一种新的非球面零朗奇检测法

提出一种新的零朗奇检测法用于测量大口径非球面镜的面形。利用光线追迹和正弦条纹的相位信息设计补偿正弦光栅。使用透射液晶显示屏显示补偿正弦光栅并作为相移装置。一个离轴点光源发出的光被镜面反射后通过补偿正弦光栅,摄像机记录携带镜面偏差信息的相移条纹图。通过对相移条纹图的分析确定被测镜面的实际横向像差以及对应的理想横向像差,然后基于朗奇检测的几何原理得到被测镜面的偏差梯度,对其积分获得被测镜面的偏差,进而重建被测镜面的三维面形。与传统的零朗奇检测法相比,这种方法可以消除补偿光栅上每个条纹带边缘的锯齿形状,而且可以获得镜面上足够多的待测点信息。计算机模拟和初步实验验证了该方法的可行性。     

一种朗契检验新方法

为了较快、较高准确度地检验大波差的非球面或球面,将一个液晶显示器作为低频光栅和移相装置被用于朗奇检验，在小液晶显示器上由计算机生成光栅图，代替普通光栅和步进电机.消除了因电机移动引起的移相误差，消除了因转动光栅的角度不能正好达到90°而引起的误差.以一个非球面为例，做了移相测试及波面复原.实验表明液晶显示器可作为一个光栅和移相装置.     

阴影检验中的气流排除技术与方法

介绍利用微机图象处理技术消除气流有天文镜面检测中的干扰，提高天文镜面检测质量，达到大幅度缩短天文镜面加工周期的目的。     

朗奇图测量透镜的球差和彗差

<正> 经典的朗奇测试曾广泛地用于光学检验。以往这种技术都作为定性的测量,这主要是因为朗奇图形用解析处理比较困难。现在采用光栅干涉的观点,可以得到象差的测量表示式。对朗奇图上为数很少的几个特征值进行测量,就可以求出球差和彗差的波差值。朗奇体系本     

用双周期光纤光栅实现温度和应变的同时测量

介绍了光纤光栅传感器的一般原理，分析了长周期光纤光栅和Bragg光纤光栅的应变和温度响应机理。结果表明，长周期光纤光栅和Bragg光纤光栅的温度和应变灵敏度不仅与纤芯参数和光栅周期有关，还依赖于包层参数。在同一根光纤上先后写入长周期光纤光栅、Bragg光纤光栅，利用长周期光纤光栅和Bragg光纤光栅基模与包层模耦合时温度和应变灵敏度的不同，实现应变和温度的同时测量。     

长周期光纤光栅折射率传感器的结构优化

为了提高长周期光纤光栅对环境介质折射率的传感灵敏度,提出一种长周期光纤光栅的周期和包层半径的结构优化.基于长周期光纤光栅的耦合模理论,分析了长周期光纤光栅的周期和包层半径的大小分别与环境介质折射率传感灵敏度的关系,讨论了长周期光纤光栅的周期和包层半径对折射率传感的影响以及控制光栅周期与包层半径对折射率传感的重要性.为使...     

分布反馈量子级联激光器光栅反馈特性北大核心CSCD

为探究Bragg光栅结构对TM模反馈特性的影响,利用有限时域差分法对具有TM模的分布反馈(DFB)量子级联激光器Bragg光栅结构进行仿真研究。重点分析了侧向耦合光栅的光学特性以及光栅侧壁倾角对光栅反射谱、损耗的影响及原因,并探究了光栅刻蚀深度及占空比与TM模的耦合系数、损耗的关系。结果表明有效折射率是影响Bragg波长的主要因素,而光限制因子是不同周期的侧向耦合光栅结构耦合系数产生巨大差别的原因,当光栅侧壁倾角90°时镜面损耗最小。光栅周期、占空比、刻蚀深度与耦合系数的关系表明:这些参数不仅影响光栅的相对介电常数,也会对光限制因子产生作用,从而影响耦合系数的大小;耦合系数与刻蚀深度具有正比关系,大周期光栅耦合系数随占空比的变化率较小。对光栅光反馈特性的理论研究有利于提升对DFB量子级联激光器的认识,促进激光器性能的提升和发展。     

快速可调谐电光聚合物波导光栅

提出并设计了快速可调谐电光聚合物波导光栅.该波导光栅通过极化聚合物的线性电光效应 可实现谐振波长的纳秒级快速调谐，调谐灵敏度为61pm/V.研究了该波导光栅的反射谱和透 射谱特性与光栅周期,周期数,折射率调制函数及其调制大小的关系.讨论了波导光栅的材料 选择,制备工艺,快速可调谐性和偏振相关性.该波导光栅不仅克服了光纤光栅调谐速度慢和不利于大规模集成的不足，而且具有调谐灵敏度高,制备工艺与半导体工艺兼容和偏振无关 等优点. 关键词： 光通信器件 光波导 电光效应 聚合物 波导光栅 光纤光栅     

