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1.
声空化所引发的特殊的物理、化学环境为制备高效发光的多孔硅薄膜提供了一条重要的途径.实验结果表明,声化学处理对于改善多孔硅的微结构,提高发光效率和发光稳定性都是一项非常有效的技术.超声波加强阳极电化学腐蚀制备发光多孔硅薄膜,比目前通用的常规方法制备的样品显示出更优良的性质.这种超声的化学效应源于声空化,即腐蚀液中气泡的形成、生长和急剧崩溃,在多孔硅的腐蚀过程中,孔中的氢气泡,由于超声波的作用增加了逸出比率和塌缩,有利于孔沿垂直方向的腐蚀. 关键词: 声空化方法 微结构 发光特性 多孔硅  相似文献   

2.
改变阳极氧化的工艺条件,制备出光致发光峰能量位于1.4—2.0eV范围内的大量多孔硅样品,其中45块样品在大气中存放一年,102块样品在200℃下热氧化(累计达200小时).在上述两种情况下,光致发光峰能量在氧化后都会聚到1.70—1.75eV能量范围.假设在充分氧化的多孔硅中包裹纳米硅的氧化层中,存在发光能量处于~1.70—1.75eV的发光中心,上述实验结果可以用量子限制/发光中心模型解释. 关键词:  相似文献   

3.
锗/多孔硅和锗/氧化硅薄膜光致发光的比较研究   总被引:2,自引:0,他引:2  
采用磁控溅射技术,以锗为溅射靶,在多孔硅上沉积锗薄膜,沉积时间分别为4,8和12 min,及以锗-二氧化硅复合靶为溅射靶,在n型硅衬底上沉积了含纳米锗颗粒的氧化硅薄膜,锗与总靶的面积比分别为5%,15%,30%.各样品在氮气氛中分别经过300,600及900℃退火30 min.对锗/多孔硅和锗/氧化硅薄膜进行了光致发光谱的对比研究,用红外吸收谱分析了锗/多孔硅的薄膜结构.实验结果显示,锗/多孔硅薄膜的发光峰位于517 nm附近,沉积时间对发光峰的强度有显著影响,锗层越厚峰强越弱.锗/氧化硅薄膜的发光峰位于580 nm附近,锗与总靶的面积比对发光峰的强度影响较大,锗/氧化硅薄膜中的锗含量越高峰强越弱.不同的退火温度对样品的发光峰强及峰位均没有明显影响.可以认为锗/多孔硅的发光峰是由多孔硅与孔间隙中的锗纳米晶粒两者界面的锗相关缺陷引起的,而锗/氧化硅的发光峰来自于二氧化硅的发光中心.  相似文献   

4.
蓝光发射多孔硅RTO过程中的尺寸分离效应   总被引:1,自引:0,他引:1       下载免费PDF全文
富笑男  李新建  贾瑜 《物理学报》2000,49(6):1180-1184
对用水热腐蚀技术制备的、具有蓝光发射的多孔硅样品在快速热氧化(RTO)处理前后其光致发光谱、硅纳米颗粒的大小及尺寸分布变化进行了研究.实验发现,新鲜多孔硅样品经过RTO处理后,其光致发光谱整体蓝移并由单发光峰分裂为两个发光峰;与此对应,样品中的硅纳米颗粒在整体减小的同时出现尺寸分离现象.这一结果表明,多孔硅中的短波长发射也具有强烈的尺寸相关性. 关键词:  相似文献   

5.
方容川  杨嘉玲 《发光学报》1992,13(4):275-280
用电化学腐蚀法制备出多孔硅系列样品.室温下具有明亮可见的光致发光.增大电解电流或延长腐蚀时间,发光光谱明显地“蓝移”;提高样品测量温度,发光光谱也明显地“蓝移”。红外吸收光谱表明多孔硅中除了硅丝骨架以外,还含有H、F及O等元素,随着腐蚀时间的增加,F和O原子的相对含量增加.实验结果表明,多孔硅在可见光区的发光现象是一种量子尺寸效应.  相似文献   

6.
对在无光照条件下,电化学阳极腐蚀方法制备的n型多孔硅进行了光致发光性能研究.在325nm的激发光照射下,多孔硅样品的发光峰在620nm处,其橙红色的发光肉眼可见,并随阳极电流密度与腐蚀时间乘积的增加.先增强,后减弱.其发光峰位置与量子限制效应、表面态及缺陷态有关,发光强度与样品表面深度较浅孔洞所占的面积比成正比.  相似文献   

