C2团簇在金刚石(111)表面吸附结构的分子动力学模拟

利用Brenner(#2)半经验多体相互作用势和分子动力学模拟方法研究荷能的C₂在金刚石(111)表面的化学吸附过程.模拟300 K时,初始入射动能分别为1,20,30 eV的C₂团簇从6个不同位置轰击金刚石(111)表面,观察到C₂团簇在金刚石(111)表面形成的吸附结构,表面C原子键的打开以及C₂团簇与表面C原子成键等物理过程,并讨论不同入射位置和入射能量对沉积团簇的结构特性的影响.结果表明,对于表面不同的局部构型,C₂团簇发生不同的碰撞过程,C₂团簇入射能量的提高有利于成键过程的发生,从原子尺度模拟沉积机制.     

Si60团簇的结构及其与Si(111)面间碰撞的分子动力学模拟

利用紧束缚分子动力学退火方法模拟研究了Si60团簇的稳定结构和基态能量,结果表明Si60团簇为具有T对称性的截顶二十面体的富勒烯结构,平均键长为0236nm,直径为0933nm,原子结合能为4.45eVatom,JahnTeller效应对Si60团簇的结构有很大影响.通过对Si60分子和Si(111)面碰撞机理的粒子数、体积和能量不变分子动力学模拟,发现Si60分子吸附在Si(111)面所需要的垂直入射动能为40eV,Si60分子远不如C60分子稳定 关键词： 紧束缚 JahnTeller效应 碰撞     

低能原子沉积在Pt(111)表面的分子动力学模拟

采用嵌入原子方法的原子间相互作用势,利用分子动力学方法模拟了六种贵金属原子(Ni,Pd,Pt,Cu,Ag,Au)分别在Pt(111)表面低能沉积的动力学过程.结果表明:随着入射能量从0.1eV升高到200eV,基体表面原子是按层迁移的,沉积过程对基体表面的影响和沉积原子在基体表层的作用均存在两个转变能量(ET1≈5eV,ET2≈70eV).当入射能量低于5eV时,基体表面几乎没有吸附原子和空位形成,沉积原子在基体表层几乎没有注入产生;当入射能量在5—70eV范围内时,沉积原子在基体表层有注入产生,其注入深度小于两个原子层,即为亚注入,此时吸附原子主要由基体表层原子形成,基体表面第三层以下没有空位形成;当入射能量高于70eV时,沉积原子的注入深度大于两个原子层,将会导致表面以下第三层形成空位,并且空位产额随入射能量的升高而急剧增加.基于分子动力学模拟的结果,对低能沉积作用下的薄膜生长以及最优沉积参数的选择进行了讨论.     

入射能量对Au/Au(111)薄膜生长影响的分子动力学模拟

利用分子动力学模拟了Au原子在Au(111)表面低能沉积的动力学过程.采用嵌入原子方法的原子间相互作用势,通过对沉积层原子结构的分析和薄膜表面粗糙度、层覆盖率的计算,研究了沉积粒子能量对薄膜质量的影响及其机制.结果表明:当入射能量Ein25 eV时,沉积层和基体表层均呈现规则的单晶面心立方(111)表面的排列,沉积原子仅注入到基体最表面两层,随着入射能量的增加,薄膜表面粗糙度降低,薄膜越趋于层状生长,入射能量的增加有利于薄膜的成核和致密化;当Ein 25 eV时,沉积层表面原子结构出现了较为明显的晶界,沉积原子注入到基体表面第三层及以下,随着入射能量的增加,薄膜表面粗糙度增加,沉积层和基体表层原子排列越不规则,载能沉积会降低基体内部的稳定性,导致基体和薄膜内部缺陷的产生,降低薄膜质量.此外,当基体内部某层沉积原子数约等于该层总原子数的一半时,沉积原子将能穿过该层进入到基体内部更深层.     

低能C36团簇在金刚石(100)晶面沉积时的影响因素

"使用Brenner-LJ拟合势描述了金刚石与C36团簇原子间的相互作用,并用分子动力学模拟的方法研究单个C36(D6h)在金刚石(100)晶面的沉积机制．通过仿真实验分析了C36团簇的入射能量、入射点位置、入射姿势、入射角度等因素对其成核初期化学吸附过程以及沉积后其稳定性的影响．研究发现：由于C36入射点位置及入射姿势的不同,其在金刚石(100)晶面沉积时的沉积阈值最小值为20 eV,最大值为60 eV;在入射角不超过60o斜射时,由于水平运动分量的存在,C36可能翻滚及平滑至成键能量较小的区域后再成键     

F原子与SiC(100)表面相互作用的分子动力学模拟

本文采用分子动力学模拟方法研究了F原子(能量在0.5—15 eV之间)与表面温度为300 K的SiC(100)表面的相互作用过程. 考察了不同能量下稳定含F反应层的形成过程和沉积、刻蚀过程的关系以及稳定含F反应层对刻蚀的影响. 揭示了低能F原子刻蚀SiC的微观动力学过程. 模拟结果表明伴随着入射F原子在表面的沉积量达到饱和,SiC表面将形成一个稳定的含F反应层. 在入射能量小于6 eV时,反应层主要成分为SiF₃,最表层为Si-F层. 入射能量大于6 eV时,反应层主要成分为SiF. 关键词： 分子动力学 刻蚀 能量 SiC     

