Fabrication of submicron gratings in fused silica by F<Subscript>2</Subscript>-laser ablation

Submicron surface-relief gratings were fabricated on fused silica by F₂-laser ablation with nanosecond duration pulses from a high-resolution 157-nm optical processing system. A 157 nm wavelength projection mask was prepared by ArF-laser ablation to form a 20-μm period grating of equal lines and spaces. A 25-fold demagnification of the mask by a Schwarzschild objective generated gratings of an 830-nm period and a 250 nm modulation depth, as characterized by SEM, AFM and HeNe-laser beam diffraction. Received: 24 April 2002 / Accepted: 25 April 2002 / Published online: 4 December 2002 RID="*" ID="*"Corresponding author. Fax: +49-551/503 599, E-mail: jihle@llg.gwdg.de     

Femtosecond waveguide writing: a new avenue to three-dimensional integrated optics

Using tightly focussed femtosecond laser pulses, waveguides can be fabricated inside various glasses and crystals. This technique has the potential to generate not only planar but three-dimensional photonic devices. In this paper we present, to the best of our knowledge, the first true three-dimensional integrated optical device, a 1×3 splitter fabricated in pure fused silica. The optical properties of this device and possibilities for the fabrication of complex high-density integrated optical elements are discussed. Received: 23 December 2002 / Accepted: 6 January 2003 / Published online: 28 March 2003 RID="*" ID="*"Corresponding author. Fax: +49-3641/65-7680, E-mail: nolte@iap.uni-jena.de     

Sensors for scanning probe microscopy

Scanning probe microscopy is still suffering from reproducible fabrication of the corresponding sensors for mechanical, electrical, optical, thermal and chemical material characterisation with highest lateral and/or time resolution. For batch-fabrication techniques lithographic, dry etching and material problems have to be solved. Using such techniques, several types of cantilevers and tips including piezoresistive detection systems have been demonstrated world-wide for the first time. Only an overview is given here. Received: 2 September 2002 / Accepted: 6 November 2002 / Published online: 5 March 2003 RID="*" ID="*"Corresponding author. Fax: +49-561/804-4136, E-mail: kassing@physik.uni-kassel.de     

Bulk heating of transparent materials using a high-repetition-rate femtosecond laser

Femtosecond laser pulses can locally induce structural and chemical changes in the bulk of transparent materials, opening the door to the three-dimensional fabrication of optical devices. We review the laser and focusing parameters that have been applied to induce these changes and discuss the different physical mechanisms that play a role in forming them. We then describe a new technique for inducing refractive-index changes in bulk material using a high-repetition-rate femtosecond oscillator. The changes are caused by a localized melting of the material, which results from an accumulation of thermal energy due to nonlinear absorption of the high-repetition-rate train of laser pulses. Received: 21 November 2001 / Accepted: 9 July 2002 / Published online: 25 October 2002 RID="*" ID="*"Corresponding author. Fax: +1-858/534-7697, E-mail: cschaffer@ucsd.edu RID="**" ID="**"Current address: University of California, San Diego, Department of Physics, La Jolla, CA 92 093, USA     

Excimer laser polymer ablation: twenty years on

Research and development in excimer laser polymer ablation has been actively pursued for some twenty years, driven by interest in the basic science as well as by numerous applications that have emerged for this high-resolution technique for material removal. This paper reviews some of the basic mechanistic aspects of the UV laser–polymer interaction as a prelude to dealing with practical matters related to polymer processing by ablation. Applications in micro-machining and potential areas for future research are briefly covered. Received: 7 October 2002 / Accepted: 8 February 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +44-1482/465-606, E-mail: p.e.dyer@hull.ac.uk     

Extremely asymmetrical scattering in gratings with weak dissipation: some physical analogies

A detailed analysis of new effects related to extremely asymmetrical scattering (EAS) of bulk and guided weakly dissipating electromagnetic waves in oblique periodic gratings is presented. A very important role of the previously determined critical grating width is demonstrated for EAS in dissipative gratings. Incident and scattered wave amplitudes inside and outside the grating are analysed as functions of dissipation coefficient, grating width, grating amplitude, etc. Strong differences in the patterns of scattering in gratings that are narrower and wider than the critical width are demonstrated and discussed. Deep analogies between EAS and other resonant optical effects, such as attenuated total reflection, Fabry–Pérot interferometry, etc. are revealed and discussed. A physical interpretation of the obtained results is presented. Received: 19 February 2002 / Revised version: 28 June 2002 / Published online: 22 November 2002 RID="*" ID="*"Corresponding author. Fax: +61-7/3864-9079, E-mail: d.gramotnev@qut.edu.au     

