激光扫描实时共聚焦显微成像系统设计

共聚焦扫描显微镜已成为生物医学和材料科学领域研究中非常有价值的一种工具.本文给出了一种反射型激光扫描共聚焦显微成像系统的系统结构和具体设计.采用多面体转镜进行水平扫描,摆镜进行垂直扫描.利用商品透镜设计了光学扫描中继系统,采用光电倍增管作为激发出的荧光探测器,同时给出了数据采集和扫描同步控制系统的组成与设计.利用CODE V优化光学扫描系统以获得尽可能小的扫描光斑尺寸和较大的视场,并综合考虑了采样频率、扫描速度和探测器对整个系统性能的影响,从而给出了该型共聚焦显微成像系统的相互匹配的设计参量.分析结果表明:共聚焦扫描系统设计合理可行|从光学扫描系统到PMT探测单元的各项技术指标得到优化,满足实时探测的要求|该系统具有适应性强,易升级,低成本的技术特点,同时可达到同类商品的技术性能.     

Rapidly tuning miniature TEA CO2 laser – rotating mirror and grating mechanism

In this research, directed toward using differential absorption lidar (DIAL) for measuring concentrations of pollutant gases, a device for rapidly tuning a transversely excited atmospheric-pressure (TEA) CO₂ laser is presented. It is shown that it is possible to utilize a rotating six-sided scanning mirror and a fixed diffraction grating to rapidly switch wavelength over randomly selected lasing transitions in the 9–11 μm region of the spectrum. The scanning mirror and an optical encoder are driven by a hysteresis synchronous motor at a speed of 1500 rpm. A surface-wire-corona preionization was utilized in a cavity. The laser system is highly automated with microprocessor-controlled laser line selection. Single-branch emission at two wavelengths with time interval ⩽10 ms has been obtained from a single cavity TEA CO₂ laser. An accurate line selection has been demonstrated in over 40 transitions at a pulse repetition frequency of up to 100 Hz. The laser energy at first-order couple output was up to 20 mJ per pulse and the pulse width is about 60 ns in an active volume of 36 cm³.     

激光扫描实时共聚焦显微成像系统设计

共聚焦扫描显微镜已成为生物医学和材料科学领域研究中非常有价值的一种工具.本文给出了一种反射型激光扫描共聚焦显微成像系统的系统结构和具体设计.采用多面体转镜进行水平扫描,摆镜进行垂直扫描.利用商品透镜设计了光学扫描中继系统,采用光电倍增管作为激发出的荧光探测器,同时给出了数据采集和扫描同步控制系统的组成与设计.利用COD...     

An omnidirectional 3D sensor with line laser scanning

An active omnidirectional vision owns the advantages of the wide field of view (FOV) imaging, resulting in an entire 3D environment scene, which is promising in the field of robot navigation. However, the existing omnidirectional vision sensors based on line laser can measure points only located on the optical plane of the line laser beam, resulting in the low-resolution reconstruction. Whereas, to improve resolution, some other omnidirectional vision sensors with the capability of projecting 2D encode pattern from projector and curved mirror. However, the astigmatism property of curve mirror causes the low-accuracy reconstruction. To solve the above problems, a rotating polygon scanning mirror is used to scan the object in the vertical direction so that an entire profile of the observed scene can be obtained at high accuracy, without of astigmatism phenomenon. Then, the proposed method is calibrated by a conventional 2D checkerboard plate. The experimental results show that the measurement error of the 3D omnidirectional sensor is approximately 1 mm. Moreover, the reconstruction of objects with different shapes based on the developed sensor is also verified.     

基于2D微电子机械系统(MEMS)镜全向激光雷达光学系统设计

为了满足全向激光探测的需求,提出一种基于2DMEMS镜扫描的激光雷达结构。激光器通过1×6高速光开关分时地给6个扫描子系统提供光信号,6个扫描子系统探测视场叠加起来可实现360°激光探测。每个扫描子系统的扫描范围为60°×30°,其中包含一个扩展MEMS镜扫描角度的发射光学天线和一个大视场有增益的接收光学天线。发射光学天线将MEMS镜±10°的扫描角扩展到±30°,发散度小于0.2mrad;接收视场内的激光波经过接收天线在探测器上所成的半像高小于1mm,接收增益为3.65。通过计算修正后的激光雷达方程可得到发射功率20 W的激光束在工作距离100 m内的回波功率≥1 nW,结果表明该光学系统可适用于激光雷达系统。     