7.
离子注入对多孔硅可见光发射特性的影响   总被引:1,自引:0,他引:1  
本文在前期对多孔硅发光机理研究的基础上,研究了离子注入对多孔硅光致发光的影响.实验表明离子注入除了可以降低多孔硅光致发光的强度外,还将使多孔硅的光致发光光谱谱峰产生蓝移、半高宽展宽,并在多孔硅发光谱带中产生一些发光减弱区和次峰结构.文中最后对实验现象做了解释.  相似文献   

8.
研究了不同时间腐蚀的多孔硅的光致发光性能与多孔硅的表面形貌和少子寿命之间的关系。结果表明,多孔硅的发光来自与氧空位有关的缺陷,而多孔硅表面的氢原子能够钝化多孔硅表面的非辐射中心从而提高多孔硅的发光效率。多孔硅的空隙度随腐蚀时间的延长而增大,这也导致了多孔硅的少子寿命的降低,从而造成多孔硅的光致发光效率随多孔硅空隙度的增大以及少子寿命的降低而提高。另外,原子力显微照片表明长时间的腐蚀使多孔硅表面层被化学腐蚀,从而降低了多孔硅表面的粗糙度。  相似文献   

9.
稀土(Tb,Gd)掺杂多孔硅的光致发光性能研究   总被引:3,自引:0,他引:3       下载免费PDF全文
用电化学方法对多孔硅薄膜进行了稀土(Tb,Gd)离子的化学掺杂.利用荧光分光光度计测试了样品的光致发光特性.用扫描电子显微镜研究了薄膜的表面形貌.用卢瑟福背散射谱分析了稀土离子在多孔硅薄膜中的分布情况.结果表明,Tb的掺入显著增强了多孔硅的发光强度,并且发光峰位出现蓝移.这是由于Tb3+的4f能级5D4—7F35D47F关键词: 多孔硅 稀土掺杂 光致发光  相似文献   

10.
采用水热腐蚀法制备了4个腐蚀时间不同的铁钝化多孔硅样品,铁钝化多孔硅样品表面呈海绵结构,随着腐蚀时间增加,样品表面的平整度下降,腐蚀孔尺寸差别有增大的趋势。在250nm光激发下,样品发光峰位于620nm附近,半峰全宽约130nm。腐蚀时间从10min增加到40min,4个样品的发光峰并未出现定向的红移或蓝移。结合样品傅里叶变换红外吸收光谱的结果,铁钝化多孔硅的光致发光行为可归因于量子限制-发光中心作用,相应的辐射复合发光中心为非桥氧空穴。  相似文献   

11.
Ultrasonically enhanced anodic electrochemical etching is developed to fabricate luminescent porous silicon (PS) material. The samples prepared by the new etching method exhibit superior characteristics to those prepared by conventional direct current etching. By applying ultrasonically enhanced etching, PS microcavities with much higher quality factors can be fabricated. The improved quality induced by ultrasonic etching can be ascribed to increased rates of escape of hydrogen bubbles and other etched chemical species from the porous silicon pillars' surface. This process will cause the reaction between the etchant and the silicon wafer to proceed more rapidly along the vertical direction in the silicon pores than laterally.  相似文献   

12.
Single-mode, highly directional and stable photoluminescence (PL) emission has been achieved from porous silicon microcavities (PSMs) fabricated by pulsed electrochemical etching. The full width at half maximum (FWHM) of the narrow PL peak available from a freshly etched PSM is about 9 nm. The emission concentrates in a cone of 10° around the normal of the sample, with a further reduced FWHM of ∼5.6 nm under angle-resolved measurements. Only the resonant peak is present in such angle-resolved PL spectra. No peak broadening is found upon exposure of the freshly prepared PSM to a He-Cd laser beam, and the peak becomes somewhat narrower (∼5.4 nm) after the PSM has been stored in an ambient environment for two weeks. At optimized etching parameters, even a 4-nm FWHM is achievable for the freshly etched PSM. In addition, scanning electron microscopy (SEM) plane-view images reveal that the single layer porous Si formed by pulsed current etching is more uniform and flatter than that formed by direct current (dc) etching, demonstrated by the well-distributed circular pores with small size in the former in comparison with the irregular interlinking pores in the latter. The SEM cross-section images show the existence of oriented Si columns of 10 nm diameter along the etching direction within the active layer, good reproducibility and flat interfaces. It is thus concluded that pulsed current etching is superior to dc etching in obtaining flat interfaces within the distributed Bragg reflectors because of its minor lateral etching. Received: 7 March 2001 / Accepted: 23 July 2001 / Published online: 30 October 2001  相似文献   

