以有效值计算的热声键合PZT换能器阻抗分析

在热超声芯片键合过程中,PZT换能器阻抗是键合系统的一个重要的研究参数。本文在提取PZT换能器驱动电信号实部数据的前提下,采用连续加窗的有效统计值计算的广义阻抗表征整个键合周期内的PZT换能器阻抗变化,由此获得键合过程PZT换能器阻抗的动态变化规律。文中详细介绍了PZT换能器阻抗的试验方法,并分析了试验结果。     

检测超声换能器用1-3型压电PZT/环氧复合材料及换能器的研究

本文介绍了一种制做1—3型压电 PZT/环氧复合材料的新方法.此方法采用了PZT小柱非周期性均匀分布,有效地消除了由于PZT小柱周期性分布而产生的有害横向结构共振模式,获得了振动模式较单纯的1—3型压电复合材料晶片,研制出宽带(低Q)换能器及高斯型换能器.     

PVDF压电薄膜超声换能器的初步实验

本工作对国产PVDF压电薄膜制成的超声换能器进行了初步实验.结果表明,PVDF压电薄膜换能器具有良好的接收响应.与PZT压电陶瓷换能器比较,其结构简单、制作方便以及能得到宽而平坦的通带特性,但灵敏度低.实验初步表明,国产PVDF压电薄膜巳达到了实用水平.     

夹心复合材料宽带超声换能器的研制

本文采用高频夹心PZT(3-3)复合材料、单层前匹配和高损耗声阻抗背村全匹配的结构,研制出窄脉冲宽带超声换能器.所研制的中心频率为1MHz的换能器,在水负载中有高传输效率,得到声压脉冲长仅一个周期的接收波形.对铝合金和灰岩等较低声阻抗负载,也得到了一个周期脉冲的接收波形.     

夹心复合PZT材料及其应用

本文主要描述致密-多孔-致密夹心复合PZT材料及其在窄脉冲超声换能器方面的应用。通过两类六种不同夹心复合材料的换能器实验表明,未充硅橡胶的夹心复合材料是一种制作窄脉冲超声换能器的新型换能材料。     

超声技术的基石——超声换能器的原理及设计

超声换能器是在超声频率范围内将交变的电信号转换成声信号或者将外界声场中的声信号转换为电信号的能量转换器件,它是超声技术中的关键器件,其性能好坏直接关系到超声应用技术的效果和使用范围.由于超声技术的应用范围很广,且超声新技术层出不穷,因而与此对应的超声换能器的种类也很多.文章对不同应用背景下多种类型超声换能器的原理及设计进行了阐述,分析了不同类型超声换能器的性能参数及设计要求,简要总结了超声换能器的性能参数测试方法,并对超声换能器的发展趋势进行了一定的分析.     

混合激励纵振换能器的研究

纵振式换能器是水声领域中不可或缺的一类中频段换能器,本文以超磁致伸缩材料Terfenol-D和压电陶瓷材料PZT作为驱动元件设计混合激励纵振式换能器。利用ANSYS有限元软件建立了有限元模型,对换能器的电声参数进行了优化,并制作一宽带混合激励纵振式换能器,实验测得的换能器与仿真的结果较为吻合,实测换能器的最大发送电压响应为145dB,其工作频带为4kHz-16kHz,频带内发送电压响应起伏为±4.5dB。     

变厚度聚焦换能器对声焦域轴向长度影响的研究*

针对不同厚度的病变组织,改变声焦域轴向长度能提高高强度聚焦超声在临床治疗过程中的安全性和有效性。基于多频超声波叠加原理,该文提出了变厚度(多频)聚焦换能器,并设计了两种类型变厚度聚焦换能器。根据瑞利积分法推导了变厚度聚焦换能器声场,计算和分析了变厚度聚焦换能器的声焦域轴向长度,并与等厚度(单频)聚焦换能器声焦域轴向长度进行对比。结果显示,变厚度聚焦换能器中心到边缘的厚度变化趋势与声焦域轴向长度变化相关,中间薄两边厚换能器声焦域轴向长度缩短,中间厚两边薄换能器声焦域轴向长度变长,且实验验证了理论的正确性。研究结果可为变厚度聚焦换能器声场研究和高强度聚焦超声的临床治疗提供参考。     

