我国低温等离子体研究进展(Ⅰ)

低温等离子体物理与技术的研究在国内受到了越来越多的重视．在等离子体中发现的一些有趣的物理现象，如磁场重联、尘埃等离子体等，使人们对等离子体物理的研究掀起了新的热潮．在应用方面，几乎所有理工类实验室都有涉及低温等离子体技术的实验装置，这使得在我国低温等离子体应用方面的研究非常普及，包括微电子工业中的等离子体工艺，各种坚硬、耐腐蚀、耐摩擦材料的制备，纳米材料的制备，聚合物以及生物材料的表面改性，等等．随着低温等离子体技术的发展，低温等离子体的诊断技术也随之发展起来．文章简要地介绍了近几年来低温等离子体研究在我国的发展，介绍了一些有关低温等离子体的热点研究课题．     

电子回旋共振等离子体技术

微波电子回旋共振是一种先进的低温等离子体技术，它具有优良的综合指标，提高了微电子，光电子集成电路制造工艺等应用领域中的低温等离子体加工水平，文章介绍了电子回旋共振等离子体产生原理，特点及重要的实验研究结果。     

低温等离子体技术在生物医学上的应用

低温等离子体技术与生物医学似乎是两种风马牛不相及的事物，可是两者的结合却可以对现代科技发展产生重要的影响．许多人都认为21世纪是生物技术的世纪，可见人们对生物技术发展抱着怎样的期待．低温等离子体技术正在成为生物材料和生物医学器件的生产和研究的广阔的平台．文章简要介绍了一些用于材料表面改性的技术以及低温等离子体技术在生物医学方面的应用，并进而讨论了将低温等离子体技术与生物技术相结合的途径以及还需要解决的问题．文章还详细讨论了一种用于表面功能化的脉冲等离子体技术方法作为二者最佳结合的一个典范．文章最后指出，生物医学与等离子体技术的完美结合可能对21世纪的科技发展产生革命性的影响；而为了实现这个目标。需要多学科专家的通力合作．     

低温等离子体在材料表面处理方面的应用和发展

本文简要地介绍了同创材料表面新技术工程中心低温等离子体相关技术在材料表面处理的应用与发展以等离子体产生、离子源技术为基石，大力发展复合离子注入、复合离子沉积及镀膜设备和相关工艺。以离子源、多弧、磁控溅射等核心技术，多元化发展等离子体表面处理设备、产品和工艺。以国家自然科学基金等科研项目为依托，大力推进科研成果向工业和民用产品转化紧跟等高子体技术的国际发展，积极开拓国际市场，推进离子源、等离子体源等技术的标准化和国际化。     

应用低温等离子体改善材料的粘结性能

本文介绍了应用低温等离子体改善高分子材料的粘结性能．经低温等离子体表面改性后，聚丙烯薄膜的粘结强度可以提高１０倍，改性效果取决于低温等离子体参数的选择．     

我国低温等离子体研究进展(Ⅱ)

5低温等离子体应用 随着我国国民经济的发展，低温等离子体的应用获得了越来越多的重视，这从国内越来越多的等离子体实验室的成立，和一些小的实验室扩大成地方的重点实验室可以得到证明．事实上，大多数涉及到材料或物质的理工科实验室都会有一些与低温等离子体有关的装置或研究，无论该实验室是研究物理的、化学的、生物的或各类工程的，毕竟宇宙中99％以上的物质处于等离子体态．下面就我国低温等离子体的应用方面分类举一些例子．     

低温低气压等离子体科学技术将会迅速发展──Herman V.Boenig教授的评述

HermanV.Boenig教授现任美国等离子体化学和工艺学协会主席,《低温等离子体化学》(期刊)主编和《等离子体消息报道》主编. 他认为低温等离子体研究和应用的发展比原来预期的更为迅速,这是当前一个十分活跃的领域.低温、低气压等离子体技术正向各个部门渗透,工业界计划应用这种技术的数目成倍增长,尤其是应用于集成电路、集成光学、光电子学、金属离子氮化、表面清洁、表面防护、海水淡化、空气净化、污水处理、太阳能电池、复合材料、纤维和织物处理等.激励这项技术迅速发展的因素有: (1)设备造价较低,投资较少.尤其是低能耗,可使生产运行…     