Two-axis-scanning laser Doppler vibrometer for precision engineering

Laser Doppler vibrometer (LVD) has been the most favorite instrument for precision dynamics measurement due to its non-contact, high accuracy and high resolution. However, LDV can only give the dynamic data of a particular location on the entire feature. In order to get the whole field data, a laser beam-scanning mechanism has to be implemented. Currently, motor-driven scanning mirror is used to move the measurement probe from one point to another. The mechanical vibrations of the scanning mirror will reduce the measurement accuracy. This paper introduces a novel scanning LDV optical system embodied in an acousto-optic deflector scanning mechanism. It can improve the measurement accuracy since there is no mechanical motion involved. One main advantage of this system is that it generates a laser scanning beam in parallel that is different from the beam scanning in the conventional scanning laser Doppler vibrometer (SLDV). The new system has a board scanning range. The measurement target size ranges from few tens of millimeters down to 10 μm. We have demonstrated the capability of the novel system on scanning measurements of features as big as ultra-precision cutting tool to features as tiny as AFM cantilever. We believe that the novel SLDV will find profound potential applications in the precision engineering field.     

Investigation of the nonlinear optical properties of metamaterials by second harmonic generation

The development of a laser absorption spectroscopy sensor system has been described for measurement of two-dimensional (2D) integrated absorbance linear density and temperature distributions. The system incorporates a tunable distributed feedback (DFB) diode laser at 1391.67 nm and a scanning mirror mounted on a moveable carriage, whilst a photodetector and a second scanning mirror are mounted on another moveable carriage. Both carriages move independently along a circular rail with a diameter of 97 cm. The positions of the carriages and the scanning mirrors are controlled by a program via four servomotors. The laser wavelength is scanned over H₂O absorption transitions for 11 fan beam projections from five equally spaced points around the circle. 2D images of the integrated absorbance linear density due to water molecules influenced by two heaters were obtained using the algebraic reconstruction technique (the Kaczmarz method). The derived temperature distribution compared well with thermocouple measurements. The experimental results demonstrate that the system based upon a tunable laser absorption sensor can be used for monitoring the 2D distribution of chemical species and temperature in various reactive flow applications.     

大尺寸平面激光扫描补偿系统误差分析

扫描补偿系统是3DLIF水体测量系统中实现大尺寸平面激光等光程扫描的关键部分,决定了平面激光光束在流体水槽中的定位精度;系统3 000 mm长的光程和500 mm宽的光源使定位精度难以保证。针对该问题,分析了扫描补偿系统中可能存在的误差因素和各项因素之间的影响关系,建立了相关误差模型并进行仿真分析,对得到的误差数据进行了多项式拟合,拟合结果显示,棱镜制造角差和平面反射镜绕z轴的俯仰为影响位置误差的主要因素;为了减小误差,进一步分析拟合结果,得到了两项因素之间的关系表达式,提出了以仿真结果指导装调来减小误差的方法。最终仿真结果显示,通过该方法使平面激光在水槽中的位置误差可以从0.618 mm减小到0.103 mm。     

Effect of excimer laser annealing on the properties of ZnO thin film prepared by sol-gel method

Pristine ZnO thin films have been deposited with zinc acetate [Zn(CH₃COO)₂], mono-ethanolamine (stabilizer), and isopropanol solutions by sol-gel method. After deposition, pristine ZnO thin films have been irradiated by excimer laser (λ = 248, KrF) source with energy density of 50 mJ/cm² for 30 sec. The effect of excimer laser annealing on the optical and structural properties of ZnO thin films are investigated by photoluminescence and field emission scanning electron microscope. As-grown ZnO thin films show a huge peak of visible region and a wide full width at half maximum (FWHM) of UV region due to low quality with amorphous ZnO thin films. After KrF excimer laser annealing, ZnO thin films show intense near-band-edge (NBE) emission and weak deep-level emission. The optically improved pristine ZnO thin films have demonstrated that excimer laser annealing is novel treatment process at room temperature.     

Scanning laser microscope for imaging nanostructured superconductors

The nanofabrication of superconductors yields various interesting features in superconducting properties. A variety of different imaging techniques have been developed for probing the local superconducting profiles. A scanning pulsed laser microscope has been developed by the combination of the XYZ piezo-driven stages and an optical fiber with an aspheric focusing lens. The scanning laser microscope is used to understand the position-dependent properties of a superconducting MgB₂ stripline of length 100 μm and width of 3 μm under constant bias current. Our results show that the superconducting stripline can clearly be seen in the contour image of the scanning laser microscope on the signal voltage. It is suggested from the observed image that the inhomogeneity is relevant in specifying the operating conditions such as detection efficiency of the sensor.     

