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分析了利用掺铁铌酸锂晶体作介质的简并四波混频及其在干涉计量术中应用的原理,描述了被测透明样品的表面各光波及其干涉形成的透射条纹及反射条纹,利用光折变晶体的介电驰豫特性,求得透射条纹和反射条纹的对比度随时间变化的公式及各参数的相互关系。对由透射条纹及反射条纹计算被测透明物体样品折射率和厚度不均匀性的方法作了数学分析,提出一种新型四波混频实时测量透明物体的光学不均匀性的方法和实验光路,对相关参数对测量过程及测量结果的影响作了探讨,得到了平板玻璃样品的干涉条纹图像,计算出实验结果。 相似文献
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<正> 很久以来,对于测量很小的尺寸变化,光学干涉法被认为是一种极为有效的方法。本文对利用双曝光干涉条纹密度测量法测量物体小角度转动的可能性进行了讨论。试验方法所用的光路如图1所示。物体(详见图2)是一个精密的反射镜转动装置,一个已知宽度 相似文献
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为了满足无损检测中复合材料在复杂载荷下多参数变量评估的需求,提出了一种基于光路复用的双功能数字散斑干涉系统,能够同时实现数字散斑干涉和数字剪切散斑干涉测量功能.通过控制其中一个反射镜-波片组合,当该组合离位时,构成数字散斑干涉测量光路,实现离面位移测量;当该组合在位时,构成数字剪切散斑干涉测量光路,实现离面位移空间梯度的测量.测量过程中只需简单切换该组合的位置就可以实现单次加载下被测物体表面离面位移及其空间梯度的同时测量.该系统光路结构简单、切换效率高,能够同时获得高质量的位移及空间梯度测量结果.实验证明,双功能数字散斑干涉系统既具备高抗干扰能力,又具备高灵敏度测试能力,适合复合材料无损检测现场使用. 相似文献
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为实现表面微观形貌快速而较简单的检测, 一种使用非平行光干涉照明的光学显微三维形貌检测方法被提出。该方法使用空间光调制器对激光光束进行衍射, 选取光强相近的2个衍射级通过显微物镜, 双光束干涉可得到周期接近图像分辨率、相位可精确调节的照明条纹, 被测样本的三维形貌可通过拍摄4帧等相位差的条纹照明图像来计算得到。该方法不需借助干涉物镜产生条纹, 不需要轴向扫描装置记录条纹变化, 相位调节精确, 成像直观。此外, 该方法所产生干涉条纹的相位随坐标线性变化, 不需对条纹周期进行修正。因为照明条纹参数调节光路独立于显微成像光路, 系统装置具有光路简洁、易于调节的优点。为验证所提出三维检测精度, 以粗糙度100 nm的粗糙度对比模块和硅片为被测样品进行了三维轮廓重建实验, 实验结果显示, 所提出方法轴向重复性测量精度为8.6 nm(2σ)。 相似文献
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提出了一种用于分析物体三维位移场的全息干涉计量新方法。该方法将一个小平面反射镜贴于被测物体的表面,用三束呈空间分布的发散光波,在干版的三个不同区域或同一部位,记录被测物体的三个独立的双曝光干涉图。这些干涉图被由小平面反射镜运动造成的参考光虚点光源的位移所调制。基于对这种调制的理论分析,导出计算参考光虚点光源和被测物体三维位移的二个线性方程组。 相似文献
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We report a sinusoidal fringe projection system based on superluminiscent diode (SLD) as a broad-band light source in conjunction with an acousto-optic tunable filter (AOTF) as frequency tuning device for three-dimensional shape measurement. The present system is based on a compact low-coherence Michelson interferometer system. The conventional interferometric system was modified in which one side of the beam splitter was coated with aluminum oxide which is used as reference mirror. With this modified version, interference fringes can easily be obtained by simply placing the external mirror in contact on the other side of beam splitter. Sinusoidal fringes with multiple spatial-carrier frequency can be generated in real-time using the present system by means of changing the radio-frequency signal to AOTF electronically without mechanically moving any component in the system. The present system was tested by projecting the sinusoidal fringes on a step-like object and 3D shape of the object was reconstructed using Fourier transform fringe analysis technique. The main advantages of the proposed system are completely non-mechanical scanning, easy to align, high stability because of its nearly common-path geometry and compactness. 相似文献
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为了准确地测量轴锥透镜锥角值,根据无衍射光同心圆环间距不随距离改变的特点和莫尔条纹放大的特性,提出了一种基于无衍射光莫尔条纹的轴锥透镜锥角的测量方法。当无衍射光束经分束器分光合束后形成莫尔条纹,平移其中一束光在图像传感器上的位置,实现莫尔条纹数量的变化,通过记录不同莫尔条纹下的中心距离计算出轴锥透镜锥角。实验以锥角为0.5°的轴锥透镜作为被测对象,与CMM测量结果进行比较,该文提出的方法相对测量误差近似为0.54%,重复性为0.86″,验证了该文方法测量轴锥透镜锥角的可行性。 相似文献