第四届全国低温等离子体科学与技术交流会简介

1987年8月25日至28日在上海复旦大学召开了第四届全国低温等离子体科学与技术交流会.会议由复旦大学和上海物理学会主办.参加会议的有高等院校、中国科学院、工业部门以及解放军科研部门共150多个单位的200多名代表,宣读论文180多篇.论文内容包括:等离子体的基本过程;各种气体放电特性;等离子体诊断方法;等离子体加工、焊接、喷涂、切割、冶炼;等离子体化学和表面处理;等离子体辐射和气体放电光源以及等离子体其他方面的应用.论文内容较为广泛,工作较以前深人,反映出近年来我国低温等离子体的研究工作有较大的发展. 与会代表一致认为,低温等…     

电感耦合等离子体CVD低温生长硅薄膜过程中的铝诱导晶化

利用电感耦合等离子体CVD方法在350℃的低温下在镀Al玻璃衬底上制备出具有良好结晶性的Si薄膜.利用x射线衍射、紫外-可见分光椭圆偏振谱、原子力显微镜及x射线光电子谱等研究了薄膜的结构、表面形貌和成分分布等.结果表明，用这种方法制备的Si薄膜不但晶化程度高，而且具有良好的（111）结晶取向性，晶粒尺寸大于300nm，样品中无Al的残留.结合电感耦合等离子体的高电子密度特征讨论了低温生长过程中Al诱导Si薄膜晶化的机理. 关键词： 电感耦合等离子体CVD Al诱导晶化 Si薄膜 低温生长     

我国等离子体研究概况

本文介绍了我国在核聚变和高温等离子体、基础等离子体、天体等离子体和空间等离子体、低温等离子体及其应用、等离子体理论等方面的研究概况．文中不仅介绍了实验装置的参数和主要的诊断设备，而且还简述了当前实验和理论方面的研究课题．     

Effect of dust particles on the properties of low-temperature plasmas

Parameters of a low-temperature plasma containing dust particles are calculated numerically with the help of a self-consistent solution of the balance equation for production and recombination of electrons and ions, combined with the molecular dynamics method for direct simulation of processes in the vicinity of macroparticles. The relation between the charges of macroparticles and the neutral gas pressure, as well as the dependence of the low-temperature plasma parameters on the volume concentration of dust particles, is analyzed. It is shown that the plasma characteristics and composition may change noticeably relative to the case unperturbed by dust even for comparatively low concentration of dust particles.     

Tokamak plasma equilibrium analysis based on the relaxation method with a specified magnetic axis

In this contribution, we have presented two techniques for the determination of plasma equilibrium position in IR-T1 tokamak: relaxation and optical methods. An analysis method of tokamak plasma equilibrium by a relaxation method with a specified magnetic axis is presented. The degrees of freedom due to designated positions of the magnetic axis are possible by using poloidal field coil currents. Stable steady-state tokamak plasma equilibria are calculated along with the magnetohydrodynamic potential energy. The plasma generates a plasma current which partially or fully cancels the magnetic field from the poloidal field coils. For low-temperature plasmas, the plasma current distribution is centrally peaked; for high-temperature plasmas, the plasma current has a hole. A centrally peaked current distribution in a low-temperature plasma is evolved into a current distribution with a hole by increasing the plasma pressure by Ohmic heating, radio frequency heating, or by neutral beam injection heating. In the second technique, an image-processing technique was used for the output signal of the charge coupled device camera and plasma emission intensity profile and then the plasma position was obtained. Results are compared and discussed.     

