介质光栅导模共振耦合波分析

导模共振是由于光栅介质内高级次子波耦合进光栅所支持的泄漏模中,导致传播波能量重新分布的结果.采用严格的耦合波方法,通过分析波导的导波模式,正确估计出弱调制介质光栅导模共振的位置.并对导模共振与光栅厚度、基底厚度以及入射角的关系作了讨论.通过采用抗反射设计,获得了具有对称、低旁带特点的窄带共振峰 关键词： 导模共振 耦合波     

反射型导模共振滤波器设计

导模共振滤波器由于其高峰值反射率,低旁带反射,窄带以及带宽可控等优良特性引起了人们极大的关注,采用亚波长光栅的导模共振效应可以实现传统基于高低折射率介质的多层膜滤波器所无法实现的特殊功能,在弱调制模式下,其共振带宽可以被压缩到零点几纳米,但是由于介质表面和空气层的菲涅耳反射,使得偏离或者远离共振区时的反射率偏高,根据等效介质理论,亚波长光栅在远离共振区可以被看为均匀的薄膜,本文通过对导模共振光栅进行单层、双层以及三层抗反射设计,有效的降低了导模共振光栅的旁带反射率,从而在可见光波段获得了性能优良的共振滤波 关键词： 导模共振 平面波导 傅里叶模式理论 窄带滤波     

反射型导模共振滤波器设计

导模共振滤波器由于其高峰值反射率，低旁带反射，窄带以及带宽可控等优良特性引起了人们极大的关注，采用亚波长光栅的导模共振效应可以实现传统基于高低折射率介质的多层膜滤波器所无法实现的特殊功能，在弱调制模式下，其共振带宽可以被压缩到零点几纳米，但是由于介质表面和空气层的菲涅耳反射，使得偏离或者远离共振区时的反射率偏高，根据等效介质理论，亚波长光栅在远离共振区可以被看为均匀的薄膜，本文通过对导模共振光栅进行单层、双层以及三层抗反射设计，有效的降低了导模共振光栅的旁带反射率，从而在可见光波段获得了性能优良的共振滤波     

基于导模共振效应三基色窄带滤光片的研究

为获得性能优良的三基色窄带滤光片,提出了一种基于减反射薄膜波导光栅结构的导模共振滤光片.该滤光片由亚波长光栅结构、波导层和基底组成.采用严格耦合波理论分析了亚波长光栅结构和波导层厚度对导模共振滤光片反射光谱性能的影响.数值分析表明λ/4-λ/2-λ/4结构能有效提高导模共振滤光片的性能.当光栅结构位于基底侧时,红绿蓝三...     

带缓冲层的导模共振滤光片反射光谱特性

将均质多层膜系设计中的缓冲层概念引入到反射导模共振滤光片的设计中,以研究缓冲层的增加对导模共振滤光片反射光谱特性的影响.设计并通过严格的耦合波理论计算了一、二、三、四通道导模共振反射滤光片光谱特性.在膜系设计中增加缓冲层后.随着其厚度的逐渐增加.反射光谱中依次出现二、三、四个窄带反射峰;缓冲层厚度为796.35 nm时.当滤光片光栅层占空比在0.2～O.9范围内、光栅深度在100～200 nm变化时,共振峰的位置、反射率峰值高度几乎不变,保持了很好的多通道滤光片特性.     

横电波激励下亚波长一维金属光栅的异常透射性

针对一维亚波长金属光栅异常透射现象实现的问题,利用时域有限差分法,对横电波（TE波）激励带电介质的亚波长一维金属光栅的光场分布进行了模拟分析,得到了TE波的透射率与电介质折射率的变化关系,从而发现TE波在所研究的模型下具有异常透射现象.基于导模共振理论建立了类导模共振理论,并应用该理论较好地解释了TE波在所研究模型下的异常透射现象,确定类导模共振是TE波产生异常透射性的主要原因.应用所建立的理论解决了传统透射理论无法解决的问题.类导模共振理论揭示了异常透射现象的物理本质,为进一步研究异常透射性的物理本质提 关键词： 金属光栅 横电波 异常透射 类导模共振     

基于级联复合光栅的窄带平顶型滤波器设计

导模共振光栅作为一种重要的滤波单元,在光通信中有着广泛的应用.然而,普通的导模共振光栅的传输光谱为洛伦兹型,该类结构在高性能光纤通信系统中的应用受到限制.采用级联导模共振光栅可以实现平顶滤波响应,但是整个器件的体积较大,制作工艺复杂.此外,单一复合光栅结构难以直接实现窄带平顶滤波响应.提出了一种级联双层复合光栅结构以解决这一问题,利用严格耦合波算法和本征模式分析法分析了其输出光谱.仿真结果表明该滤波器的中心波长为1549.9 nm,其平顶光谱的线宽为0.5nm.     

