二氧化硅及其硅烷自组装膜微观摩擦力与粘着力的研究(Ⅰ)摩擦力的实验与分析

使用原子力/摩擦力显微镜在5%—99%的相对湿度范围,研究了二氧化硅和二氧化硅基体上十八烷基三甲氧基硅烷自组装膜(简称OTE SAM/SiO₂)表面摩擦力和粘着力随湿度的变化规律.实验表明OTE SAM/SiO₂不仅能明显改善二氧化硅基体表面的摩擦性能,而且在200nN(接触区Hertz压力约为0.8GPa)的载荷条件下表现出良好的抗磨性能.由于强的亲水性,二氧化硅表面的摩擦力随湿度的增大先逐渐增大,然后急剧减小.相反,OTE SAM/SiO_{2关键词： 固体表面的物理性能 分子膜 纳米摩擦学}     

同步辐射光激励的二氧化硅薄膜刻蚀研究

利用热氧化法在硅晶片上生长SiO₂薄膜，结合光刻和磁控溅射技术在SiO₂薄膜表面制备接触型钴掩模，通过掩模方法在硅表面开展了同步辐射光激励的表面刻蚀研究，在室温下制备了SiO₂薄膜的刻蚀图样.实验结果表明：在同步辐射光照射下，通入SF₆气体可以有效地对SiO₂薄膜进行各向异性刻蚀，并在一定的气压范围内，刻蚀率随SF₆气体浓度的增加而增加，随样品温度的下降而升高；如果在同步辐射光照射下，用SF₆和O₂的混合气体作为反应气体，刻蚀过程将停止在SiO₂/Si界面，即不对硅刻蚀，实现了同步辐射对硅和二氧化硅两种材料的选择性刻蚀；另外，钴表现出强的抗刻蚀能力，是一种理想的同步辐射光掩模材料. 关键词： 同步辐射刻蚀 接触型钴掩模 二氧化硅薄膜     

硅衬底的SrTiO3淀积膜的湿敏特性与机理研究

对无定形多孔SrTiO₃膜电导率随相对湿度的变化进行了理论模型分析.该模型也适用于其他多孔半导体陶瓷材料.实验样品用氩离子束镀膜技术在SiO₂/Si衬底上淀积SrTiO₃膜并制成平面型电阻结构.结果表明，在室温下，当相对湿度从12%变化至53%时，电流缓慢下降；而当相对湿度从53%变化至92%时，电流又显著上升，即在高湿度条件下具有良好的湿敏特性.电流及其在高湿条件下的上升率随测试频率而增大.吸附响应时间明显长于脱附时间. 关键词：     

反应溅射VN/SiO2纳米多层膜的微结构与力学性能

采用V和SiO₂靶通过反应溅射方法制备了一系列具有不同SiO₂和VN调制层厚的VN/SiO₂纳米多层膜. 利用X射线衍射、X射线能量色散谱、高分辨电子显微镜和微力学探针表征了多层膜的微结构和力学性能. 结果表明：在Ar，N₂混和气体中，射频反应溅射的SiO₂薄膜不会渗氮. 单层膜时以非晶态存在的SiO₂，当其厚度小于1nm时，在多层膜中因VN晶体层的模板效应被强制晶化，并与VN层形成共格外延生长. 相应地，多层膜的硬度得到明显提高，最高硬度达34GPa. 随SiO₂层厚度的进一步增加，SiO₂层逐渐转变为非晶态，破坏了与VN层的共格外延生长结构，多层膜硬度也随之降低. VN调制层的改变对多层膜的生长结构和力学性能也有影响，但并不明显. 关键词： 2纳米多层膜')" href="#">VN/SiO₂纳米多层膜 共格外延生长 非晶晶化 超硬效应     

MoS2/SiO2界面黏附性能的尺寸和温度效应

探索二维材料与其衬底之间的黏附性能对于二维材料的制备、转移以及器件性能的优化至关重要.本文基于原子键弛豫理论和连续介质力学方法,系统研究了尺寸和温度对MoS₂/SiO₂界面黏附性能的影响.结果表明,由于表面效应引起的热膨胀系数、晶格应变和杨氏模量的变化, MoS₂/SiO₂界面黏附能随MoS₂厚度的减小而增大,而热应变使MoS₂/SiO₂界面黏附能随温度的升高而逐渐降低.此外,预测了在不同尺寸和温度下MoS₂在SiO₂衬底上的“脱落”条件,系统阐述了MoS₂与SiO₂衬底之间黏附性能的物理机制,为基于二维材料电子器件的优化设计提供了理论基础.     

