反应磁控溅射法制备的氟化类金刚石薄膜的XPS结构研究

采用射频反应磁控溅射法用高纯石墨作靶、三氟甲烷(CHF₃)和氩气(Ar)作源气体制 备了氟化类金刚石（FDLC）薄膜，通过XPS光谱结合拉曼光谱、红外透射光谱和紫外 可见光光谱研究了源气体流量比等工艺条件对薄膜中键结构、sp2/sp3杂化比以及光学带隙等性能的影响.结果表明在低功率(60W)、高气压(2.0Pa)和适当的流量比(Ar/CHF₃=2∶ 1)下利用射频反应磁控溅射法可制备出氟含量高且具有较宽光学带隙和超低介电常数的FDLC薄膜. 关键词： 反应磁控溅射 氟化类金刚石薄膜 红外透射光谱 XPS光谱     

SiC过渡层制备温度对碳化硅/氟化类金刚石复合薄膜血液相容性的影响

以316L不锈钢为基底,SiC晶体为靶材,Ar为源气体,采用磁控溅射法在不同温度下制备出系列SiC过渡层.然后以高纯石墨作靶,Ar和CHF_3为源气体,在同一工艺条件下再续镀一层氟化类金刚石(F-DLC)薄膜,形成SiC/F-DLC复合薄膜.研究表明,相比于F-DLC薄膜,复合薄膜的附着力显著增加,血液相容性明显改善.通过样品的拉曼和红外光谱分析了不同温度下制备的SiC过渡层以及复合薄膜结构的演变.结果表明,控制SiC过渡层制备温度可以有效调制过渡层中C=C键的比例以及—C—C—不饱和键的密度,复合薄膜中保留较高比例的芳香环式结构以及合适的F/C比是薄膜的血液相容性得以进一步改善的原因,SiC过渡层制备温度控制在500℃左右效果尤为明显.SiC薄膜和F-DLC两种薄膜的界面处形成一定比例的Si—C键和C=C键是导致复合薄膜附着力显著上升的直接原因.适当条件下在316L不锈钢和F-DLC薄膜之间增加SiC过渡层对于增强薄膜的附着力、改善其血液相容性是可行、有效的.     

不同射频输入功率下制备的氟化类金刚石碳膜疏水性研究

以高纯石墨作靶、氩气（Ar）和三氟甲烷（CHF₃）为源气体,用反应磁控溅射法在不同射频功率下制备了氟化类金刚石碳（F-DLC）膜,并对其疏水性进行研究.双蒸水液滴与膜表面接触角的测试结果表明,所制备薄膜表面的最大水接触角可达115°左右.通过原子力显微镜获得的薄膜表面AFM图谱、拉曼光谱以及傅里叶变换红外光谱探讨了影响薄膜的疏水性的因素.结果表明,薄膜的疏水性与薄膜的表面粗糙度和表面键结构直接相关,表面粗糙度越大,疏水性越好,但与薄膜中的F含量和sp³/sp²的比值并未呈单调增加或减小的对应关系.射频输入功率影响着薄膜的沉积速率,与薄膜表面粗糙度、薄膜中芳香环单核的比例以及薄膜表面的键结构（F的接入方式）直接相关. 关键词： 疏水性 反应磁控溅射 氟化类金刚石膜 射频功率     

射频反应磁控溅射法制备的氟化类金刚石薄膜摩擦特性研究

以高纯石墨做靶,CHF3和Ar气为源气体,采用射频反应磁控溅射法在不同流量比条件下制备了氟化类金刚石(F-DLC)薄膜.利用原子力显微镜、纳米压痕仪、拉曼光谱和红外光谱、摩擦磨损测试仪对薄膜的表面形貌、硬度、键结构以及摩擦性能做了具体分析.表面形貌测试结果表明,制备的薄膜整体均匀致密,表现出了良好的减摩性能.当CHF3与Ar气流量比r为1:6时,所得薄膜的摩擦系数减小至0.42,而纳米压痕结果显示,此时薄膜的硬度也最高.拉曼和红外光谱显示,随着r的增加,薄膜中的F浓度呈上升趋势,薄膜中的芳香环比例减小.研究表明,F原子的键入方式是影响F-DLC薄膜摩擦系数的一个重要因素,CF2反对称伸缩振动强度的减弱和CC中适量碳氢氟键的形成都能导致薄膜具有相对较低的摩擦系数.     