Optical fiber cleaved at an angle by CO2 laser ablation: Application to micromachining

Laser ablation can be achieved by delivering short power pulse with durations much smaller than the heat diffusion time. In this investigation, we are collimating and magnifying a beam from a CO₂ laser with a Keplerian telescopic system. Then we study the quality of the cut performed by scanning the beam at a fast speed over an optical fiber just after focusing a well collimated CO₂ beam at λ=10.6 μm. It is found that the best results for cutting optical fibers depend upon both the time required in raising matter temperature to the vaporization point and the scanning speed of the CO₂ laser beam. Some aspects of the laser beam collimation before focusing is reviewed briefly and results for optical fibers being cleaved at low and fast speed under various conditions are also shown and discussed.     

Gain induced stability of active plane-parallel resonators

It has been observed for a plane-parallel resonator with a saturated medium that under certain conditions confined beams mainly concentrated near the axis are present. The experiments have been done with a sealed-off plane-parallel CO₂ laser of one meter length and with an internal diameter of 20 mm. Without gain variations such a system is unstable because of thermal defocussing by the heated gas. But due to sufficiently high gain variations the beam converges nevertheless. Since the gain variation increases with decreasing reflectivity confined beams near the optical axis are only observed at sufficiently low reflectivity. The experiments were done with a totally reflecting mirror and an outcoupling mirror having a reflectivity of, respectively, 90%, 80%, 50%, and 36%. For the high reflectivities the outcoupled beam is mainly concentrated near the edge with irregular density distributions. For the low reflectivity the beam is more or less radially symmetric, concentrated near the axis having decreasing intensity with the distance from the axis. The behaviour can be understood by an analysis in which the constant and quadratic term of the complex propagation constant near the optical axis due to gain variations, dispersion and heat effects are taken into account.     

Scanning compensation in imaging lidar using a double-sided reflector

In this paper, we present a bistatic scanning imaging lidar optical system. A double-sided scanning mirror is used in this system, which can compensate image spot migration. Geometrical optical analysis is conducted for the scanning light path and an optimal detector position is given. The optical simulation is also implemented using soft-ware Zemax to verify the compensation effect of double-sided reflector. An experiment is carried out with a CW-HeNe laser to observe image spot migration in different positions. The experimental results are in agreement with simulation results. In addition, imaging experiment is performed using 905 nm pulsed laser in the laboratory. The scanning image for black and white stripes target is obtained by single-element detector. Theoretical and experimental results confirm that the use of a double-sided flat reflector can effectively compensate image spot migration.     

Hybrid optical resonator type laser proposed for direct coupling into optical fiber

Combining one stable resonator with a concave mirror and a coupling-hole plane mirror, and another unstable resonator having a concave mirror and a convex mirror, a new hybrid optical resonator type laser has been proposed by overlapping the concave mirror as a common one and fitting the convex mirror exactly to the coupling-hole. Using theABCD law, the so-called g-parameters are first found for beam confinement. Then, based on the eigen-equation, the field distribution on the plano-convex mirror is obtained with the g-parameters above. Knowing this field distribution results in an effective transmittanceG _{e e}. Finally, the ratio of the inner convex to outer plane mirror radii can be determined for an optimum coupling in both the limiting cases of homogeneously and inhomogeneously broadened gain media. Some numerical examples will also be given for a CO₂ laser having the proposed hybrid resonator.     

红外地球敏感器扫描镜摆角激光动态测试方法

为解决扫描镜摆角实时动态非接触测量问题,基于激光检测技术和CCD探测技术,提出一种红外地球敏感器扫描镜摆角激光动态测试方法,并研制了扫描镜摆角动态测试系统,其可实现扫描镜的摆动频率、零位角、幅值、峰峰值平均等参量的动静态激光非接触测量。介绍了系统的组成和总体结构,着重对扫描镜摆角动态测量理论和大视场、大相对孔径特殊线性扫描光学系统的设计方法进行了分析与探讨,通过建立系统的数学模型,解决了测量数据误差修正与图形处理问题。对测量系统的精度进行了验证,结果表明系统的摆角测量范围为0~±12°,分辨力为0.01°,动静态测量精度优于±0.04°。     

