N2微空心阴极放电特性及其阴极溅射的PIC/MC模拟

采用两维PIC/MCC模型模拟了氮气微空心阴极放电以及轰击离子 (N₂⁺,N⁺) 的钛阴极溅射. 主要计算了氮气微空心阴极放电离子 (N₂⁺,N⁺) 及溅射原子Ti的行为分布, 并研究了溅射Ti 原子的热化过程. 结果表明: 在模拟条件下, 空心阴极效应是负辉区叠加的电子震荡; 在对应条件下, 微空心较传统空心放电两种离子 (N₂⁺,N⁺) 密度均大两个量级, 两种离子的平均能量的分布及大小几乎相同; 在放电空间N⁺的密度约为N₂⁺的1/6, 最大能量约大2倍; 在不同参数 (P, T, V)下, 轰击阴极内表面的氮离子(N₂⁺,N⁺)的密度近似均匀, 其平均能量几乎相等; 从阴极溅射出的Ti原子的初始平均能量约6.8 eV, 离开阴极约0.15 mm处几乎完全被热化. 模拟结果为N₂微空心阴极放电等离子体特性的认识提供了参考依据. 关键词： 微空心阴极放电 PIC/MC模拟 2等离子体')" href="#">N₂等离子体     

等离子体增强化学气相沉积法制备立方氮化硼薄膜过程中的表面生长机理

利用感应耦合等离子体增强化学气相沉积法以Ar，He，N₂和B₂H₆为反应气体制备了高纯立方氮化硼薄膜.用四极质谱仪对等离子体状况进行了系统的分析，发现B₂H₆完全被电离而N₂只是部分被电离.H₂和过量的N₂在等离子体中生成大量中性的H原子和活化的N^*₂，它们与表面的相互作用严重地阻碍了立方 关键词： 立方氮化硼薄膜 等离子体 质谱     

飞秒激光低压N2等离子体特性的实验研究

在低于一个标准大气压的条件下对飞秒激光产生的N₂等离子体光谱进行了实验研究.结果表明, 各种样品气压下的激光N₂等离子体光谱均表现为连续谱和线状谱的叠加.随着样品气压的降低, 连续谱和原子谱线的强度经历了由缓慢增强发展为缓慢降低再到迅速降低的过程, 而正一价离子谱线强度呈现逐步增强的特征.在气压低于0.3 atm (1 atm=101325 Pa)时, 出现了正二价态的离子谱线. 给出了低压N₂等离子体对于飞秒激光传输和能量吸收的物理特性, 并初步讨论了低压等离子体通道特性.这些结果有助于加深了解飞秒激光等离子体的特性和机理, 特别是给出了在实验上测量不同价态离子光谱的条件, 为今后的研究提供了有益的实验依据. 关键词： 飞秒激光 气压 等离子体光谱 激光传输     

采用N2-RF等离子体氮化GaAs(001)

研究了在MBE系统中,GaAs(001)表面的氮化过程。GaAs(001)表面直接和间接地暴露在等离子体激发的N₂气流下。两种氮化过程显示了完全不同的表面氮化结果。在打开N₂发生器挡板的情况下,氮化导致GaAs(001)表面损伤,并且形成多晶结构。当增加N₂气压时,损伤变得更严重。但是,在关闭N₂发生器挡板的情况下,在500℃下,经过氮化将观察到(3×3)再构的RHEED花样,表面仍保持原子级的平整度。上述结果表明,不开N₂发生器挡板,低温(500℃下)氮化将在GaN外延生长之前形成平整的薄层c-GaN。     

