激光干涉光刻法制作100 nm掩模

 介绍了一种利用激光干涉光刻技术得到特征图形,并通过离子束刻蚀将图形转移到铬层上,从而获得掩模的方法。针对掩模透光率以及对干涉图形对比度可能产生影响的两个参数分别进行了数值仿真,从而证明此方法的可行性和参数的优化选择。自搭干涉光刻实验系统,用257 nm的激光光源实现光刻,得到特征尺寸为100 nm的图形,再经过离子束刻蚀,最终得到周期200 nm、线宽100 nm的掩模。     

入射光束角度及强度偏差对多光束干涉光刻结果的影响

建立了多光束干涉光刻干涉场内光强分布的数学模型,仿真计算了双光束、三光束、四光束干涉曝光情况下,入射光束存在角度偏差以及各入射光强不同时的干涉图样,并与理想状态的模拟结果进行对比.结果表明:光束入射角度偏差主要影响干涉图样的形状和周期;入射光的光强不同是降低图形对比度的主要因素.利用402nm波长激光光源进行多光束干涉光刻实验.设定激光器输出功率32mW,每两束光夹角为16°,通过控制曝光、显影工艺,双光束干涉光刻产生周期为1.4μm的光栅、点阵和孔阵结构,三光束干涉光刻产生周期为1.7μm的六边形图形阵列.该模型可为利用干涉光刻技术制备微细周期结构,提高光刻图形质量,提供一定的理论参考.     

空间外差光谱仪干涉图非均匀性校正研究

空间外差光谱仪在研制加工过程中,由于加工误差及胶合误差会使CCD接收到的干涉图存在光强分布不均匀现象,降低了变换光谱的准确性。基于对空间外差光谱仪干涉图光强非均匀性的产生机制与特点分析基础上,提出了一种干涉图非均匀性校正方法,该方法通过对实际干涉图进行单调分解、分段归一化及重新组合过程求解出光强分布函数,然后将变换光谱与光强分布函数倒数的傅里叶变换结果进行卷积来获得非均匀性校正后的光谱,最后将校正光谱进行逆傅里叶变换从而实现干涉图的非均匀性校正。将此方法应用于空间外差试验仪的近红外实测单色光干涉图的非均匀性校正,结果显示,该方法可以有效改善干涉图光强分布的非均匀性,抑制变换光谱的边频信号,通过与仿真的理想光谱对比,1 571和1 572 nm光谱校正前后噪声的减小率分别达到40.7%和24%,提高了光谱信噪比和准确性。     

具有存储功能的衍射图像光刻系统的研制

研制了一种在衍射光变图像器件上进行信息存储的新型数字化激光光刻系统。采用空间光调制器作图形自动输入,双远心投影成像系统在光刻记录面上缩微图形。通过光栅干涉光学头对记录面上的微图形进行干涉调制,使微图形上产生干涉条纹,条纹空间频率范围为500-1200lp／mm。在光刻胶干版上的存储实验表明,在衍射光变图像上的单角度存储信息密度大于3．7Mbit／cm^2。改变干涉条纹取向、条纹间隔和需要存储的图形,光刻系统可实现信息的旋转复用存储。上述光刻系统将会在防伪和衍射光变图像器件制造领域有良好应用。     

四激光束干涉光刻制造纳米级孔阵的理论分析

为提供一个在大范围内曝光出深亚微米甚至纳米级周期性密集图形的廉价的方法,研究了四激光束干涉光刻的原理,分析了干涉曝光的结果,并进行了计算机模拟.用现有的光源,如442 nm、365 nm、248 nm、193 nm激光,曝光得到的图形的临界尺寸容易做到180～70 nm.具有实际上无限制的焦深和容易实现的大视场.适合硅基CCDs、平场显示器的场发射电极阵列等光电子器件中大范围内超亚微米级的周期性孔阵或点阵结构图形的制作.     