Au/SiO2纳米复合薄膜的微结构及光吸收特性研究

用多靶磁控溅射技术制备了Au/SiO₂纳米多层薄膜.利用透射电子显微镜以及吸 收光谱对Au/SiO₂复合薄膜的微观结构、表面形貌及光学性能进行了表征和测试 .研究结果表明：单层Au/SiO₂薄膜中Au沉积时间小于10s时，分散在SiO_{2< /sub>中的Au颗粒随Au的沉积时间的延长而增大；当沉积时间超过10s后，Au颗粒的尺寸几乎 不随沉积时间变化，但Au颗粒的形状由网络状结构变为薄膜状结构.［Au(t1关键词： 尺寸效应 纳米复合薄膜 吸收光谱 有效媒质理论}     

SiO2的赝晶化及AlN/SiO2纳米多层膜的超硬效应

采用反应磁控溅射法制备了一系列不同SiO₂层厚度的AlN/SiO₂纳米多层膜，利用X射线衍射仪、高分辨透射电子显微镜和微力学探针表征了多层膜的微结构和力学性能，研究了SiO₂层在多层膜中的晶化现象及其对多层膜生长方式及力学性能的影响. 结果表明，由于受AlN六方晶体结构的模板作用，溅射条件下以非晶态存在的SiO₂层在其厚度小于0.6 nm时被强制晶化为与AlN相同的六方结构赝晶体并与AlN形成共格外延生长. 由于不同模量的两调制层存在晶格错配度，多层膜中产生了拉、压交变的应力场，使得多层膜产生硬度升高的超硬效应. SiO₂随层厚的进一步增加又转变为以非晶态生长，多层膜的外延生长结构受到破坏，其硬度也随之降低. 关键词： 2纳米多层膜')" href="#">AlN/SiO₂纳米多层膜 赝晶化 应力场 超硬效应     

溶胶凝胶ZrO2/SiO2宽带减反膜的制备与性能

采用溶胶凝胶法制备得到以正丙醇锆和正硅酸乙酯为前驱体的ZrO₂和SiO₂溶胶,通过TFCalc光学薄膜软件模拟了ZrO₂/SiO₂三层“宽M型”基频二倍频减反膜,并使用提拉法制备得到了该均匀膜层。三层减反膜在527 nm和1053 nm处的透过率约为99.5%,且透过率大于99%的波长范围均超过150 nm。经热处理后的膜层表面均方根粗糙度为1.34 nm,表面平整性良好;并运用1-on-1激光损伤阈值测试方法测得该减反膜的零几率激光损伤阈值达到36.8 J·cm^-2(1064 nm,10.7 ns)。     

Si-W/Si/SiO2/Si(100)的横截面电子显微镜研究

本文用横截面电子显微镜法分析了Si-W/Si/SiO₂/Si(100)在440—1000℃退火后的晶化过程,以及各个界面的变化情况.发现Si-W合金膜中,WSi₂并未优先在表面、界面处形成晶核.当退火温度不高于700℃时,反应在合金膜内发生,表面、界面起伏和缓.退火温度高达800—1000℃时,界面、表面出现原子扩散,造成剧烈的界面起伏;表面则出现小的热沟槽,Si/SiO₂界面也出现高分辨电子显微镜才能观察到的起伏.表面、界面的原子迁移的动力来源于晶界与表面、界面张力.由于SiO₂中Si—O键很稳定,不易发生Si和O在界面处的互扩散,所以Si/SiO₂界面起伏很小. 关键词：     

快速响应恢复的PI-SiO2/NiI2比色湿度传感器

有机-无机杂化型比色湿度传感器可通过电学信号和颜色变化获取环境湿度,并因其特征颜色区分度高、稳定性好、制备工艺简单等优点,在湿度监测领域具有广阔的应用前景,但其通常响应恢复时间长,从而不利于湿度实时监测.本文在聚酰亚胺(PI)-碘化镍(NiI₂)有机无机杂化材料中掺杂纳米SiO₂微球制备得到PI-SiO₂/NiI₂复合薄膜及比色湿度传感器,对其表面形貌和湿敏特性进行了研究.结果显示, PI-SiO₂/NiI₂薄膜具有蜂巢状的表面形貌,传感器的特征颜色显著,湿度响应时间小于1.5 s,恢复时间小于18 s.研究表明,纳米SiO₂微球掺杂能够较为显著地改善有机-无机杂化型比色湿度传感器的响应恢复特性,这对于传感器性能的提升具有一定参考意义.     

