外差干涉仪中声光调制器特性对测量精度的影响

提出并论证了混合型声光调制器衍射光的衍射级次混叠特性, 它使衍射光强中存在着驱动频率的谐波项, 此外入射光束的漂移将引起衍射光的频率漂移。分析了在外差干涉仪中应用它们对测量精度的影响, 提出了消除这些因素影响的方法： 利用双声光调制器外差干涉, 并在干涉仪的内部提取测量的参考信号。用双声光调制器的外差干涉仪可以实现纳米测量。     

外并干涉仪中声光调制器特性对测量精度的影响

提出并论证了混合型声光调制器衍射光的笛射级次混叠特性,它使衍射光强中存在着驱动射频率的谐波项,此外入射光束的漂移将引起衍射光的频率漂移。分析了在外差干涉仪中应用它们对精度的影响,提出了消除这些因素影响的方法;利用双声光调制器外差干涉,并在干涉仪的内部提取测量的参考信号。用双声光调制器的外差干涉仪可以纳米测量。     

单频偏振激光干涉仪中波片对非线性误差的影响

研究了用于纳米测量的激光干涉仪中光学波片对非线性误差的影响,基于琼斯矩阵理论建立了多波片的误差分析模型,分析了λ/2和λ/4波片引起的干涉仪非线性误差,对波片位置引起的非线性误差进行了实验研究.结果表明,波片位置调整精度对干涉仪测量影响巨大,在0～5°范围内,λ/2波片和λ/4波片引起的非线性误差分别为6.5 nm和9...     

非偏振分光镜对外差干涉仪非线性误差的影响

除了激光源、偏振分光镜（PBS）和波片等偏振器件之外,非偏振分光镜（NPBS）也是外差干涉仪中重要的非线性误差源。研究了多层介质膜NPBS的退偏效应和方位角对非线性误差的影响。采用p、s分量透射比、反射比、反射相移和透射相移共同表征NPBS的退偏效应,并逐项分析了其非线性误差模型。如果入射光束为理想线偏振光,则只有NPBS的反射相移和透射相移影响测量精度。如果入射光束存在偏振椭圆化和非正交,则NPBS的方位角、透射比和反射比、相移等参数的变化都会引入非线性误差,误差曲线的斜率受椭圆率和非正交角的影响。因此选用不同的激光源,同一个NPBS产生的非线性误差大小不同,一般可达几个纳米量级。为了实现纳米/亚纳米级精度的外差干涉测量,选择性能稳定的NPBS,特别是NPBS退偏效应与激光源输出偏振态之间的匹配非常重要。     

用于位移精密测量的光外差马赫-泽德干涉仪

本文介绍了我们研制的用于位移精密测量的光外差马赫－泽德干涉仪。由于在光路设计中采用了共光路的布置，共模抑制技术得以实现，环境干扰产生的噪声得到很好的消除，相位检测的稳定性和精度大大提高。使用该干涉仪测量了一台在光学相移器内ＰＺＴ微位移驱动装置的电压－位移关系。测量结果具有良好的线性和重复性，与预期相符。根据测量数据分析，该光外差干涉仪具有３ｎｍ的位移测量精度。     

基于光弹调制技术的波片相位延迟量测量方法

提出了一种基于光弹调制技术的波片相位延迟量测量方法,利用米勒矩阵对其进行了理论推导和误差分析。测量光路包括激光器、起偏器、光弹调制器、被测波片、检偏器和光电探测器,利用探测信号的归一化基频分量和二次谐波分量精确计算出被测波片的相位延迟量。该方法能测量紫外到红外光谱范围内任意相位延迟量的波片,误差分析表明其误差小于0.05°。实验验证了该测量方法的有效性,波片相位延迟量的重复测量精度为0.0048°。     

寄生虚反射对外差干涉椭偏测量的影响

研究了一种采用横向塞曼激光器并且没有任何运动部件的外差干涉椭偏测量系统。由非理想的激光源、偏振分光镜等器件所产生的非线性误差,是影响纳米测量精度的主要因素。采用琼斯矢量法,分析并建立了光学系统寄生虚反射所引入的误差模型,讨论了虚反射对误差漂移的影响。在不考虑其它误差因素的前提下,同一光路内部产生的同频率虚反射波对测量结果没有影响;而不同频率的参考光束与测量光束之间的交叉虚反射所产生的膜厚测量误差为亚纳米量级。讨论了消除和抑制虚反射误差的方法。     

基于共线外差干涉的波片相位延迟的测量系统

通过共线光外差系统对光波所携带相位信息的精密检测,以及对波片光轴在入射面内的不同方位时寻常光(即o光)和非常光(即e光)的传播特性的理解,搭建了共线光外差测量系统对波片的相位延迟进行测量.实验结果表明该测量方法的测量精度达到±0.5°,并通过对光线斜入射时波片相位延迟的检测对该方法进行了验证.     