空间外差光谱仪基频波长的定标

基于空间外差光谱仪的工作原理和干涉图的产生机制,提出了一种空间外差光谱仪的基频波长定标方法。沿干涉条纹法线方向求取像元相位,通过对法线方向的像元相位进行线性拟合求取相位直线的斜率,该相位斜率与干涉条纹法线方向的空间频率具有对应关系,在获取两种已知波长的激光干涉图的相位斜率后即可确定该空间外差光谱仪的基频波长。四组波长数据的测试结果显示,用该方法定标的基频波长具有很好的一致性,标准差为0.044 nm。定标结果仿真的光谱与实测光谱完全一致,证明了该方法的可行性。     

平面涡旋光干涉的分析

光学涡旋具有独特的相位奇点和螺旋相位结构, 多个涡旋光场之间的干涉呈现出新颖的强度和相位分布特征.通过在平面波背景中嵌入涡旋相位产生平面涡旋光场, 采用数值模拟方法研究了多个平面涡旋光场之间的干涉, 并分析了两个平面涡旋光场的中心间距及拓扑荷值对涡旋产生和湮灭的影响.进一步数值研究了对称分布的多个点涡旋光之间的干涉, 结果表明通过改变涡旋光束数目或者拓扑荷值, 可获得不同分布的对称涡旋阵列光场.利用计算全息并通过空间光调制器, 实验上实现了具有不同拓扑荷值的多个对称点涡旋光场的干涉, 其干涉图样与模拟结果吻合.实验结果不仅证实了数值模拟结果, 也为实验研究复杂涡旋光场的干涉提供了一种有效方法.     

在粗糙表面上用液晶空间光调制器进行振动测量

为实现在一段时间内连续实时观测振动物体的全息干涉图形,采用覆盖铝箔的喇叭作为振动物体,利用铝箔原有未经特殊处理表面反射的漫反射光成像,并用光寻址液晶空间光调制器(Liquid crystal-sparial lightmodulator,LC-SLM)作为全息记录载体,来实现振动测量。实验中采用时间平均干涉测量法,得到了不同振动频率下物体的干涉图形。同时在连续改变振动物体的振动频率时,可以清晰地观察到物体振动全息干涉图形的变化过程,即近实时的全息干涉图形。     

利用干涉光刻技术制备LED表面微纳结构

为了制备大面积周期性微纳米结构以提高LED的发光效率,建立了劳厄德(Lloyd)干涉光刻系统。简单分析了该干涉光刻系统的工作原理,并介绍了利用干涉曝光工艺制备一维光栅、二维点阵、孔阵列等纳米结构图形的具体实验过程。最后对纳米图形进行结构转移,制备出了金属纳米结构。实验结果表明:利用劳厄德干涉光刻系统,可以在20 mm×20 mm大小的ITO衬底上稳定制备出周期为450 nm的均匀光栅或二维点阵列图形结构,它们的占空比也是可以调节变化的。     

多平面波干涉的光学涡旋晶格特性研究

多平面波干涉(MPWI)是产生光学涡旋晶格(OVL)的一种经典方式.通过定义波矢空间坐标系,提出了一种基于MPWI的OVL调控方法,模拟生成了四个平面波和五个平面波干涉产生的OVL,计算了其梯度力和能流分布,分析了其在微粒操纵领域中的应用.然后,通过调控其部分波矢大小和旋转波矢角度,得到了更加丰富灵活的光场分布.最终,通过分析其梯度力和能流分布,发现该调控方法可以定制适合粒子操纵的特殊光场.该研究丰富了基于MPWI的OVL的空间模式,为OVL的应用提供了新思路.     