大气压空气纳秒脉冲阵列式线-线SDBD等离子体的电学及发射光谱特性研究

提出了一种阵列式线-线沿面介质阻挡放电结构,利用双极性高压纳秒脉冲电源,在大气压空气中激励产生了相对大面积的放电等离子体。其中,高压电极、地电极均为圆柱形金属,放电反应器由20组相间排列的阵列式线型高压电极和套有介质管的阵列式线型地电极组成。利用电压探头、电流探头、示波器等测量了放电电压和放电总电流,并计算得出了放电的实际电流。利用光纤、光栅光谱仪、CCD等测量了波长范围在300～440 nm和766～778 nm的发射光谱,即氮分子第二正带N₂ (C3Π_u→B3Π_g)包括Δν= +1, 0, -1, -2, -3、氮分子离子第一负带N+₂(B2Σ+_u→X2Σ+_g),N₂ (B3Π_g→A3Σ+_u)和O (3p5P→3s5S₂)的发射光谱。比较了氮分子第二正带N₂ (C3Π_u→B3Π_g)的各个振动峰和各个活性物种的发射光谱强度,以及这些发射光谱强度随着脉冲峰值电压的变化。测量了N₂(C3Π_u→B3Π_g, 0-0)的二次、三次衍射光谱,与原始光谱在转动带、背景光谱等方面进行了比较,并计算了二次衍射和原始光谱之间的峰值比。利用氮分子第二正带N₂ (C3Π_u→B3Π_g, Δν=+1, 0, -1, -2)和氮分子离子第一负带N+₂ (B2Σ+_u→X2Σ+_g, 0-0)模拟了等离子体的转动温度和振动温度,对模拟结果进行了比较,并研究了脉冲峰值电压对等离子体振动温度和转动温度的影响。通过测量放电的电压和计算得到的放电电流发现,当脉冲峰值电压为22 kV,脉冲重复频率为150 Hz时,阵列式线-线沿面介质阻挡放电的放电电流在正脉冲、负脉冲两个方向上均可达75 A左右。通过诊断放电等离子体的发射光谱发现,在测量的波长范围内,放电产生的活性物种主要有氮分子第二正带N₂ (C3Π_u→B3Π_g)、氮分子离子第一负带N+₂(B2Σ+_u→X2Σ+_g),N₂ (B3Π_g→A3Σ+_u)和O (3p5P→3s5S₂)。在脉冲峰值电压22～36 kV的变化范围内,氮分子第二正带N₂(C3Π_u→B3Π_g, 0-0)的发射光谱强度始终保持最强,N₂ (B3Π_g→A3Σ+_u)次之,而氮分子离子第一负带N+₂(B2Σ+_u→X2Σ+_g)和O (3p5P→3s5S₂)的发射光谱强度较弱。同时,当脉冲峰值电压升高时,氮分子第二正带N₂ (C3Π_u→B3Π_g)的所有振动峰,以及氮分子离子第一负带N+₂(B2Σ+_u→X2Σ+_g),N₂ (B3Π_g→A3Σ+_u)和O (3p5P→3s5S₂)的发射光谱强度均随之升高。通过比较氮分子第二正带N₂(C3Π_u→B3Π_g, 0-0)的原始、二次衍射、三次衍射光谱发现,二次、三次衍射光谱的转动带更清晰,但三次衍射光谱的背景更强,因此氮分子第二正带N₂(C3Π_u→B3Π_g)的二次衍射光谱更有利于模拟等离子体的转动温度。通过比较模拟得到的振动温度和转动温度发现,氮分子第二正带N₂ (C3Π_u→B3Π_g, Δν=-2)在N₂ (C3Π_u→B3Π_g)四个谱带Δν=+1, 0, -1, -2中最适于模拟等离子体振动温度,而利用氮分子离子第一负带N+₂ (B2Σ+_u→X2Σ+_g,0-0)模拟得到的等离子体转动温度要比N₂ (C3Π_u→B3Π_g, Δν=-2)的模拟结果高约10～15 K。同时,当脉冲峰值电压升高时,由N₂ (C3Π_u→B3Π_g, Δν=-2)和N+₂ (B2Σ+_u→X2Σ+_g, 0-0)模拟得到等离子体的转动温度均出现了略微上升的趋势,而利用N₂ (C3Π_u→B3Π_g, Δν=-2)模拟得出的振动温度则略微下降。     

氮气辉光放电阴极鞘层重粒子输运过程研究

采用蒙特卡罗模拟对氮气辉光放电等离子体阴极鞘层内离子(N₂⁺,N⁺)和快中性分子(N_2f)的输运过程进行了研究,计算了阴极鞘层中离子(N₂⁺,N⁺)和快中性分子的能量及角分布的空间变化,较好地解释了实验结果.得到了氮气辉光放电等离子体阴极附近主要存在着能量较低的荷能分子、密度较低的高能原子离子及密度和能量居中的分子离子.诸粒子状态随放电条件而变化.模拟结 关键词：     

