激光超声检测铝合金材料的残余应力分布

为了有效检测铝合金材料上的残余应力分布,研究了用激光超声技术来检测铝合金材料上的残余应力分布的方法。该方法用Nd:YAG脉冲激光激发声表面波,并用外差激光干涉仪接收。理论分析表明可通过测量表面波在不同位置上声速的相对变化,来确定试样的残余应力分布。并对无残余应力、有压缩残余应力、有拉伸残余应力的三个试样应力分布,进行了实验测定。结果证实了试样的残余应力分布可引发声表面波在不同位置上声速的相对变化,也证实了激光激发声表面波及其接收技术是一种无损检测材料内残余应力分布的有效方法。     

基于M-Z干涉仪原理的光纤超声检测

提出了一种基于M_Z(Mach_Zehnder)干涉仪原理的光纤超声检测技术和U形结构的光纤传感器。讨论了光纤传感器与超声波之间的相互作用关系。对传感器的灵敏度与传感光纤的有效长度、U形结构的个数之间的关系进行了理论分析,实验结果和理论分析结果是一致的。通过比较超声波在三种不同入射方式下探测器的输出电压可知,该结构的光纤传感器在声信号垂直入射时由探测器探测到的信号最强,即传感器有很强的方向性,适合于对声表面波的定向检测。     

利用激光超声技术测量介观尺度材料的声速

设计并建立了一种可用于测量介观尺度(几十微米至几毫米)材料声速的激光超声系统.该系统采用脉宽为6.3 ns的调Q激光器作为超声波激发光源,使用光纤位移干涉仪进行超声位移探测.利用新建立的激光超声系统,测量了不同厚度铜箔的纵波声速.结果表明,激光超声系统得到的声速具有较高精度,可以将其应用于介观尺度材料声速测量.     

用Fabry-Perot干涉仪检测激光超声以实现钢板测厚

本文介绍了一种用激光产生超声并用另一激光及共焦Fabry-Perot干涉仪检测超声的钢板测厚系统,详细讨论了作为接收超声的Fabry-Perot干涉仪的检测灵敏度和信号检测及处理的方法,并给出了一些实验结果.     

环形光纤声发射传感器的相位调制特性研究

提出了一种基于光纤Sagnac干涉仪的环形传感器，用于固体表面传播的超声波的检测.这种传感器的特点是能够精确地检测由固体表面传播的超声波产生的微弱振动.当超声波信号通过光纤传感器的两个臂到达探测器时，干涉仪的输出光强度受到了超声信号的调制.通过检测干涉仪的输出光强度并利用Fourier变换，测得了超声信号的振幅和频率.而且对传感系统的位相调制特性进行了仿真，并对实验结果进行了分析，结果表明该系统可用于固体表面传播的超声波频率特征的识别.     

光纤Fizeau干涉仪的声发射检测研究

验证了一种基于光纤Fizeau干涉仪的声发射传感器,可用于固体表面传播的超声波的检测.这种传感器的特点是能够精确地检测由固体表面传播的超声波产生的微弱振动.当超声波信号通过光纤传感器到达探测器时,干涉仪的输出光强度受到了超声信号的调制.通过检测干涉仪的输出光强度并利用Fourier变换,测得了超声信号的振幅和频率.对传感系统的相位调制特性进行了仿真,并对实验结果进行了分析.     

光纤光栅传感器波长移位检测方法

光纤光栅波长移位检测是光纤光栅传感器的核心技术之一,已提出的光纤光栅波长移位检测方法有被动解调法、匹配光栅法、非平衡Mach-Zehnder干涉仪法、可调谐窄带光源法和激光锁模法等详细介绍了光纤布拉格光栅(FBG)传感器的波长移位检测方法,分析了各种检测方法原理.重点讨论了非平衡M-Z干涉仪法和可调谐窄带光源法,并对以上各种方法的优、缺点进行了分析和讨论.     

脉冲激光在镀层圆柱表面激发的表面波

分别从理论和实验上研究了脉冲激光在快、慢镀层圆柱表面激发的表面波声场.脉冲激光线源在镀层圆柱周向上激发超声波信号并利用激光干涉仪检测.对钢基底锌镀层圆柱和锡基底铜镀层圆柱试样表面波的理论频散和实验信号估计频散进行了比较,瞬态位移场则利用留数定理与FFT技术数值仿真得到并与实验波形进行对比.结果显示:理论频散和仿真波形与...     