Periodic sub-micrometric structures using a 3D laser interference pattern

A method to obtain three-dimensional sub-micrometric periodic structures is presented. The experimental set-up consists in a pulsed UV laser beam source (λ = 355 nm) coming into an interferometer in order to generate four beams converging inside a chamber. According to the directions, to the relative intensities and to the polarizations of these four beams, a 3D interference pattern can be obtained inside the overlapping volume of these four beams; the characteristics of the four laser beams have been optimized in order to obtain a maximal contrast of intensity. In order to visualize the interference pattern, its contrast and its stability at each laser pulse, a video camera coupled to an oil immersion microscope objective has been installed above the interferometer. By suppressing the central beam, it is also possible to generate a bidimensional interference pattern which defines an hexagonal structure in the (1 1 1) plane with a period of 377 nm.This optical set-up has been used to obtain 3D sub-micrometric periodic structures in negative photoresists. Experiments consist in a one- or multi-pulse irradiation of the photoresist followed by a development procedure which leads to a sub-micrometric face-centred cubic structure cut in a (1 1 1) plane with a cell parameter of 650 nm. The optimization of the experimental conditions is presented for two kinds of photoresists; the role of the substrate according to its reflectivity at the laser wavelength and its influence on the interference pattern is also discussed.     

基于体布拉格光栅的光谱合成的数值分析

 建立了分别用一个和两个反射式体布拉格光栅实现两路和三路光束合成的物理模型,模型中考虑了体布拉格光栅的吸收,并假设入射光束的光谱具有高斯线型。通过对两路和三路光谱合成的数值分析可知:当光谱宽度为0.1 nm时,两路和三路光谱合成的效率分别为98.76%和97.69%;当光谱宽度为0.3 nm的时候,对应的效率分别为97.34%和95.78%。随着光谱宽度的增加,合成的效率明显降低。当光谱宽度较窄时,实现多路光束较高的合成效率是可行的,这为高能激光的获得提供了一种确实可行的方法。     

Peculiarities of spontaneous grating generation in light-sensitive waveguide layers during holographic grating formation

The generation of spontaneous (noise) gratings during the simultaneous formation of a holographic grating in thin (on the order of the cutoff thickness of the TE₀ waveguide mode) AgCl-Ag films by two laser beams with λ = 532 nm and polarization vectors that make an angle of 45° with the plane of incidence have been studied. The electron microscopy images and diffraction patterns have revealed a significant difference of the spontaneous-grating structure from the structure obtained under irradiation by one laser beam. The spontaneous gratings have a significant spread in the directions of their wave vector, and the diffraction pattern (recorded using a probe beam with λ = 337 nm) has the form of a bundle of diverging arcs that intersect at one point. This difference is caused by self-diffraction from the holographic grating, which is responsible for the main diffraction peaks with odd orders, the growth of spontaneous gratings because of the interference of the beams diffracted by the holographic grating with the waveguide TE₀ modes scattered in the film, and silver transport to the interference minima. The diffraction patterns are quantitatively analyzed and the period of the new (formed under two-beam irradiation) spontaneous gratings is calculated. The calculation results are in good agreement with the experimental data.     

激光烧蚀制备分布反馈式有机激光器件

采用激光烧蚀的方法结合激光全息技术,直接在高分子聚合物MEH-PPV薄膜表面烧蚀光栅结构,制备了分布反馈式有机激光器。这一方法具有工艺简单、光栅参数的可控性和重复性好等优点。器件MEH-PPV的膜厚是400 nm。利用波长为355 nm的Nd-YAG纳秒激光器进行单脉冲烧蚀,获得的光栅周期和光栅高度分别为370 nm和 100 nm。利用飞秒激光放大器作为泵浦源激射DFB激光器件,得到激射阈值约为182 μJ·cm^-2·pulse^-1,光谱的波峰约在609 nm处,半高宽为4.2 nm。通过改变两光束的夹角获得了周期为360, 370, 380, 390 nm的光栅,它们对应的激光波峰分别为602.91, 609.24, 613.26, 619.01 nm。     

Laser diode beam shaping by optical interference

We recently proposed a novel beam shaping technique that employs Lloyd’s mirror interference. In this study, we apply this technique to three commercial laser diodes: laser diodes used for optical pumping of solid-state lasers, for laser beam printers, and for laser displays. The elliptical output beams from these laser diodes could be transformed into nearly circular beams by inserting a mirror-polished GaAs substrate below the active layer of each laser diode and adjusting its height. The experimentally observed far-field patterns were predicted fairly well by numerical calculations based on Huygens’ integral. We confirmed that our beam shaping technique is applicable to laser diodes with various wavelengths and vertical beam divergence angles. We also describe the monolithic configuration of the beam shaping system, which can be fabricated by dry etching.     