多面转镜激光器扫频光学相干层析成像系统的全光谱重采样方法

在多面转镜激光器扫频光学相干层析成像系统中,激光器存在着输出光谱错位与扫频范围波动的问题.目前的重采样方法中,普遍利用互相关运算校正光谱错位,并进行大范围的截取,保证扫频范围的一致性,但这会导致成像信噪比与分辨率的降低.本文用马赫-曾德尔干涉仪(MZI)采集到的干涉信号对扫频范围波动的问题进行了详细的测量与分析,其中干涉信号的解缠相位曲线的非随机性和平行性,表明该类激光器输出光谱的波长分布具备一致性.在此基础上,提出了一种用最长扫频范围的MZI干涉信号,对样品干涉信号进行时域光谱对齐、然后进行一对多插值的重采样方法.实验与分析表明,该方法利用了所有的光谱信号,保证了样品干涉信号的能量利用率,能有效提高图像的信噪比与分辨率.     

Thermal optical effect in axisymmetric structural laser resonator

In order to study the thermal optical effect (TOE) resulting from the axisymmetrical sources of thermal energy at the output mirror of CO₂ laser, the Heat Conduction Poisson Equation (HCPE) has been solved in the output mirror. Then the temperature distribution is given. The temperature variations will cause the surface distortion and the phase shift at the output mirror. Therefore, the output laser beam will be subject to thermal optical distortion and phase change. The numerical examples are to confirm our calculated results.     

Dynamical analysis of acousto-optically Q-switched CO2 laser

A compacted size high power CO₂ laser has been developed using an acousto-optically (AO) Q-switch. Performance characteristics have been investigated as a function of output mirror transmittance. The theory of six-temperature model for CO₂ lasers has firstly been utilized to analyze the dynamical process in the AO Q-switched CO₂ laser. This theory perfectly explains the behavior of energy transfer between different molecules in laser gain medium, and describes the shape of pulse laser. The calculated pulse waveforms are in good agreement with the experimental result. Both the experimental and theoretical results present that the optimal value of output mirror transmittance is 39%. Under this condition, the measured peak power is 4750 W and pulsed width is 160 ns, which is consistent with the calculations. Six-temperature model is a perfect theory for CO₂ laser kinetics, which will lay a theoretical foundation for the laser optimum design.     

多色分图层激光扫描自聚焦投影技术

为了突破常规激光投影仪由于单一波长的局限性造成应用场景的限制,同时实现对不同零件、不同材料、不同装配工艺的分图层投影,设计并搭建了多色分图层激光扫描自聚焦投影系统。系统采用2种波长的激光作为光源,根据二向色镜的位置不同,提出了多色共光轴和分光路2种激光扫描自聚焦投影方案,并推导了相应的光学系统数学模型。通过系统的自聚焦功能调节镜组间距,均可以实现在不同距离的投影面上聚焦出不同颜色的最小光斑。利用ZEMAX光学设计软件对2种投影光学系统进行仿真,并从系统可靠性和投影效果上对2种系统进行比较分析。实验结果表明：在3 m处的投影面上,共光轴系统各种波长的光斑直径均在0.8 mm以内,且光斑大小均匀,可以实现多色分图层的扫描自聚焦投影功能。     

基于MEMS微镜的长波近红外光谱仪的设计与实现

为适应光谱仪微型化、集成化的发展趋势,详细分析了MEMS微镜应用于微型长波近红外光谱仪的方法和涉及的主要问题,例如分光系统的设计、MEMS微镜的选择、探测器与前置放大电路的设计等。并将50 Hz谐振频率、峰峰驱动电压为10V的MEMS微镜、高灵敏度的InGaAs单元探测器,结合立特罗式分光光路,设计和实现了900～2 055 nm波段的微型长波近红外光谱仪样机,其中1 000～1 965 nm谱段的光谱分辨率介于9.4～16 nm之间。采用MEMS扫描微镜技术后,一方面简化了光谱仪中的复杂机械结构,使尺寸可以更小;另一方面实现了单探测器的长波近红外光谱仪,与阵列长波近红外探测器光谱仪相比,成本有所降低。作为应用实例,此样机成功对纯水以及乙醇-水溶液的长波近红外光谱进行了测量,实现了乙醇-水溶液的浓度预测分析,其中本样机测量的纯水长波近红外光谱与文献相符。