SiC过渡层对氟化类金刚石薄膜附着特性的影响

采用射频反应磁控溅射法在316L不锈钢基片上分别沉积了两种薄膜:一种是氟化类金刚石薄膜(F-DLC),另一种是先镀上一定厚度的SiC过渡层再沉积F-DLC.着重研究了薄膜的附着力随过渡层制备条件的变化规律.结果显示,增加SiC过渡层后薄膜的附着力明显增加,且附着力随SiC过渡层的制备条件有所变化,在射频输入功率为200 W,沉积时间5min制备出的SiC过渡层上再沉积F-DLC时,附着力可达8.7 N,远高于未加过渡层时F-DLC膜的附着力(4 N).通过研究SiC的沉积速率曲线、表面形貌和红外光谱,探讨了SiC过渡层及其制备条件影响薄膜附着力的相关机制.     

不同CHF3/CH4流量比下沉积a-C∶F∶H薄膜键结构的红外分析

通过微波电子回旋共振等离子体化学气相沉积方法使用CH₄/CHF₃源气体制备a-C∶F∶H薄膜.红外结果表明,a-C∶F∶H薄膜随着流量比R=[CHF₃]/[CHF₃]+[CH₄])的变化存在结构上的演变,R<64%时,薄膜主要是以类金刚石(DLC)特征的结构为主;当R>64%时,薄膜表现为一个类聚四氟乙烯(PTFE)的结构,结构单体主要为CF₂.同时这种结构上的变化影响着薄膜 关键词： a-C∶F∶H薄膜 傅里叶变换红外光谱 紫外可见光谱     

含氮氟化类金刚石(FN-DLC)薄膜的研究：(Ⅲ)疏水性能分析

不同沉积条件下，在单晶硅基底上沉积了含氮氟化类金刚石(FN-DLC)薄膜，用静滴接触角/表面张力测量仪测量了水与FN-DLC膜表面的接触角.用X射线光电子能谱、Raman光谱和傅里叶变换吸收红外光谱(FTIR)分析了薄膜的组分和结构.用原子力显微镜观测了薄膜的表面形貌.结果表明，FN-DLC薄膜疏水性能主要取决于薄膜表面的化学结构、薄膜表面极化强度的强弱、以及薄膜的表面粗糙度的大小.sp³/sp²的比值减小，CF₂基团含量增加，薄膜粗糙度增加，接触角增大；反之，则接触角减小.在工艺上，沉积温度和功率的减小，气体流量比r(r=CF4/［CF₄+CH₄］)的增加，都会使水的浸润性变差，接触角增大. 关键词： 氟化类金刚石膜 疏水性 接触角     

含氮氟化类金刚石(FN-DLC)薄膜的研究：(Ⅳ)氮掺杂对薄膜结构的影响

不同条件下，在单晶硅基片上沉积了含氮氟化类金刚石(FN-DLC)薄膜.原子力显微(AFM)形貌显示，掺N后，薄膜变得致密均匀.傅里叶变换吸收红外光谱(FTIR)表明，随着r(r=N₂/［N₂+CF₄+CH₄］)的增大薄膜中C—H键的逐渐减少，C〖FY=,1〗N和C≡N键含量逐渐增加.X射线光电子能谱(XPS)的C1s和N1s峰拟合结果发现，N掺入导致在薄膜中出现β-C₃N₄和a-CN_x(x=1,2,3)成分.Roman散射谱的G峰向高频方向位移和峰值展宽等证明：随着r的增大，薄膜内sp²键态含量增加. 关键词： 氟化类金刚石膜 键结构 氮掺杂     