离子液体在大气压等离子体中稳定性研究

采用发射光谱、紫外可见吸收光谱、红外吸收光谱和核磁共振技术分析1-丁基-3-甲基咪唑硫酸氢盐（[Bmim]HSO₄）, 1-丁基吡啶硫酸氢盐（HSO₄）和1-丁基-3-甲基咪唑四氟化硼（[Bmim]BF₄）三种离子液体在大气压介质阻挡放电氩等离子体体系中的稳定性,并分别以上述三种离子液体为辅助液采用大气压介质阻挡放电等离子体技术制备TiO₂,进一步研究三种离子液体在等离子体中的稳定性对所制备的TiO₂晶相结构的影响。结果表明：向大气压介质阻挡放电氩等离子体中分别引入[Bmim]HSO₄,HSO₄和[Bmim]BF₄离子液体后并未改变氩等离子体放电光谱谱峰的位置和数量且没有新的谱峰生成,但谱峰强度都明显降低,说明上述三种离子液体没有在等离子体区蒸发形成激发态物种;[Bmim]HSO₄和HSO₄放电前后的红外吸收光谱基本一致,表明离子液体在放电后的化学键未发生改变;[Bmim]HSO₄和HSO₄的紫外可见吸收光谱显示其吸收峰的位置和强度未发生改变,说明两种离子液体在等离子体作用后的结构是稳定的;[Bmim]BF₄放电前后的红外吸收光谱各个特征峰并无明显差异,但其紫外可见吸收光谱图谱吸收峰的位置却发生较大的偏移,进一步对放电前后的[Bmim]BF₄离子液体进行核磁共振分析,两者的1H NMR峰数相同,但放电后的离子液体化学位移向高位偏移大约0.2单位,说明其化学环境发生了变化,表明有部分[Bmim]BF₄结构发生改变。光谱和核磁共振技术分析表明离子液体[Bmim]BF₄在等离子体作用后结构发生了改变。采用三种离子液体辅助大气压介质阻挡放电等离子体技术制备TiO₂样品的X-射线衍射分析结果表明 [Bmim]HSO₄和HSO₄辅助制备的HSO₄-TiO₂和[Bmim]HSO₄-TiO₂,谱图与锐钛矿相TiO₂标准谱图基本一致,表明所制备的TiO₂为纯锐钛矿型。而[Bmim]BF₄辅助制备的[Bmim]BF₄-TiO₂在2θ=24.1°处的衍射峰向小角度偏移,2θ=48°处的衍射峰向大角度偏移,说明[Bmim]BF₄在辅助制备TiO₂过程中,F进入TiO₂的晶格,破坏了TiO₂原子间的平衡状态,生成了F掺杂TiO₂光催化材料。F掺杂TiO₂光催化材料的形成也间接证明了离子液体[Bmim]BF₄在大气压等离子体中的不稳定性,此结果与核磁共振及紫外可见光的检测结果相一致。同时说明离子液体在等离子体的作用下对于纯锐钛矿晶格的形成和促进高活性掺杂型的光催化材料具有重要作用。为等离子体辅助离子液体制备高性能纳米材料提供重要的实验和理论依据。     

介质阻挡均匀大气压氮气放电特性研究

基于一维流体力学模型，对介质阻挡均匀大气压氮气放电特性进行了数值计算研究.模型中考虑了氮气中主要的电离、激发过程，所包含的粒子种类为e，N₂，N⁺₂，N⁺₄，N₂(a¹∑^-_u)，N₂(A³∑⁺_u).模拟结果显示，氮中的放电具有低气压下汤生放电的特性.放电电流幅度较小，放电过程中气体电压变化缓慢，电子密度远低于离子密度，而且最大值出现在阳极，电子不能在放电间隙中被俘获，不存在中性等离子体区，气体中的电场趋于线性变化.亚稳态N₂(A³∑⁺_u)和N₂(a¹∑⁺_u)在整个放电空间都具有非常高的密度，比电子密度高三个量级以上，亚稳态密度的最大值出现在阳极，这样的分布决定了放电的空间结构.放电所需的种子电子主要由亚稳态之间潘宁电离提供，这种机理使放电的电离水平较低，导致氮气中的放电只能是汤生放电.随着放电参数的变化，多电流峰放电也可在氮气中获得. 关键词： 大气压均匀放电 介质阻挡放电 数值模拟 氮气     

非晶碳氮纳米尖端的微结构和发光机理

利用等离子体增强热丝化学气相沉积系统,用CH₄、H₂和N₂为反应气体,在Si衬底上制备了碳氮纳米尖端。用扫描电子显微镜和显微Raman光谱仪对其进行了表征。在室温下测试了它的发光性能,发光谱由中心约为406 nm和506 nm的两条发光带组成。根据Raman散射谱,对其微结构进行了分析。结合非晶碳氮薄膜的结构和发光机理,分析了它的发光性能。     

