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1.
佘清  江美福  钱侬  潘越 《物理学报》2014,63(18):185204-185204
以316L不锈钢为基底,SiC晶体为靶材,Ar为源气体,采用磁控溅射法在不同温度下制备出系列SiC过渡层.然后以高纯石墨作靶,Ar和CHF_3为源气体,在同一工艺条件下再续镀一层氟化类金刚石(F-DLC)薄膜,形成SiC/F-DLC复合薄膜.研究表明,相比于F-DLC薄膜,复合薄膜的附着力显著增加,血液相容性明显改善.通过样品的拉曼和红外光谱分析了不同温度下制备的SiC过渡层以及复合薄膜结构的演变.结果表明,控制SiC过渡层制备温度可以有效调制过渡层中C=C键的比例以及—C—C—不饱和键的密度,复合薄膜中保留较高比例的芳香环式结构以及合适的F/C比是薄膜的血液相容性得以进一步改善的原因,SiC过渡层制备温度控制在500℃左右效果尤为明显.SiC薄膜和F-DLC两种薄膜的界面处形成一定比例的Si—C键和C=C键是导致复合薄膜附着力显著上升的直接原因.适当条件下在316L不锈钢和F-DLC薄膜之间增加SiC过渡层对于增强薄膜的附着力、改善其血液相容性是可行、有效的.  相似文献   

2.
高鹏  徐军  邓新绿  王德和  董闯 《物理学报》2005,54(7):3241-3246
利用微波ECR全方位离子注入技术,在单晶硅(100)衬底上制备类金刚石薄膜.分析结果表明,所制备的类金刚石碳膜具有典型的类金刚石结构特征,薄膜均匀、致密,表面粗糙度小,摩擦系数小.其中,薄膜的结构和性能与氢流量比关系密切,随氢流量比的增加,薄膜的沉积速率减小,表面粗糙度降低,且生成sp3键更加趋向于金刚石结构,表面能 更低,从而使摩擦系数大幅降低. 关键词: 全方位离子注入 类金刚石碳膜 拉曼光谱 摩擦磨损  相似文献   

3.
戴永丰  江美福  杨亦赏  周杨 《物理学报》2011,60(11):118101-118101
用316L不锈钢(SU316L)作基片,以高纯石墨作靶、CHF3和Ar作源气体,采用反应磁控溅射法在不同流量比R (CHF3/Ar)下制备了氟化类金刚石(F-DLC)薄膜. 利用双蒸水液滴法、BCA(二喹啉甲酸)法和傅里叶红外光谱(FTIR)探讨了影响薄膜蛋白吸附能力的因素. 结果表明,镀有F-DLC薄膜的SU316L表面的血小板黏附量明显减少,血小板的变形程度显著减轻,相应的白蛋白与纤维蛋白原的吸附比普遍高于未镀膜的SU316L表面的相应值,说明镀上F-DLC薄膜可以改善样品的血液相容性. 流量比为2 ∶1左右时制备出的F-DLC薄膜,其白蛋白与纤维蛋白原的吸附比值达到最大,相应的血液相容性最佳. 对薄膜的接触角和表面能以及FTIR光谱分析研究表明,SU316L表面的F-DLC薄膜的白蛋白与纤维蛋白原的吸附比及血液相容性与薄膜的中的-CFx键的含量(F/C比)和表面能(疏水性)直接相关,控制源气体流量比可以实现对薄膜的血液相容性的调制. 关键词: 反应磁控溅射 氟化类金刚石薄膜 蛋白吸附  相似文献   

4.
以高纯石墨作靶、氩气(Ar)和三氟甲烷(CHF3)为源气体,用反应磁控溅射法在不同射频功率下制备了氟化类金刚石碳(F-DLC)膜,并对其疏水性进行研究.双蒸水液滴与膜表面接触角的测试结果表明,所制备薄膜表面的最大水接触角可达115°左右.通过原子力显微镜获得的薄膜表面AFM图谱、拉曼光谱以及傅里叶变换红外光谱探讨了影响薄膜的疏水性的因素.结果表明,薄膜的疏水性与薄膜的表面粗糙度和表面键结构直接相关,表面粗糙度越大,疏水性越好,但与薄膜中的F含量和sp3/sp2的比值并未呈单调增加或减小的对应关系.射频输入功率影响着薄膜的沉积速率,与薄膜表面粗糙度、薄膜中芳香环单核的比例以及薄膜表面的键结构(F的接入方式)直接相关. 关键词: 疏水性 反应磁控溅射 氟化类金刚石膜 射频功率  相似文献   