基于激光超声的微裂纹检测技术的研究

在固体中利用激光产生超声波 ,可作为超声测量和材料无损检测的一种新方法。介绍了激光超声表面波的产生机理、微裂纹的检测方法及其应用。采用Nd∶YAG脉冲激光器、扩束与聚焦透镜组、PZT探头、数据分析仪等器件设计并构建了一套基于接触式检测方法的激光超声微裂纹检测实验系统。通过对大量实验数据进行处理 ,得出了相应的各种关系曲线 ,说明了线光源产生的超声表面波非常适用于材料表面微裂纹的检测     

DAC加载下材料高压声速的激光超声测量技术

 设计并建立了可测量金刚石压砧（DAC）加载下材料高压声速的激光超声系统。该系统采用脉宽为6.3 ns的调Q激光器作为超声波激发光源,使用光纤位移干涉仪和速度干涉仪混合系统进行超声位移探测,不需要借助其它任何参数即可直接测量样品的高压声速和原位厚度。利用该系统,测量了2.6 GPa压力下铜样品的高压纵波声速和原位厚度,并给出了测量结果。     

Investigation of titanium nitride coating by broadband laser ultrasonic spectroscopy

We present a laser ultrasonic method to investigate a titanium nitride(TiN) coating specimen.The technique is based on the principle of surface acoustic wave (SAW) dispersion during acoustic propagation on a half-space with the presence of a thin layer.Due to the high efficiency of laser line-source excitation,we have been able to generate and detect a SAW with an excellent signal-to-noise ratio in a wide frequency band.An inverse fitting algorithm was employed to extract simultaneously the thickness and the elastic parameters of the TiN coating from the experimental SAW velocity dispersion curve.     

Noncontact all-optical measurement of corneal elasticity

We report on a noninvasive and noncontact all-optical method to measure the elasticity of the cornea. We use a pulsed laser to excite surface acoustic waves (SAW) that propagate on the corneal surface, then use a phase-sensitive optical coherence tomography system to remotely record the SAWs from which the corneal elasticity is estimated. In addition, the system is able to provide real-time tomographic images of the cornea being examined, an important consideration for clinical studies. While precisely maintaining a range of intraocular pressures (IOP), a series of measurements is performed on ex vivo intact primate eyes. The measurement results not only demonstrate the feasibility of the proposed system to remotely measure the corneal elasticity, but also suggest a strong correlation between the corneal stiffness and the true IOP.     

非侵入式超声波浆料浓度测量技术研究*

设计了一种基于非侵入式超声波透射衰减法的浆料浓度测量系统,根据超声传播衰减原理,建立超声衰减值与浆料浓度之间的关系。实验中采用生物显微镜和激光粒度仪对颗粒标称粒径进行验证,采用中心频率为200 kHz的超声波换能器,利用一发一收模式对超声波在有机玻璃管内的浆料进行非侵入式测量并分析透射波信号,对体积百分浓度小于25%、不同粒径的石英砂浆料进行测量,通过拟合方法获得浆料温度、体积百分浓度与声衰减对应的关系,并据此构造浓度求解方程,通过现场实时在线测量并与取样结果进行对比验证方程的准确性,结果显示,本方法可有效测量浆料浓度。     

A Novel Rotation Speed Measurement Method Based on Surface Acoustic Wave

This paper presents an original passive wireless rotation speed measurement method based on surface acoustic wave (SAW) technology. A theoretical analysis was conducted on the principle of SAW rotation speed measurement and a numerical analysis on the SAW response energy pulses with different rotation angles and resonance frequencies was performed. Numerical calculation results showed that when the distance and the effective length of the antenna connected to SAWR vary with the rotation angle, the energy of acquired SAW response varies periodically. The rotation speed was estimated by searching the crossing points of the SAW response energy pulses and its mean value line. The SAW rotation speed measurement system was set up and the high performance SAW resonators were fabricated on a quartz substrate. The proposed measurement system was tested with a maximum error of 0.6 rpm, indicating that the system is capable of measuring rotation speeds from 10 to 100 rpm. Experimental results verified the validity and feasibility of presented rotation speed measurement method.     

