横电波激励下亚波长一维金属光栅的异常透射性

针对一维亚波长金属光栅异常透射现象实现的问题,利用时域有限差分法,对横电波（TE波）激励带电介质的亚波长一维金属光栅的光场分布进行了模拟分析,得到了TE波的透射率与电介质折射率的变化关系,从而发现TE波在所研究的模型下具有异常透射现象.基于导模共振理论建立了类导模共振理论,并应用该理论较好地解释了TE波在所研究模型下的异常透射现象,确定类导模共振是TE波产生异常透射性的主要原因.应用所建立的理论解决了传统透射理论无法解决的问题.类导模共振理论揭示了异常透射现象的物理本质,为进一步研究异常透射性的物理本质提 关键词： 金属光栅 横电波 异常透射 类导模共振     

TE激励下金属光栅电荷振荡的异常透射及其表面波分析

 利用时域有限差分法,对TE偏振光（电场平行狭缝方向）激励下,不同结构和参数的带电介质亚波长一维金属光栅的光场分布进行了数值模拟实验。根据金属表面电荷分布理论和表面波理论对此现象进行了物理机理分析,通过分析可以得出在金属狭缝处产生柱面表面波,这种表面波可以突破衍射极限,从而引起异常透射;并且根据Ag的表面电荷分布及其激发机理分析,得到了透射峰位置与介质覆层厚度变化的动态响应以及金属薄膜厚度改变时透射率与波长变化的动态关系,确定了柱面表面波是该异常透射现象产生的一个重要原因。理论分析与模拟实验结果一致,从而为TE偏振光激励下的异常透射机理深入研究和结构参数的选择提供了较好的理论依据。     

Fabry-Perot腔谐振对横电波激励下亚波长一维金属光栅的异常透射性的作用

利用时域有限差分法,对横电波(TE波)激励带电介质的亚波长一维金属光栅的光场分布进行了模拟分析,发现TE波在所研究的模型下具有异常透射现象.探究其物理本质,确定类导模共振理论是第一个峰和第二个峰产生的主要原因.在此基础上,从麦克斯韦方程出发,通过有效折射率法,确定了类Fabry-Perot(F-P)腔谐振是产生第三个峰的主要原因.从而完善了TE波在所研究的模型下产生异常透射现象的物理本质.为进一步研究TE波异常透射性的物理本质提供了一种完整的理论依据. 关键词： 金属光栅 横电波 异常透射 类Fabry-Perot腔谐振     

深紫外双层金属光栅偏振器的设计与分析

193 nm波长浸没式步进扫描投影光刻机是实现45 nm及以下技术节点集成电路制造的核心装备.增大数值孔径是提高光刻分辨率的有效途径,而大数值孔径曝光系统的偏振性能严重影响光刻成像质量.光刻机曝光系统偏振参数的高精度检测是对其进行有效调控的前提.基于光栅的偏振检测技术能实现浸没式光刻机偏振检测装置的小型化,满足其快速、高精度在线检测的需求,该技术中的关键部件是结构紧凑且偏振性能良好的光栅.本文基于反常偏振效应和双层金属光栅对TE偏振光的透射增强原理,采用严格耦合波理论和有限时域差分方法,设计了一种双层金属光栅偏振器.计算了该偏振器的初始结构参数,并通过数值仿真得到了其偏振性能关于各光栅参数的变化关系.仿真结果表明,中间层高度是影响TE偏振光透射增强的主要因素;垂直入射时TE偏振光的透过率可达到56.8%,消光比高达65.6 dB.与现有同波段金属光栅偏振器相比,所设计的光栅偏振器在保证高透过率的同时,消光比提升了四个数量级.     

