基于过焦扫描光学显微镜的光学元件亚表面缺陷检测方法

微/纳米尺度亚表面缺陷会降低光学元件等透明样品的物理特性,严重影响光学及半导体领域加工制造技术的发展。为了快速、无损检测透明样品亚表面缺陷,本文针对光学元件亚表面内微米量级缺陷的检测需求,提出了一种基于过焦扫描光学显微镜（TSOM）的检测方法。利用可见光光源显微镜和精密位移台,沿光轴对亚表面缺陷进行扫描,得到亚表面缺陷的一系列光学图像。将采集到的图像按照空间位置进行堆叠,生成TSOM图像。通过获得所测特征的最大灰度值来获得亚表面缺陷的定位信息。提出方法对2000μm深亚表面缺陷的定位相对标准差达到0.12%。该研究为透明样品亚表面缺陷检测及其深度定位提供了一种新方法。     

高分辨率ITO导电薄膜透明区域缺陷识别

为识别铟锡氧化物导电薄膜透明区域内可能存在的加工型和移交型缺陷,并满足实际应用需求,提出了基于高分辨率视觉系统的自动缺陷识别方法.根据铟锡氧化物薄膜光学特性和空间要求,设计了工作距离为30mm的科勒式同轴光照明模块.此外,为了与照明部分通用光学元件,设计了适用于应用检测的高分辨率成像模块.完成图像采集后,为便于分别检测两类缺陷,采用了两种预处理方法:对图像进行邻域半径r=7的中值滤波并与原图像相减后,获取清晰的划痕缺陷;对图像进行形态学和与阈值处理后,获取对比度为48%的透明电路图案.处理后的图像为缺陷的自动识别提供了可靠的依据,保障了铟锡氧化物薄膜定位的灵敏度和准确度.     

球粉板表面缺陷在线检测

为快速准确检测球粉板表面缺陷,对球粉板表面光学特性不一致性和缺陷类型的多样性等关键问题进行了分析,以利于有效地解决关键问题;论文提出采用基于模板图片创建矫正模板来解决被测板材表面光学特性变动的均化问题、自适应萃取二值化阈值解决二值化阈值整定问题,以提高软件的执行鲁棒性;通过自定义算法实现了细线型缺陷修补,有效地提高了划痕类缺陷检测的精度和可靠性;提出了筛查模型实现了符合缺陷检测精度要求的噪点筛除;通过大量现场实验验证了本系统能够正确高效实现球粉板表面缺陷检测定位标识和面积测量功能,以及达到了目标检测精度;本系统能很好地胜任球粉板在线表面缺陷检测;实验证明检测系统非常高效精准,极大地提高了生产线自动化能力。     

光学透明红外与雷达兼容隐身复合超表面

基于透明导电材料氧化铟锡(ITO)、高透光的聚对苯二甲酸乙二醇酯(PET),设计并实现了光学透明超宽带雷达与红外兼容隐身的复合超表面。该结构由两个专门设计的光学透明超表面组成,由内到外依次为雷达吸波层、红外低发射层。通过调节谐振器尺寸和ITO的方阻实现了微波段8.0~32.0 GHz频带内吸收率高于90%的宽带吸波。利用高ITO占空比的容性频率选择表面,实现了微波段高透过率与红外波段低发射率,并进一步研究了其红外辐射特性。该结构具备较好的超宽频雷达吸波性能、低红外发射率与光学透明特性。     

基于滤波差分的双阈值弱划痕提取算法

高质量光学元件表面缺陷中存在一些深度较浅或者宽度较窄的划痕,在暗场成像检测中,该类划痕产生的散射光灰度值很低,甚至淹没在背景光中,很难被目视或常规机器视觉识别,造成划痕缺陷的漏检。针对该问题,以既有的疵病检测系统为基础,根据划痕灰度的等级特征,提出双阈值法分类处理划痕缺陷。在低阈值的弱划痕处理中,根据弱划痕和背景的频率特征以及空间对比度特征,设计了频域滤波及背景差分算法。通过空间域以及频率域的滤波处理,排除高频噪声以及高亮度噪声,根据几何特征等提取弱划痕图像中的复杂背景。经差分处理后,提取弱划痕并增强对比度,最后与正常灰度级划痕信息一同通过高阈值(正常阈值)进行后续划痕的特征提取,即得到所有的划痕信息,为划痕缺陷总长度计算以及最大长度的分级判定奠定基础。实验结果表明,该算法避免了过低二值化阈值引入的背景等不规则噪声,使得划痕与背景的对比度大大增强。目前该算法已经应用于惯性约束聚变系统中大口径光学表面划痕的定量检测,并且使长度计量的准确度已提升到约80%。     

