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1.
为了研究微透镜阵列成像质量的影响因素,针对慢刀伺服加工和紫外(UV)光固化工艺制备的微透镜阵列,引入微透镜阵列镜片的误差,建立基于Zemax光学软件的光学微透镜阵列成像仿真模型,分析透镜单元的高度、曲率半径、入瞳直径等误差对微透镜阵列成像质量的影响。搭建光学测试平台对评价微透镜阵列成像性能的光学参数进行检测,包括各透镜单元的焦斑大小、位置误差及其焦距值,并利用点扩散函数(PSF)曲线的半峰全宽值对光场成像结果进行成像质量评价,测量得到微透镜阵列的焦距标准误差为0.12 mm。将测量结果与仿真结果相比,可得PSF曲线的半峰全宽值误差在12%左右,证明了仿真模型的准确性。利用仿真和实验的方法建立了微透镜阵列镜片误差与其光学成像质量之间的关系,这可为基于功能实现的光学微透镜阵列的超精密加工工艺提供理论基础和指导。  相似文献   

2.
紫外衍射微透镜阵列的设计与制备   总被引:1,自引:1,他引:0  
为了提高紫外焦平面阵列的填充因子,可以通过微透镜阵列与紫外焦平面阵列的集成,以改善紫外焦平面阵列的探测性能。根据标量衍射理论设计了用于日盲型紫外焦平面阵列的128×128衍射微透镜阵列,其工作中心波长为350nm,单元透镜F数为F/3.56。采用组合多层镀膜与剥离的工艺方法制备了128×128衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为88%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列具有均匀的焦斑分布,与紫外焦平面阵列单片集成能较好地改善器件的整体性能。  相似文献   

3.
六角形孔径平面微透镜阵列的制作及基本特性研究   总被引:5,自引:4,他引:1  
张玉  刘德森 《光子学报》2008,37(8):1639-1642
采用光刻离子交换工艺制作了六角形孔径平面微透镜阵列.离子交换后的变折射率区域有微小重叠,填充系数可达95%以上.对制作的六角形孔径平面微透镜进行了折射率分布、数值孔径和像差等光学特性测试,得到的六角形孔径平面微透镜阵列光学性能均匀,成像质量较好的结果.该透镜阵列的研制成功为制作高质量高填充系数透镜阵列及模拟生物复眼光学系统奠定了基础.  相似文献   

4.
针对通过微透镜阵列通光孔径的光束在不同条件下的填充问题,利用填充因子来表征微透镜阵列系统光瞳位置处光束的填充率,并分析其对系统探测距离、点扩散函数和光学传递函数的影响。基于近轴光学模型,构建了快速计算微透镜阵列扫描光学系统填充因子的数学模型,并提出一种系统设计方法。利用该方法设计了微透镜阵列扫描光学系统,所设计系统的实验结果与理论计算结果吻合,表明该系统的性能良好。  相似文献   

5.
微透镜阵列是一种多功能的微光学元件,可以对入射光进行扩散、光束整形、光线均分、光学聚焦等调制,进而实现大视角、低像差、小畸变、高时间分辨率和无限景深等,在光电器件和光学系统的微型化、智能化和集成化方面具有重要的应用潜力.介绍了微透镜阵列的光学原理和发展历程,综述了喷墨打印、激光直写、丝网印刷、光刻技术、光聚合技术、热熔回流技术和化学气相沉积法等微透镜阵列制备技术,总结了微透镜阵列在成像传感、照明光源、显示和光伏等领域的应用进展,最后对微透镜阵列的发展方向进行了展望,讨论了曲面微透镜、叠加复眼系统以及微透镜与新型光电材料结合等新方向的发展趋势和未来挑战.  相似文献   

6.
许乔  杨国光 《光子学报》1999,28(3):250-254
本文针对微透镜阵列与红外焦平面阵列集成的应用,对折射性微透镜阵列的非成象光学特性进行了研究和总结.采用系统性能评价因子来衡量微透镜的聚能效率,分析了系统参数对会聚效率的影响,并用标量衍射方法对几何光学分析结果进行了校验,为红外焦平面阵列微镜集成的设计和制作提供了理论依据.  相似文献   

7.
杨旭  耿超  李小阳  李枫  姜佳丽  李斌成  李新阳 《强激光与粒子束》2021,33(8):081005-1-081005-11
光学相控阵光束扫描技术在激光雷达、空间光通信和光开关等领域拥有巨大的应用潜力。微透镜阵列光学相控阵可以通过微透镜阵列间μm量级的相对位移同时对多个出射光束的二维倾斜相位进行调制,从而实现大角度二维光束扫描,具有出射口径大、结构简单、体积小、微惯性、多功能等优点。首先介绍了微透镜阵列光学相控阵的扫描原理,之后对微透镜阵列光学相控阵国内外的发展现状、应用和现阶段存在的问题进行了阐述,最后对微透镜阵列光学相控阵的发展趋势进行了展望。  相似文献   