基于双频激光干涉相位检测的高精度波片测量

波片精度对偏振光学系统性能有着重要的影响,故需要对其相位延迟量和快轴方位角进行高精度测量。提出了一种新型基于双频激光干涉相位检测的高精度波片测量方法,采用双频激光外差干涉光路,利用一个可旋转半波片和一个角锥反射棱镜测量待测波片,可实现任意波片的相位延迟量和快轴方位角的高精度同时测量。所提方法不受波片、偏振片等双折射器件的方位角精度的影响,从原理上避免了该类系统误差。所设计的系统具有共光路结构,测量稳定性高,信号处理采用相位检测方式相对于一般的光强检测方式测量精度更高。此外,所设计的测量系统中元件很少,结构简单,测量过程快捷。误差分析表明,在现有实验条件下,测量系统的波片相位延迟量的测量不确定度约为3.9′,快轴方位角的测量不确定度约为5′′。实验比对结果表明,所提方法的测量结果与其他方法测量结果的一致性很好。重复性测量实验表明,测量结果的标准偏差约为2′。     

塞曼激光外差干涉仪的非线性分析及校正

He-Ne激光器施加纵向磁场或横向磁场构成的纵向塞曼激光器和横向塞曼激光器,是激光外差干涉仪最常用的光源。外差干涉仪原理表明,干涉仪所测位移和仪器测得的光电信号的相位变化,是线性关系。而实际上由于光源和光学系统难于达到理想状态,使二者之间产生了周期性非线性,导致纳米、亚纳米测量难以实现。本文分析了引起非线性的原因及其特性,提出了校正和减小非线性的方法,并证实了其有效性。     

Polarization Mixing Error Reduction in a Two-Beam Interferometer

A simple method to reduce the polarization mixing in a two-beam interferometer is proposed. A small separation angle Wollaston prism and an optical wedge were added to the conventional heterodyne setup. It was experimentally demonstrated that the polarization mixing error was reduced below 52.4 mrad by this method.     

Analysis of nonlinearity in a high-resolution grating interferometer

Metrological feasibilities of a high-resolution grating interferometer (GI) based on a transverse Zeeman laser are investigated. When the grating pitch equals 20 μm, a resolution of 0.7 nm is obtained by means of a heterodyne signal processing method. The comparison of two approaches for determining the residual nonlinearity is presented. One is to evaluate the maximum residual error by determining the amplitude modulation degree of the measurement signal. The other is to do a high precision calibration with a differential dual-frequency interferometer that has a higher precision. The experimental results show that the nonlinearity is no more than 25 nm which fits well with the estimating result. Analysis of the depolarization effect of the grating indicates that it has little influence on the measurement accuracy.     

Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer

The phase-shifting method is all along an important wavefront extraction technique in the interferometer. Moreover, to require almost real-time measurement an algorithm with a small number of grabbed buckets is very helpful to the phase-shifting interferometer. Therefore, those algorithms within five buckets are very practical and are given more attention. In the paper, popular phase shifting algorithms within five buckets are compared and new four and five buckets algorithms are developed to compensate for two dominate error sources which are linear phase shift deviation and detector nonlinearity. Numerical simulations and wavefront extraction experiment verify that the proposed compensation algorithms are insensitive to linear phase shift deviation and detector nonlinearity compared with classical four and five bucket algorithm.     