离子束辅助沉积对类金刚石膜结构影响的计算机模拟

采用分子动力学(MD)模拟研究了离子束辅助沉积(1BAD)生长类金刚石(DLC)膜的物理过程.分 别选C₂分子和Ar离子作为沉积源和辅助沉积粒子.改变Ar的入射能量和到达比(A r／C)，研 究了它对DLC膜结构的影响.重点讨论了Ar辅助沉积引起表面原子的瞬间活性变化对薄膜结构 产生的影响.分析表明，由于Ar离子的轰击引起的能量和动量的传递，大大地增强了C原子在 表面的反冲动能及迁移概率，增加了合成薄膜的SP³键含量.研究结果和实验 观察一致，并从合成机理上给出了一些定量解释. 关键词： 类金刚石膜 离子束辅助沉积 分子动力学模拟     

乙炔气体流量对纳米TiC类金刚石复合膜的化学结构及力学性能影响

采用离子注入与反应磁控溅射相结合的方法在钛合金及硅片基体表面上制备了纳米TiC类金刚石(DLC)复合膜.通过纳米压痕技术检测了薄膜的纳米硬度，显微划痕试验评估了薄膜的结合力.通过X射线光电子能谱及X射线衍射表征了薄膜的化学结构.结果表明，通过改变C₂H₂气体流量，可以达到控制薄膜中钛原子含量的目的，合适的C₂H₂气体流量可以在DLC膜中形成较多的纳米TiC晶粒，形成DLC包覆TiC晶粒的复合结构，使DLC膜力学性能得到明显提高.另外，划痕试验表明掺钛、先注入后沉积工艺都使薄膜的结合力得到了较大提高. 关键词： 纳米TiC类金刚石复合膜 类金刚石膜 力学性能     

The effect of TiN nanoparticles deposition with different number of shots on SS316L by plasma focus device

In this paper, we present the result of TiN nanocrystalline deposition on SS316L, using a 4 kJ plasma focus (PF) device for 10, 20, and 30 focus shots. The effect of different number of focus shots on micro-structural changes of thin film is characterized by field emission scanning electron microscope. Existence of grains in different size confirms the formation of TiN nanocrystals on the surface of SS316L substrate. X-ray diffraction (XRD) reveals the formation of a nanocrystalline titanium nitride coating on the surface of SS316L samples. The crystalline size of TiN obtained from XRD data is strongly dependent on the number of focus shots. Thickness of the elements found on the surface of the treated sample that obtain by Rutherford backscattering spectroscopy (RBS) analysis is in the range of 150×10¹⁵?200×10¹⁵ atoms/cm². All the existence elements in the coated samples are identified by Particle Induced X-ray Emission (PIXE) spectra. Investigation on the corrosion resistance of TiN coatings was performed using an electrochemical potentiodynamic polarization. Our results suggest that TiN nanocrystalline implantation with proper ion fluences using PF can significantly improve the corrosion resistance of SS316L.     

Surface characterisation and electrochemical behaviour of porous titanium dioxide coated 316L stainless steel for orthopaedic applications

Porous titanium dioxide was coated on surgical grade 316L stainless steel (SS) and its role on the corrosion protection and enhanced biocompatibility of the materials was studied. X-ray diffraction analysis (XRD), atomic force microscopy (AFM), Fourier transform infrared (FTIR) spectroscopy, scanning electron microscopy (SEM) and energy dispersive X-ray analysis (EDAX) were carried out to characterise the surface morphology and also to understand the structure of the as synthesised coating on the substrates. The corrosion behaviour of titanium dioxide coated samples in simulated body fluid was evaluated using polarisation and impedance spectroscopy studies. The results reveal that the titanium dioxide coated 316L SS exhibit a higher corrosion resistance than the uncoated 316L SS. The titanium dioxide coated surface is porous, uniform and also it acts as a barrier layer to metallic substrate and the porous titanium dioxide coating induces the formation of hydroxyapatite layer on the metal surface.     