在有机玻璃上射频溅射ITO组合薄膜

利用射频磁控溅射技术在有机玻璃表面上一次完成表面活化、ITO膜制备、SiO2 减反射膜制备过程。利用低能等离子体对有机玻璃表面进行改性以提高ITO膜的附着力。研究了氧分压等工艺参数对ITO膜导电性能及光学性能的影响。     

一种新的基于频域有限差分方法的小周期有机太阳能电池的光电特性

由MoO₃/Ag/MoO₃ （MAM）组成的多层膜结构非常有希望替代ITO作为有机太阳能电池中的透明阳极.然而,基于MAM结构的有机太阳能电池光吸收能力较弱.为此,引入了一种小周期短节距金属光栅,利用表面等离子激元增强活性层的光吸收.借助于频域有限差分方法求解麦克斯韦方程和半导体方程,探讨了有机太阳能电池结构的光学和电学性质.分析结果表明：与平面结构相比,活性层中的光吸收大大提高;同时,当凹槽宽度为4 nm,能量转换效率提高了49%.相关结果有助于更好地开发和利用无ITO层的有机太阳能电池.     

衬底温度对ITO薄膜及黑硅SIS型太阳电池性能影响

结合反应离子刻蚀法和掩膜法在n型硅片表面制备出圆锥状结构黑硅,利用湿法氧化法在硅片表面氧化出一层超薄SiOx,采用磁控溅射法在其表面沉积一层掺锡氧化铟(IndiumTinOxide,ITO)薄膜,在黑硅衬底上制备出ITO/SiOx/n-Si太阳电池。通过硅片表面纳米结构,增加光吸收,进而提高电池转化效率。研究结果表明,在不同衬底温度下沉积ITO时,薄膜都呈现出了良好的光学和电学性能.250℃时,ITO薄膜性能最优,在400~1 000nm波长范围内,平均透过率达到93.1%,并展现出优异的电学性能.通过优化H_2O_2预处理时间,减小了SiOx层中氧空位缺陷,SIS电池短路电流得到明显提高,从未处理前的26.84mA/cm2提升到经H_2O_2处理15min后的34.31mA/cm2.此时,电池性能最优,转化效率达到3.61%.     

于散乱三维点云的缺陷检测和三维重构方法

设备表面的缺陷检测对于保证安全生产避免经济损失具有重要意义。针对基于设备表面散乱三维点云缺陷检测和三维重构算法复杂的问题,提出了一种基于散乱三维点云的缺陷检测和三维重构方法。对散乱三维点云沿某一轴向进行分层处理,将同一层内的三维点进行移位规则化处理,并对规则化的三维点云进行缺陷检测和三维重构。分别对无缺陷设备表面和凹凸缺陷设备表面进行缺陷检测和三维重构,规则化前后三维数据缺陷计算结果相对误差为1.01%。实验结果表明,将散乱三维点云分层和规则化处理有效降低了缺陷检测和三维重构的复杂度,易于实现。     

基于三维缺陷检测的DMD数字条纹投影光学系统设计

基于半导体行业中PCB焊膏印刷检测的实际应用,采用0.45 WXGA DMD芯片设计了数字条纹投影光学系统.以LED作为光源,结合透镜阵列照明DMD芯片;同时,为了减小投影三角关系造成的条纹周期不均匀性对检测结果的影响,采用双远心光路结构将DMD生成的条纹成像到待测表面,且适用的最小检测面积为1mm2.光学模拟结果表明,该数字投影系统在被投影表面上的照明均匀性为91%,投射条纹的对比度高于0.8,且条纹周期均匀,为实际应用与后续条纹分析提供了良好保障.     

Theoretical analysis and simulation of conjugate heights for dual-conjugate AO system in lidar

A multi-conjugate adaptive optics （MCAO） can offer a possibility of widening field of view （FOV） characterized by the isoplanatic angle, and the choose of conjugate height becomes a basic problem for MCAO, which influences the size of iosplanatic angle. Considering the application of lidar, the isoplanatic angle＇s expressions of two deformable mirrors （DMs） MCAO for uplink and downlink are deduced. The effects of conjugate heights for dual-conjugate AO are thoughtfully discussed, and the isoplanatic angles are further analyzed. The results show that the isopanatic angle varies with the conjugate height and reaches the maximum as the conjugate height is at the optimal altitude. Moreover, the optimal conjugate height changes with the propagation distance.     

Quick single-photon detector with many avalanche photo diodes working on the time division

Due to the limit of response speed of the present single-photon detector, the code rate is still too low to come into practical use for the present quantum key distribution (QKD) system.A new idea is put up to design a quick single-photon detector.This quick single-photon detector is composed of a multi-port optic-fiber splitter and many avalanche photo diodes (APDs).Au of the ports with APDs work on the time division and cooperate with a logic discriminating and deciding unit driven by the clock signal.The operation frequency lies on the number N of ports, and can reach N times of the conventional single-photon detector.The single-photon prompt detection can come true for high repetition-rate pulses.The applying of this detector will largely raise the code rate of the QKD, and boost the commercial use.     

