外并干涉仪中声光调制器特性对测量精度的影响

提出并论证了混合型声光调制器衍射光的笛射级次混叠特性,它使衍射光强中存在着驱动射频率的谐波项,此外入射光束的漂移将引起衍射光的频率漂移。分析了在外差干涉仪中应用它们对精度的影响,提出了消除这些因素影响的方法;利用双声光调制器外差干涉,并在干涉仪的内部提取测量的参考信号。用双声光调制器的外差干涉仪可以纳米测量。     

纳米精度外差干涉仪非线性漂移的研究

在纳米精度外差干涉仪中，由于非线性温度漂移，成为外差干涉仪实现纳米精度测量的重要误差源。本文对差动干涉仪的理论分析得出如下的结论，干涉仪中除了测量光路和参考光路以外，还存在参考光误差分量和测量光误差分量的额外光路，从而引和了干涉混叠，产生非线性漂移：１／４波片的相位延迟量误差和安装是引入非线性漂移的主要因素，其影响程度是一阶的，提高波片对加工精度，并尽量减少其级数可降低非线性漂移。     

基于双声光移频器的外差式激光多普勒测振计

分析了单声光移频器构成的外差式激光多普勒测振计中声光移频器驱动信号的频率稳定性和信号功率对待测振动信号的影响.为了降低声光移频器驱动信号频率漂移的影响,提出双声光移频器构成的外差式激光多普勒测振计,并基于直接数字频率合成技术,以相位噪音低、初始相位可控的芯片AD9912为核心器件,完成了声光移频器驱动信号生成及处理模块的设计.开展了双声光移频器组成的外差式激光多普勒测振计的振动测量实验,结果表明,驱动信号生成装置可以驱动声光移频器正常工作,且测振计的本底噪音在0~10kHz频带范围内呈现平坦分布,0~1kHz频段内噪音得到明显抑制,较单声光移频器构成的外差式激光多普勒测振计有显著改善.     

基于双声光移频器的外差式激光多普勒测振计

分析了单声光移频器构成的外差式激光多普勒测振计中声光移频器驱动信号的频率稳定性和信号功率对待测振动信号的影响.为了降低声光移频器驱动信号频率漂移的影响,提出双声光移频器构成的外差式激光多普勒测振计,并基于直接数字频率合成技术,以相位噪音低、初始相位可控的芯片AD9912为核心器件,完成了声光移频器驱动信号生成及处理模块的设计.开展了双声光移频器组成的外差式激光多普勒测振计的振动测量实验,结果表明,驱动信号生成装置可以驱动声光移频器正常工作,且测振计的本底噪音在0～10kHz频带范围内呈现平坦分布,0～1kHz频段内噪音得到明显抑制,较单声光移频器构成的外差式激光多普勒测振计有显著改善.     

共线外差干涉系统相位特性

以单束正交线偏振光为光源,利用索列尔-巴比涅相位补偿器使相位连续变化,采用锁相放大器进行数据采集,设计了一种由光纤耦合输出的窄频半导体激光器和双声光调制器组成的共线外差干涉系统,对其相位特性进行了研究,分析了激光束漂移及光源谱线宽度对相位测量的影响.实验表明:系统的相位分辨率为0.3611μm,相位灵敏度为27.386°/mm,测量误差为0.090rad;可以消除由声光调制器光强调制引起的相位误差,抑制激光束漂移引起的误差,以及减弱环境因素产生的噪声对测量结果的影响.     

用超声衍射效应实现位移测量

本文叙述了用声光调制器实现位移测量的原理。入射光束与声光调制器间的相对运动引起的多普勒频移被反映光衍射的频移中去，通过测量该多普勒频移，测量出声光调制器的位移的大小，文中给出了实验结果。     

用于原子干涉仪的拉曼光的制备

原子干涉仪是利用原子物质波的特性而实现的干涉仪,广泛应用于精密测量领域.在原子干涉仪中,通过拉曼光对原子进行相干操作,拉曼光的质量直接影响着干涉仪的技术指标.基于注入锁定技术,采用普通半导体激光器、声光调制器,实现了功率、频率和位相稳定的拉曼光的制备,并对拉曼光的相位噪声技术指标进行了测试.     

