The production of excimer molecules and excited atoms in a positive corona discharge in He/Xe(Kr)/SF6/CCl4 mixtures

Electrical and optical characteristics of a positive corona discharge in He/Xe(Kr)/SF₆/CCl₄ mixtures, which are of interest for the use in multiwavelength excimer radiation sources, are studied in the needle-grid electrode configuration. The length of the discharge, which is usually used to pump repetitive high-pressure multiwavelength radiation sources, is equal to the length of the electrodes of an excimer laser or lamp pumped by a transverse electric discharge. The discharge current-voltage and frequency characteristics, panoramic emission spectra, and the dependences of the relative emission intensity from the halogenides and excited noble gas atoms on the corona discharge current are investigated. The main processes resulting in the production of halogenides, as well as xenon and krypton excited atoms, in the generation regions of a corona discharge are studied.     

介质阻挡放电点燃大气压直流均匀放电的光谱研究

由于大气压均匀放电等离子体在工业领域具有广泛的应用前景,为了获得大尺寸的大气压均匀等离子体,采用氩气作为工作气体,在大气压空气环境中利用同轴介质阻挡放电点燃了针-板电极间的大气隙(气隙宽度达到5 cm)直流均匀放电。研究发现,同轴介质阻挡放电能够有效降低针-板电极间的击穿电压。该均匀放电由等离子体柱、等离子体羽、阴极暗区和阴极辉区组成。其中等离子体柱和阴极辉区都是连续放电。而等离子体羽不同位置的放电是不同时的。事实上,等离子体羽放电是由从阴极向着等离子体柱移动的发光光层(即等离子体子弹)叠加而成。利用电学方法测量了放电的伏安特性曲线,发现其与低气压正常辉光放电类似,均具有负斜率。采集了放电的发射光谱,发现存在N₂第二正带系、氩原子和氧原子谱线。通过Boltzmann plot方法对放电等离子体电子激发温度进行了空间分辨测量,发现等离子体柱的电子激发温度比等离子体羽的电子激发温度低。通过分析放电机制,对以上现象进行了定性解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

Spectroscopic diagnostics of barrier discharge plasmas in mixtures of zinc diiodide with inert gases

The spectral characteristics of the emission of gas discharge atmospheric pressure plasmas in mixtures of zinc diiodide vapor with inert gases (He, Ne, Ar, Kr, and Xe) are investigated. The formation of a gas discharge plasma and the excitation of the components of a working mixture were performed in a high-frequency (with a repetition frequency of sinusoidal voltage pulses of 100 kHz) barrier discharge. The gas discharge emission was analyzed in the spectral range 200–900 nm with a resolution of 0.05 nm. Emission bands of ZnI(B-X) exciplex molecules and I₂* excimer molecules, lines of inert gases, and emission bands of XeI* exciplex molecules (in Xe-containing mixtures) were revealed. It is ascertained that the strongest emission of ZnI* molecules is observed in ZnI₂/He(Ne) mixtures. The regularities in the spectral characteristics of the gas discharge plasma emission are considered.     

Temporal extension of stable glow discharges in fluorine-based excimer laser gas mixtures by the addition of xenon

The effect of addition of xenon on the long term homogeneity of discharges in F₂and ArF excimer laser gas mixtures was investigated in a small-volume discharge chamber. The gas mixture in the discharge chamber was preionized by X-rays. A special electrical excitation circuit containing a pulse forming line provided a long, square-shaped current pumping pulse of a predetermined duration to the discharge electrodes. The initiation and the development of the discharge was monitored via its fluorescence signal with an intensified CCD camera. We found that adding Xe up to partial pressures of 0.53 mbar extended the homogeneous phase of the discharge from 80 ns to approximately 200 ns in He/F₂as well as in He/Ar/F₂and Ne/Ar/F₂excimer laser gas mixtures. Monitoring of the ArF and XeF spontaneous emission signals showed that the formation of ArF excimers remained unaffected by the addition of xenon (up to 1.3 mbar) to the laser gas mixture.     