Second-order grazing-angle scattering in uniform wide holographic gratings

Grazing-angle scattering (GAS) is a type of Bragg scattering in slanted wide periodic gratings. It occurs when the diffracted order satisfying the Bragg condition (scattered wave) propagates at a grazing angle to the grating boundaries. Previous research has been concerned only with first-order GAS, which has been shown to be a highly unusual type of scattering characterised by a strong resonant increase of amplitudes of the scattered and incident waves in the grating. In this paper, a rigorous numerical study of second-order GAS is presented for the case of bulk TE electromagnetic waves in planar holographic gratings. A highly unusual pattern of strong resonances in the grating, which is strongly different from that for first-order GAS, is predicted, described, and discussed. Physical interpretations of the predicted results are presented. In particular, a special new type of eigenmodes in a slanted wide periodic grating with large amplitude is predicted. These eigenmodes are shown to be guided by the grating alone without any conventional guiding effect in the structure. The typical field structure in such eigenmodes is investigated and discussed. Received: 16 September 2002 / Revised version: 4 November 2002 / Published online: 22 January 2003 RID="*" ID="*"Corresponding author. Fax: +61-7/3864-9079, E-mail: d.pile@osa.org     

Germania/ormosil hybrid materials derived at low temperature for photonic applications

We report on germania/organically modified silane (ormosil) hybrid materials produced by the sol–gel technique for photonic applications. Acid-catalyzed solutions of γ-glycidoxypropyltrimethoxysilane mixed with germanium isopropoxide have been used as precursors for the hybrid materials. Planar waveguide films with a thickness of about 2 μm have been prepared by a single spin-coating process and low-temperature heat treatment from these high germanium content hybrid materials. Atomic force microscopy, thermal gravimetric analysis, UV–visible spectroscopy, and Fourier-transform infrared spectroscopy have been used to investigate the optical and structural properties of the films. The results have indicated that a dense, low absorption, and high transparency (in the visible range) waveguide film could be achieved at a low temperature. A strong UV-absorption region at short wavelengths ∼200 nm, accompanied by a shoulder peaked at ∼240 nm, has been noticed due to the neutral oxygen monovacancy defects. The propagation mode and loss properties of the planar waveguide films have also been investigated by using a prism-coupling technique. Received: 5 November 2002 / Revised version: 27 December 2002 / Published online: 19 March 2003 RID="*" ID="*"Corresponding author. Fax: +65-67909081, E-mail: ewxque@ntu.edu.sg     

150-times phase conjugation by degenerate four-wave mixing in a continuous-wave Nd:YVO4 amplifier

The high phase-conjugate reflectivity of 150, by four-wave mixing in a diode-pumped Nd:YVO₄, has been demonstrated. The phase-conjugate mirror was capable of correcting the phase aberration of a probe beam. The experimental diffraction efficiency of the transmission gratings was 60. Received: 8 April 2002 / Revised version: 10 June 2002 / Published online: 25 September 2002 RID="*" ID="*"Corresponding author. Fax: +81/43-290-3490, E-mail: omatsu@image.tp.chiba-u.ac.jp     

VUV F<Subscript>2</Subscript> laser ablation of sodium chloride

We report an investigation of the ablation of NaCl crystals at the 157-nm wavelength of the F₂ laser where there is very strong excitonic absorption. Probe-beam deflection and etch-rate measurements show that the interaction is characterised by a low ablation threshold (∼80 mJ cm^-2) and a capability for controllable material removal at the nanometer level. Scanning electron microscopy of the exposed surfaces show this to be microscopically smooth but with fine cracks present. It is demonstrated that micron-scale features can be formed in NaCl using 157-nm laser ablation, a result attributed to the strongly localised optical and thermal nature of the interaction. The results are discussed within the framework of a thermal vaporisation model. Received: 29 May 2002 / Accepted: 17 July 2002 / Published online: 4 November 2002 RID="*" ID="*"Corresponding author. Fax: +44-1482/465606, E-mail: p.e.dyer@hull.ac.uk