Fabrication of submicron gratings in fused silica by F<Subscript>2</Subscript>-laser ablation

Submicron surface-relief gratings were fabricated on fused silica by F₂-laser ablation with nanosecond duration pulses from a high-resolution 157-nm optical processing system. A 157 nm wavelength projection mask was prepared by ArF-laser ablation to form a 20-μm period grating of equal lines and spaces. A 25-fold demagnification of the mask by a Schwarzschild objective generated gratings of an 830-nm period and a 250 nm modulation depth, as characterized by SEM, AFM and HeNe-laser beam diffraction. Received: 24 April 2002 / Accepted: 25 April 2002 / Published online: 4 December 2002 RID="*" ID="*"Corresponding author. Fax: +49-551/503 599, E-mail: jihle@llg.gwdg.de     

Femtosecond waveguide writing: a new avenue to three-dimensional integrated optics

Using tightly focussed femtosecond laser pulses, waveguides can be fabricated inside various glasses and crystals. This technique has the potential to generate not only planar but three-dimensional photonic devices. In this paper we present, to the best of our knowledge, the first true three-dimensional integrated optical device, a 1×3 splitter fabricated in pure fused silica. The optical properties of this device and possibilities for the fabrication of complex high-density integrated optical elements are discussed. Received: 23 December 2002 / Accepted: 6 January 2003 / Published online: 28 March 2003 RID="*" ID="*"Corresponding author. Fax: +49-3641/65-7680, E-mail: nolte@iap.uni-jena.de     

Sensors for scanning probe microscopy

Scanning probe microscopy is still suffering from reproducible fabrication of the corresponding sensors for mechanical, electrical, optical, thermal and chemical material characterisation with highest lateral and/or time resolution. For batch-fabrication techniques lithographic, dry etching and material problems have to be solved. Using such techniques, several types of cantilevers and tips including piezoresistive detection systems have been demonstrated world-wide for the first time. Only an overview is given here. Received: 2 September 2002 / Accepted: 6 November 2002 / Published online: 5 March 2003 RID="*" ID="*"Corresponding author. Fax: +49-561/804-4136, E-mail: kassing@physik.uni-kassel.de     

Bulk heating of transparent materials using a high-repetition-rate femtosecond laser

Femtosecond laser pulses can locally induce structural and chemical changes in the bulk of transparent materials, opening the door to the three-dimensional fabrication of optical devices. We review the laser and focusing parameters that have been applied to induce these changes and discuss the different physical mechanisms that play a role in forming them. We then describe a new technique for inducing refractive-index changes in bulk material using a high-repetition-rate femtosecond oscillator. The changes are caused by a localized melting of the material, which results from an accumulation of thermal energy due to nonlinear absorption of the high-repetition-rate train of laser pulses. Received: 21 November 2001 / Accepted: 9 July 2002 / Published online: 25 October 2002 RID="*" ID="*"Corresponding author. Fax: +1-858/534-7697, E-mail: cschaffer@ucsd.edu RID="**" ID="**"Current address: University of California, San Diego, Department of Physics, La Jolla, CA 92 093, USA     

Excimer laser polymer ablation: twenty years on

Research and development in excimer laser polymer ablation has been actively pursued for some twenty years, driven by interest in the basic science as well as by numerous applications that have emerged for this high-resolution technique for material removal. This paper reviews some of the basic mechanistic aspects of the UV laser–polymer interaction as a prelude to dealing with practical matters related to polymer processing by ablation. Applications in micro-machining and potential areas for future research are briefly covered. Received: 7 October 2002 / Accepted: 8 February 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +44-1482/465-606, E-mail: p.e.dyer@hull.ac.uk     

Extremely asymmetrical scattering in gratings with weak dissipation: some physical analogies

A detailed analysis of new effects related to extremely asymmetrical scattering (EAS) of bulk and guided weakly dissipating electromagnetic waves in oblique periodic gratings is presented. A very important role of the previously determined critical grating width is demonstrated for EAS in dissipative gratings. Incident and scattered wave amplitudes inside and outside the grating are analysed as functions of dissipation coefficient, grating width, grating amplitude, etc. Strong differences in the patterns of scattering in gratings that are narrower and wider than the critical width are demonstrated and discussed. Deep analogies between EAS and other resonant optical effects, such as attenuated total reflection, Fabry–Pérot interferometry, etc. are revealed and discussed. A physical interpretation of the obtained results is presented. Received: 19 February 2002 / Revised version: 28 June 2002 / Published online: 22 November 2002 RID="*" ID="*"Corresponding author. Fax: +61-7/3864-9079, E-mail: d.gramotnev@qut.edu.au     