长周期光纤光栅传感器温度和应变灵敏度分析

从耦合模理论出发,分析了长周期光纤光栅的温度和应变灵敏度.结果表明,长周期光纤光栅的温度和应变灵敏度不仅与光栅周期和纤芯参数有关,还强烈依赖于包层参数.通过选择适当的参数,可以制成对温度(或应变)不敏感的应变(或温度)长周期光纤光栅传感器,从而可以解决光纤光栅传感器的温度和应变交叉敏感问题.同时,利用基模与不同包层模耦合时温度和应变灵敏度的不同,可以用一根长周期光纤光栅传感器同时测量温度和应变.     

长周期光纤光栅折射率传感器的结构优化

为了提高长周期光纤光栅对环境介质折射率的传感灵敏度,提出一种长周期光纤光栅的周期和包层半径的结构优化.基于长周期光纤光栅的耦合模理论,分析了长周期光纤光栅的周期和包层半径的大小分别与环境介质折射率传感灵敏度的关系,讨论了长周期光纤光栅的周期和包层半径对折射率传感的影响以及控制光栅周期与包层半径对折射率传感的重要性.为使优化的长周期光纤光栅具有实用性,谐振波长设计在1.55 μm的常规波长范围,经过多次摸拟实验,提出最佳优化参量为：Λ=380 μm,rcl=17 μm,对环境介质折射率从1.26~1.38不同值的实验测试,折射率传感灵敏度达到0.000 12,长周期光纤光栅的结构优化获得理想的预期效果.     

Ronchi线条法检验大非球面镜的理论计算

由光线追迹和三级像差理论计算大抛物面的Ｒｏｎｃｈｉ弯线条。分析这两种理论计算方法的结果和偏差，其偏差值随镜子的口径增大而增加，用所计算的结果制作的Ｒｏｎｃｈｉ弯线条检验可移动式平行光管的φ７００ｍｍ口径的抛物面主镜。给出检验结果。     

Quantitative measurement of large-aperture aspheric surfaces by off-axis Ronchi test

An off-axis Ronchi test based on the phase-shifting technique is presented to measure the aspheric mirror quantitatively. In this paper, slopes of deviations from the mirror's ideal aspheric shape are derived when an off-axis point source is used. By integrating these slopes, the deviations of the shape are obtained and then the tested shape can be reconstructed. Compared with the coaxial Ronchi test, the measurement error caused by combination fringes can be avoided, and this system is more flexible. In the experiment, a marked point is used to guide the phase unwrapping procedure, which improves the accuracy of extracting corresponding phase points. In addition, the method has strong anti-noise ability. The validity of the method has been verified by both computer simulations and a preliminary experiment.     

空间遥感器中大口径SiC主镜的轻量化设计

考虑到反射镜质量、尺寸对载荷敏感度、加工困难程度和总成本的影响,阐述了对空间遥感器大口径主镜进行轻量化设计与优化的必要性。叙述了主镜轻量化技术的一般规律,对几种轻量化方式进行了比较并给出了网格筋大小的确定公式。结合具体工程的主镜设计,针对SiC材料的空间反射镜提出了一种背部半封闭、三角形孔的轻量化形式,用迭代方法完成了轻量化设计,并制作了660 mm轻量化SiC反射镜。提出的设计方式解决了单种轻量化方式存在的不足,使单镜满足了质量小、刚度大的要求,为今后大口径SiC主镜的轻量化技术提供了借鉴和参考。     

Talbot interferometer with computer generated gratings

In a Talbot interferometer the self image of a periodic pattern, such as a Ronchi ruling of period d, illuminated by a monochromatic plane wavefront of wavelength λ, is formed at distances which are integral multiples of 2d²/λ. A refracting object placed in front of the Ronchi ruling distorts the self image. A computer generated pattern can be designed, such that, when placed in a self imaging plane, a uniform intensity or a distinct moire pattern characterising a standard object is obtained. A method of computing the required patterns and experimental results for some aspherical objects are described.     

Ronchigram simulations for free-form concave reflective surfaces

A new algorithm to simulate ronchigrams and bironchigrams for free-form reflective concave surfaces is reported. In order to know the surface saggita and its partial derivatives at any point within mirror domain a bicubic spline interpolation is done over a finite set of points where the free surface is defined. To simulate the ronchigram irradiances we used ruling with cosinusoidal transmittance instead of Ronchi ruling. Several examples of bironchigrams are shown for spherical surface affected by local and/or radial errors; and surfaces used in ophthalmic progressive lenses.     