低温等离子体对塑料表面处理——低温等离子体对高密度聚乙烯表面处理的ESR研究

本文研究了不同处理条件(处理功率、处理时间和处理压力)下等离子体气体(Ar、N₂、O₂和空气等)对高密度聚乙烯表面处理产生的自由基的ESR谱。我们观察到等离子体处理产生的自由基是相当稳定的,它的ESR信号强度随处理功率和处理时间增加而增加。但处理压力对它影响不大。我们证明了紫外线对高密度聚乙烯表面产生自由基作用随处理条件而变化。并初步解释了谱的超精细相互作用。     

Decay reactions of rare gas cluster ions: Kinetic energy release distributions and binding energies

We have carried out measurements on metastable fragmentation of mass selected argon cluster ions which are produced by electron impact ionization of a neutral argon cluster beam. From the shape of the fragment ion peaks (MIKE scan technique) one can deduce information about the distribution of kinetic energy that is released in the decay reaction. In this study, for Ar ₅ ⁺ to Ar ₁₅ ⁺, it is Gaussian and thus we can calculate from the peak width the mean kinetic energy release 〈KER〉 of the corresponding decay reactions. Using finite heat bath theory we calculate from these data the binding energies of the decaying cluster ions. Received 20 November 2000     

Excitation of thermoluminescence in Eu doped Ba0.12Sr0.88SO4 nanophosphor by low energy argon ions

In the present paper thermoluminescence properties of argon ions irradiated barium strontium mixed sulphate phosphor are reported. The Ba_0.12Sr_0.88SO₄ phosphor was prepared by chemical co-precipitation method. The X-ray diffraction study of prepared sample suggests orthorhombic structure with average grain size of 37 nm. The samples were irradiated with 1.2 MeV Argon ions at fluences varying between 10¹¹-10¹⁵ ions/cm². The argon ions penetrate to the depth of 1.89 μm and lose their energy mainly via electronic stopping. Due to ion irradiation, a large number of defects in the sample are formed. Thermoluminescence (TL) glow curves were recorded for each of the ion fluence. These curves exhibit one broad peak with maximum intensity at 498 K composed of three overlapping peaks. This indicates that different sets of traps are being activated within the particular temperature range each with its own value of activation energy (E) and frequency factor (s). The peaks were observed due to formation of trap levels by ion irradiation and subsequently activation of traps on thermal stimulation. The TL response of the nanophosphor is linear in the dose range 59 kGy-590 MGy. Kinetic parameters associated with the prominent peaks were calculated using glow curve deconvolution (GCD) and verified by different glow curve shape and sample heating rate methods.     

B 2Σ u + excited states of the N + 2 ion and the electron temperature in the discharge afterglow of an Ar-N2 mixture

The electron energy distribution function in the afterglow of a low-pressure discharge in an Ar-N₂ mixture was experimentally found. The values of electron temperature were determined. At the initial stage of plasma decay, the electron temperature was shown to be close to the nitrogen vibrational temperature. A study was made of the afterglow observed in the bands of the first negative system of N ₊ ² , and it is shown that this afterglow may be attributed to collisions of argon ions with nitrogen molecules found on higher vibrational levels.     

POSITRON ANNIHILATION STUDY ON SURFACE STRUCTURE OF BIOLOGICAL SAMPLES IMPLANTED BY IONS WITH LOW ENERGY

The organic materials of biological samples, such as lima bean and peanut, were implanted respectively by nitrogen ions with an energy of 100 keV and vanadium ions with an energy of 200 keV. The positron annihilation lifetime spectra of implanted and non-implanted samples were compared with each other especially in τ₃ and I₃. The experimental results showed that before implantation there were many small holes with diameters of 0.48 and 0.7 nm respectively in lima bean and peanut. After ion implantation, the size of holes would be changed because of organism cross linking and scission. The effective penetration range of implantation of ions with low energy into biological samples is about 200μm.     

Multiple inner-shell ionization in oxygen produced by ion bombardment in the MeV range

Oxygen X-ray spectra from oxide targets by proton, helium, nitrogen and argon ion bombardment are studied. K satellite and hypersatellite peaks are observed. In light ion bombardment, X-ray production of the double K-shell ionization indicated large deviation from the Z²₁ dependence.     