功率超声振动系统的研究进展

功率超声振动系统是功率超声技术中的关键部分,其主要部分包括功率超声换能器、超声变幅杆以及超声工具头或超声辐射器。本文就功率超声换能振动系统设计中经常遇到的一些关键问题进行了简要的归纳和总结,目的在于为功率超声换能器的优化设计和性能改善提供一些有用的设计指南和解决措施。同时,对一些新的功率超声振动系统进行了介绍,并简要分析了其发展趋势和应用领域。     

Barker码体波脉冲压缩换能器的研究

本文从压电圆片二维等效电路出发,导出了多层结构的传输矩阵。对PZT,PT做成的多层编码发射和多层倒置接收换能器,在阶跃电脉冲激励下实现了Barker码脉冲压缩。从理论和实验上分析讨论了径向模、背衬、负载、粘接层、介电损耗和机械损耗等对压缩效果的影响。理论与实验结果基本符合。在解决了某些工艺困难之后,作出了PZT和PT的Barker码体波脉冲压缩换能器。     

High frequency broadband PZT thick film ultrasonic transducers for medical imaging applications

A modified sol-gel method is used to prepare PZT thick film on Pt-coated silicon substrate. A new method of vacuum filling sol-gel precursor solution is introduced to improve film quality. The effects of the filling on PZT thick film structure and ferroelectric properties are discussed. The fabrication of a high frequency transducer with the PZT film as the actuating layer is described. The performance of the transducer is measured and results show that the transducer backed by E-Solder without a matching layer has a center frequency of 103 MHz and a bandwidth of 70%. Beam profile measurements show that the transducer has an axial resolution of 9.2 microm and a lateral resolution of 33 microm.     

Fabrication and comparison of PMN-PT single crystal, PZT and PZT-based 1-3 composite ultrasonic transducers for NDE applications

This paper describes fabrication and comparison of PMN-PT single crystal, PZT, and PZT-based 1-3 composite ultrasonic transducers for NDE applications. As a front matching layer between test material (Austenite stainless steel, SUS316) and piezoelectric materials, alumina ceramics was selected. The appropriate acoustic impedance of the backing materials for each transducer was determined based on the results of KLM model simulation. Prototype ultrasonic transducers with the center frequencies of approximately 2.25 and 5 MHz for contact measurement were fabricated and compared to each other. The PMN-PT single crystal ultrasonic transducer shows considerably improved performance in sensitivity over the PZT and PZT-based 1-3 composite ultrasonic transducers.     

Modeling of a high frequency ultrasonic transducer using periodic structures

Solidly mounted integrated transducers with a Bragg cell inserted between the piezoelectric film and the substrate are investigated for high frequency ultrasonic applications. A numerically stable recursive one dimensional transmission/reflection model was used to analyze the behavior of the periodic structure. This theoretical analysis includes the study of the influence of the acoustic properties of the constitutive layer, the effect of the number of cells and their arrangement. A 35 MHz integrated transducer consisting in a PZT ceramic laid down on a Au/PZT Bragg cell deposited on a porous substrate was fabricated and characterized. Both theoretical and experimental results highlight the interest of using a periodic structure for high frequency ultrasonic applications.     

Preparation and application of the 3C–SiC substrate to piezoelectric micro cantilever transducers

This study examines the fabrication process and mechanical properties of piezoelectric films with the substrate, which is made from silicon carbide. After depositing the PZT thick film on silicon carbide substrate and silicon substrate respectively, it was shown that silicon carbide substrate formed a stable interface with PZT thick film up to 950?°C, compared with silicon substrate. In addition, the dielectric constant of the PZT thick film sintered at 950?°C on a silicon carbide substrate was 843, and this value was about over 25 % improved value compared with that on a silicon substrate. A thick film piezoelectric micro transducer of a micro cantilever type was fabricated by using a multifunctional 3C–SiC substrate. The fabricated micro cantilever was a micro cantilever with multiple thin films on either silicon or silicon carbide substrate. The piezoelectric thick-film micro cantilever that was fabricated by using a SiC substrate showed excellent mechanical and thermal properties. The piezoelectric micro cantilever on the SiC substrate shows an excellent sensitivity towards the change of mass compared with the piezoelectric micro cantilever on the Si substrate.     

