改善轴向分辨率的光瞳滤波器

给出了一种新型滤波器,它即能提高系统的轴向分辨率又不影响其横向分辨率。利用这种滤波器不可以控制远场旁瓣强度的最大值与主瓣强度最大值之比（Ｍ）,从而获得较好的超分辨效果,还根据扩展结果分析了光瞳滤波器的中间区对轴向分辨率的影响。     

光学相干层析成像轴向超分辨研究

为了提高光学相干层析成像(OCT)的轴向分辨率,采用OCT与光学超分辨术相结合的方法,设计了三区相位型和振幅型两种光瞳滤波器,并将制作的光瞳滤波器应用于系统的样品臂中,分别测量不同条件下对应的轴向响应曲线,结果与理论分析基本吻合,实现了轴向分辨率10％以上的提高,从而验证了利用合适光瞳滤波器实现OCT轴向超分辨的可行性.     

三环位相型光瞳滤波器的横向超分辨与轴向焦深扩展

用矢量衍射方法分析了线偏振光入射到带有三环位相型光瞳滤波器的高数值孔径物镜时,焦点的轴向和横向光强分布.数值模拟结果表明,高数值孔径物镜聚焦时需同时考虑光强的轴向和横向分布.通过加入三环位相光瞳滤波器,在实现横向超分辨的同时实现了光学系统轴向焦深扩展和轴向光强分布平坦化,并且位相调制深度变化时,会出现轴向焦移现象.对三环位相光瞳滤波器结构进行了优化,得出了优化结果. 关键词： 光学超分辨 扩展焦深 位相型光瞳滤波器 矢量衍射方法     

超分辨在共焦三维形貌检测术中的应用

通过对共焦三维形貌检测术的分析,根据超分辨理论,在共焦系统中加入环形光瞳滤波器,以期延长系统的动态检测范围,并提高系统的横向分辨率。理论和实验结果表明该方法在适当牺牲轴向分辨率的条件下,能有效地延长系统的动态检测范围,且提高其横向分辨率。     

可调谐位相型光瞳滤波器的横向光学超分辨和轴向扩展焦深

为克服传统光瞳滤波器的缺点,实现系统光学超分辨性能的可调谐性,设计了一种新型可调谐的位相型光瞳滤波器.该光瞳滤波器包括两个λ/4波片和置于其间的λ/2波片,其中λ/2波片分为两个可作相对旋转的区域.研究结果表明,通过旋转λ/2波片的任意一区域不仅可以实现系统横向光学超分辨能力的可调性,而且可以在横向分辨能力提高的同时实现光学系统轴向焦深的扩展以及轴向焦移. 关键词： 光学超分辨 位相型光瞳滤波器 可调谐     

多项式型相位光瞳滤波器实现三维超分辨

为研究连续型相位光瞳滤波器对光学成像系统成像效果的影响,并实现对远场光学成像系统分辨率的提升,设计了一种多项式函数形式的相位型光瞳滤波器,证明其可以实现三维超分辨.给出了其与一种典型三区型相位光瞳滤波器的超分辨效果的对比.通过对比可以发现,在分辨效果的改善上,横向分辨率有明显提升,但施特雷尔比会有所下降.此外,由于此种...     

可调谐位相型光瞳滤波器的横向光学超分辨和轴向扩展焦深

为克服传统光瞳滤波器的缺点，实现系统光学超分辨性能的可调谐性，设计了一种新型可调谐的位相型光瞳滤波器.该光瞳滤波器包括两个λ/4波片和置于其间的λ/2波片，其中λ/2波片分为两个可作相对旋转的区域.研究结果表明，通过旋转λ/2波片的任意一区域不仅可以实现系统横向光学超分辨能力的可调性，而且可以在横向分辨能力提高的同时实现光学系统轴向焦深的扩展以及轴向焦移.     

三区振幅型超分辨光瞳滤波器的设计

提出运用非线性规划及目标规划法,在给定斯特雷耳比S(超分辨模型和艾里模型主瓣最大亮度比)的条件下,设计出使成像系统的横向、轴向及三维分辨率分别达到最大值的环形振幅型超分辨光瞳滤波器。给出超分辨优化设计模型和实例,并作图验证其结果。对超分辨率伴随的旁瓣效应,把滤波器应用于共焦扫描系统,可有效地抑制旁瓣,提高成像信噪比和对比度。此方案用于三区以上振幅型超分辨滤波器及环形纯相位超分辨光瞳滤波器的设计,为超分辨滤波器的设计提供了参考。     

电控径向滤波器的横向超分辨与轴向焦移

提出一种光瞳滤波器来同时实现横向超分辨和轴向焦移效应的电控制.该光瞳滤波器由两偏光镜及包含有径向双折射元件的任意偏振态的电控旋光器组成.利用径向双折射元件对光偏振态的空间调制作用，结合旋光器对任意偏振态光的旋光作用，与两个偏光镜结合，实现了空间偏振态的重新分布.利用庞加莱球及琼斯理论进行了分析，结果表明，借助这种电致位相延迟来实现的偏振态调制效应，可同时实现横向超分辨与轴向焦移效应.对能够同时获得横向超分辨与轴向焦移的情况进行了分析，得到了系统各组成参量及电光调制范围.     