8.
光学微透镜阵列在光学系统中的应用广泛,需求量大,而玻璃模压成形技术是最高效的微透镜阵列量产加工方法,具有精度高,一致性好,生产成本低等特点,有重要的应用研究价值。本文介绍了光学微透镜阵列的设计原理,模具制造技术,模压成形技术及相应检测技术;重点介绍了微透镜阵列模压成形试验与有限元仿真研究的最新进展;最后对微透镜模压成形发展前景进行了展望,包括微透镜阵列模压材料,模具表面镀层技术及超声复合加工技术在微透镜阵列模压成形中的应用等。  相似文献   

9.
窦任生  林海  胡继承 《光学学报》2005,25(7):59-964
研究了计算机程控光学器件的性能。通过对液晶空间光调制器进行电寻址控制,得到了振幅模式、二进制相位模式和连续相位模式的计算机程控透镜和程控微透镜阵列。实验结果和计算分析都表明,连续相位模式的程控透镜具有较好的聚焦性能和光效率。程控微透镜阵列的优点是阵列中的每一个微透镜都可以单独控制,可以得到所需要的阵列形式。实验给出了一个由这样的微透镜阵列产生的去掉了中心4×4阵列的8×8光斑阵列样式。还给出了利用程控透镜来方便有效地演示和研究透镜的像差方法。由计算机控制空间光调制器得到的光学器件虽然具有极大的灵活性,但是由于空间光调制器的像素的尺寸影响了它的精细程度,限制了它的应用。  相似文献   

10.
一种新型微透镜阵列成象式投影光刻系统的研究   总被引:4,自引:2,他引:2  
崔崧  高应俊  阮驰  郝爱花 《光子学报》2002,31(6):769-773
从理论和实验两方面入手,系统地研究了微透镜阵列的形成原理和制作工艺,分析了微透镜阵列的面形结构,得到了联系微透镜阵列矢高与制作工艺参量的经验公式.并且将四片微透镜阵列耦合,形成一个深紫外光刻的1:1成象的多孔径微小光刻系统.从几何光学理论出发,分析了这个光刻系统综合成象的特点,讨论了这种光刻系统的光学性能,并给出了实验测量方法.  相似文献   

11.
In this paper, we present microlens arrays (MLA) with long focal length (in millimeter range) based on thermal reflow process. The focal length of microlens is usually in the same order of lens diameter or several hundred microns. To extend focal length, we made a photoresist (SU-8) MLA covered by a Polydimethylsiloxane (PDMS) film on a glass substrate. Because the refractive index difference between PDMS and photoresist interface is lower than that of air and MLA interface, light is less bended when passing through MLA and is focused at longer distance. Microlenses of diameters from 50 μm to 240 μm were successfully fabricated. The longest focal length was 2.1 mm from the microlens of 240 μm diameter. The numerical aperture (NA) was reduced 0.06, which is much lower than the smallest NA (~ 0.15) by regular thermal reflow processes. Cured PDMS has high transmittance and becomes parts of MLA without too much optical power loss. Besides, other focal lengths can be realized by modifying the refractive index different between two adjacent materials as described in this paper.  相似文献   

12.
Microlens array (MLA) is microfabricated using Ultra Violet (UV) laser for display device applications. A colorless liquid photopolymer, Norland Optical Adhesive (NOA) 60, is spin-coated and pre-cured via UV light for completing the laser process. The laser energy controlled by a galvano scanner is radiated on the surface of the NOA 60. A rapid thermal volume expansion inside the material creates microlens array when the Gaussian laser energy is absorbed. The fabrication process conditions for various shapes and densities of MLA using a non-contact surface profiler are investigated. Furthermore, we analyze the optical and display characteristics for the Organic Light Emitting Diode (OLED) devices. Optimized condition furnishes the OLED with the enhancement of light emission by 15%. We show that UV laser technique, which is installed with NOA 60 MLA layer, is eligible for improving the performance of the next generation display devices.  相似文献   

13.
Microlens array diffuser for a light-emitting diode backlight system   总被引:4,自引:0,他引:4  
Chang SI  Yoon JB  Kim H  Kim JJ  Lee BK  Shin DH 《Optics letters》2006,31(20):3016-3018
Microlens array (MLA) diffusers for light-emitting diode (LED) backlight systems have been developed. A high fill-factor photoresist mold for the MLA was fabricated using three-dimensional diffuser lithography, and the patterns were transferred to a nickel master mold for UV-curable polymer replication. The fabricated microlens had various paraboloidal profiles, and its aspect ratio was controlled from 1.0 to 2.1. The MLA diffuser showed a batwing radiation pattern with a radiation angle of 150 degrees. The fabricated MLA diffuser may greatly enhance the color-mixing characteristics of LED backlight systems and help reduce the number of LEDs required.  相似文献   