带有高折射率介质层的金属光栅偏振器特性的研究

研究了一种亚波长金属光栅偏振器在可见光波段的透射与消光特性。与传统亚波长光栅偏振器不同的是,通过在基底和光栅之间增加一层高折射率介质薄膜,提高了TM偏振光透射率和消光比。利用严格耦合波分析法(RCWA),模拟了高折射率介质层厚度、光栅占宽比对透射率和消光比的影响。计算结果表明,在整个可见光波段,合适的介质层厚度可使透射更加均匀并且当入射角在0～60°变化时,TM偏振光的透射率和消光比仍可分别达到79%和50 dB。这种带有高折射率介质层的亚波长金属光栅偏振器结构紧凑,性能优良,特别适合作为液晶平板显示中的偏振分光器件。     

一维增透亚波长光栅的研究

将具有高透射性的亚波长光栅置于微机械波长可调谐垂直腔面发射激光器(VCSEL)的内腔当中可以提高波长的调谐范围,为了使波长调谐范围达到最优则必须优化高透射性的亚波长光栅使其透射率达到最大。利用严格耦合波法分析了亚波长光栅的占空比、周期、厚度和入射角对其透射率的影响并找出最优的光栅参数。通过计算分析可得,对于TE和TM偏振存在最佳的占空比使其透射率达到99.5%。在文中条件下,它们对应的占空比分别为0.23和0.80。而光栅厚度对于TE和TM偏振透射率的影响是周期性的,在一个周期内存在一个最佳值使其透射率达到最高。在文中条件下,TE偏振的厚度周期是150 nm,TM偏振的厚度周期是300 nm。当光栅参数不变时,无论是TE还是TM偏振光,它们的透射率只有在垂直入射光栅时(入射角为0°)才能达到最大。而通过等效介质原理可以得出,周期对透射率没有影响。最后计算了透射率在光栅厚度和占空比同时变化时的变化趋势,并从中得出最优的光栅参数。     

一种基于介质光栅金属薄膜复合结构的折射率传感器

设计了一种基于介质光栅金属薄膜复合结构的折射率传感器。利用He-Ne激光器输出的632.8nm横磁偏振光激发复合结构中的表面等离子体,得到了高灵敏度的折射率传感器。运用有限元方法,数值模拟了具有不同光栅厚度、周期以及折射率的分析物的反射光谱。对占空比为0.5、金属薄膜厚度为45nm的复合结构进行了参数优化,得到最优参数为:光栅厚度100nm、光栅周期500nm。在最优参数条件下,计算了金属薄膜与具有不同折射率的分析物之间的界面共振角的变化,得到了高达500(°)/RIU的角灵敏度。该折射率传感器操作简单、成本低、角灵敏度高,具有很好的应用前景。     

亚波长金属波导的光传播和干涉特性研究

利用时域有限差分方法研究了亚波长金属波导TE波的传播特性和基于异常透射现象的干涉特性.对各种参量对驻波特性的影响及两列波导间的耦合特性进行了分析.研究发现,TE波在波导中传播时存在截止宽度,如果波导宽度小于截止宽度,TE波在波导中不能传播;如果波导宽度大于截止宽度,TE波的传播距离将随波导宽度变大而突然增加.当波导宽度达到或大于半波长时,TE波可以在波导中正常传播.金属波导的截止宽度与金属的吸收系数成正比.此外,由于光在亚波长金属波导透射时的异常透射现象,在亚波长金属波导中产生了TE波的干涉现象,能形成驻波.     

亚波长金属波导的光传播和干涉特性研究

利用时域有限差分方法研究了亚波长金属波导TE波的传播特性和基于异常透射现象的干涉特性.对各种参量对驻波特性的影响及两列波导间的耦合特性进行了分析.研究发现,TE波在波导中传播时存在截止宽度,如果波导宽度小于截止宽度,TE波在波导中不能传播;如果波导宽度大于截止宽度,TE波的传播距离将随波导宽度变大而突然增加.当波导宽度达到或大于半波长时,TE波可以在波导中正常传播.金属波导的截止宽度与金属的吸收系数成正比.此外,由于光在亚波长金属波导透射时的异常透射现象,在亚波长金属波导中产生了TE波的干涉现象,能形成驻波.     