Fabrication and characterization of a Cu seed layer on a 60-nm trench-patterned SiO2 substrate by a self-assembled-monolayer (SAM) process

Continuous electroless deposition of a 10-nm thick layer of Cu was successfully performed on a SiO₂/Si substrate coated with a 3-nm Au catalytic layer. The Au catalytic layer was formed by a self-assembled monolayer (SAM) process terminated with NH₂ headgroups, upon which negatively charged Au particles were deposited via electrostatic interaction with the positively charged NH₂-SAM. The Au and NH₂-SAM layers were analyzed by X-ray photoelectron spectroscopy (XPS) and contact angle analysis. Atomic force microscopy, field emission scanning electron microscopy, and XPS revealed that the Cu layer formed by this electroless processes had good step-coverage, small grain size, and excellent adhesion to the substrate. The proposed process is a very promising method for fabrication of a conductive Cu seed layer in a 60-nm trench-pattern.     

机械-化学方法在硅(100)表面制备芳香烃重氮盐单层膜

利用机械-化学方法同时实现硅表面的图形化和功能化. 在芳香烃重氮盐(C₆H₅N₂BF₄)中用金刚石刀具刻划单晶硅(100),使单晶硅表面的Si-O键断裂,形成硅的自由基,进而它们与溶液中含有的有机分子共价结合以形成自组装单层膜. 用原子力显微镜对自组装前后的表面形貌进行表征,用飞行时间二次离子质谱和红外光谱对自组装单层膜进行检测和分析,通过确认C₆H₅离子的存在证明自组装单层     

Effects of a self-assembled monolayer on the sliding friction and adhesion of an Au surface

The friction and adhesion mechanisms with and without a self-assembled monolayer (SAM) in nanotribology were studied using molecular dynamics (MD) simulation. The MD model consisted of two gold planes with and without n-hexadecanethiol SAM chemisorbed to the substrate, respectively. The molecular trajectories, tilt angles, normal forces, and frictional forces of the SAM and gold molecules were evaluated during the frictional and relaxation processes for various parameters, including the number of CH₂ molecules, the interference magnitude, and whether or not the SAM lubricant was used. The various parameters are discussed with regard to frictional and adhesion forces, mechanisms, and molecular or atomic structural transitions. The stick–slip behavior of SAM chains can be completely attributed to the van der Waals forces of the chain/chain interaction. When the number of CH₂ molecules was increased, the SAM chains appeared to have bigger tilt angles at deformation. The magnitude of the strain energy that was saved and relaxed is proportional to the elastic deformable extent of the SAM molecules. The frictional force was higher for long chain molecules. With shorter SAM molecules, the adhesion force behavior was more stable during the compression and relaxation processes. A surface coated with a SAM can increase nano-device lifetimes by avoiding interface effects like friction and adhesion. PACS 52.65.Yy; 81.40.Pq; 81.16; 68.35.-p     

Synthesis of bismuth nanocap arrays on quartz substrates and their surface plasmon resonance properties

Bismuth nanocap arrays have been prepared by vacuum depositing Bi films onto the surfaces of self-assembled monolayer arrays of SiO₂ nanoparticles. The surface morphologies, structures, and optical properties of the obtained samples have been characterized by transmission electron microscopy (TEM), scanning electron microscopy (SEM), atomic force microscope (AFM), X-ray diffraction (XRD), and ultraviolet–visible–near infrared (UV–vis–NIR) spectrophotometer. TEM and AFM images indicated that the SiO₂/Bi composite nanoparticles were incompletely encapsulated and their surfaces were relatively rough. UV–vis–NIR absorption spectra showed that Bi nanocap arrays had strong and tunable surface plasmon resonance peaks in the visible and near infrared regions, which were dependent dramatically on the relative ratio of the SiO₂ core diameter to the Bi cap thickness.     