相位、振幅调制两用声光调制器设计

针对实际应用中大多的光调制器只能实现单参数调制的情况,提出一种既可以调相又可以调幅的声光调制器的设计方案.运用矩阵级数解法求解正常声光相互作用Raman-Nath方程,通过计算机编程进行数值求解,得到衍射光的衍射光强和附加位相变化,从而指出以往解法的一些不合理性,并找到声波功率和衍射光的光强和位相的关系,为声光效应的位相调制和振幅调制设计提供了一种可行的方法.结合调制声波频率,可在同一个调制器上进行调幅、调相、调偏转方向.     

并联驱动声光调制器在连续波线性调频激光雷达系统中的应用

讨论了连续波线性调频激光雷达系统中声光调制器的设计方法，并给出了具体设计参数。提出应用两个并联驱动且声声沿相反方向传播的声光调制器来补偿由于超声波频率的改变而引起的衍射光方向的偏转，并同时提高了扫频带宽。该器件应用于线性调频激光测距实验中，取得了可信的实验结果。     

跨尺度亚纳米分辨的可溯源外差干涉仪

提出了一种能够实现跨尺度测量具有亚纳米分辨力的可溯源外差干涉仪,利用小型化碘稳频532 nm激光器,将激光频率溯源至国际计量委员会推荐的复现米定义谱线之一的R(56)32-O(a10)上;使用双频激光空间分离的设计方法,抑制了双频激光混叠引起的测量位移非线性误差,补偿了光纤与声光调制器引入的相位噪声;通过高精度的相位测量技术,使相位测量分辨率达到了0.017°.干涉仪的不确定度评估结果显示,100 mm的量程内,其不确定度达322 pm,实现了跨尺度亚纳米分辨力可溯源的位移测量.     

High-speed scanning fiber-optic heterodyne interferometer using a micro-electro-mechanical system mirror and an f-theta lens

This paper describes a novel fiber-coupled heterodyne interferometer using a micro-electro-mechanical system (MEMS) mirror and an f-theta lens. In this interferometer system, the cross-polarized laser beams operating at 2 μm with the frequency difference of 100 kHz are introduced by means of the two acousto-optic modulators (AOM). The sample with diameter of 300 mm is uniformly scanned by the 1 mm laser beam with the help of the combined optical scanning configuration, a MEMS mirror and an f-theta lens. The output intermediate signal from the two channels, reference channel and the measurement channel, are processed in the 12 bit analog-to-digital (A/D) process system. Details of our interferometer scheme are discussed.     

Common path interferometer based on the modified Michelson configuration using a reflective grating

A common-path interferometer using the modified Michelson system with a reflective grating is proposed for quantitative phase imaging. The frequency spectrum of the object beam is split into two beams using a beam splitter. One beam is diffracted into +1, 0, and −1 orders by the reflective grating to act as an object beam, and the other beam is low-filtered and diffracted by a pinhole mirror to act as a reference beam. Three phase-shifted interferograms can be simultaneously captured using the proposed interferometer, and the specimen phase can then be reconstructed from the three interferograms. Experiments are carried out to prove the precision, real-time ability, and stability of the proposed method.     

双波长绝对距离外差干涉仪的研究

提出了一种采用双纵模稳频激光器的新型绝对距离测量外差干涉仪。该干涉仪探测两个波长各自的外差信号, 通过测量两信号的相位差, 直接测量出合成波的小数级次。指出了两波长间的相互耦合对测量精度的影响, 提出了补偿方法, 在２５ ｍ 的测量范围取得了 １４０ μｍ 的测量精度。     

