利用真空变温电阻测试仪研究VO_2薄膜的电阻特性

利用磁控溅射技术在普通玻璃基片上制备了VO2薄膜,晶体结构和表面形貌分析表明制备的样品主要具有VO2相,结晶情况良好.利用自制真空变温薄膜电阻测试仪器测试了VO2薄膜的电阻率随温度变化曲线,观察到钒氧化物的电阻突变和热滞现象.     

绝热法测量金属材料的比热

采用固体绝热和真空绝热测量了金属的比热.热量由恒流源通过合金电阻片提供,温度由铂金属薄膜电阻温度计测量.该方法涉及了真空技术、传热技术和温度测量,与混合法及冷却法测量比热相比,该实验更突出比热的基本概念和对学生综合能力的培养.     

纳米晶氧化锡薄膜的接触特性

在 Ar和 O2 气体中 ,基片温度在 15 0～ 40 0℃的条件下 ,用直流磁控溅射的方法可以制备纳米晶透明导电薄膜。实验利用 TL M模型测试了纳米晶 Sn O2 透明导电薄膜的方块电阻、单位面积薄膜的接触电阻和电极与薄膜的结合力随热处理温度的变化情况     

Sn1-x(In1-yCuy)xO薄膜的合成

利用真空反应蒸发技术,在氧分压约为8.5×10-2Pa、衬底温度为400℃条件下蒸发高纯度的铟、锡和铜,在玻璃衬底上制备出Sn1-x(In1-yCuy)xO薄膜.研究了蒸发源材料质量比不同的样品的薄膜结构、透过率、薄膜的方块电阻和电阻率与温度的关系.实验结果表明,Sn1-x(In1-yCuy)xO透明导电薄膜具有优良的光电特性,而且制备出的Sn1-x(In1-yCuy)xO薄膜中In的含量大大减少,可以成为ITO薄膜的潜在替代材料.     

用于彩色滤光片的低阻低应力ITO透明导电膜

探讨了用于彩色滤光片的低电阻和低压应力的ITO透明导电膜工艺。用磁控溅射方法在不同温度的衬底上制备了ITO薄膜。研究了膜形衬底温度与膜结晶化程度的关系,以及膜形衬底温度对膜电阻和压应力的影响。对不同衬底温度下形成的ITO薄膜进行了退火处理,并对退火后的ITO薄膜的电阻和压应力特性进行了分析。结果表明,采用室温沉积非晶态ITO膜,在真空退火下可获得低电阻、低压应力的多晶相ITO膜。     

金纳米薄膜导电和导热性质的实验研究

由于尺寸效应和晶界效应的影响,纳米薄膜在导电和导热方面呈现出与体材料不同的性质.本文实验研究了不同厚度(20～54 nm)金薄膜在不同温度(100～340 K)的导电、导热性质.测量结果显示,薄膜的电导率和热导率比体材料小,洛伦兹数比体材料大,Wiedemann-Franz定律不再成立.随着厚度增加,薄膜的电导率,热导率和电阻温度系数都增加.薄膜热导率随温度变化趋势与体材料相反,随着温度升高而升高.电导率随温度变化趋势与体材料相同,随着温度升高而降低;但薄膜没有体材料对温度变化敏感,导致电阻温度系数下降.     

反应溅射法制备钒氧化物薄膜及电学性质的测量

采用射频溅射法,通过控制通入真空腔中Ar和O2的比例来获得VOx薄膜.由于V的氧化物众多,不同的氧分压会显著影响薄膜的组分.实验结果表明:尽管在X射线衍射谱上没有观测到明显的VO2特征峰,但在氧气的比例为40%~50%时样品具有很大的电阻温度系数.     

氮化硅纳米薄膜非平衡热导率实验研究

3ω实验方法是一种可以对薄膜热导率进行瞬时测量的方法。根据3ω方法测试原理,搭建了薄膜导热系数测试平台,并且分别测试低频率段和高频段薄膜与基底的温升以及薄膜热导率。测试结果表明:Si3N4薄膜的热导率随温度的升高而增大;高频段下,热导率受频率影响大,误差大;在低频段下薄膜热导率与频率变化基本无关;基于电子与声子的局部热平衡运输方程假设,S i3N4薄膜的热导率具有极度非平衡性;通过比较电阻、热导率与温度的关系可以看出加热器的尺寸大小会影响薄膜的热导率,最佳加热器的宽度选用20μm左右。     

溅射条件对Ni80Fe20薄膜各向异性磁电阻的影响

研究了基片温度和溅射气压对磁控溅射方法制备的Ni80Fe20磁性薄膜各向异性磁电阻的影响.实验发现基片温度是影响Ni80Fe20薄膜各向异性磁电阻最重要的因素.在较高的基片温度下,溅射气压对Ni80Fe20薄膜各向异性磁电阻也有较大的影响.基片温度在150~180℃,溅射气压在0.3~0.5 Pa范围内制备的Ni80Fe20薄膜有较大的各向异性磁电阻(3.7%~4.3%).     