激光外差干涉快速超精密测量模型研究

为了精确地描述激光外差干涉在快速超精密测量中的位移测量．建立了激光外差干涉快速超精密测量模型。传统外差干涉测量模型采用舍去高阶误差的方法,便于分析与快速计算,但存快速纳米精度测量中,高阶误差已经影响到测量精度．根据多普勒频移公式,通过分析激光外差干涉的测量原理．在已有的激光干涉测量模型上增加了u^2/c的积分项．相当于将传统测量模型进行了高阶误差补偿。通过理论分析可知,当最高测量速度为1m/s,运行位移为3m时,该测量模型能够减小约18nm的测量误差,解决了传统测量模型存存的残余误差累计问题,从而为激光外差干涉在快速超精密测量领域的应用提供了一种理论依据。     

双波长绝对距离外差干涉仪的研究

提出了一种采用双纵模稳频激光器的新型绝对距离测量外差干涉仪。该干涉仪探测两个波长各自的外差信号, 通过测量两信号的相位差, 直接测量出合成波的小数级次。指出了两波长间的相互耦合对测量精度的影响, 提出了补偿方法, 在２５ ｍ 的测量范围取得了 １４０ μｍ 的测量精度。     

相位激光测距与外差干涉相结合的绝对距离测量研究

 为了克服一般绝对距离测量方法量程和精度不能同时满足的问题,提出一种相位激光测距与外差干涉相结合的绝对距离测量方案。该方案使用相位激光测距技术进行粗测,双纵模He-Ne激光器外差干涉测长技术进行精测,保证两者结合的单值性。建立测量系统,对方案的可行性进行了实验验证,并对影响系统稳定性的因素进行了分析。与双频激光干涉仪的比对结果表明：测量标准差优于1mm,可以满足一些大尺寸的测量精度要求。     

基于F-P腔法的纳米精度非线性误差校准系统研究

为了研究可用于纳米、亚纳米精度的非线性误差校准系统,采用差拍F-P干涉法,在中国计量科学研究院研制的差拍F-P干涉仪基础上,设计并制作了适用于该系统的密封干涉光路的真空系统。通过与电容式测微仪的比对实验,证明了系统的抗干扰能力得到了改善,在大于半波长的测量范围内,系统的非线性度优于3.86nm。     

激光自外差相干测量中分布反馈半导体激光器电流调谐非线性的补偿方法

半导体激光器的电流调谐非线性对自外差相干测量的精度影响很大.研究了分布反馈半导体(DFB) 激光器的电流调谐特性,据此提出一种数学模型补偿方法.利用已知光程差下的差拍频率,建立了动态调频 系数的数学模型.以此模型对DFB激光器的电流调谐非线性进行补偿,可以将差拍信号频率预测值的相对误差 减小约3%,提高了系统的测量精度.数学模型补偿方法简化了测量系统的结构,适用于高精度的电流调谐 激光在线测量系统.     

Micro-Gal laser absolute gravimeter based on high precision heterodyne interferometer

A micro-Gal absolute gravimeter based on high-precision and high-stability heterodyne interferometer is presented. The distance measuring technology of the gravimeter is studied in detail. The experimental results of distance measuring for a free-falling motion show that the high-precision heterodyne interferometer described in this paper can meet the demand of a micro-Gal absolute gravimeter with relative uncertainty of 6.4 × 10-9. Moreover, the heterodyne interferometer is more stable than the Mach-Zehnder interferometer (MZI) which is widely used in present absolute gravimeters.     

Linearization methods of laser interferometers for pico/nano positioning stages

Presented work introduces methods for improving linearity of a heterodyne laser interferometer system. The heterodyne configuration exhibits high potential in demanding applications, like pico/nano positioning. Those applications require superior accuracy, more difficult to obtain in a homodyne configuration of the laser interferometer. The homodyne setup is more susceptible to external light, variation of DC offset and higher noises, especially the 1/f noise. Those issues are filtered out in the heterodyne configuration. The main disadvantage of heterodyne setup are higher measurement nonlinearities. In this paper there are first introduced sources of nonlinearities and their impact on the overall accuracy. According to those findings there are proposed techniques to eliminate error caused by parasite beams, i.e. nonlinearities. Presented method is based on digital signal processing and is reliable and easy to use. In the shown approach the nonlinearities correction is completely automatic. Such system is applicable for X/Y positioning stages. Presented configuration of the laser interferometer is able to track the displacement with 100 pm resolution up to 7 m/s of translation velocity. The resolution can be improved to 10 pm by limitation of maximal velocity. In the paper there is confirmed that errors caused by nonlinearities are in range of ±0.6 nm. Achieved accuracy is comparable to capacitance gauges with presented laser interferometer having much better dynamic range.