Second-order grazing-angle scattering in uniform wide holographic gratings

Grazing-angle scattering (GAS) is a type of Bragg scattering in slanted wide periodic gratings. It occurs when the diffracted order satisfying the Bragg condition (scattered wave) propagates at a grazing angle to the grating boundaries. Previous research has been concerned only with first-order GAS, which has been shown to be a highly unusual type of scattering characterised by a strong resonant increase of amplitudes of the scattered and incident waves in the grating. In this paper, a rigorous numerical study of second-order GAS is presented for the case of bulk TE electromagnetic waves in planar holographic gratings. A highly unusual pattern of strong resonances in the grating, which is strongly different from that for first-order GAS, is predicted, described, and discussed. Physical interpretations of the predicted results are presented. In particular, a special new type of eigenmodes in a slanted wide periodic grating with large amplitude is predicted. These eigenmodes are shown to be guided by the grating alone without any conventional guiding effect in the structure. The typical field structure in such eigenmodes is investigated and discussed. Received: 16 September 2002 / Revised version: 4 November 2002 / Published online: 22 January 2003 RID="*" ID="*"Corresponding author. Fax: +61-7/3864-9079, E-mail: d.pile@osa.org     

Germania/ormosil hybrid materials derived at low temperature for photonic applications

We report on germania/organically modified silane (ormosil) hybrid materials produced by the sol–gel technique for photonic applications. Acid-catalyzed solutions of γ-glycidoxypropyltrimethoxysilane mixed with germanium isopropoxide have been used as precursors for the hybrid materials. Planar waveguide films with a thickness of about 2 μm have been prepared by a single spin-coating process and low-temperature heat treatment from these high germanium content hybrid materials. Atomic force microscopy, thermal gravimetric analysis, UV–visible spectroscopy, and Fourier-transform infrared spectroscopy have been used to investigate the optical and structural properties of the films. The results have indicated that a dense, low absorption, and high transparency (in the visible range) waveguide film could be achieved at a low temperature. A strong UV-absorption region at short wavelengths ∼200 nm, accompanied by a shoulder peaked at ∼240 nm, has been noticed due to the neutral oxygen monovacancy defects. The propagation mode and loss properties of the planar waveguide films have also been investigated by using a prism-coupling technique. Received: 5 November 2002 / Revised version: 27 December 2002 / Published online: 19 March 2003 RID="*" ID="*"Corresponding author. Fax: +65-67909081, E-mail: ewxque@ntu.edu.sg     

150-times phase conjugation by degenerate four-wave mixing in a continuous-wave Nd:YVO4 amplifier

The high phase-conjugate reflectivity of 150, by four-wave mixing in a diode-pumped Nd:YVO₄, has been demonstrated. The phase-conjugate mirror was capable of correcting the phase aberration of a probe beam. The experimental diffraction efficiency of the transmission gratings was 60. Received: 8 April 2002 / Revised version: 10 June 2002 / Published online: 25 September 2002 RID="*" ID="*"Corresponding author. Fax: +81/43-290-3490, E-mail: omatsu@image.tp.chiba-u.ac.jp     

VUV F<Subscript>2</Subscript> laser ablation of sodium chloride

We report an investigation of the ablation of NaCl crystals at the 157-nm wavelength of the F₂ laser where there is very strong excitonic absorption. Probe-beam deflection and etch-rate measurements show that the interaction is characterised by a low ablation threshold (∼80 mJ cm^-2) and a capability for controllable material removal at the nanometer level. Scanning electron microscopy of the exposed surfaces show this to be microscopically smooth but with fine cracks present. It is demonstrated that micron-scale features can be formed in NaCl using 157-nm laser ablation, a result attributed to the strongly localised optical and thermal nature of the interaction. The results are discussed within the framework of a thermal vaporisation model. Received: 29 May 2002 / Accepted: 17 July 2002 / Published online: 4 November 2002 RID="*" ID="*"Corresponding author. Fax: +44-1482/465606, E-mail: p.e.dyer@hull.ac.uk     

Photofabrication of periodic microstructures in azodye-doped polymers by interference of laser beams