基于外差干涉的微振动测量技术研究

针对外差干涉的微振动测量存在稳定性低、严重受环境噪声影响等缺点,提出了对光路的改进方案。根据差分原理将其改为双光路,消除环境噪声的干扰;通过偏振分光棱镜（PBS）将椭圆偏振光变为线偏光,提高干涉信号幅值;改进频移装置(AOM),抑制频率漂移;增加光阑,滤除杂散光,提高系统信噪比。通过探测5 kHz压电陶瓷振动信号,以及2.5 MHz高频激光超声信号进行实验验证,结果表明:信号稳定且无纹波,系统分辨率为2.3 nm,信噪比提高16.7倍。两路干涉信号幅值分别为552 mV和736 mV,较传统外差干涉信号幅值提高近10倍,有利于纳米量级微振动信号的检测。     

Polarization Sagnac interferometer with postmodulation for gravitational-wave detection

We describe a polarization Sagnac interferometer with an in-loop half-wave plate that allows signal detection at the reciprocal port of the beam splitter while maintaining the ability to detect the signal at a dark fringe. Postmodulation and balanced heterodyne detection are used to recover the signal. This topology is simple to control because of its common-path characteristics and its collinear signal and local oscillator. The robustness of this scheme to amplitude and frequency fluctuations of the laser is demonstrated. Intraloop birefringence in this interferometer acts as a loss, reducing the power on the detector. The magnitude of this loss is discussed and experimentally verified.     

Dual-frequency paired polarization phase shifting ellipsometer

A novel dual-frequency paired polarization phase shifting ellipsometer (DPPSE) is proposed and experimentally demonstrated. It combines the features of the phase shifting interferometer and common-path polarized heterodyne interferometric ellipsometer where the ellipsometric parameters (EP) of a specimen are measured accurately. The experimental results verify that DPPSE is capable of determining the full dynamic range of EP. In addition, the properties of dual-frequency paired linearly polarized laser beam in DPPSE perform in common phase noise rejection mode. It is insensitive to environmental disturbance and laser frequency noise. The capability of DPPSE to perform higher accuracy EP measurement than conventional ellipsometer is verified according to error analysis.     

Balanced heterodyne signal extraction in a postmodulated Sagnac interferometer at low frequency

We describe a balanced-heterodyne postmodulated Sagnac interferometer signal extraction method that is suitable for gravitational wave detection. The method is simple to implement by placement of a polarization-selective modulator after the beam splitter in the dark port of the interferometer. The postmodulated Sagnac interferometer retains its common path advantage and exhibits insensitivity to laser frequency noise below, at, and above the heterodyne frequency. Balanced detection reduces sensitivity to laser amplitude noise. In this scheme mirror displacement signals were rf demodulated and observed from 0.2 to 10kHz.     

Microscopy of non-birefringent transmissive phase samples using Sagnac laser interferometer

A cyclic interferometer, appropriately combined with a long working distance microscope objective, is adapted for quantitative phase microscopy. In such an arrangement, the sample information, in terms of the diffracted orders emerging from the sample, is carried by both the counter propagating beams within the cyclic interferometer. However, positioning the sample close to the input/output cube beam splitter and use of a suitably converging laser beam of light as the input to the interferometer ensure that only one of the counter propagating beams carries the object information to the objective while the other beam, which serves as the reference, allows only the undiffracted component to contribute to the process of image formation. Use of suitable polarization optics renders the interferometer its polarization phase shifting property. Using the proposed arrangement, the experimental results showing the quantitative 3D phase rendering of polystyrene microspheres and micro-wells etched in glass are presented.     

Quasi-common-path laser feedback interferometry based on frequency shifting and multiplexing

We present a quasi-common-path laser feedback interferometer based on frequency shifting and multiplexing. The interferometer uses two acousto-optic modulators to shift the frequency of the target-generated feedback light by 2 Omega. A properly aligned mirror is inserted into the feedback path to generate a feedback light frequency shifted by Omega. Phase variations of the two quasi-common-path feedback light beams are simultaneously measured through heterodyne demodulation with two different reference signals. Their subtraction accurately reflects the target displacement. Under typical room conditions, the system's short-period resolution is better than 2 nm, and its 3 min displacement accuracy is 8 nm.