共查询到13条相似文献,搜索用时 203 毫秒
1.
在溶胶-凝胶工艺获得高质量Bi4Ti3O12薄膜的基础上 ,制备了Ag/Bi4Ti3O12栅n沟道铁电场效应晶体管. 研 究了Si基Bi4Ti3O12薄膜的生长特性及其对铁电薄膜/ 硅的界面状态和铁电场效应晶体管存储特性的影响. 研究表明,在合理的工艺条件下可以获 得具有较高c-轴择优取向的纯钙钛矿相Si基Bi4Ti3O12 铁电薄膜并有利于改善Bi4Ti3O12/Si之间的界面特性; 顺时针回滞的C-V特性曲线和C-T曲线表明Ag/Bi4Ti3O12栅n沟道铁电场效应晶体管具有极化存储效应和一定的极化电荷保持能力; 器件的转移(I< sub>sd-VG)特性曲线显示Ag/Bi4Ti3O12 sub>栅n沟道铁电场效应晶体管具有明显的栅极化调制效应.
关键词:
铁电场效应晶体管
4Ti3O12')" href="#">Bi4Ti3O12
存储 特性
溶胶-凝胶工艺 相似文献
2.
采用Sol-Gel工艺低温制备了Si基Bi3.25La0.75Ti3O12铁电薄膜.研究了退火温度对薄膜微观结构、介电特性与铁电性能的影响.500℃退火处理的Bi3.25La0.75Ti3O12薄膜未能充分晶化,晶粒细小且有非晶团聚,介电与铁电性能均较差.高于550℃退火处理的Bi3.25La0.75
关键词:
铁电薄膜
3.25La0.75Ti3O12')" href="#">Bi3.25La0.75Ti3O12
Sol-Gel工艺 相似文献
3.
利用Sol-Gel法在Pt/Ti/SiO2/Si衬底上制备出Bi4Ti3O12和Bi3.25La0.75Ti3O12薄膜,研究了La掺杂对Bi4Ti3O12薄膜的晶体结构、铁电性能和疲劳特性的影响,发现La掺杂没有改变Bi4Ti3O12薄膜的基本晶体结构,并且提高了Bi4Ti3O12铁电薄膜的剩余极化值和抗疲劳性能,对La掺杂改善Bi4Ti3O12铁电薄膜性能的机理进行了讨论.
关键词:
铁电性能
4Ti3O12薄膜')" href="#">Bi4Ti3O12薄膜
3.25La0.75Ti3O12薄膜')" href="#">Bi3.25La0.75Ti3O12薄膜
sol-gel法
La掺杂 相似文献
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6.
采用sol-gel法在Pt/TiO2/SiO2/p-Si(100)衬底上制备了Bi3.25La0.75Ti3O12(BLT)铁电薄膜,研究了在750 ℃时不同退火气压(pO2:10-4—3 atm)对薄膜微观结构和电学性能的影响.XRD和拉曼光谱结果表明在10-4和3 atm氧气压下退火
关键词:
3.25La0.75Ti3O12')" href="#">Bi3.25La0.75Ti3O12
铁电性能
sol-gel法
正交化度 相似文献
7.
采用sol-gel工艺,在分层快速退火的工艺条件下成功地制备了高质量Si基BiTi3O12铁电薄膜.研究了Si基Bi4Ti3O12薄膜的生长行为、铁电性能、C-V特性和疲劳特性.研究表明:Si基Bi4Ti3O12薄膜具有随退火温度升高沿c轴择优生长的趋势;退火温度通过影响薄膜的晶粒尺寸、生长取向和薄膜中载流子的浓度来改变Si基Bi4Ti3O12薄膜的铁电性能;Ag/Bi4Ti3O12/p-Si异质结的C-V特性曲线呈现顺时针回滞,可以实现极化存储;109次极化反转后Bi4Ti3O12薄膜的剩余极化仅下降12%,具有较好的疲劳特性. 相似文献
8.
采用脉冲激光沉积(PLD)技术,利用LSCO/CeO2/YSZ多异质缓冲层,在Si(100)基 片上成功地制备了c轴一致取向的Bi3.15Nd0.85Ti3O12(BNT)铁电薄膜.利用X射线衍射(XRD)和扫描电镜(SEM)分析测定了薄膜的相结构 、取向和形貌特征,考察了沉积温度和氧分压对BNT薄膜微结构、取向和形貌的影响,确定 了BNT薄膜的最佳沉积条件.对在优化的条件下制备得到的BNT薄膜的C-V曲线测试得到了典型 的蝴蝶形曲线,表明该薄膜具有较好的电极化反转存储特性.最后讨论了BNT薄膜铁电性能与 薄膜取向的相关性.