Volume holographic gratings and two-dimensional periodic microstructures in azodye-doped polymethylmethacrylate were fabricated, respectively, by interference of two coherent beams of a femtosecond laser and by interference of three coherent beams of a nanosecond laser. The dependence of the first-order Bragg diffraction efficiency and the photoinduced refractive-index modulation of the gratings on the intensity of the writing light was investigated. The measurements of the absorption spectra before and after irradiation with the writing light suggest that the photoinduced gratings were refractive-index-modulated gratings, which arose from a photoinduced decomposition reaction of the azodye molecules through multiphoton absorption. In the experiments involving the interference of three beams, the period of the two-dimensional periodic microstructures was changed by adjusting the angle between the three writing beams. Received: 10 July 2002 / Revised version: 5 September 2002 / Published online: 20 December 2002 RID="*" ID="*"Corresponding author. Fax: +81-774/955206, E-mail: jhsi@photon.jst.go.jp     

Geometrical optical modeling of femtosecond setups having angular dispersion

A reliable and efficient method based on a geometrical optical approach is presented to model the propagation of ultrashort pulses in optical systems. It is shown that the commonly used method to determine the group delay of the spectral components of a pulse from their geometrical optical path lengths is only correct for aberration-free optical systems. In the case of systems with angular dispersion and imaging errors, a correction to the path values obtained from ray-tracing calculations must be applied, since for specific systems neglect of the correction causes significant errors. A technique for performing this correction is presented. Two optical arrangements used for the generation and detection of tunable THz radiation by the femtosecond tilted-pulse-front excitation technique are analyzed to demonstrate the indispensability of the correction. Received: 29 July 2002 / Revised version: 22 October 2002 / Published online: 29 January 2003 RID="*" ID="*"Corresponding author. Fax: +36-72/501-571, E-mail: kozma@fizika.ttk.pte.hu     

Deep drilling of metals by femtosecond laser pulses

Results of recent investigations on deep drilling of metals by femtosecond laser pulses are reported. At high laser fluences, well above the ablation threshold, femtosecond lasers can drill deep, high-quality holes in metals without any post-processing or special gas environment. It is shown that for high-quality drilling of metals, the following processes are important: (1) laser-induced optical breakdown of air containing metal vapor and small metal particles (debris) generated by multi-pulse femtosecond laser ablation, (2) transformation of laser pulses into light filaments, and (3) low-fluence finishing. Received: 15 November 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +49-511/2788-100, E-mail: ch@lzh.de     

Efficient submicron processing of metals with femtosecond UV pulses

The generation of submicron-sized holes on metal surfaces by applying femtosecond UV laser pulses was investigated. Different optical schemes based on a Schwarzschild-type reflective objective were used to reach optimized ablation quality and efficiency in different applications (hole ablation, through-hole drilling, generation of surface patterns consisting of holes, etc.). Submicron-sized holes and hole patterns were ablated onto metal surfaces and drilled through ∼5-μm-thick steel foils with 600-nm diameter on the output side. Using a special optical interferometric method, large-area surface processing of high-conductivity materials in the submicron regime was performed. Combining these techniques with the application of high-repetition-rate ultra-short UV laser sources, large-area sub-μm processing of all kinds of materials in industrial environments is possible. Received: 28 February 2002 / Accepted: 12 March 2002 / Published online: 25 October 2002 RID="*" ID="*"Corresponding author. Fax: +49-551/503599, E-mail: psimon@llg.gwdg.de     

The photo-neutronrefractive effect

Since its discovery in 1966, the photorefractive effect, i.e. the change of the refractive index upon illumination with light, has been studied extensively in various materials and has turned out to play a key role in modern optical technologies like photonics. This article focuses on substances that change their refractive index for neutrons when irradiated with light. In analogy to light optics, we call them photo-neutronrefractive. After a short introduction to the relevant concepts of neutron optics, two materials exhibiting this effect, a photopolymer and an electrooptic crystal, are presented. Further, we discuss the progress made concerning the development of creating light-induced gratings for neutron diffraction, which culminated in the setup of an interferometer for cold neutrons. Experiments performed on photo-neutronrefractive materials are surveyed and the variety of corresponding results obtained is presented, including a discussion of their impact on material science, neutron optics, and the foundations of physics. Received: 23 July 2002 / Published online: 25 October 2002 RID="*" ID="*"Corresponding author. Fax: +43-1/4277-9511, E-mail: martin.fally@exp.univie.ac.at     

