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1.
White-light scanning interferometry (WLSI) has been a well-established tool for measuring the profile of objects. Since the white-light source is continuous in spectrum, the phase ambiguity problem can be avoided. Specimens with discontinuous profile can therefore be possibly measured by WLSI. In this paper, using higher steps, i.e. nine and eleven steps, phase-shifting algorithms (PSAs) based on local linear conditions of envelope function were proposed. The actual zero optical path difference position was retrieved by extracting the phase value and phase compensation. Maximum intensity peak positions at five points were used to calculate the center wavelength of the light source by both phase unwrapping and linear least-squares fitting. Both simulated and experimental results showed that the proposed nine- and eleven-step PSAs have good linearity and robustness to accurately measure the profile and center wavelength of the light source.  相似文献   

2.
S. Ma  C. Quan  R. Zhu  C.J. Tay  L. Chen  Z. Gao 《Optics Communications》2011,284(10-11):2488-2493
White-light scanning interferometry (WLSI) has been widely used in micro-profile measurement such as Micro-Electro-Mechanical Systems (MEMS) and Computer Generated Hologram (CGH) diffractive elements. It does not contain phase ambiguity problem which is often encountered in monochromatic wavelength interferometry. This paper presents an algorithm based on windowed Fourier transform (WFT) to extract the phase of a white-light interferogram and compensates for the difference in zero optical path difference (ZOPD) position in WLSI. With the WFT technique, the center wavelength of a white-light source and the phase of a white-light interferogram could be retrieved simultaneously. The effect of noise, scanning interval of a piezoelectric transducer (PZT) and the window size of WFT are also analyzed. Both simulated and experimental results show that the proposed algorithm has good noise immunity and is able to accurately measure the micro-profile of a specimen.  相似文献   

3.
White-light interferometric techniques have been widely used in three-dimensional (3D) profiling. This paper presents a new method based on vertical scanning interferometry (VSI) for the 3D profile measurement of a micro-component that contains sharp steps. The use of a white-light source in the system overcomes the phase ambiguity problem often encountered in monochromatic interferometry and also reduces speckle noises. A new algorithm based on the continuous wavelet transform (CWT) is used to retrieve the phase of an interferogram. The algorithm accurately determines local fringe peak and improves the vertical resolution of the measurement. The proposed method is highly resistant to noise and is able to achieve high accuracy. A micro-component (lamellar grating) fabricated by sacrificial etching technique is used as a test specimen to verify the proposed method. The measurement uncertainty of the experimental results is discussed.  相似文献   

4.
C. Quan  W. Chen  C.J. Tay 《Optics Communications》2008,281(15-16):3957-3964
In this paper, temporal phase unwrapping and short time Fourier transform (STFT) are proposed for shape measurement of an object with height steps by digital holographic interferometry (DHI). A series of digital holograms is recorded with a high-speed CCD camera using a multi-illumination method. Each pixel is processed along the time axis independently of other pixels. Two novel methods are proposed to process the wrapped phase maps: the first method is based on complex phasor (CP) and temporal phase unwrapping, and the second method is based on CP and STFT. In the STFT method, continuous phase maps are obtained by integration of the exacted instantaneous frequency. The continuous phase map can characterize the profile of the object with height steps. An experiment is conducted to verify the validity of the proposed methods.  相似文献   

5.
Digital holography (DH) and digital shearography (DS) both play an important role in non-destructive evaluation. In this paper, a novel method based on digital holographic interferometry (DHI) and complex phasor (CP) is proposed to determine displacement derivative. An algorithm is employed to filter the imaginary and real parts of complex values without the need of direct phase manipulation. Two-dimensional short time Fourier transform (STFT) is employed subsequently to process wrapped phase maps. An experiment is conducted to demonstrate the validity of the proposed method.  相似文献   

6.
A novel method based on continuous wavelet transform (CWT) and guidance of phase derivative is developed to measure the phase of a single fringe pattern which contains closed fringes. Wrapped phase values are retrieved by ridge extraction algorithms based on CWT which has the capability of better noise reduction and thus increases the resolution of measurement significantly. To further reduce the noise, the scales detected by maximum ridge algorithm are filtered iteratively before retrieval of wrapped phase. The proposed method also identifies any ambiguous point in a non-monotonous fringe pattern by directly tracking an inflexion point from an unwrapped phase map without the use of a carrier. The algorithm developed is validated by computer simulation and experimental results. Based on micro interferometry the experimental results for both static and dynamic deformations of a micro structure demonstrate that the proposed method is an effective tool for the analysis of closed fringe patterns and subsequent deformation measurement. However, the proposed technique is limited to measurement of surface which is relatively smooth compared to the mean wavelength of the light source. In addition, prior knowledge of the sign of surface slope is required in cases where a spatial carrier is not available or adaptable.  相似文献   

7.
A non-cube beam-splitter (NCBS) is proposed, by which an incident beam can be separated largely in a direction and then the lights from the test object and the lights from a reference surface placed adjacently to the test object can be combined to construct a simple electronic speckle pattern interferometry (ESPI) system. Two mainly useful quantitative ways, to calculate the phase change of the test object, the phase-shift and the fringe carrier method with Fourier transform, can be achieved in the ESPI system with the NCBS. Experiments with phase-shifting and fringe carrier method are completed. The experimental results show that the monolithic design of the proposed NCBS is effective in ESPI measurement and immunity to vibrations.  相似文献   

8.
在连续小波变换和展开相位拐点识别的基础上,提出一种非单调条纹图的相位恢复新方法.包裹相位通过连续小波变换的方法提取,提出小波变换尺度步长的选择准则及对粗糙尺度作迭代均值滤波的技术.基于展开相位拐点与符号歧义点的单应性,可通过检测并修正展开相化拐点的方法恢复非单调条纹图的真实相位.给出了详细的理论推导、数值模拟及实验验证过程.数值模拟包括一维及二维的含噪声信号,实验为基于显微干涉法的微桥的静动态形貌和变形测试.模拟及实验结果表明,该法只需一幅条纹图即可准确解调非单调条纹的相位,最大误差小于4%,且具有极强的抗噪能力.这为显微干涉测量提供了有效的相位恢复新手段.  相似文献   

9.
Increasing phase values at the edges of objects under analysis in electronic speckle shearing interferometry (ESSPI) cause errors in the actual recovering methods to obtain the spatially integrated phase. An iterative least minimum squares method is proposed here to recover the phase map from the approximated ESSPI derivatives when the displacement phase is increasing near the object edges. It is based in an iterative Fourier transform method derived from a least-squares phase map recovery algorithm. Experimental results from a rotating cylindrical bar show the validity of our approach.  相似文献   

10.
Parallel two-step phase-shifting interferometry for microscopy is presented, and the recording condition for generalized two-step phase-shifting interferometry is discussed. A 45° tilted cube beamsplitter enables to replicate the orthogonally linear polarized object and reference waves into two parallel beams, respectively. As a consequence, two interferograms with quadrature phase shift are obtained along the two beams, and phase reconstructed with an improved algorithm. To reconstruct the phase distribution from the two-step phase-shifting interferograms, a certain recording condition should be satisfied. However, the recording condition has not ever been discussed before. In this paper, the recording condition for the two-step phase-shifting interferometry is derived and that is: the intensity of reference wave should be no less than two times object wave intensity.  相似文献   

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