Analysis on the laser beam pointing instability induced fringe shift and contrast dilution from different interferometers used for writing fiber Bragg grating

This paper presents an analysis on the effect of laser beam pointing instability on the fringe shift and hence the contrast dilution of superposed fringes from two beam interferometers. The interferometers analyzed are those commonly used in writing fiber Bragg grating (FBG) such as phase mask, bi-prism and phase mask based Talbot/Holographic type. The beam pointing instability is incorporated as slight change in the angle between two interfering beams. The relative immunity of different interferometers to laser beam pointing is discussed vs location of FBG writing plane from the beam splitter. The effect of the beam pointing was minimum in proximity FBG writing by phase mask. The effect, in terms of fringes contrast dilution, was worst in case of large length interferometers e.g. phase mask based-Talbot interferometer. For intermediate length prism interferometers, the effect was moderate. For a given length interferometer, the fringe shift was directly proportional to beam pointing angle and inversely proportional to fringe separation. Theoretical analysis is verified experimentally by studying the fringe instability of interference pattern formed by a bi-prism of angle 2^o with the copper vapour laser (CVL, λ = 510 nm) beams of different beam pointing instabilities.     

Sound-velocity measurements in gases by laser-induced electrostrictive gratings

Laser-induced electrostrictive gratings have been applied to measure the adiabatic sound velocity in various gases on a single-pulse basis. The gratings are generated by the interference of two parallel polarized, crossed excitation beams arising from a pulsed Nd: YAG laser at 532.1 nm, and are detected by diffracting a probe beam originating from a cw Ar⁺ laser operating single-line at 514.5 nm. Measurements were performed in the overlap volume of unfocused and focused excitation beams. Using unfocused beams, the sound velocities in various gases at pressures of 5 bar were measured with a statistical error for single-pulse measurements of about 0.3%. With focused beams, the accuracy of the measurements is reduced because of the propagation of the sound waves out of the smaller overlap volume of 0.2 mm diameter and 4 mm length. Measurements with focused beams were performed in air and CO₂, with an error of about 1%.     

双激光束干涉条纹处理方法的研究

在分析了双激光束干涉条纹特点的基础上 ,提出了基于遗传算法的最小二乘非线性曲线拟合法 ,以实现对双激光束干涉条纹的高精度细分定位。该算法以高斯调制余弦平方函数为拟合模型 ,为克服目标函数在参数空间上存在多极 (小 )值现象 ,引入了具有全局优化能力的遗传算法以实现对目标函数寻优。仿真及实验研究表明 :该方法用于双光束干涉条纹处理具有很好的鲁棒性和自适应能力     

三光束飞秒激光干涉在GaP,ZnSe表面诱导二维复合纳米-微米周期结构

报道了三光束飞秒激光干涉在GaP和ZnSe晶体表面诱导二维复合纳米-微米周期结构.改变三束光的偏振组合方式,可以得到不同的纳米-微米复合结构.理论计算了相应偏振条件下光场强度分布、椭偏度分布和偏振方向分布.实验和理论计算结果表明,烧蚀斑上的微米长周期结构是由三光束干涉的强度花样决定,短周期纳米结构是由光场的偏振干涉花样决定.这些研究在纳米材料制备、超高密度光存储以及材料特性周期性调制等方面有很大的应用前景.     

Laser surface patterning using a Michelson interferometer and femtosecond laser radiation

We report on a simple method to obtain surface gratings using a Michelson interferometer and femtosecond laser radiation. In the optical setup used, two parallel laser beams are generated using a beam splitter and then focused using the same focusing lens. An interference pattern is created in the focal plane of the focusing lens, which can be used to pattern the surface of materials. The main advantage of this method is that the optical paths difference of the interfering beams is independent of the distance between the beams. As a result, the fringes period can be varied without a need for major realignment of the optical system and the time coincidence between the interfering beams can be easily monitored. The potential of the method was demonstrated by patterning surface gratings with different periods on titanium surfaces in air.