电子束曝光机偏转系统及可动物镜分析

电子束大扫描场偏转系统设计中 ,像差的确定是一个必须解决的实际问题。以SDS 3电子束曝光机的磁复合偏转系统为基础 ,以双通道扫描原理进行扫描 ,分析了像差与电子束主轨迹的关系。给出了可动物镜的条件 ,并利用这一条件分析电子束最佳轨迹的结构和方法。并使用计算机辅助设计研究电子束曝光机聚焦偏转系统的结构。由该电子束曝光机试验结果表明 ,复合系统结构简单紧凑 ,像差小而可以不用动态校正。采用矢量描写电子轨迹 ,以积分式表示像差。以 0 .0 0 5rad半张角 ,5× 10 -5的高压纹波 ,5 0mm的像距 ,10mm× 10mm扫描场的边脚处 ,使动态校正前的总像差为 0 .0 3μm。     

Design of a mirror aberration corrector and a beam separator for LEEM

A SPLEEM (spin polarized low energy electron microscope) has been designed with a numerical simulation of electrostatic and magnetic field distributions and electron ray trajectories. Highly (more than 90%) spin polarized electron source has been used. A Wien type spin manipulator and a magnetic lens type spin rotator are used to align spin direction. A magnetic field free objective lens is designed to observe magnetic domain structure of magnetic materials. High or low magnification mode can be selected by using a combined electrostatic and magnetic objective lens for a high spatial resolution and a wide imaging area observation. An electrostatic mirror aberration corrector is installed after the image forming objective lens. A double deflection 45° beam separator is used to bend the direction of electrons from the source to the objective lens and from the objective lens to the mirror aberration corrector.     

普遍的电偏转三级象差系数及其与光栅图的关系

本文将电偏转三级象差的工作推广,使适合于入射处就有电场的情况,导出一个能在任意平面上求三级偏转象差的公式,对分离式电偏转系统及叠合式偏转系统(Deflection Yoke)均适用。并经过数学处理,使公式简洁,换算方便,还将象差系数积分公式中的轴上场E₀(z)的一、二级微商全部消除,以提高计算精度。为了和我们的前一工作相对应,符号的命名和计算格式也与文献[1]相同,最后还描述了顶点在屏上的圆锥形细束在偏转后产生的光栅畸变、场曲、象散、彗差等图形与这套系数的对应关系。这种关系也完全适合于磁偏转三级象差的情况。 关键词：     

Aberrations theory of a time dependent magnetic field lens

We analyze new forms of aberrations affecting a time dependent magnetic field lens recently proposed. The lens consist of an axially symmetric ellipsoidal solenoid producing a spatially uniform but time pulsating homogeneous field. The dynamics of electrons emitted by some object and injected into this coil shows that this system is capable of focusing a parallel beam or produce images free of geometrical aberrations. The cardinal elements of this lens change periodically in positions and therefore to obtain a stationary image it is necessary to employ a chopped electron beam. Two forms of aberrations originate from the finite duration of the electron pulse and the energy dispersion of the incoming beam (chromatic aberration). Their image degradation effects are quite similar and result from recording different axially displaced images at some fixed stationary plane. We show how, by adjusting the parameters characterizing the magnetic pulse and introducing small apertures that increase the depth of focus, their effects can be reduced or in some cases eliminated. Other forms of instrumental aberrations characteristic of this time dependent magnetic field lens are briefly discussed.     

Aberrations theory of a time dependent magnetic field lens

We analyze new forms of aberrations affecting a time dependent magnetic field lens recently proposed. The lens consist of an axially symmetric ellipsoidal solenoid producing a spatially uniform but time pulsating homogeneous field. The dynamics of electrons emitted by some object and injected into this coil shows that this system is capable of focusing a parallel beam or produce images free of geometrical aberrations. The cardinal elements of this lens change periodically in positions and therefore to obtain a stationary image it is necessary to employ a chopped electron beam. Two forms of aberrations originate from the finite duration of the electron pulse and the energy dispersion of the incoming beam (chromatic aberration). Their image degradation effects are quite similar and result from recording different axially displaced images at some fixed stationary plane. We show how, by adjusting the parameters characterizing the magnetic pulse and introducing small apertures that increase the depth of focus, their effects can be reduced or in some cases eliminated. Other forms of instrumental aberrations characteristic of this time dependent magnetic field lens are briefly discussed.     