Hybrid approach for the design of mirror array to produce freeform illumination sources in immersion lithography

Source and mask optimization (SMO) has emerged as a key resolution enhancement technique (RET) for 45 nm technology node and below in lithography. The design method of freeform illumination sources predicted by SMO is significant for the scanner development. We present a hybrid approach combining simultaneous and sequential approaches to optimize the tilt angles of the mirrors to produce multi target freeform illumination sources accurately and quickly. The size of spot reflect by plane mirror can be easily controlled by changing different microlens arrays with appropriate focal length, which reduce the complexity of the system and makes it more flexible to produce the specific freeform sources compared to curving the mirrors used in previous work. The relationship between the tilt angles of plane mirrors and the positions of the spots in the pupil is obtained by chief ray tracing. Using the hybrid approach the freeform illumination sources required by SMO can be designed by merely adjusting the tilt angles of mirrors without changing other parameters of optical elements, which is most effective for both lithography tool manufacture and its applications. The real ray tracing results demonstrate that our design method is capable of creating multi freeform illumination sources with high transmittance, and confirm that the effectiveness of the hybrid approach for optimized design and control of mirror array in immersion lithography system.     

Quantitative measurement of Φ630 mm F/1.34 parabolic surfaces with Ronchi grating test method

The Ronchi grating is applied to measure the large-aperture aspheric surfaces in a quantitative way on the basis of self-made software which includes Ronchi null grating design, collection of Ronchi graph, and data processing. The measured concave parabolic mirror has a diameter of 630 mm and an F number of 1.34. The measurement result is approximately the same as that of the ZYGO interferometer. This analysis software and test method establish a good foundation for the quantitative measurement of the big error about the large-aperture aspheric surfaces of the next generation telescope.     

Aberration analysis of electron mirrors by a differential algebraic method

A differential algebraic (DA) method has been developed for the aberration analysis of electron mirrors. Since large ray slopes occur near the turning points in mirrors, the axial position is no longer suitable as the independent variable and the electron trajectory equation used in conventional lens theory is no longer feasible. A DA solution of the electron motion equation, wherein a single DA ray trace is performed on a non-standard extension of real number space called _nD_v, enables the aberrations of a mirror system to be obtained, in principle up to arbitrary order n, and with very high accuracy, due to the remarkable algebraic properties of _nD_v. With the DA method, the enormous effort to derive explicit formulae for the aberration coefficients of electron mirrors is avoided. A software package MIRROR_DA has been developed for the aberration analysis of electron mirrors, based on the DA method. Two examples of electron mirrors are presented. For the first example, for which the electrostatic and magnetic fields are represented by analytical models, the results computed with MIRROR_DA were shown to be in good agreement with those extracted by direct ray tracing, with relative deviations of less than 0.065% for all the primary aberration coefficients. The second example consists of a real magnetic lens and electrostatic mirror, with numerically computed fields, and from the results of MIRROR_DA, the spherical aberration coefficient C_s3 is almost cancelled out because of the correction effect of the mirror. The MIRROR_DA software is a novel, effective and precise tool for the aberration analysis of electron mirrors, capable of handling realistic and complicated systems of electron lenses and electron mirrors.     

Optimizing X‐ray mirror thermal performance using matched profile cooling

To cover a large photon energy range, the length of an X‐ray mirror is often longer than the beam footprint length for much of the applicable energy range. To limit thermal deformation of such a water‐cooled X‐ray mirror, a technique using side cooling with a cooled length shorter than the beam footprint length is proposed. This cooling length can be optimized by using finite‐element analysis. For the Kirkpatrick–Baez (KB) mirrors at LCLS‐II, the thermal deformation can be reduced by a factor of up to 30, compared with full‐length cooling. Furthermore, a second, alternative technique, based on a similar principle is presented: using a long, single‐length cooling block on each side of the mirror and adding electric heaters between the cooling blocks and the mirror substrate. The electric heaters consist of a number of cells, located along the mirror length. The total effective length of the electric heater can then be adjusted by choosing which cells to energize, using electric power supplies. The residual height error can be minimized to 0.02 nm RMS by using optimal heater parameters (length and power density). Compared with a case without heaters, this residual height error is reduced by a factor of up to 45. The residual height error in the LCLS‐II KB mirrors, due to free‐electron laser beam heat load, can be reduced by a factor of ～11 below the requirement. The proposed techniques are also effective in reducing thermal slope errors and are, therefore, applicable to white beam mirrors in synchrotron radiation beamlines.