磁性流体薄片高电压电流光学测量的研究

研究一种用磁性流体薄片对高压电流进行光学测量的电流传感器。设计原理基于磁性流体的光透射率随垂直磁场强度的变化而变化的关系。磁性流体受到垂直外磁场作用,原先无序的磁性颗粒将凝聚在一起形成条条磁链,从而引起磁性流体的光透射率的变化。采用磁性流体作为传感媒介设计的传感结构避免了基于法拉第效应的光磁式电流互感器对环境干扰敏感造成信噪比不高和传统的电磁式电流互感器的高压绝缘的缺陷。通过改变磁性流体的浓度和基液,或者改变传感头的结构,来达到实际需要的传感灵敏度和响应时间。     

High-overtone self-focusing acoustic transducers for high-frequency ultrasonic Doppler

This work reports the potential use of high-overtone self-focusing acoustic transducers for high-frequency ultrasonic Doppler. By using harmonic frequencies of a thick bulk Lead Zirconate Titanate (PZT) transducer with a novel air-reflector Fresnel lens, we obtained strong ultrasound signals at 60 MHz (3rd harmonic) and 100 MHz (5th harmonic). Both experimental and theoretical analysis has demonstrated that the transducers can be applied to Doppler systems with high frequencies up to 100 MHz.     

面向水下应用的电容式微机械超声换能器*

电容式微机械超声换能器具有宽频带和易于制造二维阵列等优势,已经成为一种重要的新型超声换能器。该文针对图像声呐系统对新型超声换能器的迫切需求,提出了一种电容式微机械超声换能器结构和参数,并利用硅微加工技术制备出了该换能器,最后对其主要性能参数进行了测试和分析。测试结果表明该换能器具有发射和接收超声波的功能,中心工作频率为1.965 MHz,6 dB相对带宽达到109.4%,在1 MHz、2 MHz和3 MHz频率时的接收灵敏度分别为-218.29 d B、-219.39 dB和-218.11 dB。该文研制的电容式微机械超声换能器显示出了优秀的宽频带特性,且工作频率和接收灵敏度性能均基本满足了高频图像声呐系统的需求。     

Micromachined ultrasonic transducers and arrays based on piezoelectric thick film

This paper reports on the design, fabrication, and characterization of diaphragm-type piezoelectric micromachined ultrasonic transducer (pMUT) and arrays. A combination of piezoelectric composite thick film techniques and silicon micromachining has been proven to be a promising approach for a batch production of pMUTs, especially pMUT transmitter arrays for ultrasound radiation. In this paper, some important issues related to the pMUT element design and micromachining processes are addressed. Thanks to the well-developed processing technology, pMUTs and arrays operating at different resonance frequencies by dimension variation have been successfully fabricated with a high yield for possible mass manufacturing. The characterization of piezoelectric composite thick film will be briefly reported. The performance of the prototype devices has been characterized in terms of vibration modes, dependency of the resonance frequency on bias voltage, nonlinearity, electromechanical coupling efficiency, equivalent circuit, output sound pressure level and directivity of a two-dimensional pMUT array. PACS 85.50.-n; 85.85.+j     

压电MEMS超声换能器研究进展

MEMS(micro-electromechanical systems)超声换能器(MEMS ultrasonic transducer,简称MUT)是采用微电子和微机械加工技术制作的新型超声换能器。与传统超声换能器相比,MUT具有体积小、重量轻、成本低、功耗低、可靠性高、频率控制灵活、频带宽、灵敏度高以及易于与电路集成和实现智能化等特点。是超声换能器的重要的研究方向之一。MUT的研究主要包括压电MUT(piezoelectric MUT,简称PMUT)和电容MUT(capacitiveMUT,简称CMUT)两个方面。本文概述了PMUT研究的发展进程和研究成果,展望了PMUT的研究和应用前景。