一维金属光栅的透射光学特性

利用时域有限差分法模拟了一维金属光栅的透射光场的分布及光栅厚度等因素对透射光谱的影响.结果表明:特定波长的光通过金属光栅中的亚波长狭缝时有异常大的透过率增强.分析其物理起源,认为是类FabryPerot(FP)腔作用的结果.基底介电常量对类FP腔长度的调制导致了对透射光谱的影响.金属光栅表面激发的表面等离子体激元波与多缝干涉一样,对透射光谱有一定的影响,但不是形成增强的原因 关键词： 金属光栅 透射光学特性     

Extraordinary Transmission through Metallic Grating with Subwavelength Slits for S-Polarization Illumination

Based on the rigorous coupled-wave analysis algorithm, we have systematically analysed the effect of the geometrical parameters of a dielectric film coated metallic grating with subwavelength slits on extraordinary optical transmission for s-polarization illumination. Results show that the dielectric film which sustains a waveguide electromagnetic mode on the top of the metallic lamellar grating can strongly enhance the transmittance, the positions of the transmission peaks are mainly determined by the period of the metallic grating, the thickness and refractive index of the dielectric film. This structure shows potential applications in excellent polarizers or polarization-isotropic devices at infrared spectral range by appropriately choosing the geometrical parameters.     

The optical transmission characteristics through gold nanoslit arrays embedded in nonlinear medium

We present the numerical investigation of the optical transmission through a periodic gold nanoslit array embedded in the Kerr type nonlinear medium by using a developed two-dimensional Finite Different Time Domain (FDTD) method. The enhanced transmission in the nonlinear structure is attributed to the collaboration of the surface plasmon resonance and the localized waveguide resonance. We show that, in a certain intensity range, with the increase of the incident intensity, the transmission resonance peaks redshift obviously, and peak values decrease firstly and then increase; with the gold film thickness and the embedded depth becoming larger, transmission resonance peaks of both types redshift significantly, and the peak number, peak value and the half peak width change obviously. The electric fields distributions for different embedded depths of the gold slits at various resonance wavelengths are simulated to illuminate the underlying physical mechanisms. It is expected that these results obtained here will help to design nonlinear subwavelength metallic grating devices.     

表面覆膜波导光栅共振光谱特性及传感机理分析

基于波导光栅共振原理和古斯-汉欣(Goos-Hänchen)位移理论，提出一种表面覆膜波导光栅传感结构，并研究其共振光谱特性。通过在光栅表面涂覆低折射率聚合物功能膜层优化其共振光谱特性，选用多孔硅作为待测物承载单元，可以使光学探针更充分地接触待测样本，从而提高其检测性能。根据波导光栅共振相位条件，建立了共振波长和样本折射率之间的数学模型，通过检测共振位置的改变进而对样本浓度进行检测。研究表明，该表面覆膜波导光栅传感结构具有线型对称和窄线宽的共振光谱特性，可实现高品质因数(Q值)和高灵敏度的传感特性，其Q值为1 488，对折射率的检测极限可达5×10-4 RIU(RIU为折射率单位)。通过检测不同浓度的葡萄糖溶液对其传感特性进行验证分析，结果表明，共振波长与葡萄糖溶液浓度之间具有良好的线性关系，对葡萄糖溶液的检测灵敏度为1.12nm/1%，证明了该表面覆膜波导光栅传感结构的有效性，可以用于对低浓度样本溶液的实时动态监测，并为波长调制型光学折射率传感器的研究提供理论指导。     

Influence of slit width on the electromagnetic transmission of a periodic metallic grating

The light transmittance of a periodic metallic grating with varied slit widths has been investigated. The transmission peaks move to the shorter wavelength direction with an increase in the width of slits while keeping the other parameters unchanged. It was demonstrated that the slit width affects the spectral transmittance of the metal grating significantly. It was also found that the effective refractive index and cavity modes in slits are responsible for this phenomenon. Cavity modes play an important role in extraordinary transmission of the sub-wavelength aperture grating. When a complete resonant mode forms in the slits, a high transmission will appear. A wider slit results in a smaller efficient refractive index and thus affects the cavity mode in the slits. These two elements cause the transmission peaks to move to the shorter wavelength direction with widening of slits. The results obtained here may provide a useful guide to design metallic slit grating devices.     