5.
非平衡磁控溅射制备类石墨碳膜及性能研究   总被引:1,自引:0,他引:1       下载免费PDF全文
利用中频非平衡磁控溅射技术在单晶硅基底上沉积了类石墨碳膜, 采用Raman光谱、高分辨透射电子显微镜、原子力显微镜分析了薄膜微观结构和表面形貌; 采用纳米压痕仪和CSM摩擦磨损试验机测试了碳膜力学性能和摩擦学性能. 结果表明: 利用中频非平衡磁控溅射技术沉积的碳膜是一种以sp2键合碳为主、结构非晶、硬度适中、应力较低、表面粗糙度较大、摩擦性能优异的薄膜. 脉冲占空比对薄膜微观结构和性能有显著影响, 随着脉冲占空比的增大, Raman光谱D峰和G峰的强度比ID/IG先减小后增大, 而硬度随脉冲占空比的增大却呈现出相反的变化趋势, 即先增大后减小; 大气氛围中的摩擦性能测试表明, 本实验制备的薄膜具有优异的抗磨性能(~10-11 cm3/N-1. m-1)和承载能力(~2.5 GPa). 随脉冲占空比的增大, 薄膜摩擦系数变化甚微而磨损率却呈现先显著减小后轻微增大的变化趋势. 类石墨碳膜优异的摩擦学性能主要归因于其独特的结构、较低的内应力及良好的结构稳定性.  相似文献   

6.
射频功率对类金刚石薄膜结构和性能的影响   总被引:1,自引:0,他引:1       下载免费PDF全文
利用直流-射频-等离子体增强化学气相沉积技术在单晶硅表面制备了类金刚石薄膜,采用原子力显微镜、Raman光谱、x射线光电子能谱、红外光谱和纳米压痕仪考察了射频功率对类金刚石薄膜表面形貌、微观结构、硬度和弹性模量的影响.结果表明,制备的薄膜具有典型的含H类金刚石结构特征,薄膜致密均匀,表面粗糙度很小.随着射频功率的升高,薄膜中成键H的含量逐渐降低,而薄膜的sp33含量、硬度以及弹性模量先升高, 后降低,并在射频功率为100W时达到最大. 关键词: 等离子增强化学气相沉积 类金刚石薄膜 射频功率 结构和性  相似文献   

7.
韩亮  宁涛  刘德连  何亮 《物理学报》2012,61(17):176801-176801
利用磁过滤真空阴极电弧技术制备了sp3键大于80%的四面体非晶碳(ta-C)薄膜, 通过冷阴极离子源产生keV能量的氩离子轰击ta-C薄膜,研究了氩离子轰击能量对ta-C薄膜结构, 内应力以及耐磨性的影响.通过X射线光电子能谱和原子力显微镜研究了氩离子轰击对薄膜结构 与表面形貌的改性,研究表明,氩离子轰击诱导了ta-C薄膜中sp3键向sp2键的转化, 并且随着氩离子轰击能量的增大,薄膜中sp2键的含量逐渐增多, 薄膜内应力随着氩离子轰击能量的增大逐渐减小.氩离子轰击对薄膜的表面形貌有较大影响, 在薄膜表面形成刻蚀坑,并且改变了薄膜的表面粗糙度,随着氩离子轰击能量的增大, 薄膜的表面粗糙度也会逐渐增大.通过摩擦磨损仪的测试结果,氩离子轰击对薄膜的初始摩擦系数影响较大, 但是对薄膜的稳定摩擦系数影响较小,经过氩离子轰击前后的ta-C薄膜的摩擦系数为0.1左右, 并且具有优异的耐磨性.  相似文献   

8.
张敏  林国强  董闯  闻立时 《物理学报》2007,56(12):7300-7308
用脉冲偏压电弧离子镀技术在玻璃基片上制备均匀透明的TiO2薄膜.利用X射线衍射仪、原子力显微镜、扫描电子显微镜、紫外-可见透射光谱仪和纳米压痕仪等手段,对不同脉冲负偏压下合成薄膜的相结构、微观结构、表面形貌、力学和光学性能进行表征.结果表明,沉积态薄膜为非晶态.脉冲负偏压对薄膜性能有明显的影响.随偏压的增加,薄膜厚度、硬度和弹性模量均先增大后减小,前者峰值出现在100—200 V负偏压范围,后两者则在250—350V范围.300 V负偏压时薄膜硬度最高,薄膜达到原子级表面光滑度,均方 关键词: 2薄膜')" href="#">TiO2薄膜 脉冲偏压电弧离子镀 硬度 折射率  相似文献   