13.
Size‐controlled porous silicon‐based nanoparticles are prepared by pulsed electrochemical etching of single crystal silicon wafers, followed by ultrasonic fracture of the freestanding porous layer. When high‐current density pulses are applied periodically during the porous layer etching process, a porous multilayer results in which porous layers are separated by thin layers of much higher porosity. Ultrasonic fracture selectively cleaves the porous film along these high‐porosity perforations, providing greater size control and improved yields (by 5x) of the resulting porous nanoparticles. The effect of pulse width and repetition rate is systematically studied: tunability of the average nanoparticle size in the range 160–350 nm is demonstrated.  相似文献   

14.
多孔硅的微结构与发光特性研究   总被引:5,自引:1,他引:4       下载免费PDF全文
利用原子力显微镜(AFM)和光致荧光(PL)光谱对一系列直流腐蚀和脉冲腐蚀的多孔硅的微结构及发光特性进行了对比研究.表面和侧面的AFM结果表明,多孔硅表面呈“小山”状,有许多小的、突出的硅颗粒.在相同的腐蚀条件(等效)下,脉冲腐蚀的样品表面Si颗粒更加尖锐、突出,侧面的线状结构更明显,多孔硅层更厚.对应的PL谱,脉冲腐蚀的样品发光更强.量子限制效应的理论可以比较成功地解释这个结果 关键词:  相似文献   

15.
Microstructure and physical characteristics of porous silicon (PS), such as thickness, bulk porosity, dielectric permittivity, and refractive index depend directly on the production conditions, e.g., on the electrolyte composition, anodizing current density, duration of etching, etc. Various possibilities of applications of PS generate high interest towards elaboration of new or modified operative nondestructive methods for testing the microstructure characteristics of PS layer for the adjustment of its processing regimes.According to the mechanism of formation of PS and experimental data on the morphology of PS layers, a porous layer is represented as a structure with cylindrical pores of equal lengths piercing the silicon frame. This approximation allows considering the structure using the parallel plate model within parallel-connected capacitances of the silicon frame and the air or liquid dielectric-filled pores.A method for obtaining information on the volume porosity, thickness, and dielectric permittivity of a PS layer by means of two measurements of the structure capacitance—in dry air and when the pores are filled by a condensed medium having a dielectric permittivity strongly differing from that of air (e.g., methanol)—is described.Sufficiently good agreement has been revealed between the data calculated from the capacitance measurements and obtained by other methods.  相似文献   

16.
In this paper, we present an experimental study on the chemical and electrochemical etching of silicon carbide (SiC) in different HF-based solutions and its application in different fields, such as optoelectronics (photodiode) and environment (gas sensors). The thin SiC films have been grown by pulsed laser deposition method. Different oxidant reagents have been explored. It has been shown that the morphology of the surface evolves with the etching conditions (oxidant, concentration, temperature, etc.). A new chemical polishing solution of polycrystalline 6H-SiC based on HF:Na2O2 solution has been developed. Moreover, an electrochemical etching method has been carried out to form a porous SiC layer on both polycrystalline and thin SiC films. The PL results show that the porous polycrystalline 6H-SiC and porous thin SiC films exhibited an intense blue luminescence and a green-blue luminescence centred at 2.82 eV (430 nm) and 2.20 eV (560 nm), respectively. Different device structures based on both prepared samples have been investigated as photodiode and gas sensors.  相似文献   

17.
Narrow photoluminescence peaks with a full-width at half-maximum of 14–20 nm are obtained from porous silicon microcavities (PSM) fabricated by the electrochemical etching of a Si multilayer grown by molecular beam epitaxy. The microcavity structure contains an active porous silicon layer sandwiched between two distributed porous silicon Bragg reflectors; the latter were fabricated by etching a Si multilayer doped alternatively with high and low boron concentrations. The structural and optical properties of the PSMs are characterised by scanning electron microscopy and photoluminescence (PL). The wavelength of the narrow PL peaks could be tuned in the range of 700–810 nm by altering the optical constants.  相似文献   

18.
《Current Applied Physics》2015,15(8):870-876
A technique is demonstrated to detect DNA hybridization based on surface layer of Au/porous silicon microcavity (Au/PSM) substrate for very small amount of biomolecules. Simulations show that the increase of effective refractive index for the first layer of PSM will cause a blue shift for its reflectance spectrum, and the blue shift becomes less with the increase of refractive index for one more layers. In experiments, such a blue shift of reflectance spectrum of PSM comes from the increase of refractive index by DNA hybridization on the surface. The detection limit of Au/PSM biosensor is 15.15 nM for 19-base pair DNA, which is comparable to that of reported biosensors based on porous silicon (PS). Therefore such an Au/PSM could be very useful to develop simple, rapid and sensitive optical biosensors when the amount of target is very small.  相似文献   

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