Corona and back discharges in flue-gas simulating mixture

Results of spectroscopic investigations and current–voltage characteristics of electrical discharges between a needle and plate electrodes in a gas mixture simulating flue gases from coal fired power plants at atmospheric pressure are presented in the paper. In these investigations, back discharge was generated at the plate electrode covered with fly ash layer in order to simulate the conditions similar to those in electrostatic precipitators. To characterize the physical processes in back discharges, the emission spectra were measured and compared with those obtained for normal corona discharge generated in the same electrode configuration but with fly ash removed from the electrode. The emission spectra provide information on elemental and molecular composition of the layer. It was also shown that discharge characteristics in flue gas are quite different from those occurring in ambient air.     

Modeling of filament discharge development in a XeCl excimer laser

Dynamics of a filament discharge in a discharge-excited XeCl excimer laser medium has been simulated for a sequence of discharge pulses (shots). In the present model a filament discharge is triggered at a microprotrusion on a cathode surface. After the first discharge initiation, a hot spot is created near the cathode, then filament develops toward the anode in the second shot. Images of the filament discharge development and its properties in a XeCl excimer laser are presented     

Optical emission spectroscopy of point-plane corona and back-corona discharges in air

Results of spectroscopic investigations and current-voltage characteristics of corona discharge and back discharge on fly-ash layer, generated in point-plane electrode geometry in air at atmospheric pressure are presented in the paper. The characteristics of both discharges are similar but differ in the current and voltage ranges of all the discharge forms distinguished during the experiments. Three forms of back discharge, for positive and negative polarity, were investigated: glow, streamer and low-current back-arc. In order to characterize ionisation and excitation processes in back discharge, the emission spectra were measured and compared with those obtained for normal corona discharge generated in the same electrode configuration but with fly ash layer removed. The emission spectra were measured in two discharge zones: near the tip of needle electrode and near the plate. Visual forms of the discharge were recorded with digital camera and referred to current-voltage characteristics and emission spectra. The measurements have shown that spectral lines emitted by back discharge depend on the form of discharge and the discharge current. From the comparison of the spectral lines of back and normal discharges an effect of fly ash layer on the discharge morphology can be determined. The recorded emission spectra formed by ionised gas and plasma near the needle electrode and fly ash layer are different. It should be noted that in back arc emission, spectral lines of fly ash layer components can be distinguished. On the other hand, in needle zone, the emission of high intensity N₂ second positive system and NO _γ lines can be noticed. Regardless of these gaseous lines, also atomic lines of dust layer were present in the spectrum. The differences in spectra of back discharge for positive and negative polarities of the needle electrode have been explained by considering the kind of ions generated in the crater in fly ash layer. The aim of these studies is to better understand the discharge processes encountered in electrostatic precipitators.     

针-板和针-水电极大气压直流辉光放电的光谱特性

利用光谱学方法,对针-水电极和针-板电极直流辉光放电特性进行了比较研究。结果发现两种装置产生的放电都有明显的分区现象, 从阴极到阳极分别为负辉区、阴极暗区、正柱区和阳极辉区。针-板电极放电中可以清晰地观测到阳极暗区, 而针-水电极放电阳极暗区不明显。对比两种放电的伏安特性曲线,发现放电电压均随电流增大而减小,但相同电流下针-水电极间的电压大于针-板电极间的电压。由于伏安特性具有负斜率,且放电电流密度介于10-5～10-4 A·cm-2,说明两种装置中的放电均处于正常辉光放电阶段。在正常辉光放电的范围内比较两种放电的发射光谱, 发现发射光谱中都包含N₂的第二正带系(含波长为337.1 nm的谱线)和N+₂的第一负带系(含波长为391.4 nm的谱线),但相对强度不同。利用光谱学方法对放电发射谱的谱线强度比I_391.4／I_337.1和振动温度进行了空间分辨测量,发现相同位置处针-水电极放电的谱线强度比要比针-板电极放电的大,并且相同位置处针-水电极放电的振动温度高。     

Excimer ArF/XeF lasers providing high-power stimulated radiation in Ar/Xe and F lines

Lasing in atomic lines of noble gases and fluorine, prior to excimer radiation, was observed in an electric discharge ArF/XeF excimer laser. Some Ar/Xe lines end at metastable levels, which are very important for the formation of ArF/XeF excimer molecules. Five new lasing lines of atomic fluorine have been obtained. Consideration is given to the use of lasing in atomic and molecular lines, that occurs in one burst, in investigations of the excitation kinetics of excimer states under the conditions of a high-pressure electric discharge.     

