基于迈克尔逊干涉的傅里叶变换散斑形貌测量技术

提出了电子散斑干涉载频调制测量物体形貌的方法。采用典型的迈克尔逊干涉光路，将物体偏转一微小角度（等效为物面与参考面间形成空气楔）产生等厚干涉，可在物体的表面引入包含物体高度信息的载波干涉条纹。用CCD采集该载波条纹图，利用傅里叶变换法可解调出物体高度的位相信息，从而实现物体的形貌测量。介绍了电子散斑干涉载频调制测量物体形貌的原理，并进行了实物测量，给出了实验结果。由于该方法采用散斑干涉方法测量物体形貌，所以具有灵敏度高的优点。     

三维电子散斑干涉载频调制及其在柴油机上的应用

将电子散斑干涉场的三维载波调制技术应用到三维物体变形测量中.用水平方向、竖直方向及垂直试件表面的三路相干光分别照明物体，在水平和竖直方向通过控制反射镜的微小偏转引入载波，实现位移场干涉条纹的调制；利用物体的微小偏转实现离面位移场干涉条纹的调制；结合傅里叶变换法，分别解调出变形场的位相，从而实现了物体三维变形场的精确测量.将该技术应用到柴油机油泵的三维位移测量上，成功测量了油泵的三维位移场.     

大剪切电子散斑干涉的载频调制与位移场测量

将电子散斑干涉场的载波调制引入到大剪切电子散斑干涉中,通过对参考物的微小偏转引入载波条纹;利用傅里叶变换法,解调出了变形场的相位,从而实现了物体变形场的精确测量。讨论了大剪切载频的调制机理,理论分析表明,调制条纹的空间频率与参考面偏转的角度成正比;因此,控制参考面的偏转角度可实现不同位移量系统的调制。利用中心加载周边固定圆盘进行了典型实验,实验结果证明在大剪切电子散斑干涉技术中可以通过参考面的旋转高质量地实现电子散斑干涉条纹的调制,求解位移场。该系统具有系统简单,不需要专门引入参考光,条纹质量好等优点。该技术可扩展电子散斑干涉的应用范围,有一定的实际应用价值。     

利用电子散斑相移技术测量物体三维面形的方法

为了获得准确的面形测量,提出了一种相移电子散斑干涉技术测量物体面形的测量方法.利用电子散斑干涉产生载波条纹,该载波条纹受到物体表面高度的调制变得弯曲,引起载波条纹相位的变化,可运用相移技术提取物体的相位信息,最后根据高度和相位之间的关系得到物体的面形.介绍了该方法的原理,利用该方法对球冠物体进行了面形测量,证明该方法测量物体面形是可行性的.由于是采用散斑干涉的方法产生干涉条纹,因此该方法测量物体面形具有灵敏度高的优点.     

利用电子散斑相移技术测量物体三维面形的方法

为了获得准确的面形测量,提出了一种相移电子散斑干涉技术测量物体面形的测量方法.利用电子散斑干涉产生载波条纹,该载波条纹受到物体表面高度的调制变得弯曲,引起载波条纹相位的变化,可运用相移技术提取物体的相位信息,最后根据高度和相位之间的关系得到物体的面形.介绍了该方法的原理,利用该方法对球冠物体进行了面形测量,证明该方法测量物体面形是可行性的.由于是采用散斑干涉的方法产生干涉条纹,因此该方法测量物体面形具有灵敏度高的优点.     

载频调制大剪切电子散斑干涉系统

大剪切电子散斑干涉技术不需要引入参考光，具有条纹质量好等特点。提出将干涉场的载频调制技术引入到大剪切电子散斑干涉中，可形成具有载频调制功能的新的电子散斑干涉系统。该系统具有对测量环境的隔振振动要求低，能方便定量求解物体的变形场等优点。首先讨论大剪切载频的调制机理，然后利用中心加载、周边固定的圆盘进行典型实验，设计了可用计算机控制且可对参考物进行精确偏转的步进电机系统，进而实现了对电子散斑干涉场的自动控制调制。最后，利用傅里叶变换法对调制条纹进行解调，解调出变形场的相位，并通过相位与位移的转换计算，得到精确的物体变形场。实验结果证明，该系统能够调制电子散斑干涉场，求解物体的位移场。     