Electron optics for high throughput low energy electron microscopy

Novel electron-optical components and concepts aiming at improving the throughput and extending the applications of a low energy electron microscope (LEEM) have been developed. An immersion magnetic objective lens can substantially reduce e-e interactions and the associated blur, as electrons do not form a sharp crossover in the back-focal plane. The resulting limited field of view of the immersion objective lens in mirror mode can be eliminated by immersing the cathode of the electron gun in a magnetic field. A dual illumination beam approach is used to mitigate the charging effects when the LEEM is used to image insulating surfaces. The negative charging effect, created by a partially absorbed mirror beam, is compensated by the positive charging effect of the secondary beam with an electron yield exceeding 1. On substrates illuminated with a tilted beam near glancing incidence, large shadows are formed on even the smallest topographic features, easing their detection. On magnetic substrates, the magnetic flux leaking above the surface can be detected with tilted illumination and used to image domain walls with high contrast.     

The aberration theory of a combined electron focusing–deflection system with a rotating deflection field following the rotation of the electrons

A new type of combined magnetic focusing–electrostatic deflection systems whose orientation of deflection field is rotated synchronously with the beam electrons is proposed. This rotation deflection field can be formed by twistification of tube wall electrode (TWE) deflectors. Formulae are derived for the first-order optical properties, third-order geometrical aberrations and first-order chromatic aberrations of this system. A program was written in FORTRAN for numerical computation. An example is given; the computation results show that compared to the conventional systems, the proposed new system has lower deflection aberration coefficients.     

电子束在磁透镜场中压缩传输理论

 给出了强流相对论电子束在磁透镜场中压缩传输系数的理论公式和计算结果，其结果说明能量传输效率随磁透镜比的增大而减小，随阴极处磁感应强度的增大而增大，对于一个特定的系统存在一个能通量密度的极限值。     

高斯轨迹参量的线性变换对于电子光学象差的影响

本文从比较普遍的观点出发,采用矢量形式描写高斯轨迹,运用矩阵形式表示象差,从而讨论了普遍的高斯轨迹参量线性变换下的电子光学系统的三级象差和象差系数及其偏微商。由此得到了电子光学广义的Fraunhofer条件(即消除各向同性和各向异性彗差的条件),证明了在此条件下,象散和场曲取极值或稳定值。利用上述的普遍公式和结果,讨论了固定束和扫描束电子光学系统中光阑位置变化的影响,还讨论了阴极发射系统中磁浸没的影响。 关键词：     

宽束和细束电磁复合聚焦球面阴极透镜的象差理论

本文研究了对宽束和细束阴极透镜普遍适用的电磁复合聚焦球面阴极透镜的象差理论。在考虑物场和象场弯曲以及阴极面上磁场和横向电场不为零的情况下,导出了任意理想象面上的一级近轴横向象差和包括色象差在内的全部三级横向象差矩阵公式。所得的结果较为完整、普遍。本文详细讨论了宽束和细束阴极透镜的关系,并用轨迹法和变分法严格证明了:当考虑阴极面逸出电子具有一定的初能量和初角度分布,并采用准规范化电位表示的近轴轨迹方程来讨论系统的理想成象时,宽束和细束两类阴极透镜从象差理论以至导出的三级横向象差、象差系数表示式都可以统一起来。本文采用矢量描写轨迹,运用矩阵表示象差,形式简洁,象差系数积分收敛,适合于计算机计算。 关键词：     

细电子束像差与畸变参量非劣解中的最优解

以电子束偏转磁场的像差和畸变为目标,对参量进行非劣解中找出贴近理想的最优解。以SDS-3电子束曝光机的磁复合偏转系统为基础,分析了像差与电子束主轨迹的关系。并给出了磁聚焦和静电的偏转场相复合情况下竖轴的3级几何像差系数和1级色差系数公式。应用中表明,复合系统结构简单紧凑,像差小而可以不用动态校正。     

STUDY ON THE MAGNETIC COMPRESSION OF INTENSE RELATIVISTIC ELECTRON BEAMS UNDER A CONVERGING MAGNETIC GUIDE FIELD

The magnetic compression of intense relativistic electron beams under a converging magnetic guide field is studied theoretically and experimentally in this paper. A code to evaluate the compressed-beam transport is set up. Calculations of the beam energy fraction transmitted through magnetic mirror are in good agreement with experimental data.     