9.
微波输入功率引起a-C∶F薄膜交联结构的增强   总被引:6,自引:0,他引:6       下载免费PDF全文
黄松  辛煜  宁兆元  程珊华  陆新华 《物理学报》2002,51(11):2635-2639
使用C2H2和CHF3的混合气体,在改变微波功率的条件下,利用微波电子回旋共振等离子体增强化学气相沉积方法制备了氟化非晶碳薄膜(aC∶F).薄膜的傅里叶变换红外光谱分析结果表明:薄膜中的CC与C—F键含量的比值随功率的增加而相应地增大;借助于紫外可见光谱分析发现,薄膜的光学带隙随功率的增大而减小.由此推断微波输入功率的提高有助于增强薄膜的交联结构.aC∶F薄膜的交流电导与x射线光电子能谱进一步证实了这种增强效应 关键词: 氟化非晶碳薄膜 傅里叶变换红外光谱 x射线光电子能谱  相似文献   

10.
潘越  赵强  江舸  周杨  江美福  杨亦赏 《物理学报》2013,62(1):15209-015209
采用射频反应磁控溅射法在316L不锈钢基片上分别沉积了两种薄膜:一种是氟化类金刚石薄膜(F-DLC),另一种是先镀上一定厚度的SiC过渡层再沉积F-DLC.着重研究了薄膜的附着力随过渡层制备条件的变化规律.结果显示,增加SiC过渡层后薄膜的附着力明显增加,且附着力随SiC过渡层的制备条件有所变化,在射频输入功率为200 W,沉积时间5min制备出的SiC过渡层上再沉积F-DLC时,附着力可达8.7 N,远高于未加过渡层时F-DLC膜的附着力(4 N).通过研究SiC的沉积速率曲线、表面形貌和红外光谱,探讨了SiC过渡层及其制备条件影响薄膜附着力的相关机制.  相似文献   

11.
The nitrogen-doped diamond-like carbon (DLC) films were deposited on high speed steel (HSS) substrates in the direct current unbalanced magnetron sputtering system. Sulphurized layer was formed on the surface of DLC films by means of liquid sulfidation in the intermixture of urea and thiourea solution in order to improve the tribological properties of DLC films. The influence of sulfidation treatment on the structure and tribological properties of DLC films was investigated in this work. The structure and wear surface morphology of DLC films were analyzed by Raman spectroscopy, XPS and SEM, respectively. It reveals that the treated films are smooth and uniform; and sulfur atoms are bonded chemically. The treated films have broader distribution of Raman spectra in the range of 1000-1800 cm−1 and higher ID/IG ratio than the untreated films as a result of the appearance of the crystalline graphite structure after the sulfidation treatment. It is showed that the sp2 relative content increase in the treated films from the XPS measurement. The Raman results are consistent with the XPS results. The tribological properties of DLC films were investigated using a ball-on-disk rotating friction and wear tester under dry friction conditions. It is found that the sulfidation concentration plays an important part in the tribological properties of the treated DLC films. The results showed the treated films with low sulfidation concentration have a lower friction coefficient (0.1) than the treated films with high sulfidation concentration (0.26) and the untreated films (0.27) under the same friction testing conditions, which can be attributed to both the presence of sulfur-containing materials and the forming of the mechanical alloyed layer on the wear surface. Adding the dry nitrogen to the sliding surface in the testing system helps the friction coefficient of the treated films with low sulfidation concentration to decrease to 0.04 further in this work. On the basis of the experimental results, it is indicated that the liquid sulfidation technique, which is low-cost, non-polluting and convenience, would be an appropriate method for the surface treatment of DLC films.  相似文献   

12.
江美福  宁兆元 《物理学报》2004,53(9):3220-3224
采用射频反应磁控溅射法用高纯石墨作靶、三氟甲烷(CHF3)和氩气(Ar)作源气体制 备了氟化类金刚石(FDLC)薄膜,通过XPS光谱结合拉曼光谱、红外透射光谱和紫外 可见光光谱研究了源气体流量比等工艺条件对薄膜中键结构、sp2/sp3杂化比以及光学带隙等性能的影响.结果表明在低功率(60W)、高气压(2.0Pa)和适当的流量比(Ar/CHF3=2∶ 1)下利用射频反应磁控溅射法可制备出氟含量高且具有较宽光学带隙和超低介电常数的FDLC薄膜. 关键词: 反应磁控溅射 氟化类金刚石薄膜 红外透射光谱 XPS光谱  相似文献   

