evelopment of two-port surface acoustic wave resonator with A1/Au electrodes for gas sensing

Simple and efficient surface acoustic wave （SAW） two-port resonators with low insertion loss and high Q-values on ST-X quartz substrate using a corrosion-proof A1/Au-stripe electrode structure are developed for gas sensing. It was composed of two shorted grating reflectors and adjacent intedigital transducers （IDT）, and an active metal film in the cavity between the IDTs for the sensitive film coating. The devices are expected to provide good protection towards metal electrode for gas sensors application in chemically reactive environments. Excellent device performance as low insertion loss, high Q factor and single-mode are achieved by carefully selecting the metallic electrode thickness, cavity length and acoustic aperture. Prior to fabrication, the coupling of modes （COM） model was performed for device simulation to determine the optimal design parameters. The fabricated single-mode SAW resonator at operation frequency of 300 MHz range exhibits matched insertion loss of ~6.5 dB and loaded Q factor in the 3000 range. Using the fabricated resonator as the feedback element, a duaresonator-oscillator with excellent frequency stability （0.1 ppm） was developed and evaluated experimentally, and it is significant for performance improvement of SAW gas sensor.     

Influence of resonator shape on nonlinear acoustic field in a thermoacoustic engine

The influence of the resonator shape on nonlinear acoustic field in a thermoacoustic engine is studied.The resonator of themoacoustic engine is boundary driving by a piston at one end,and the other end of it is rigid closed.A one-dimensional wave equation that accounts for gas dynamic nonlinearities and viscous dissipation in the resonator is established based on the governing equations of viscous hydromechanics.The nonlinear wave equation is solved using approximate Galerkin method.The nonlinear acoustic field in four different types of shaped resonators including hyperbolical,exponential,conical and sinusoidal are obtained and compared with that of a cylindrical resonator.It is found that the amplitude and waveform of the pressure are strongly affected by the resonator shape,the driving amplitude and the oscillation frequency of the piston.Waveform distortion,resonance frequency shift and hysteresis are observed,when the piston oscillation amplitude is large enough.The advantages of shaped resonator for thermoacoustic engine lie in inhibition of higher order harmonics and improvement of pressure ratio,etc.     

Acoustic performance prediction of Helmholtz resonator with conical neck

There is no accurate analytical approach for the acoustic performance prediction of Helmholtz resonator with conical neck,which has broad band acoustic attenuation performance in the low frequency range.To predict the acoustic performance of the resonator accurately,a general theory model based on the one-dimensional analysis approach with acoustic length corrections is developed.The segmentation method is used to calculate the acoustic parameters for sound propagation in conical tubes.And then,an approximate formula is deduced to give accurate correction lengths for conical tubes with difierent geometries.The deviations of the resonance frequency between the transmission loss results obtained by the general theory with acoustic lengths correction and the results from the finite element method and experiments are less than 2 Hz,which is much better than the results from one-dimensional approach without corrections.The results show that the method of acoustic length correction for the conical neck greatly improved the accuracy of the one-dimensional analysis approach,and it will be quick and accurate to predict the sound attenuation property of Helmholtz resonator with conical neck.     

Fabrication and Frequency Response Characteristics of A1N-Based Solidly Mounted Resonator

Film bulk acoustic resonator （FBAR） with solidly mounted resonator （SMR）-type is carried out by rf magnetic sputtering. To fabricate SMR-type FBAR, alternative high and low acoustic impedance layers, Mo/Ti multilayer, are adopted as Bragg reflector deposited by dc magnetron sputtering. The influences of sputtering pressure, substrate temperature and sputtering power on the surface roughness of Bragg reflector layer are discussed. From the atom force microscopy （AFM） analysis, the surface roughness of the Bragg reflector is improved remarkably by controlling deposition conditions. Under the appropriate sputtering condition, AlN thin films with highly c-axis-preferred orientation are deposited by rf magnetron sputtering. The performance of fabricated Mo/Ti SMR shows that the electromechanical coupling coefficient is 3.89%, the series and parallel resonant frequencies appear at 2.49 and 2.53 GHz, with their quality factors 134.2 and 97.6, respectively.     

A metamaterial absorber with direction-selective and polarisation-insensitive properties

This paper reports the design of a metamaterial absorber with direction-selective and polarisation-insensitive property.Both theoretical and simulated results reveal that the absorber has a distinct absorption point with direction selectivity at 7.48 GHz,which is related to the resonance of the metamaterial and is not influenced by the polarisation.The retrieved impedance indicates that the impedance of the absorber can be tuned to approximatively match the impedance of the free space on one side and not to match the impedance of the free space on the other side.This design can result in the minimal reflectance,the minimal transmission and the highest absorbance at the absorption frequency.The distribution of the power loss indicates that the absorber is an excellent electromagnetic wave collector:the wave is first trapped and reinforced in certain specific locations,and then mostly consumed.The distribution of the surface current is consistent with the design,the retrieved impedance and the distribution of the power loss.This absorber may have applications in many scientific and technological areas.     