周期介质膜压缩光栅中的导模共振效应

 使用耦合波法以及特征矩阵法计算了周期膜堆结构以及介质压缩光栅的本征值，研究了介质型压缩光栅产生导模共振现象的条件，并计算了导模共振点附近光栅的衍射效率曲线。针对导模共振效应对光栅应用的影响，提出了一种避开该效应的方法。计算结果表明：当介质折射率呈周期变化时，取光栅周期为0.667 μm，深度为0.6 μm时，可以避开导模共振效应。     

反射型光变色超表面滤光结构

提出了一种反射型超表面滤光结构,该滤光结构由基底、低折射率纳米光栅、Ag光栅、SiNx高折射率介质层组成.理论模拟结果表明:45°入射角下,在垂直于光栅栅线的入射平面内,反射谱峰值出现在475 nm波长处;在平行于光栅栅线的入射平面内,反射谱峰值出现在550 nm波长处.其电场分布特性表明,在不同的平面内TE偏振入射光激发的导模共振区域不同,TM偏振下激发的导膜共振强度与表面等离子体共振强度不同,导致该结构在垂直于光栅栅线方向与平行于光栅栅线方向的两个平面内表现出两种截然不同的颜色.基于此制备的超表面结构样品不但光变色效果明显,且易于与纳米压印工艺相结合实现大幅面光变色结构制备,在防伪和图案信息编码等领域有广阔的应用前景.     

缓冲层对导模共振滤光片反射光谱截止特性的影响

提出将均质多层膜系设计中的缓冲层概念71入到反射导模共振(GMR)滤光片的设计中,通过严格的耦合波理论精确计算,研究了加入缓冲层对改善导模共振滤光片反射峰边带截止深度及截止宽度的作用.双层导模共振滤光片结构中,入射光为TE偏振光时,设计增加97.5 nm缓冲层后,能够明显地展宽反射光谱范围.由原来的192.4 nm展宽到345.6 nm,并且在650～1250 nm波长范围内的边带截止度均比不含缓冲层结构的要深.入射光为TM偏振光,以类似TE结构的滤光片在布儒斯特角入射时,在700~1300 nm波长范围内,较不含缓冲层的结构,也能够获得更宽的截止带反射光谱和更深的截止度.在提出的膜系结构中,经过优化膜系、选择合适的光栅参数等,可以使反射光谱具有更好的截止特性,同时保证设计的共振峰位置不变.     

Study on guided-mode resonance characteristic of multilayer dielectric grating with broadband and wide using-angle

Guided-mode resonance in a diffraction band of multilayer dielectric gratings may lead to a catastrophic result in laser system, especially in the ultrashort pulse laser system, so the inhibition of guided-mode resonance is very important. In this paper the characteristics of guided-mode resonance in multilayer dielectric grating are studied with the aim of better understanding the physical process of guided-mode resonance and designing a broadband multilayer dielectric grating with no guided-mode resonance. By employing waveguide theory, all guided-wave modes appearing in multilayer dielectric grating are found, and the incident conditions, separately, corresponding to each guided-wave mode are also obtained. The electric field enhancement in multilayer dielectric grating is shown obviously. Furthermore, from the detailed analyses on the guided-mode resonance conditions, it is found that the reduction of grating period would effectively avoid the appearing of guided-mode resonance. And the expressions for calculating maximum periods, which ensure that no guided-mode resonance occurs in the requiring broad angle or wavelength range, are first reported. The above results calculated by waveguide theory and Fourier mode method are compared wit each other, and they are coincident completely. Moreover, the method that relies on waveguide theory is more helpful for understanding the guided-mode resonance excited process and analyzing how each parameter affects the characteristic of guided-mode resonance. Therefore, the effects of multilayer dielectric grating parameters, such as period, fill factor, thickness of grating layer, {\it et al.}, on the guided-mode resonance characteristic are discussed in detail based on waveguide theory, and some meaningful results are obtained.     

基于导模共振的窄带可调谐滤波器

提出了一种分离的导模共振滤波器.该结构由光栅层和两个被空气薄层隔开的平板介质波导组成.使用时域有限差分法分析了该光栅结构在不同的结构参数下的光谱特性.研究表明,当TM偏振入射时改变空气薄层的厚度可以实现共振波长的可调谐,并且共振波长几乎随着空气薄层厚度线性变化.浅调制光栅被用于实现窄线宽特性.波长可调谐范围为1 515~1 558nm,半高全宽小于0.6nm.     

Polarization-Independent Guided-Mode Resonance Filters under Oblique Incidence

We present the dispersion relation of guided-mode resonances in planar periodic waveguides, both for s-polarized （TF, mode） and p-polarized （TM mode） incident waves. For a fixed homogeneous planar waveguide, dispersion curves of the TE eigenmode cannot cross that of the TM eigenmode at all. That is to say, at a certain wavelength, TE and TM modes cannot be excited with the same propagation constant. Due to Bragg reflection in the planar periodic waveguide, dispersion curves of the TE leaky mode may intersect with that of the TM leaky mode in the first Brillouin zone. We employ these intersections to achieve polarization-independent guided-mode resonance filters.     