Interaction of a surface glow discharge with a gas flow

A surface glow discharge in a gas flow is of particular interest as a possible tool for controlling the flow past hypersonic aircrafts. Using a hydrodynamic model of glow discharge, two-dimensional calculations for a kilovolt surface discharge in nitrogen at a pressure of 0.5 Torr are carried out in a stationary gas, as well as in a flow with a velocity of 1000 m/s. The discharge structure and plasma parameters are investigated near a charged electrode. It is shown that the electron energy in a cathode layer reaches 250–300 eV. Discharge is sustained by secondary electron emission. The influence of a high-speed gas flow on the discharge is considered. It is shown that the cathode layer configuration is flow-resistant. The distributions of the electric field and electron energy, as well as the ionization rate profile in the cathode layer, do not change qualitatively under the action of the flow. The basic effect of the flow’s influence is a sharp decrease in the region of the quasineutral plasma surrounding the cathode layer due to fast convective transport of ions.     

Application of Electron-Beam Ionized Discharges to Switches?a Comparison of Experiment with Theory

A theoretical investigation of high-pressure discharges ionized by an external electron beam (e-beam) was conducted. Only when secondary emission from the cathode and electron-impact ionization of metastable states were included in the analysis did calculated current-voltage (I-V) characteristics for argon and methane discharges compare well with experimental data. The I-V characteristics obtained reveal a sharp rise in the current at a certain threshold voltage. This threshold voltage and the entire I-V characteristic are shifted to lower voltages when metastable ionization is significant. Below the threshold voltage and at low external ionization source strengths, a region of negative differential conductivity is obtained. In the high-current region, the I-V slope is controlled by the secondary emission coefficient. The additional cathode sheath ionization from secondary emission and ionization from metastable states significantly reduces the discharge voltage. This important effect can be used to reduce e-beam switch losses and increase lifetime through judicious gas mixture selection and proper cathode conditioning.     

Optical characteristics of the plasma of a nanosecond atmospheric-pressure volume discharge in a nonuniform electric field

Optical characteristics of the plasma of nanosecond volume discharges in air, nitrogen, krypton, argon, neon, and Ar/N₂ and Ar/Xe mixtures at elevated pressures are investigated. The discharges are excited in a gap with a cathode of small curvature radius. The waveforms and spectra of plasma emission from discharges in different gases in the 230-to 600-nm spectral range are measured. Optical generation in an Ar/Xe mixture is achieved at an active length of 1.5 cm. A comparison is performed of the spectral characteristics of the emission from nitrogen, krypton, argon, and neon excited by a volume discharge in a nonuniform electric field, by a nanosecond electron beam, and by a pulsed volume discharge in a uniform electric field at a high initial voltage.     

Numerical modeling of a He-Kr coil hollow cathode laser

A theoretical study of a He-Kr laser (KrII, 469.4 nm line) pumped by a helical hollow cathode discharge is presented. A detailed kinetic model of plasmachemical reactions and radiative processes including the influence of gas heating on the active medium is developed. In the process of numerical calculations the dependence of the plasma parameters (electron and gas temperature, electron and metastable density, upper and lower laser level density) and laser characteristics (output power and gain coefficient) on the variations of discharge pumping, gas-mixture partial pressures and geometry of the coil hollow cathode, are investigated. The results of the numerical calculations are in a good agreement with the experimental data.     

Influence of multi-photon ionization of Xe on a XeF discharge induced by KrF laser irradiation

Excimer laser preionization induced by an external laser was investigated for XeF excimer laser discharge induced by a KrF laser, paying attention to the ionized species in the gas. Enhancement of amplified spontaneous emission (ASE) was observed for XeF gas discharge preionized by a KrF laser with and without its irradiation. In contrast, no ASE enhancement was observed for KrF gas discharge with KrF laser preionization. ASE enhancement was larger for the longer wavelength, which was close to the two-photon resonance of the Xe atom, when tunable KrF laser irradiation was used. These results indicate that multi-photon ionization of Xe atoms supplied the initial electrons to the laser-induced preionization.     