偏转平台剪切电子散斑干涉相移技术研究

在沃拉斯顿棱镜作为剪切器件的传统剪切散斑干涉术中,由于错位的二物光束同光路传播,很难通过将它们分开来引入附加相位的方法实现相移。本文提出的偏转平台法是利用平台上物体的偏转来引入附加相位的,从而可以实现剪切电子散斑干涉的相移。理论分析证明,物体的偏转可以引入稳定、线性的附加相位,并给出了物体偏转角度与附加相位之间的关系式;利用周边固定、中心加载圆盘进行了典型实验,给出了实验结果,证明偏转平台相移技术能够有效地从干涉条纹中提取位移导数信息。     

数字散斑干涉术物体形变测量

基于数字散斑干涉术测量物体形变的原理,研究了物体面内位移及变形的测试技术.采用电荷耦合器件记录变形前后的两幅散斑图,取代传统散斑干涉术中的记录干板,省去传统方法中干板显影、定影的繁琐的化学湿处理过程.分别用菲涅尔散斑和像面散斑方法获得散斑干涉图,用相减技术得到含有物体形变信息的散斑干涉条纹.设计高斯低通滤波器,对干涉条纹进行处理,提高了干涉条纹的对比度.提出扫描条纹中心行方法,由条纹中心行一维位相分布获得一维物面变形,实现了散斑干涉条纹的自动判读.试验表明,该方法简洁且实用.     

一种改进的载波电子散斑干涉处理方法

提出了一种新的载波电子散斑干涉的处理方法,该方法将载波所形成的直条纹和包含物体变形信息的弯曲条纹在频域直接比较, 避免了传统载波干涉方法中的载波频率计算和由此带来的误差. 因此在准确程度和方便性方面都有明显改进. 本文在给出理论分析的同时进行了实验验证.     

双波长剪切散斑干涉法在复合材料缺陷检测中的应用

为使剪切散斑干涉能适用于物体大变形的测量,选用双波长激光照射和彩色相机,用傅里叶变换法对干涉图进行频谱分离,用红色波长相位减去绿色波长相位,得到合成波长相位,经频域滤波和相位解包裹,得到连续相位.理论计算表明合成波长相位条纹数是单波长相位条纹数的0.189倍.合成波长参与计算可以有效减小相位条纹密度,解决剪切散斑干涉在物体离面位移测量中由于变形条纹过于密集而导致欠采样的问题,同时降低对干涉条纹滤波和相位解包裹难度,增强图像处理可靠度,提高了测量准确度.给出了合成波长与单波长相位幅度的比较以及相同外力下二者相位条纹密度的对比,实验验证了所提方法的有效性、准确性和可靠性,实现了剪切散斑干涉对复合材料大变形的测量,扩展了剪切散斑干涉工程应用的范围,为新型剪切散斑干涉测量系统的设计提供了参考.     

The separation of out-of-plane displacement from in-plane components by fringe carrier method based on large image-shearing ESPI

A fringe carrier method for separating out-of-plane displacement from in-plane components based on large image-shearing electronic speckle pattern interferometry (ESPI) is presented. If the test object is respectively illuminated by two expanded symmetric illuminations in large image-shearing ESPI, two interferometers are formed. Carrier fringe patterns can be introduced by tilting reference surface a small angle. The carrier fringe patterns are demodulated after deformation of the object. Two phase maps, which include out-of-plane and in-plane displacement, can be obtained by using Fourier transform. Then out-of-plane displacement can be easily separated from in-plane displacement by simple operation between two unwrapped phase distributions. The principle of spatial carrier frequency modulation in large image-shearing ESPI is discussed. A typical three-point-bending experiment is completed. Experimental results are offered. The results show that the method offers high visibility of carrier fringes. And the system presented does not need a special beam as a reference light and has simple optical setup.     