A study on the multi-freedom broadband impedance model for time-domain simulations

The purpose of this paper is to construct a general broadband impedance model, which is suited for predicting acoustic propagation problems in time domain.A multi-freedom broadband impedance model for sound propagation over impedance surfaces is proposed and the corresponding time domain impedance boundary condition is presented.Basing on the extended Helmholtz resonator,the multi-freedom impedance model is constructed through combing with a sum of rational functions in the form of general complex-conjugate pole-residue pairs and it is proved that the impedance model is well posed.The impedance boundary condition can be implemented into a computational aeroacoustics solver by a recursive convolution technique, which results in a fast and computationally efficient algorithm.The two dimensional and three dimensional benchmark problems are selected to validate the accuracy of the proposed impedance model and time domain simulations.The numerical results are in good agreement with the reference solutions.It is demonstrated that the proposed impedance model can be used to describe the broadband characteristics of acoustic liners,and the corresponding time domain impedance boundary condition is viable and accurate for the prediction of sound propagation over broadband impedance surfaces.     

Theoretical analysis and experimental results of interference striation pattern of underwater target radiated noise in shallow water waveguide

Waveguide invariant in shallow water is an attractive topic in recent three decades. The interference phenomena of direct wave of radiated noise of underwater target and reflection wave from sea surface and sea bottom can be considered as a typical case of shallow water waveguide.The interference striation pattern of direct wave and its reflection is the effective and comprehensive figure for better understanding the essence of shallow water waveguide invariant.The theoretical analysis of interference phenomena generated by direct wave of radiated noise of underwater target and its reflection wave from sea surface and sea bottom is presented in this paper.It is shown that the interference wave resulted by sea surface reflection will produce striation pattern centered at high frequency band.But the interference of nulling frequency resulted by sea bottom reflection may be at low frequency or high frequency, it strongly depends on the acoustic behavior of sea bottom.The relationship between main parameters of interference striation pattern and target,receiver,and environment is derived.It is shown that the interference striation have the shape of hyperbolic curve.The equation set of the hyperbolic curve and its asymptotic line is presented.The at sea experiment carried out in South China sea shows some interesting results.A part of data processing results are illustrated in this paper.The results expressed in this paper show that the interference striation pattern can be used,in some conditions,as a potential means for target recognition.     

Propagating Properties of Cylindrical Rayleigh Waves Generated by a Pulsed Laser Line Source

A two-dimensional theoretical model is used to ana/yse the acoustic field of cylindrical surface waves generated by a pulsed laser line source in the ablation regime. The complete dispersive curves for cylindrical Rayleigh wave are presented. The laser-generated transient acoustic field of cylindrical Rayleigh waves is calculated and the corresponding laser ultrasonic experiments are carried out. Both the numerical and experimental results are in good agreement.     

Calculation of acoustic scattering of a nonrigid surface using physical acoustic method

In this paper the physical acoustic method or the Kirchhoff approxima-tion is extended to treat the scattering of a nonrigid surface in order to estimatethe target strength of targets with absorbing coatings.By using the locally planewave approximation,the relationship between the sound pressure and its normalderivative on the surface can be represented by the plane wave reflectioncoefficient and the acoustic impedance of the surface.The resulting modifiedKirchhoff approximation involves the plane wave reflection coefficient.For aimpedance sphere,a comparison between the physical acoustic method and theexact solution shows that the physical acoustic method still is a good approxima-tion at higher κα values.     

Fabrication and characterization of one-port surface acoustic wave resonators on semi-insulating GaN substrates

One-port surface acoustic wave resonators(SAWRs) are fabricated on semi-insulating high-quality bulk GaN and GaN film substrates, respectively. The semi-insulating GaN substrates are grown by hydride vapor phase epitaxy(HVPE)and doped with Fe. The anisotropy of Rayleigh propagation and the electromechanical coupling coefficient in Fe-doped GaN are investigated. The difference in resonance frequency between the SAWs between [1120] GaN and [1100] GaN is about 0.25% for the Rayleigh propagation mode, which is smaller than that of non-intentionally doped GaN film(~1%)reported in the literature. The electromechanical coupling coefficient of Fe-doped GaN is about 3.03%, which is higher than that of non-intentionally doped GaN film. The one-port SAWR fabricated on an 8-μm Fe-doped GaN/sapphire substrate has a quality factor of 2050, and that fabricated on Fe-doped bulk GaN has a quality factor as high as 3650. All of our results indicate that high-quality bulk GaN is a very promising material for application in SAW devices.