Characterization of PolyA and PolyC mismatches by Raman spectroscopy

A.C mismatches are studied by Raman spectral characterization of PolyA, PolyC, and their equimolar complex in solution of 0.14 mol/L Na ,pH7.0.Experimental results show that A·C mismatches occur to be A/B (mainly A) conformers, and unlike Watson-Crick base pairing, this kind of mismatches is stabilized by only one hydrogen bond involving cytosine N4H2 and adenine N7.The formation of A·C complex makes the base stacking interactions much stronger, and conformation of the backbone more ordered, which leads to obvious Raman hypochromic effect with some shifts in corresponding bands.     

Improvement of four-wave mixing-based wavelength conversion efficiency in dispersion shifted fiber by 40-GHz clock pumping

40-GHz clock modulated signal as a pump to improve the efficiency of four-wave mixing (FWM)-based wavelength conversion in a 26.5-km dispersion shifted fiber (DSF) is investigated. The experimental results demonstrate that the conjugated FWM component has higher intensity with the clock pumping than that with the continuous-wave (CW) light pumping. The improvement of FWM-based wavelength conversion efficiency is negligible when the pump power is less than Brillouin threshold. But when the pump power is greater than Brillouin threshold, the improvement becomes significant and increases with the increment of pump power. The improvement can increase up to 9 dB if pump power reaches 17 dBm.     

Multi-pulse operation of a Kerr-lens mode-locked femtosecond laser

Our experimental results show that the presence of a proper amount of negative group velocity dispersion is essential to multi-pulse operation of a Kerr-lens mode-locked femtosecond laser. We demonstrate that the pulse separations and the number of pulses contained within a cavity round trip are strongly dependent on the initial perturbations. The results allow us to get a better understanding on the influences of the convoluted self-phase modulation and intra-cavity dispersions on the stable multi-pulse oscillation in a Kerr-lens mode-locked femtosecond laser.     

Propagation of Helmholtz-Gauss beams in weak turbulent atmosphere

Based on the Rytov approximation of light propagation in weak turbulent atmosphere,the closed-form expressions of field and average irradiance of each one of the four fundamental families of Helmholtz-Gauss (HzG)beams:cosine-Gauss beams,stationary Mathieu-Gauss beams,stationary parabolic-Gauss beams,and Bessel-Gauss beams,which are propagating in weak turbulent atmosphere,are obtained.The results show that the field and average irradiance can be written as the product of four factors:complex amplitude depending on the z-coordinate only,a Ganssian beam.a factor of complex phase perturbation induced by atmospheric turbulence,and a complex scaled version of the transverse shape of the non-diffracting beam.The effect of weak atmospheric turbulence on irradiance distribution of the HzG beam can be ignored.     

An effective method for reducing speckle noise in digital holography

An effective method for reducing the speckle noise in digital holography is proposed in this paper.Different from the methods based on classical filtering technique,it utilizes the multiple holograms which are generated by rotating the illuminating light continuously.The intensity images reconstructed by a series of holograms generated by rotating the illuminating light possess different speckle patterns.Hence by properly averaging the reconstructed intensity fields,the speckle noises can be reduced greatly.Experimental results show that the proposed method is simple and effective to reduce speckle noise in digital holography.     

Influence of purity of HfO2 on reflectance of ultraviolet multilayer

The impurities in two kinds of HfO2 materials and in their corresponding single layer thin films were determined through glow discharge mass spectrum technology and secondary ion mass spectrometry(SIMS) equipment respectively.It was found that ZrO2 was the main impurity in the two kinds of HfO2 either in the original HfO2 materials or in the electron beam deposited films.In addition,the difference of Zr content in the two kinds of HfO2 single laver films was much laxger than that of the other impurities such as Ti and Fe.which showed that it was just ZrO2 that made the difference between the optical performance of the film products including the two kinds of HfO2.With these two kinds of HfO2 and the same kind of SiO2.we deposited HfO2/SiO2 multilayer reflective coatings at the wavelength of 266 nm.Experimental results showed that the reflectances of these two mirrors were about 99.85% and 99.15% respectively,which agreed well with the designed results what were based on the optical constants obtained from the corresponding single layer thin films.     

Speech enhancement by array crosstalk resistant ANC and spectrum subtraction

Microphone array-based speech enhancement has great importance for speech communications and speech recognition. To reduce the aperture of the microphone array and to increase the effect of the speech enhancement will greatly broaden the application areas of the microphone array. An array crosstalk resistant adaptive noise cancellation method is therefore presented. And then an improved spectral subtraction algorithm is further cascaded to obtain better enhancement results. Theoretic analysis and experiments indicate that the proposed scheme needs only a very small microphone array while it simultaneously achieves a higher SNR improvement. Besides, the proposed scheme can be used in many noisy environments and is easy for real-time implementation.