Theory of optical bistability in a non-linear quasi-waveguide

Optical bistable behavior in a quasi-waveguide containing non-linear film has been experimentally investigated in several publications in the past years; however, the physical mechanism for optical bistability has not been theoretically explained. In the present letter, we propose a theoretical model and successfully explain the observed optical bistability of both the reflected light and the scattered light (m-lines) in a non-linear quasi-waveguide. The optical bistability in the non-linear quasi-waveguide is due to the scattering-type wavevector mismatch mechanism. Received: 10 July 2002 / Revised version: 10 September 2002 / Published online: 20 December 2002 RID="*" ID="*"Corresponding author. Fax: +86-25/359-5535, E-mail: htwang@nju.edu.cn     

Saturation effect in azobenzene polymers used for polarization holography

The saturation behavior of diffraction efficiency has been experimentally studied and theoretically modeled in azobenzene polyesters by recording polarization gratings with two beams of orthogonal circular polarization. The model is an extension of the phenomenological expression of Kakichashvili, derived from the rate equations for photoanisotropic materials, taking into account the effect of saturation with time and intensity. The saturation model of the polyester material can be used for the computer simulation of a polarization holographic data storage system under development. The simulation is based on fast Fourier transforms, taking the parameters of the recording material and the optical processes into account. Agreement between measured and simulated results proves the applicability of the saturation model as an efficient tool in the optimization of the system. Received: 16 September 2002 / Published online: 3 April 2003 RID="*" ID="*"Corresponding author. Fax: +36-1/463-4194, E-mail: pvarhe@math.bme.hu     

Sub-ps laser microstructuring of soft X-ray Mo/Si multilayer gratings

The sub-picosecond laser microstructuring of multilayer gratings is presented in this paper. A micromachining system operating with a 0.5 ps KrF laser at 248 nm was used to etch grating structures with a groove width of 1–2 μm in Mo/Si and Si/Mo multilayers. Atomic force microscopy, scanning electron microscopy and X-ray reflectivity were used to characterize the microetched patterns. The ω-scans around the 1st Bragg maximum show symmetric satellites up to 3rd order, with positions corresponding to the grating period. The use of sub-picosecond laser pulses minimizes the thermally affected zone and enhances the quality of the etched features. Short pulse laser processing is advantageous for the fabrication of high spatial resolution microstructures required in X-ray optics. Received: 21 May 2002 / Accepted: 19 August 2002 / Published online: 15 January 2003 RID="*" ID="*"Corresponding author. Email: dpapa@iesl.forth.gr     

Towards nanostructuring with femtosecond laser pulses

Detailed investigations of the possibilities for using femtosecond lasers for the nanostructuring of metal layers and transparent materials are reported. The aim is to develop a simple laser-based technology for fabricating two- and three-dimensional nanostructures with structure sizes on the order of several hundred nanometers. This is required for many applications in photonics, for the fabrication of photonic crystals and microoptical devices, for data storage, displays, etc. Measurements of thermionic electron emission from metal targets, which provide valuable information on the dynamics of femtosecond laser ablation, are discussed. Sub-wavelength microstructuring of metals is performed and the minimum structure size that can be fabricated in transparent materials is identified. Two-photon polymerization of hybrid polymers is demonstrated as a promising femtosecond laser-based nanofabrication technology. Received: 20 November 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +49-511/2788-100, E-mail: ch@lzh.de     

Time-resolved photoemission electron microscopy of magnetic field and magnetisation changes

Owing to its parallel image acquisition, photoemission electron microscopy is well suited for real-time observation of fast processes on surfaces. Pulsed excitation sources like synchrotron radiation or lasers, fast electric pulsers for the study of magnetic switching, and/or time-resolved detection can be utilised. A standard approach also being used in light optical imaging is stroboscopic illumination of a periodic (or quasi-periodic) process. Using this technique, the time dependence of the magnetic field in a pulsed microstrip line has been imaged in real time exploiting Lorentz-type contrast. Similarly, the corresponding field-induced changes in the magnetisation of cobalt microstructures deposited on the microstrip line have been observed exploiting magnetic X-ray circular dichroism as a contrast mechanism. The experiment has been performed at the UE 56/1-PGM at BESSY II (Berlin) in the single-bunch mode. Received: 2 September 2002 / Accepted: 2 September 2002 / Published online: 5 March 2003 RID="*" ID="*"Corresponding author. Fax: +49-6131/392-3807, E-mail: krasyuk@mail.uni-mainz.de