关键词:
3.15Nd0.85Ti3O12')" href="#">Bi3.15Nd0.85Ti3O12
铁电薄 膜
多层异质结
脉冲激光沉积 相似文献
9.
采用基于密度泛函理论的第一性原理研究了在氮氢混合气氛中退火后Bi4Ti3O12铁电性的退化机理. 分别计算了无氢、含氢模型中Ti沿c轴位移时体系总能量的变化,电子云密度分布,以及电子结构的总能态密度的变化. 结果表明含氢Bi4Ti3O12铁电相Ti-O,Bi-O间的电子云重叠布居分布较无氢情况下变化明显,氢氧之间较强的轨道杂化使它们趋于形成共价键;晶格中氢氧键的
关键词:
氮氢混合气氛退火
铁电性
4Ti3O12')" href="#">Bi4Ti3O12
第一性原理 相似文献
10.
采用脉冲激光沉积(PLD)工艺,制备了以Bi4Ti3O12(BIT)为过渡阻挡层的Au/PZT/BIT/p-Si异质结.研究了BIT铁电层对Pb(Zr0.52Ti0.48)O3(PZT)薄膜晶相结构、铁电及介电性能的影响,对Au/PZT/BIT/p-Si异质结的导电机制进行了讨论.氧气氛530℃淀积的PZT为多晶铁电薄膜,与直接淀积在Si基片上相比,加入BIT铁电层后PZT铁
关键词:
铁电薄膜
异质结构
脉冲激光沉积(PLD) 相似文献
11.
采用溶胶-凝胶法,在氧气氛中和层层晶化的工艺条件下,成功地制备了沉积在Pt/Ti/SiO2/Si(100)衬底上的铁电性能优良的Sr2Bi4Ti5O18 (SBTi)薄膜,并研究了SBTi薄膜的微结构、表面形貌、铁电性能和疲劳特性.研究表明:薄膜具有单一的层状钙钛矿结构,且为随机取向;薄膜表面光滑,无裂纹,厚度约为725nm;铁电性能测试显示较饱和、方形的电滞回线,当外电场强度为275kV/cm时
关键词:
溶胶-凝胶法
铁电薄膜
2Bi4Ti5O18')" href="#">Sr2Bi4Ti5O18 相似文献
12.
Pb(Zr0.52Ti0.48)O3 (PZT) thin films with large remanent polarization and SrBi2Ta2O9 (SBT) thin films with excellent fatigue-resisting characteristic have been widely studied for non-volatile random access memories, respectively. To combine these two advantages, bilayered Pb(Zr0.52Ti0.48)O3/SrBi2Ta2O9 (PZT/SBT) thin films were fabricated on Pt/TiO2/SiO2/Si substrates by chemical solution deposition method. X-ray diffraction patterns revealed that the diffraction peaks of PZT/SBT thin films were completely composed of PZT and SBT, and no other secondary phase was observed. The electrical properties of the bilayered structure PZT/SBT films have been investigated in comparison with pure PZT and SBT films. PZT/SBT bilayered thin films showed larger remanent polarization (2Pr) of 18.37 μC/cm2 than pure SBT and less polarization fatigue up to 1 × 109 switching cycles than pure PZT. These results indicated that this bilayered structure of PZT/SBT is a promising material combination for ferroelectric memory applications. 相似文献
13.
To investigate temperature-dependent ferroelectric and dielectric properties of ferroelectric films, Bi3.25La0.75Ti3O12 (BLT) thin films were prepared on Pt-coated silicon substrates by pulsed laser deposition. The ferroelectric and dielectric behaviors have been studied in a wide temperature range from 80 K to room temperature. The saturated polarization (Psat) decreases with decreasing temperature and decreasing electric field, whereas remnant polarization (Pr) shows a more complex temperature dependence. These results, which can be well explained based on a temperature-dependent charged defects-domain wall interaction model, might be helpful for further understanding the domain switching behavior. Based on these results, an alternative way to investigate temperature-dependent ferroelectric fatigue is proposed and experimentally carried out. The measured fatigue rate is found to be linearly dependent on temperature, consistent with the report on Pb(Zr,Ti)O3 films. Temperature-dependent dielectric measurements of the films further confirm the above explanation. 相似文献