XeCl excimer laser using chlorinated hydrocarbons as Cl donors

XeCl excimer laser emission has been observed in a fast transverse discharge system using vapors of several chloro-carbon and fluoro-chloro-carbon compounds. Laser characteristic are largely independent of the different molecules used. Efficiencies up to 0.9% have been obtained. The output energy decayed to half the maximum value in 15 000 shots for each fill. The evolution of laser emission with number of shots seems to be due to the discharge condition in the first stage. Complete quenching after prolonged running is due to some absorbing product formed by a reaction induced by the discharge. This new class of Cl donors appears to be very convenient because corrosive products are completely avoided and the gas handling system is substantially simplified.     

A cw uv copper hollow cathode laser in the 260 nm region

A cw uv copper hollow cathode laser is described, which could be operated for a longer time duration with an output power of 7 mW in the 260 nm region. A double-cathode configuration with a protection for the mirrors from metal-vapour deposition is presented. Characteristics of the laser output power, the spontaneous emission, and the ion densities in the negative glow were measured as depending on the discharge current, the neon gas pressure, and the size of the cathode slit. The observed saturation of the laser output power at high discharge current (1 A/cm²) and the optimum slot size are discussed.     

Laser action of C,N, O,F, Cl,and Br in hollow cathode discharges

C, N, O, F, Cl, and Br red and infrared laser emission was investigated using hollow cathode discharges in gas mixtures of helium and molecules containing the corresponding atoms. A total of 33 laser lines with wavelengths from 0.7 to 2.0m was observed. Three laser lines of atomic C, five laser lines of atomic N, two laser lines of atomic Cl and five laser lines of atomic Br were observed for the first time. Dissociation charge transfer and dissociative excitation transfer are suggested as being responsible for populating the upper laser levels.     

Characteristics of a reflex discharge with a box-shaped cathode cavity and emission properties of the discharge plasma

A new geometrical relationship between the shape and dimensions of the cathode cavity of a reflex discharge with a cold hollow cathode is determined. The discharge characteristics and the emission properties of the discharge plasma are investigated experimentally. The conditions are determined for generating a cathode plasma that is highly inhomogeneous in the radial direction and the possibility of creating such a plasma is demonstrated. The existence of a stationary double electric layer with a potential drop of 14–16 V in the aperture of the cathode cavity is revealed. Specific features of the longitudinal extraction of plasma ions through the wall layer of the reflex and hollow cathodes are considered.     

Boron doping of silicon by excimer laser irradiation in a reactive atmosphere

UV excimer lasers have been used to dope semiconductors by a one-step process in which the laser serves both to melt a controlled thickness of a sample placed in dopant ambient and to photodissociate the dopant molecules themselves. Here we report the boron doping of silicon by means of an ArF (193 nm) excimer laser. Dopant atoms are obtained by photolysis of BCl₃ or pyrolysis of BF₃ molecules. The doping is performed both in gas ambient and using only an adsorbed layer. We have investigated the dependence of doping parameters such as laser pulse repetition and gas pressure on the subsequent boron impurity profiles and the dopant incorporation rate. These results indicate that the laser doping process is dopant-flux limited for BF₃ and externally rate limited for BCl₃.     

The characteristics of pulsed hollow cathode discharges used forpseudospark switch triggering

The complex interaction between the trigger discharge and the main switch discharge in high-power gas discharge switches influences both the switching characteristics, and the switch and trigger lifetime. Any attempts to improve either of these parameters has to take into account the pressure and geometry dependence of a particular trigger geometry. Yet, although not very intensely investigated in detail for this particular purpose, pulsed hollow cathode discharges are commonly used for low-pressure gas discharge triggering as in pseudospark switches. Measurements of the electron current flowing to the cathode backplane of a pseudospark switch from the pulsed hollow cathode trigger discharge show that maximum current densities are peaked around the symmetry axis of the trigger electrode, an effect which is more pronounced at low pressures. Delayed (and slowed-down) increase of the current density at larger radii leads to increasing delay and jitter, provided the trigger coupling holes in the cathode backplane are located off-axis. The electron current density increases with decreasing diameter of the trigger electrode, and with increasing pressure of the working gas. In addition, it is shown that a preionization (keep-alive) current in the trigger electrode region shows a distinct influence on the trigger current distribution, proving that there exists an optimum keep-alive current depending on the geometry and gas pressure