超声波辅助酸蚀提高熔石英损伤阈值

为了提高熔石英元件表面抗激光损伤阈值,利用超声波辅助HF酸研究平滑光学元件表面缺陷形貌和去除刻蚀后残留物效果,通过扫描电子显微镜电镜和原子力显微镜记录表面形貌结构,以及单脉冲激光辐照测试抗损伤阈值确定实验参数。研究表明,超声波场的引入能催化HF酸的刻蚀速率、提高钝化效果并且更易剥离嵌入的亚μm级杂质粒子。经过实验测试,获得了熔石英类元件相匹配的超声辅助HF酸刻蚀实验参数,研究结果对应用超声波辅助HF酸研究熔石英表面抗激光损伤有重要意义。     

Frequency dependence of laser ultrasonic SAW phase velocities measurements

Advances in the field of laser ultrasonics have opened up new possibilities in applications in many areas. This paper verifies the relationship between phase velocities of different materials, including hard solid and soft solid, and the frequency range of SAW signal. We propose a novel approach that utilizes a low coherence interferometer to detect the laser-induced surface acoustic waves (SAWs). A Nd:YAG focused laser line-source is applied to steel, iron, plastic plates and a 3.5% agar–agar phantom. The generated SAW signals are detected by a time domain low coherence interferometry system. SAW phase velocity dispersion curves were calculated, from which the elasticity of the specimens was evaluated. The relationship between frequency content and phase velocities was analyzed. We show that the experimental results agreed well with those of the theoretical expectations.     

Visualization of 50 MHz Surface Acoustic Wave Propagation Using Stroboscopic Phase-Shift Interferometry

A Stroboscopic phase-shift interferometry has been developed to visualize surface acoustic wave (SAW) propagation on SAW devices quantitatively. The developed interferometry is a Fizeau-type one with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Fifty MHz SAW propagation on the surface of the SAW device has been measured with the interferometry. Distribution of the SAW along the propagation path has been observed, whose amplitude is 3 nm (p-p). Repetition accuracy evaluated with the root mean square method is 1/2500 of the laser wavelength. The system is useful for estimating and improving performances of micro-devices.Presented at 1996 International Workshop on Interferometry (IWI ‘96), August 27-29, Saitama, Japan.     

Surface wave propagation in wood: prospective method for the determination of wood off-diagonal terms of stiffness matrix

Overall elastic properties of wood can be studied by ultrasonic methods. Orthotropic symmetry is assumed (nine constants). This article describes two methods developed for the determination of three off-diagonal terms of the stiffness matrix. The first method deals with bulk waves (BAW), and the second with surface wave (SAW) measurements. The BAW method requires repeated off-axis measurements and an optimization criterion for selecting the C_ij-terms. The SAW method gives the value of the C_ij-term corresponding to a specific plane of symmetry, from only one on-axis measurement. The six diagonal terms of the stiffness matrix can be obtained easily from on-axis bulk wave measurements. From the nine terms of the matrix, the compliance terms (S_ij) and corresponding technical terms are calculated. Technical constants determined from ultrasonic measurements are in agreement with those obtained by classical statistical methods. The experiments were performed on beech and spruce. The SAW technique is expected to be of more interest for further investigations of wood mechanical properties.     

表征超大规模集成电路互连纳米薄膜硬度特性的声表面波的频散特性

利用声表面波(SAW)的频散特性来表征超大规模集成电路(ULSI)互连系统中低介电常数(k)薄膜的物性具有准确、快速、对材料无损伤等突出优点.研究了Si(100)衬底上淀积低k薄膜的分层结构中，SAW沿任意方向传播的色散关系.引入坐标变换后，单层薄膜特征矩阵从9阶降到6阶，双层薄膜特征矩阵从15阶降到10阶，大幅度提高了计算速度，有利于生产ULSI过程中的在线监测. 关键词： 超大规模集成电路 声表面波 传输方向 频散特性     

环形定子的激光致表面波机理及可视化探测研究

开展了用于新型激光驱动马达的环形定子的激光致表面波机理及实验研究. 提出一种带有凹槽阵列结构的环形定子新设计, 建立了激光在环形定子表面激发表面波的物理模型, 揭示了影响表面波幅值的关键因素; 采用一种新颖的激光致表面波可视化探测方法, 在波长1053 nm, 脉宽30 ns, 单脉冲能量1 mJ的激光激发下, 对表面波在铜质环形定子表面的传播特性进行了可视化探测实验. 理论与实验研究表明: 当激发光斑的位置紧邻凹槽阵列时, 沿着圆环向凹槽方向传播的表面波会被齿状凹槽阵列迅速衰减和吸收, 而沿着圆环向远离凹槽方向传播的表面波能够持续传递, 从而首次实现了激光致表面波在环形定子上的单向传播; 而对没有凹槽阵列结构的圆环进行的对比实验表明, 激光致表面波在圆环表面双向传播, 最终因相互混叠和串扰等而处于混乱状态. 由激光在该种环形定子表面激发出的单向表面波, 可望在光致表面波马达及驱动机构中获得应用. 关键词： 激光致表面波 环形定子 表面波可视化 激光驱动