One-dimensional coherent four-wave mixing as a way to image the spatial distribution of atoms in a laser-produced plasma

An experimental technique based on coherent one-dimensional hyper-Raman-resonant four-wave mixing in broad cylindrically focused light beams has been developed for line-by-line imaging of spatial distribution of excited atoms in a low-temperature plasma of optical breakdown. The technique was applied to map excited lead atoms in a low-temperature laser-produced plasma.     

Non-linear jump of wave polarization in a plasma

The hysteresis is pointed out of a non-linear dependence of electromagnetic waves polarization near plasma resonance in magnetoactive plasma due to the wave energy. Stable “low-temperature” and “high-temperature” conditions are found of polarization and critical fields corresponding to transitions between them.     

Equilibrium composition and the effective adiabatic exponent of a clustering carbon plasma

The equilibrium composition and the effective adiabatic exponent of a low-temperature carbon plasma containing eight components (C, C₂, C₃, C₄, C₅, C⁺, C₂⁺, and e) are calculated. The temperature and pressure ranges are found in which polyatomic clusters form in a gas flow. It is shown that the effective adiabatic exponent of the carbon plasma is a nonmonotonic function of temperature. In the parameter range where the plasma consists largely of polyatomic clusters, the adiabatic exponent is close to unity. It is noted that anomalously low values of the effective adiabatic exponent indicate a considerable concentration of polyatomic molecules in the plasma jet. Such values can be observed in experiments with a low-temperature carbon plasma flowing about bodies.     

Pulsed axisymmetric ejection of a dense plasma into a gas. 2. Conditions for the formation and stability of a plasma toroidal vortex

This work continues our previous investigations on pulsed ejection of a dense plasma into a gas. The conditions for the formation of high-temperature (plasma) and low-temperature gaseous toroidal vortices during pulsed axisymmetric ejection of a dense plasma/gas into air are investigated experimentally at different parameters of the ambient medium and jet generator. Quantitative criteria for the formation and stable propagation of such vortices are established using experimental data.     

Temperature measurement of a surface exposed to a low-temperature plasma flux

A method of measuring the surface temperature in the region exposed to a low-temperature plasma flux is suggested. The boundary-value problem of heat conduction for the unsteady case is analytically solved by means of the Laplace transformation. Analysis of the analytical relationships shows that this method measures temperature with a high accuracy in real time. Its application in formation of micro-and nanostructures in a low-temperature plasma is considered.     

Formation of liquidlike and crystalline structures in dusty plasmas

Under certain conditions in a dusty plasma, which is a low-temperature plasma with dust grains, the strong interaction between grains can give rise to gas-liquid-solid-state phase transitions. A study is made of ordered (liquidlike and crystalline) grain structures in various kinds of dusty plasmas: a thermal plasma at atmospheric pressure, a plasma of a dc glow discharge, and a UV radiation-driven plasma. The results of experimental observations of ordered dust structures are reported, and the characteristic features of the dust structures and the conditions for their appearance are discussed.     

Surface modification of medical PVC by remote oxygen plasma

Surface modification of medical PVC by remote oxygen plasma has been studied: surface structure and performance of treated material are analyzed by weight loss rate, contact angle measurement and XPS. With the increase of sample distance from the plasma source, weight loss rate drops, electrons and ions and etching action are restrained; and C=O groups are found in the treated PVC surface. The surface wettability of PVC film can be improved by remote low-temperature plasma and the radical reaction is intensified.     

Fabrication of superhydrophobic surfaces on aluminum

A superhydrophobic surface was prepared on aluminum substrate. Anodization and low-temperature plasma treatment were used to create micro-nano-structure and subsequently trichlorooctadecyl-silane modified the rough surface. The result shows that the water static contact of the aluminum surface after anodization and modification by trichlorooctadecyl-silane reaches to 152.1°. A rougher surface with some micro-nano-pores and small mastoids along the edges of pores was generated when low-temperature plasma treatment was applied to anodized aluminum film, resulting in water static contact angle up to 157.8°.