14.
The Sb adsorption process on the Si(1 1 1)–In(4×1) surface phase was studied in the temperature range 200–400 °C. The formation of a Si(1 1 1)–InSb (2×2) structure was observed between 0.5 and 0.7 ML of Sb. This reconstruction decomposes when the Sb coverage approaches 1 ML and Sb atoms rearrange to and (2×1) reconstructions; released In atoms agglomerate into islands of irregular shapes. During the phase transition process from InSb(2×2) to Sb (θSb>0.7 ML), we observed the formation of a metastable (4×2) structure. Possible atomic arrangements of the InSb(2×2) and metastable (4×2) phases were discussed.  相似文献   

15.
交联共聚物的红外光谱定量分析研究   总被引:2,自引:0,他引:2  
交联共聚物由于具有不溶不熔性,定量分析方法非常有限,红外光谱分析可以用溴化钾压片制样,故不受此限制.文章用红外内标法测定了甲基含氢硅油-丙交酯交联共聚物中两组分的含量.以KSCN为内标物资,以2 100 cm-1处的强吸收峰为KSCN的定量峰.以1 750 cm-1的强羰基吸收峰为丙交酯的定量峰,二者的吸光度比值为I=ALA/AKSCN.丙交酯和内标物质KSCN的质量比即浓度比为C=MLA/MKSCN,以C对I作图,得内标工作曲线.实验结果表明在2/5<MLA/MKSCN<8/5范围内有较好的线性关系.只要加入适量的内标物质,使C值落在直线范围内,即可获得较为准确的分析结果.文章为交联共聚物以及其他共聚物组成的测定提供了一种简便易行的实验方法.  相似文献   

16.
In this paper, TLD (LiF: Mg, Cu, P) is used as detector. A multi-layer absorption (MLA) model is designed. Combined with Monte-Carlo processes, a bremsstrahlung X-ray spectrum is reconstructed by an iterative method; the reconstructed results agree with the results of simulations by the MCNP process essentially, especially in middle energy region.  相似文献   

17.
A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed. PACS 42.82.Cr; 07.60.Pb; 42.62.Cf  相似文献   

18.
Based on structure prediction method, the machine learning method is used instead of the density functional theory (DFT) method to predict the material properties, thereby accelerating the material search process. In this paper, we established a data set of carbon materials by high-throughput calculation with available carbon structures obtained from the Samara Carbon Allotrope Database. We then trained a machine learning (ML) model that specifically predicts the elastic modulus (bulk modulus, shear modulus, and the Young’s modulus) and confirmed that the accuracy is better than that of AFLOW–ML in predicting the elastic modulus of a carbon allotrope. We further combined our ML model with the CALYPSO code to search for new carbon structures with a high Young’s modulus. A new carbon allotrope not included in the Samara Carbon Allotrope Database, named Cmcm–C24, which exhibits a hardness greater than 80 GPa, was firstly revealed. The Cmcm–C24 phase was identified as a semiconductor with a direct bandgap. The structural stability, elastic modulus, and electronic properties of the new carbon allotrope were systematically studied, and the obtained results demonstrate the feasibility of ML methods accelerating the material search process.  相似文献   

19.
Zhang QX  Wang JY  Liu L  Yao XC 《Optics letters》2010,35(22):3838-3840
We designed a rapid functional imager for the parallel recording of localized intrinsic optical signals (IOSs). This imager used a microlens array (MLA)-based illuminator to deliver visible stimulus light and near-infrared (NIR) recording light simultaneously. The parfocal configuration of the stimulus and recording light illumination enabled confocal recording of the stimulus-evoked IOSs. Because the MLA stimulation/recording spots were widely separated on the retina, and only the photoreceptors within the MLA stimulation/recording spots were stimulated, the potential IOS cross talk effect among neighboring retinal areas was minimized. Our experiments revealed robust IOS activities tightly correlated with localized retinal responses.  相似文献   

20.
Au/Co(4–8 ML)/Au single magnetic layers and Au(8 ML)/Co(4 ML)/Au(8 ML)/Co(8 ML)/Au bilayer were sequentially grown by electrodeposition on an Au(1 1 1) buffer layer electrodeposited on Si(1 1 1). The technique used in this work provides full control on the structure and the chemical composition of the different layers (no alloying) as well as on the chemistry at interfaces. scanning tunneling microscopy (STM) and atomic force microscopy (AFM) imaging and X-ray diffraction measurements show that atomically flat continuous Co(0 0 0 1) layers (4–8 ML) can be grown in epitaxy with the Au(1 1 1) substrate and that the 2 nm-thick spacer is also a continuous Au(1 1 1) layer. The Co ultrathin layers (4 and 8 ML) exhibit perpendicular magnetic anisotropy. The lateral magnetic homogeneity and magnetization reversal process have been investigated by scanning magneto-optical Kerr effect (MOKE) magnetometry and global Kerr microscopy. The correlation between magnetization switching behaviour in each layer of the Co-bilayer stack has been evidenced from in-depth sensitive MOKE measurements and microscopy. The strong coupling observed between the two Co layers is attributed to magnetostatic interaction at domain wall boundaries.  相似文献   

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