13.
采用PR650光谱光度计对高速沉积微晶硅薄膜的生长过程进行了在线监测研究,并对所对应的材料进行了Raman谱和红外吸收谱(FTIR)的测试.结果表明:能反映材料晶化程度的I[SiH*/I[Hβ*比值在沉积时间为100 s之内有下降的趋势,且反应气体总流量Tfl越小下降趋势越明显,这与拉曼散射光谱对材料的结构测试结果一致;沉积5 min时I 关键词: 高速沉积 微晶硅薄膜 电子温度  相似文献   

14.
不同条件下,在单晶硅基片上沉积了含氮氟化类金刚石(FN-DLC)薄膜.原子力显微(AFM)形貌显示,掺N后,薄膜变得致密均匀.傅里叶变换吸收红外光谱(FTIR)表明,随着r(r=N2/[N2+CF4+CH4])的增大薄膜中C—H键的逐渐减少,C〖FY=,1〗N和C≡N键含量逐渐增加.X射线光电子能谱(XPS)的C1s和N1s峰拟合结果发现,N掺入导致在薄膜中出现β-C3N4和a-CNx(x=1,2,3)成分.Roman散射谱的G峰向高频方向位移和峰值展宽等证明:随着r的增大,薄膜内sp2键态含量增加. 关键词: 氟化类金刚石膜 键结构 氮掺杂  相似文献   

15.
Abstract

We have prepared novel nanohybrid Li2xMn1?xPS3/GO films consisting of graphene oxide (GO) and exfoliated MnPS3 nanosheets via an easy mixing protocol at room temperature. These films were investigated by SEM and AFM, as well as XRD, Raman and XPS spectroscopies, obtaining information about the nature of the interaction between MnPS3 and GO. In particular, the dark colour of the nanocomposite film and, more to the point, the analysis of (i) the C1s core level XPS spectra, (ii) the interlayer spacing obtained by XRD measurements and (iii) the increment in the intensity ratio ID/IG of the two bands typical of the carbon region of GO Raman spectra, suggest that a partial reduction of GO can be obtained right upon intercalation into Li2xMn1?xPS3.  相似文献   

16.
Amorphous carbon nitride powders are successfully produced by ammonothermal synthetic routes. The existence of the chemical bonding of C≡N in the powders is confirmed by Raman and infrared spectra. Raman spectra of various samples show that the G-band frequency shifts to higher energies, and the intensity ratio ID/IG decreases as the N content increases. The Knoop hardness of the sintering sample is up to 1200 kgf/mm2. The hardness of the sample increases with increasing of the N content. Received: 24 May 2000 / Accepted: 26 May 2000 / Published online: 2 August 2000  相似文献   

17.
Diamond-like carbon (DLC) is an attractive biomedical material due to its high inertness and excellent mechanical properties. In this study, DLC films were fabricated on Ti6Al4V and Si(1 0 0) substrates at room temperature by pulsed vacuum arc plasma deposition. By changing the argon flow from 0 to 13 sccm during deposition, the effects of argon flow on the characteristics of the DLC films were systematically examined to correlate to the blood compatibility. The microstructure and mechanical properties of the films were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) surface analysis, a nano-indenter and pin-on-disk tribometer. The blood compatibility of the films was evaluated using in vitro platelet adhesion investigation, and the quantity and morphology of the adherent platelets was investigated employing optical microscopy and scanning electron microscopy.The Raman spectroscopy results showed a decreasing sp3 fraction (an increasing trend in ID/IG ratio) with increasing argon flow from 0 to 13 sccm. The sp3:sp2 ratio of the films was evaluated from the deconvoluted XPS spectra. We found that the sp3 fraction decreased as the argon flow was increased from 0 to 13 sccm, which is consistent with the results of the Raman spectra. The mechanical properties results confirmed the decreasing sp3 content with increasing argon flow. The Raman D-band to G-band intensity ratio increased and the platelet adhesion behavior became better with higher flow. This implies that the blood compatibility of the DLC films is influenced by the sp3:sp2 ratio. DLC films deposited on titanium alloys have high wear resistance, low friction and good adhesion.  相似文献   

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