Guided-mode resonance Brewster filter

A new type of optical filter is predicted theoretically and verified experimentally. The filter operates under guided-mode resonance conditions in a thin-film waveguide grating. A high-efficiency reflection filter response is produced at the Brewster angle at which TM reflection is classically prohibited. Low-reflectance sidebands are obtained that are adjacent to the resonance peak induced by the Brewster effect in the neighborhood of the resonance peak. A double-layer waveguide grating yields 94% experimental reflectance at the thin-film Brewster angle for a Gaussian laser beam with TM polarization at the 1064-nm wavelength.     

Design of guided-mode resonance filters with an antireflective surface at oblique incidence

A design approach of guided-mode resonance filter (GMRF) with an antireflective surface at oblique incidence is presented. For a given incident angle or grating filling factor, the required grating filling factor or incident angle can be expressed by the analytical forms of the quadratic equations at quarter-wavelength thickness. Long-range, low sidebands are obtainable for a single-layer GMRF under the TM mode wave illumination at oblique incidence. The reflection properties such as the symmetry of the lineshape and the sideband level in the logarithm scale can be further improved by slightly varying both the grating period and the grating thickness. Magnetic field enhancement occurs in these structures due to the coupling between the evanescent diffracted order and the waveguide mode.     

Analysis of restriction factors of widening diffraction bandwidth of multilayer dielectric grating

In order to design a multilayer dielectric grating with wide-bandwidth diffraction spectrum, the restriction factors of both the reflection bandwidth of multilayer dielectric high-reflectivity mirror and the guided-mode resonance phenomenon are studied in detail. The reflection characteristics of high-reflectivity mirror in zeroth and 1st transmitted diffraction orders are quantitatively evaluated. It is found that the reflection bandwidth of high-reflectivity mirror in 1st transmitted diffraction order, which determines the final diffraction bandwidth of multilayer dielectric grating, is evidently compressed. Furthermore, it is demonstrated that the reducing of grating period is an effective approach to the elimination of guided mode resonance over a required broad band range both spectrally and angularly. In addition, the expressions for calculating the maximum period ensuring no guided mode resonance in the required bandwidth are derived. Finally, two high-efficiency pulse-compression gratings with broad-band are presented.     

Design of single-material guided-mode resonance filter

In this letter, a guided-mode resonance （GMR） filter with the same material for both the grating layer and the waveguide layer is designed, and its optical properties are investigated. The GMR filter owns almost 100% reflection at the resonance wavelength of 800 nm with the full-width at half-maximum （FWHM） of 20 nm, and its sideband reflection from 700 to 1000 nm is less than 5%. As the resonance wavelength is influenced by more than one parameter during the fabrication process, GMR filter with the same resonance wavelength can be obtained by adjusting other parameters or even one parameter to deviate from the design value.     

Design of internal Brewster guided-mode resonance filter

An internal Brewster guided-mode resonance （GMR） filter is designed. For this kind of GMR filter, the Brewster reflection occurs at the interface of grating/waveguide layers rather than at the interface of air/grating layers. At Brewster angle of 60~, the GMR filter owns almost 100% reflection at the resonance wavelength of 800 nm with the full-width at half-maximum （FWHM） of 0.2 nm. Its angle response changing with the fabrication deviation is also discussed.     

A method to accurately control the period of subwavelength planar holographic grating in the fabrication process of guided mode resonance filter

Subwavelength optical element such as guided-mode resonance filter has gained much interest recently due to its properties and applications. It is very hard to fabricate an ideal guided-mode resonance filter with the same parameters as the designed one. The reason is that the resonance wavelength of guided-mode resonance filter is susceptible to the fabrication errors of its parameters, such as the period, the groove depth, the thickness of a guided-wave layer, and the refraction indexes of materials, etc. In this article, a method to accurately control the period of subwavelength planar holographic grating which was used as a sub-layer of the guided mode resonance filter is investigated. Results show that utilizing a convex lens placed in the exposure position can cause the adjusting of the period of subwavelength planar grating more convenient in the holographic optical path during the fabrication process. Accuracy controlling the period of grating which was used as the sub-layer of guided-mode resonance filter has great significance in the fabrication of guided-mode resonance filter.     

Authentication labels based on guided-mode resonant filters

A guided-mode resonance (GMR) filter with wide angular tolerances is experimentally demonstrated as an authentication label illuminated with unpolarized white light. The proposed filter, based on a free-standing silicon nitride membrane suspended on a silicon substrate, is fabricated by using anisotropic wet etching to remove the substrate beneath the silicon nitride layer. Both grating and waveguide structures without a lower cladding layer, i.e., a substrate, are fabricated simultaneously on a silicon nitride membrane. Since the silicon nitride is transparent within the spectra of visible and infrared light, such suspended-membrane-type GMR filters are well suited for applications within the visible spectrum. Moreover, the high refractive index of silicon nitride allows the proposed filters to have strongly modulated gratings and an immunity to high angular deviation. The measured reflection resonance has an angular tolerance up to +/-5 degrees under normal incidence for the wavelength of 629.5 nm.