Microwave transmission of a compound metal grating

An array of subwavelength slits in a metallic substrate supports a series of Fabry-Perot-like resonances, where each harmonic results in a transmission peak. Addition of extra slits per period yields a compound grating with a structure factor associated with the basis. In this study each repeat period is comprised of a central slit flanked by a pair of narrower slits. It supports three resonances for every Fabry-Perot-like solution. New and useful insight into this phenomenon is gained by describing each of the modes in terms of the band structure of diffractively coupled surface waves.     

TE0导模干涉刻写周期可调亚波长光栅理论研究

通过棱镜耦合激发非对称金属包覆介质波导结构中的TE₀导波模式, 利用两束TE₀模的干涉从理论上实现了周期可调的亚波长光栅刻写. 分析了TE₀模式的色散关系, 刻写亚波长光栅的周期与激发光源、棱镜折射率、光刻胶薄膜厚度及折射率之间的关系. 用有限元方法数值模拟了金属薄膜、光刻胶薄膜和空气多层结构中TE₀导模的干涉场分布. 研究发现, 激发光源波长越短, TE₀ 模干涉刻写的亚波长光栅周期越小; 光刻胶越厚, 刻写的亚波长光栅周期越小; 高折射率光刻胶有利于更小周期亚波长光栅的刻写. 相较于表面等离子体干涉光刻, 基于TE₀ 模的干涉可在厚光刻胶条件下通过改变激发光源、棱镜折射率、光刻胶材料折射率、特别是光刻胶薄膜的厚度等多种方式实现对亚波长光栅周期的有效调控.     

Waveguide resonance of subwavelength metallic slits

The transmission characteristics of a metallic film with subwavelength periodic slits are investigated by using the two-dimensional finite-difference time-domain method （2D-FDTD）. Two models are constructed to show the dependance of the transmission spectrum on the slit structure. A sandwiched structure is used to exhibit the contribution of the metallic wall inside slits to the extraordinary high transmission. And a filled slit structure is employed to reflect the relation between the average refractive index inside the slits and the transmission spectrum of the structure. The transmission characteristics of two structures can be explained well with the waveguide resonance theory.     

Negative role of surface plasmons in the transmission of metallic gratings with very narrow slits

It is generally admitted that the extraordinary transmission of metallic grating with very narrow slits is mainly due to the excitation of surface plasmons on the upper and lower interfaces of the grating. We show that the surface plasmon contribution is not the prime effect and that waveguide mode resonance and diffraction are responsible for the extraordinary transmission. Additionally and surprisingly, we reveal that the transmittance of subwavelength metallic gratings is always nearly zero for frequencies corresponding to surface plasmon excitation. This finding implies that surface plasmons play a negative role in the transmission.     

Anomalous transmission of terahertz wave through one-dimensional lamellar metallic grating

The anomalous transmission through one-dimensional lamellar metallic gratings was investigated in terahertz (THz) regime. The extraordinary optical transmission (EOT) is identified to originate from two possible ways: coupling of incident light with waveguide resonances and coupling of surface plasmon polaritons (SPPs) at the upper and lower interfaces of metal grating. The dual effects of SPPs have been clarified in this study: (i) the excitation of SPP modes at each individual interface results in the weakness of the THz wave transmission; and (ii) the coupling of SPP modes at two interfaces of metal grating is attributed to enhancement of THz wave transmission. The enhanced transmission is dominated by the coupling of incident light with transverse waveguide resonances. Numerical simulation based on finite-difference time-domain (FDTD) agrees well with experimental results.