Continual deformation analysis with scanning phase method and time sequence phase method in temporal speckle pattern interferometry

If a laser beam illuminates a continual deformation object surface, it will lead to a temporal speckle pattern on the observation plane. Recording this time-dependent speckle pattern the deformation of the surface of an object can be obtained. Two methods, scanning phase method (SPM) and time sequence phase method (TSPM), have been introduced for measuring the displacement caused by the deformation in temporal speckle pattern interferometry (TSPI). Their principle is that by capturing a series of speckle interference patterns related to the object deformations, the fluctuations in the intensity of the interference patterns can be obtained. Through scanning these fluctuations and estimating both the average intensity and modulation of the temporal speckle interference patterns, the phase maps for whole-field displacements are calculated. In this way one is capable of quantitatively measuring continual displacements simply using a conventional electronic speckle pattern interferometry (ESPI) system without phase shifting or a carrier. The elaboration on the new methods is given in this paper and experiments are performed to demonstrate their performance with a conventional ESPI system.     

The design of a non-cube beam-splitter used for electronic speckle pattern interferometry

A non-cube beam-splitter (NCBS) is proposed, by which an incident beam can be separated largely in a direction and then the lights from the test object and the lights from a reference surface placed adjacently to the test object can be combined to construct a simple electronic speckle pattern interferometry (ESPI) system. Two mainly useful quantitative ways, to calculate the phase change of the test object, the phase-shift and the fringe carrier method with Fourier transform, can be achieved in the ESPI system with the NCBS. Experiments with phase-shifting and fringe carrier method are completed. The experimental results show that the monolithic design of the proposed NCBS is effective in ESPI measurement and immunity to vibrations.     

Modulation analysis in spatial phase shifting electronic speckle pattern interferometry and application for automated data selection on biological specimens

In electronic speckle pattern interferometry (ESPI), for a fast and objective analysis of measurement data which occur with a high repetition rate, an automated data processing is of particular advantage. For this reason, investigations were carried out to determine if the modulation of speckle interferograms can be applied as a quality parameter for the selection of suitable interferogram data for further evaluation e.g. phase unwrapping when spatial phase shifting (SPS) is performed. Six methods for determining the modulation of speckle interferograms are characterised and compared. The applicability of the speckle interferogram modulation as a parameter for mask generation in the unwrapping process of the phase difference is demonstrated by the evaluation of measurement data obtained from experiments with a spatial phase shifting endoscopic ESPI system on a technical surface and on a human gastrectomy specimen.     

Evaluation of elastic modulus of cantilever beam by TA-ESPI

The paper proposes an evaluation technique for the elastic modulus of a cantilever beam by vibration analysis based on time average electronic speckle pattern interferometry (TA-ESPI) and Euler-Bernoulli equation. General approaches for the measurement of elastic modulus of a thin film are the Nano indentation test, Buldge test, Micro-tensile test, and so on. They each have strength and weakness in the preparation of the test specimen and the analysis of experimental results. ESPI is a type of laser speckle interferometry technique offering non-contact, high-resolution and whole-field measurement. The technique is a common measurement method for vibration mode visualization and surface displacement. Whole-field vibration mode shape (surface displacement distribution) at resonance frequency can be visualized by ESPI. And the maximum surface displacement distribution from ESPI can be used to find the resonance frequency for each vibration mode shape. And the elastic modules of a test material can be easily estimated from the measured resonance frequency and Euler-Bernoulli equation. The TA-ESPI vibration analysis technique can be used to find the elastic modulus of a material requiring simple preparation process and analysis.     

Low-frequency harmonic vibration analysis with temporal speckle pattern interferometry

In this paper, the time sequence phase method (TSPM) has been applied to measure the displacement caused by low-frequency vibration in temporal speckle pattern interferometry (TSPI). The principle is that by capturing the temporal speckle patterns related to the object vibration, the whole-field displacement responses (amplitude and phase) of the vibrating object can be calculated through scanning these fluctuations. Thus, quantitative measurement can be carried out using a conventional ESPI system without a camera synchronized to the object vibration or a phase shifting system. The elaboration on the method is given and experimental results are presented.