Controlling surface states and photoluminescence of porous silicon by low-energy-ion irradiation

Porous silicon (PS) was irradiated by three kinds of low-energy ions with different chemical activity, namely argon ions, nitrogen ions and oxygen ions. The chemical activity of ions has significant effect on the surface states and photoluminescence (PL) properties of PS, The photoluminescence quenching after argon ions and nitrogen ions irradiation is ascribed to the broken Si-Si bonds, while the PL recovery is attributed to the oxidation of Si-H back bonds. Oxygen ions irradiation leads to the formation of a SiO_x layer with oxygen defects and PS shows different PL evolution than PS irradiated by argon ions and nitrogen ions.     

Numerical study on characteristics of nitrogen discharge at high pressure with induced plasma

Based on the fluid theory of plasma, a model is built to study the characteristics of nitrogen discharge at high pressure with induced argon plasma. In the model, the spices such as electron, N₂⁺, N₄⁺, Ar⁺, and two metastable states (N₂ (A³∑_u⁺), N₂ (a¹∑_u^-)) are taken into account. The model includes particle's continuity equations, electron's energy balance equation, and Poisson equation. The model is solved with a finite difference method. The numerical results are obtained and used to investigate the effect of time taken to add nitrogen gas and initially-induced argon plasma pressure. It is found that lower speeds of adding the nitrogen gas and varying the gas pressure can induce higher plasma density, and inversely lower electron temperature. At high-pressure discharge, the electron density increases when the proportion of nitrogen component is below 40%, while the electron density will keep constant as the nitrogen component further increases. It is also shown that with the increase of initially-induced argon plasma pressure, the density of charged particles increases, and the electron temperature as well as the electric field decrease.     

Energy spectra of ions sputtered from elements by O+2: A comprehensive study

The results of a comprehensive study of the energy distributions of ions sputtered from 31 pure elements and two compounds by a 5.5 keV O⁺₂ beam are presented. The spectra were determined under three different ambient conditions: residual vacuum or low argon pressure backfill, oxygen backfill, and nitrogen backfill. The energy spectra of polyatomic ions are narrower and peaked at lower energies than the atomic ion spectra and decrease in width and average energy with greater ion complexity. The statistical model of polyatomic ion formation does not correctly describe the shape of the energy distributions. The atomic ion energy spectra reveal that more than one ionization mechanism is responsible for the formation of ions from the various elements and that the dominant mechanism is frequently different in the presence of a reactive gas than in a vacuum. Periodic trends of the parameters describing the energy distributions are dependent on the electronic structure of the ions. The average energies of the distributions correlate with the sublimation energies of the pure elements, but the most probable energies do not. Apparent surface binding energies calculated from the energy distributions are presented.     

Interaction of low energy (5–10 keV) argon atoms and ions with a Cu(100) surface; Ion fraction,ionization and neutralization

The ion fractions η⁺ of low energy (5–10 keV) argon particles scattered from a Cu(100) surface, are measured with a time of flight spectrometer. Neutral as well as charged projectiles are used. The scattering angle θ is 30°. The results for different angles of incidence ψ and crystal directions are reported. For scattering in the 〈100〉 direction, with a ψ-value of 15° and a primary energy E₀ of 5 and 10 keV, the ion fractions for the quasi single scattering peak, η⁺_QS, are 1.5 and 6.1% respectively. When E₀ is between 5 and 10 keV a reionization process with a constant reionization probability occurs during the violent interaction. This process, but also neutralization along the outgoing trajectory, determines η⁺_QS. With ions as projectiles, an energy difference of about 16 eV is observed between the quasi single scattering peaks in the spectra of all scattered particles and of ions only. The ion fraction for the quasi double scattering peak, η⁺_QD. depends largely upon E₀, indicating that the efficiency of the reionization process increases with E₀. A qualitative discussion of the data is given, using the reionization process and the interatomic neutralization processes along the trajectory of the scattered particles.     

Double scattering of ions from polycrystalline materials

In this paper double scattering of ions from polycrystalline materials has been theoretically investigated. It is shown that double collision events contribute to the yield at low energy as well as to the high energy flanks of the peaks depending on whether or not the azimuthal angle ø₁ is greater than or less than a critical angle ø_1c at a given first scattering angle θ₁. There are various combinations of first scattering angle θ₁ and second scattering angle θ₂ which give the required retained energy in two successive collisions. Scattering cross sections derived from the Bohr potential and a double interpolation sub-routine are used to calculate the scattering yield at various angles. Two systems, Ne⁺ scattered from copper and Ar⁺ scattered from gold, each at 30 keV primary energy, have been compared with experimental results.