非对称三区光瞳滤波器实现一维横向超分辨

基于严格的光学成像矢量衍射理论,以4倍缩小倍率的成像系统和x线偏振光照明为例,得到经光瞳滤波器调制的大数值孔径光学系统焦区横向场表达式.通过详细研究非对称三区复振幅型光瞳滤波器的内外环归一化半径、各环相位分布和第一层透过率t对y方向分辨率增益比Gty,斯特尔比Sy和第一旁瓣与主瓣相对强度Iry的影响.设计了一种非对称三区相位型光瞳滤波器,实现Gty=0.8345,Sy=0.4087,Iry=0.4923,使得y方向分辨率比没有加光瞳滤波器时提高了将近20%.     

Designing superresolution optical pupil filter with constrained global optimization algorithm

In this paper, a new method for designing three-zone optical pupil filter is presented. The phase-only optical pupil filter and the amplitude-only optical pupil filters were designed. The first kind of pupil for optical data storage can increase the transverse resolution. The second kind of pupil filter can increase the axial and transverse resolution at the same time, which is applicable in three-dimension imaging in confocal microscopy.     

用于高数值孔径物镜的可调光瞳滤波器

根据矢量衍射理论，提出了一种用于提高高数值孔径显微物镜纵向分辨率的可调二元环形光瞳滤波器，通过改变滤波器的环半径获得不同的纵向分辨率，并利用共焦显微术点扩散函数的乘积性大大地降低了旁瓣相对主瓣的比值。模拟结果表明，这种新型滤波器不仅可以提高高数值孔径物镜的纵向分辨率，同时基本上不影响横向分辨率。     

Effect of an annular pupil filter on differential confocal microscopy

Combining differential confocal microscopy and an annular pupil filter, we obtained the normalized axial intensity distribution curve of an optical system. We used the sharp slopes of the axial response curve of the optical system to measure the surface profile of a reflection grating. Experimental results prove that this method can extend the axial dynamic range and improve the transverse resolution of three-dimensional profilometry by sacrificing axial resolution.     

A study of the optical transfer function for annular binary filters

The annular binary pupil filters consist of two transparent annuli obstructed by an annular mask. The optical transfer functions for them are analytically derived under paraxial approximation, and three- and two- as well as one-dimensional numerical plots are presented. It is shown that by changing the parameters of transparent regions it is possible to improve the axial resolution whilst the transverse resolution remains unchanged, compared with an annular lens. Results indicate, as is well known, that this kind of filters can be applied to three-dimensional confocal microscopy.     

Improvement of confocal microscope performance by shaped annular beam and heterodyne confocal techniques

In order to further improve the performance of a confocal microscope (CM) used for measurement of surface profiles and 3D microstructures, a shaped annular beam heterodyne confocal measurement method based on annular pupil filter technique and reflection confocal microscopy, is proposed to expand the measurement range and to improve the defocused property of CM. The approach proposed uses a confocal dual-receiving light path arrangement and a heterodyne subtraction of two signals received from detectors with axial offset to enable CM to be used for bipolar absolute measurement and to improve the defocused property of CM, and it uses the annular pupil filter technique to produce a binary optical shaped annular beam, which expands the measurement range by expanding the full-width at half-maximum of intensity curve received from two detectors in a heterodyne confocal microscopy system. Theoretical analyses and experimental results indicate that a shaped annular beam heterodyne microscope has a measurement range expanded from 4 to 14 μm, achieved an axial resolution of 2 nm and improved the defocused property, when ε=0.5 and NA=0.65. It can be therefore concluded that the shaped annular beam heterodyne confocal measuring method proposed is a new approach to ultraprecision measurement of surface profiles and 3D microstructures.     

Differential confocal technology based on radial birefringent pupil filtering principle

In order to improve the spatial resolution of a confocal system, a radial birefringent pupil filter (RBPF) is introduced into a differential confocal system. RBPF consists of two polarizers with a birefringent element between them, and its pupil function is deduced from Jones matrix. The thickness and curvature radius of RBPF are optimized independently, using the first zero coordinate ratio. The pupil function is modulated by RBPF to enhance the half-width of the response function, and lateral resolution is improved when response curve is changed with the position of RBPF as well as the polarization; then axial super-resolution of the system can be guaranteed using differential confocal detection mechanism. In comparison with conventional pupil filtering technology, RBPF features high lateral resolution and can be easily produced; moreover, it also has a simple structure. Together with its low cost, RBPF provides a new way for the improvement of super-resolution of confocal system. It is indicated from theoretical analysis and preliminary experiments that the lateral resolution can be significantly improved and the measurement error is reduced by 76 nm when measuring a standard grating of period 3 μm; the axial resolution up to 3 nm has been achieved using the optimized pupil filter. In addition to its application for measurement of a small irregular surface in a limited space, the whole differential confocal system proposed can be fitted onto a coordinate measuring machine for non-contact measurement of dimensions and surface roughness.     

Designing Superresolution Optical Pupil Filter with Constrained Global Optimization algorithm

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复振幅光瞳滤波器的三维超分辨性能研究

超分辨技术中现有的纯振幅型或纯相位型光瞳滤波器,大部分只能实现轴向或横向超分辨而不能实现三维超分辨,三维超分辨在三维成像系统中有着重要的作用。因此为提高成像系统中的三维分辨能力,设计了一种复振幅光瞳滤波器,并对其三维超分辨性能进行了研究。详细分析了该光瞳滤波器的第一区半径和透射率对施特雷尔比、轴向和横向超分辨因子以及旁瓣能量的影响。通过一系列的模拟证明,借助于复振幅光瞳滤波器可以实现三维超分辨。该滤波器的优点是容易实现三维超分辨,且有比较高的施特雷尔比,缺点是三维超分辨的实现总是伴随着旁瓣能量的增加,但可以采用共焦扫描成像系统来加以抑制。