飞秒电子衍射系统中调制传递函数的理论计算

主要介绍了飞秒电子衍射系统的组成及设计指标. 包括光电阴极、电子聚焦系统、电子偏转系统、双微通道板(MCP)电子探测器等，并给出了基本的设计思路、设计结果. 光电阴极是由位于蓝宝石晶体上面的银膜构成，为了获得足够小的电子束斑以及减小电子上靶时的角度，紧贴栅极后放置一个100μm的小孔，对电子束的形状和大小进行限制. 采用磁电子透镜进行聚焦，电子衍射图样由放置在样品后面的双MCP像增强器进行探测. 在设计计算时，用Monte Carlo方法对光电子的初能量、初角度以及初位置分布进行抽样，用有限元法计算磁透镜 关键词： 飞秒电子枪 有限元法 Monte Carlo模拟 调制传递函数     

磁透镜与偏转器的复合系统的电子光学性质和象差理论

本文研究了旋转对称磁透镜和磁偏转器的复合系统,给出了场和轨迹的普遍表达式。利用向量形式来描写电子轨迹,讨论了高斯光学性质。运用变分原理(费马原理)计算了三级象差,得出了复合系统普遍的象差公式。它们以矩阵的形式表出,形式简洁,便于进行数值计算。本文的结果具有较大的普遍性,概括了文献上关于偏转象差的已有结果,并对复合系统作了较完整的论述和严格的计算,因而可以广泛地研究各种电子束管和电子光学仪器的偏转象差。     

多注速调管电子光学系统的模拟

 利用3维电磁场计算软件MAFIA对L波段100 kW多注速调管的多注电子光学系统进行了模拟计算。通过编写宏程序使MAFIA可以计算旁轴电子枪的性能参数，给出了磁场分布并分析了磁场的差异对电子轨迹的影响。模拟表明：中心注磁场具有轴对称性，在均匀区，轨迹的波动性最小，电子轨迹的层流性也最好； 内层电子注径向磁场较小，轨迹的波动性略大于中心注的情况；外层电子注靠近极靴处径向磁场最大，电子轨迹的波动最大，层流性最差。计算并模拟显示了18个电子注在收集极入口处的发散情况。     

Velocity separation in electron beam by static electromagneticfield of helical symmetry

In a homogeneous magnetic field superimposed one a helically symmetric electrostatic one, the electron drift trajectory depends on the particle energy and on the particle velocity component relative to the magnetic field. These effects can be used (1) to suppress gyrotron magnetron-injection gun instabilities caused by electron reflection from the magnetic mirror and (2) for separation of electron beam energy fractions in multistage depressed collectors     

复合的电子束扫描系统象差的动态校正

本文在文献[1]的基础上讨论了复合的电子束扫描系统象差的动态校正问题。讨论了采用不同的电磁多极场作为动态校正器的可能性。推导了圆形校正透镜、偏转校正场和四极、六极校正场引起的附加象差的公式。由此证明了由这种圆形校正透镜、偏转校正场和四极校正场等组成的动态校正系统在一定条件下可以消除复合的电子束扫描系统中大多数的三级偏转象差。 关键词：     

10MeV LIA强流电子束的聚焦

 研究了10MeV直线感应加速器（LIA）的输出束在螺线管透镜作用下的聚焦特性。通过解非线性电子轨迹方程获得实验所需的磁场范围，并解析分析空间电荷效应、发射度、透镜球面像差和色散像差对最小焦斑直径的限制，同时，对束质心螺旋运动影响束聚焦的情况亦做了较为详细的分析。实验结果表明：在合适的螺线管聚焦磁场下，可获得直径≤6mm的电子束焦斑，与理论分析结果基本一致。     

普遍的磁偏转三级象差系数以及它们与PI枪光栅图形的关系

本文将磁偏转三级象差的工作推广,使适用于电子束入射处就有磁场的情况,导出一个能在任意平面上求三级偏转象差的公式,并经过数学处理,使公式简洁、换算方便。最后运用这套象差系数就水平一列式电子枪(PI枪)经偏转后所产生的光栅图形进行了分析和探讨。     

Multiplexed phase-conjugate holographic data storage with a buffer hologram

We describe and demonstrate a volume holographic storage system in which a phase-conjugate object beam is reconstructed by the same reference beam that was used for recording. An intermediate hologram is used as a temporary buffer, recorded with its own reference beam and the data-bearing object beam. Reading this buffer hologram with the phase conjugate of its reference beam reconstructs the phase conjugate of the object beam, which can then be recorded into the desired volume hologram for long-term storage. This method combines the immunity to lens aberrations provided by phase-conjugate readout with the simplicity of using the same multiplexed reference beam for both recording and readout. Only a single pair of phase-conjugate reference beams is required. Experimental results are shown with a single LiNbO(3):Fe crystal used as both buffer and storage holograms and a self-pumped phase-conjugate mirror in BaTiO(3) that provides the pair of phase-conjugate reference beams.