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Shape identification using phase shifting interferometry and liquid-crystal phase modulator 总被引:6,自引:0,他引:6
A phase shifting technique using a Michelson interferometry system is presented and applied to surface contour measurement. Hyperbolic fringes are produced by the interference of two spherical wavefronts expanded from a beam expander. The fringe pattern is projected on an object surface and the deformed grating image is captured by a CCD camera for subsequent analysis by a PC. Phase variation is achieved by a liquid-crystal device incorporated in the Michelson interferometry system. Results obtained using the proposed method for objects of various shapes and sizes compared well with those from a conventional profilometer. 相似文献
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空间频率对透射式全息图衍射率的影响 总被引:1,自引:1,他引:0
为研究干涉条纹空间频率与透射式全息图衍射率的关系,在相同条件下,拍摄以平面波、发散的和会聚的球面波分别作参考光、物光的透射式全息图,通过实验测量其衍射效率,同时计算了干涉条纹的空间频率。然后以会聚的球面波为物光,平面波为参考光,分别改变入射角和球面波会聚点到记录面的距离制作另外4块透射式全息图,并计算了它们的空间频率,测量了其衍射效率。结果表明:在相同条件下制作透射式全息图时,衍射效率只由空间频率决定,与使用何种参考光和物光无关,空间频率仅随参考光和物光的夹角变化而变化。 相似文献
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利用激光全息干涉测量梁的微小位移 总被引:4,自引:3,他引:1
全息干涉测量利用二次曝光记录物体在不同载荷状态下的相对位移场.通过在干板上记录和比较不同状态产生的光波的干涉,可以得到在不同载荷时干涉条纹随物体位移的变化情况,实现对物体微小变形、微小位移量的测量.本文利用激光全息干涉技术测量了金属梁的微小位移量,计算得到金属梁的弹性模量和挠度. 相似文献
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This paper proposed a flexible 3D profilometry based on fringe contrast analysis. A series of sinusoidal fringes are projected on the surface of the testing object that is laid in front of the imaging plane of the fringes, and captured through a beam splitter by a CCD camera in the same direction as the axis of the projection. After the fringe contrast obtained using phase-shifting technique, the height of the object can be restored through searching the look-up table of the contrast and the height. In the measurement process, we only need to capture fringe patterns in one position, without changing the imaging plane of the fringes, so it is faster and more convenient than the existing method based on fringe contrast analysis. Our system is simple and flexible by reason of no special devices used. In this paper, the principle of this method, the setup of the measurement system and primary experiment results are given. The experimental results prove this method can restore the height of the complex object accurately and effectively. 相似文献
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V. P. Ryabukho 《Optics and Spectroscopy》2003,94(3):453-460
The processes of formation of average-intensity interference fringes upon diffraction by a random-phase object of a laser beam having interference fringes and focused on the surface of the object are considered. The dependences of the fringe contrast on the parameters of scattering inhomogeneities of the object and the parameters of the focused laser beam are established in analytical form for various diffraction regimes. Practical possibilities of a method of probing of scattering objects in problems of measuring the parameters of inhomogeneities and problems of interference-pattern formation in optical systems with scattering media are discussed. 相似文献