MgB_2超导薄膜正常态电阻特性研究

研究了MgB2超导薄膜正常态电阻的影响因素,探讨了与之相应的超导电性机制。MgB2超导薄膜样品采用两步异位退火的Mg扩散方法制备,通过电阻~温度曲线测量、扫描电子显微镜形貌观测和光学金相显微镜观察等方法研究了所制备薄膜的基本特性。实验结果表明,先驱硼薄膜的纯度严重影响着所生成的MgB2超导薄膜的转变温度,退火温度越高,影响越大;退火温度高的样品,正常态电阻大;退火时间长的样品正常态电阻大。     

用离子束增强沉积从V2O5粉末制备高热电阻温度系数VO_2薄膜

采用了一种用离子束增强沉积从V2O5粉末直接制备VO2薄膜的新方法,将纯度为997%的V2O5粉末压成溅射靶,在用Ar离子束溅射的同时,用氩氢混合束对沉积膜作高剂量离子注入,使沉积膜中V2O5的V—O键断裂,进而被注入的氢还原,退火后获得热电阻温度系数(TCR)高达4%的VO2薄膜.高剂量的氩氢混合束注入对薄膜引入应力,使薄膜的转换温度降低、电阻温度曲线斜率变大,是薄膜TCR增大的原因 关键词： 离子束增强沉积 VO2薄膜 热电阻温度系数     

Graphene oxide thin film coated quartz crystal microbalance for humidity detection

In this paper, we demonstrated that chemically derived graphene oxide (GO) thin film as a humidity sensitive coating deposited on quartz crystal microbalances (QCMs) for humidity detection. By exposing GO thin film coated QCMs to various relative humidity (RH) environments at room temperature, the humidity sensing characteristics of the QCMs such as sensitivity and linearity, response and recovery, humidity hysteresis were investigated. The experiment results show that GO thin film coated QCMs exhibit an excellent humidity sensing performance. Moreover, the possible humidity sensing mechanism of GO thin film coated QCMs was also investigated by monitoring the crystal's motional resistance change. It is suggested that the frequency response of the QCMs is dependent on water molecules adsorbed/desorbed masses on GO thin film in the low RH range, and on both water molecules adsorbed/desorbed masses on GO thin film and variations in interlayer expansion stress of GO thin film derived from swelling effect in the high RH range.     

Pulsed laser deposition of (110) oriented semiconductive SrFeO3−x thin films

 The semiconductive perovskite-type oxide SrFeO_3-x (x<0.16) (SFO) thin films have been directly fabricated on (001)SrTiO₃ and (001)LaAlO₃ single crystal substrates by pulsed laser deposition(PLD) under high oxygen partial pressure of 100 Pa. The SFO thin films were (110) oriented. The x-ray photoelectron spectroscopy (XPS) analysis showed that the surface of SFO thin film has strong gas absorption capability. The resistance versus temperature has been measured in the temperature range from 77 K to 300 K. The SFO thin film showed typical semiconductive property. Dependence of resistance of SFO thin film on oxygen pressure was measured and result showed that the SFO thin film had better oxygen sensitive property. Received: 14 May 1996/Accepted: 15 August 1996     

相变记录介质GaSb薄膜的光学性质、微观结构及其记录性质

本文系统地研究了热致相变对射频磁控溅射的GaSb薄膜光学性质和微观结构的影响.发现在270℃左右具有连续无序网络结构的非晶GaSb薄膜发生相变,转变为具有立方晶系的多晶薄膜,其晶格常数为α_0=0.6095nm,相变后薄膜的吸收减小,GaSb薄膜的光能隙由0.7eV升高为0.94eV.用精密四探针法测量了GaSb薄膜电阻随温度变化的过程.给出了GaSb薄膜的一次写入记录特性,研究了光致晶化记录畴的微结构.     