聚变堆用CLF-1 钢与316L 钢TIG 焊接接头组织与性能初步研究

对用W19123L 为焊丝的聚变堆用低活化CLF-1 钢与316L 钢的钨极氩弧焊(TIG)焊接接头金相组织及性能进行了初步研究。结果表明：焊接接头成型良好、无缺陷;金相组织表明焊接接头由CLF-1 侧(母材区、热影响区、熔合区)、过渡层、焊缝区、316L 侧(母材区、热影响区、熔合区)组成;室温拉伸试验结果优于母材的最低要求值;弯曲试验后的焊接接头内外表面完好,无裂纹产生,变形均匀;焊接接头冲击值成凹型分布,焊缝区冲击值最低,焊缝两侧热影响区冲击值次之,母材冲击值最高,316L 侧冲击值略高于CLF-1 侧,均满足焊接接头设计值;焊接接头上表面1.6mm 硬度波动较大,略高于1/2T 和下表面1.6mm 处,焊接接头1/2T 和下表面1.6mm 硬度分布较均匀,从CLF-1 侧到316L 侧有下降趋势。整体焊接性能基本稳定,满足异种钢焊接性能匹配要求。     

�۱����CLF-1 ����316L ��TIG ���ӽ�ͷ��֯�����ܳ����о�

A preliminary study of microstructure and properties of the welded joint of low activation CLF-1 steel used for fusion reactor and 316L dissimilar metal by tungsten inert gas (TIG) welding using W19123L as filler material, has been performed. The welded joint forming is proved well and without defect. The welded joint consists of CLF-1 zone [base metal (BM), heat affected zone (HAZ), fusion zone (FZ)], inside layer (IL), weld zone (WZ), and 316L zone (BM, HAZ, FZ). Tensile strength of the joint is better than the base metal minimum value in room temperature. Both surfaces of welded joint are without crack and with deformation uniformity under the bending test. The distribution of impact value of the joint is concave-like and satisfies the designed values for the welded joint, the WZ’s value is the lowest, the HAZ’s of both WZ zones is the second, the BM’s was the best, and the 316L steel zone’s is slightly larger than the CLF-1 zone’s. The hardness values of the point under the 1.6mm top surface of welded joint have a larger fluctuation range, and is slightly higher than those of 1/2T and above down surface 1.6mm position. The hardness distribution of 1/2T and above the down surface 1.6mm position is roughly uniform, and has a downward trend from the CLF-1 zone to 316L zone. Welding properties generally has remained stable and satisfy the requirement of dissimilar steel welding performance matching.     

New route to form micro-pores on 316L stainless steel surface

In order to seek an effective way for preventing restenosis after coronary stent implantation, a proposal of increasing the amount of loaded drug without changing the size of struts was given. Thereafter, a process of fabricating in-situ formed sub-micro-pores on 316L stainless steel (316L SS) was demonstrated. An aluminum thin film was deposited by magnetron sputtering on a 316L substrate. The aluminum film was then anodized in different acids (0.3 M oxalic and 10 vol.% sulfuric) by regulating direct current power supply. Through an appropriate chemical dissolution, the anodic alumina film was removed and the underlying porous 316L was obtained. The morphology of the porous 316L surface was examined by scanning electron microscope and the composition of the pores was investigated by energy dispersive X-ray analysis. The corrosion behavior of the porous 316L was evaluated by the polarization measurement. The results indicate that the shape and size of pores could be affected evidently by the acids used in anodization. The pores density is found to change with variation of the applied voltage in anodization. The corrosion current of the anodized specimens decrease and the corrosion voltage increase, compared with the untreated specimens.     

强流脉冲离子束辐照对不锈钢耐腐蚀性能的影响

 利用强流脉冲离子束（HIPIB）对316L不锈钢进行了表面辐照处理，研究了HIPIB辐照对其在0.5mol/L H2SO4溶液中电化学腐蚀性能的影响。极化曲线测量结果表明，HIPIB辐照能够显著提高316L的抗腐蚀性能，自腐蚀电流对辐照次数的依赖性与自腐蚀电位相比明显较强。采用扫描电子显微镜（SEM）、X射线衍射（XRD）和电子探针（EPMA）分析辐照后试样表面形貌、表面层相结构和元素分布的变化。结果表明：HIPIB辐照使试样表面光滑化，表面层产生择优取向，且发生了杂质元素的选择性烧蚀，是316L不锈钢耐电化学腐蚀性能得以提高的主要原因。