Silane effects on the surface morphology and abrasion resistance of transparent SiO2/UV-curable resin nano-composites

Transparent ultraviolet curable nano-composite coatings consisting of nano-sized SiO₂ and acrylate resin have been developed to improve the abrasion resistance of organic polymers. The nano-sized SiO₂ particles were surface-modified using various amounts of 3-methacryloxypropyltrimethoxysilane. The 3-methacryloxypropyltrimethoxysilane concentration effects on the surface morphology and abrasion resistance of the transparent SiO₂/ultraviolet-curable resin nano-composites were investigated using scanning electron microscopy, atomic force microscopy, and ultraviolet-visible spectrophotometer. The results showed that as the 3-methacryloxypropyltrimethoxysilane/SiO₂ weight ratio increased from 0.2 to 0.6, the dispersion, compatibility and cross-linking density between the 3-methacryloxypropyltrimethoxysilane-modified SiO₂ particles and acrylate resin were improved, leading to an increase in abrasion resistance. However, as the 3-methacryloxypropyltrimethoxysilane/SiO₂ weight ratio was increased to 1.5, the additional 3-methacryloxypropyltrimethoxysilane may exceed that needed to fill the pores with the probability of SiO₂ nano-particles existing on the coating surface was lower than that for samples with a 3-methacryloxypropyltrimethoxysilane/SiO₂ weight ratio of 0.6. This produced a decrease in abrasion resistance.     

Influence of surface energy and relative humidity on AFM nanomechanical contact stiffness

The effects of surface functionality and relative humidity (RH) on nanomechanical contact stiffness were investigated using atomic force acoustic microscopy (AFAM), a contact scanned-probe microscopy (SPM) technique. Self-assembled monolayers (SAMs) with controlled surface energy were studied systematically in a controlled-humidity chamber. AFAM amplitude images of a micropatterned, graded-surface-energy SAM sample revealed that image contrast depended on both ambient humidity and surface energy. Quantitative AFAM point measurements indicated that the contact stiffness remained roughly constant for the hydrophobic SAM but increased monotonically for the hydrophilic SAM. To correct for this unphysical behavior, a viscoelastic damping term representing capillary forces between the tip and the SAM was added to the data analysis model. The contact stiffness calculated with this revised model remained constant with RH, while the damping term increased strongly with RH for the hydrophilic SAM. The observed behavior is consistent with previous studies of surface energy and RH behavior using AFM pull-off forces. Our results show that surface and environmental conditions can influence accurate measurements of nanomechanical properties with SPM methods such as AFAM.     

Wettability and crystalline orientation of Cu nanoislands on SiO<Subscript>2</Subscript> with a Cr underlayer

Cu thin films were grown by sputter deposition on SiO₂ substrates with a Cr underlayer that is known to improve the adhesion between Cu and SiO₂. The initial stage of Cu growth was investigated using transmission electron microscopy. Results showed that non-wetting spherical Cu nanoislands were formed with a random crystalline orientation on Cr/SiO₂, and evolved into a randomly oriented polycrystalline thin film. These results were then compared with our previous results on the initial growth of Cu on SiO₂ with and without a Ti underlayer. A quantitative model was proposed to explain the difference in dependence of the wettability of microscopic nanoislands and that of the adhesion of macroscopic thin films on interfacial interactions and surface energies. PACS 61.46.+w; 68.35.Md; 68.35.Np     

Protective sol-gel coating on silicate phosphor used in light emitting diodes

In this study, an orange-red silicate phosphor that is used in light emitting diodes (LEDs) was coated with a SiO₂ blocking layer via a sol-gel reaction of tetra-ethyl ortho-silicate (TEOS) to investigate its reliability as an encapsulant. A sol-gel coating protects the phosphor surface from moisture and reactive materials and improves the reliability of the phosphor. The efficacy of the phosphor coating following an 85 °C and 85 relative humidity (Rh)% test decreased by 7%, whereas an uncoated phosphor coating decreased by 35%. A SiO₂ sol-gel coating decreases the luminous efficiency by a small amount with each coating.     

Rearrangement of the Ultrasmooth Surface of La3Ga5SiO14 Crystals at Heating

The morphology and phase composition of the surface of La₃Ga₅SiO₁₄ (langasite) crystals at annealing in a temperature range 1000–1200°C have been studied using electron and atomic force microscopy. It has been shown that trigonal lanthanum oxide (La₂O₃) crystals with sizes to 3–4 μm, as well as a microstructure with sizes to 50 μm with gallium excess, with the approximate composition of 15 mol % La₂O₃, 65 mol % Ga₂O₃, and 20 mol % SiO₂ are formed on the surface of langasite crystals annealed in air at temperatures above 1100°C. Possible reasons for thermal destruction of the compound can be a significant rearrangement of the disordered crystal structure of langasite caused by the interaction with air oxygen and under the intense surface diffusion of atoms of the crystal, as well as the incongruent character of melting of the La₃Ga₅SiO₁₄ compound. The revealed thermal destruction of the surface of langasite crystals should be taken into account when using this material to fabricate piezoelectric elements for operation at high temperatures.