Influence of Zr(50)Cu(50) thin film metallic glass as buffer layer on the structural and optoelectrical properties of AZO films

Aluminum-doped ZnO(AZO) thin films with thin film metallic glass of Zr(50)Cu(50) as buffer are prepared on glass substrates by the pulsed laser deposition. The influence of buffer thickness and substrate temperature on structural, optical, and electrical properties of AZO thin film are investigated. Increasing the thickness of buffer layer and substrate temperature can both promote the transformation of AZO from amorphous to crystalline structure, while they show(100)and(002) unique preferential orientations, respectively. After inserting Zr(50)Cu(50) layer between the glass substrate and AZO film, the sheet resistance and visible transmittance decrease, but the infrared transmittance increases. With substrate temperature increasing from 25℃ to 520℃, the sheet resistance of AZO(100 nm)/Zr(50)Cu(50)(4 nm) film first increases and then decreases, and the infrared transmittance is improved. The AZO(100 nm)/Zr(50)Cu(50)(4 nm) film deposited at a substrate temperature of 360℃ exhibits a low sheet resistance of 26.7 ?/, high transmittance of 82.1% in the visible light region, 81.6% in near-infrared region, and low surface roughness of 0.85 nm, which are useful properties for their potential applications in tandem solar cell and infrared technology.     

Electrical properties of boron-doped diamond-like carbon thin films deposited by femtosecond pulsed laser ablation

We report on electrical measurements and structural characterization performed on boron-doped diamond-like carbon thin films deposited by femtosecond pulsed laser deposition. The resistance has been measured between 77 and 300 K using four probe technique on platinum contacts for different boron doping. Different behaviours of the resistance versus temperature have been evidenced between pure DLC and boron-doped DLC. The a-C:B thin film resistances exhibit Mott variable range hopping signature with temperature. Potential applications of DLC thin films to highly sensitive resistive thermometry is going to be discussed.     

Non-vacuum, single-step conductive transparent ZnO patterning by ultra-short pulsed laser annealing of solution-deposited nanoparticles

A solution-processable, high-concentration transparent ZnO nanoparticle (NP) solution was successfully synthesized in a new process. A highly transparent ZnO thin film was fabricated by spin coating without vacuum deposition. Subsequent ultra-short-pulsed laser annealing at room temperature was performed to change the film properties without using a blanket high temperature heating process. Although the as-deposited NP thin film was not electrically conductive, laser annealing imparted a large conductivity increase and furthermore enabled selective annealing to write conductive patterns directly on the NP thin film without a photolithographic process. Conductivity enhancement could be obtained by altering the laser annealing parameters. Parametric studies including the sheet resistance and optical transmittance of the annealed ZnO NP thin film were conducted for various laser powers, scanning speeds and background gas conditions. The lowest resistivity from laser-annealed ZnO thin film was about 4.75×10⁻² Ω cm, exhibiting a factor of 10⁵ higher conductivity than the previously reported furnace-annealed ZnO NP film and is even comparable to that of vacuum-deposited, impurity-doped ZnO films within a factor of 10. The process developed in this work was applied to the fabrication of a thin film transistor (TFT) device that showed enhanced performance compared with furnace-annealed devices. A ZnO TFT performance test revealed that by just changing the laser parameters, the solution-deposited ZnO thin film can also perform as a semiconductor, demonstrating that laser annealing offers tunability of ZnO thin film properties for both transparent conductors and semiconductors.     

Formation of photoresist-free patterned ZnO film containing nano-sized Ag by photochemical solution deposition

Direct patterning of ZnO thin film was realized without photoresist and dry etching by photochemical solution deposition. Photosensitive ortho-nitrobenzaldehyde was introduced into the solution precursors as a stabilizer and contributed to form a cross-linked network structure during photochemical reaction. Ag nanoparticles were prepared with uniform size distribution using trisodium citrate as a capping agent to incorporate into ZnO thin film in order to reduce the electrical resistance of the film. The optical and electrical properties of ZnO film with or without Ag nanoparticles after anneal at various temperatures were investigated. The reduction in transmittance with the increase in anneal temperature was observed and also the increase in the electrical resistance was found. The increase in the surface roughness of ZnO film and the decrease of surface oxygen deficiencies were mainly responsible for the decrease in transmittance and the increase in electrical resistance, respectively.     

Activation energy for electrotransport in thin aluminum films by resistance measurements

The activation energy for electrotransport in thin aluminum films was measured by a resistometric technique involving several individual resistance measurements along the stripe. An equation was derived which relates the rate of resistance change to the ion velocity.A thin film thermocouple which is free of any loss of heat was used to monitor the temperature of the stripe. This thermocouple was calibrated by the melting points of pure metals placed on the film.The activation energy for electrotransport in thin aluminum films was found to be temperature dependent and to vary between 0.45 and 0.72 eV in a temperature range between 220 and 360°C.The average ion velocity in the grain boundaries due to electrotransport was found to be around $\text{10}{}^{\mathrm{?7}}\text{cm}\text{sec}$ in agreement with the literature.