Be原子在Be基底上的沉积过程研究

利用分子动力学方法模拟了Be原子在Be基底上的沉积过程. 模拟了沉积粒子不同入射动能条件下, 沉积薄膜表面形态的差异. 在一定能量范围内, 增加粒子入射动能可以减小薄膜的表面粗糙度. 但是, 过高的入射动能, 不利于减小薄膜表面粗糙度. 通过沉积薄膜中原子配位数以及单个原子势能沿薄膜厚度的分布, 分析沉积原子入射动能对于薄膜及表面结构的影响. 沉积动能较大时, 薄膜的密度较大; 单个原子势能沿薄膜厚度分布较为连续; 同时薄膜中原子应力沿薄膜厚度分布较为连续. 最后, 分析了沉积粒子能量转化的过程、粒子初始动能对基底表面附近粒子局部动能增加的影响.     

载能氢原子与石墨(001)面碰撞过程中的能量传递行为的分子动力学研究

本文采用分子动力学方法研究了单一载能氢原子与石墨碰撞时氢原子被石墨反射、 吸附和石墨被氢原子穿透的发生系数以及碰撞中的能量传递机理. 研究发现: 与单层石墨相比, 多层石墨之间的长程相互作用增加了氢原子发生反射的能量范围, 尤其当入射能量大于20.0 eV时, 对反射过程的影响很明显; 当氢原子的入射能量大于25.0 eV时, 有一定的概率穿透四层石墨; 当氢原子入射能量高于28.0 eV时, 载能氢原子的能量传递给第二层石墨烯的比传递给第一层石墨烯的多. 这些结果对理解聚变反应中, 碳基材料的化学腐蚀及氚滞留有重要意义.     

质子与羟基碰撞的含时密度泛函理论研究

采用将含时密度泛函理论和分子动力学非绝热耦合的方法,研究了不同入射速度下质子与羟基碰撞的反应动力学.计算了碰撞前后质子动能和羟基动能的变化及羟基电子和质子的运动.计算结果表明,质子沿垂直羟基分子轴方向入射时,质子与羟基碰撞后,质子被反弹且动能损失并俘获了羟基中氧的一部分电子,而丢失部分电子的羟基则获得动能以伸缩振动的形式向计算边界平动.随着入射质子的初动能增加,质子从羟基中俘获的电子增多,碰撞后羟基的键长变长,羟基振动变强而伸缩振动频率降低.此外,还发现质子的入射方向对碰撞过程的激发动力学有很大的影响.质子从不同的方向入射时,质子的入射初动能越大,其损失的动能越多且损失的动能与入射初动能呈线性关系,而入射方向对质子动能损失的影响很小.在质子入射初动能较低(小于25 eV)的情况下,羟基获得的动能与质子入射初动能呈线性关系且与入射方向无关;在质子入射初动能较高(大于25 eV)时,当质子沿羟基分子轴方向入射时,羟基动能的增量远大于质子沿垂直于羟基分子轴方向入射时羟基动能的增量.     

低能Cl原子刻蚀Si(100)表面的分子动力学模拟

使用分子动力学模拟方法研究了不同能量(0.3—10 eV)的Cl原子对表面温度为300 K的Si(100)表面的刻蚀过程.模拟中采用了Tersoff-Brenner势能函数来描述Cl-Si体系的相互作用.模拟结果显示,随着入射Cl原子在表面的吸附达到饱和,Si表面形成一层富Cl反应层.这和实验结果是一致的.反应层厚度随入射能量增加而增加.反应层中主要化合物类型为SiCl,且主要分布于反应层底部.模拟结果发现随初始入射能量的增加,Si的刻蚀率增大.在入射能量为0.3,1和5 eV时,主要的Si刻蚀产物为Si 关键词： 分子动力学 Cl刻蚀Si 分子动力学模拟 微电子机械系统     

Scattering of N2 from Ni(111)

A cold (T_rot<10 K) beam of N₂ with an initial translational energy of 0.40 eV strikes an Ni(111) surface at surface temperatures from 300 to 873 K at several incident angles from 15 to 60°. The rotational energy and angular distributions of the scattered molecules are probed using (2+1) resonance-enhanced multiphoton ionization. Molecules scattered in the specular direction have mean rotational energies that are independent of surface temperature, whereas those scattered at angles far from the specular show a dependence on surface temperature, caused likely by multiple collisions with the surface before escape. A rotational rainbow, seen in systems such as CO–Ni(111) and N₂–Ag(111), is not seen in this system. For molecules that scatter close to the specular direction, approximately 10% of the initial translational energy is converted into rotational energy of the scattered N₂. For surface temperatures above room temperature, the angular distributions indicate that molecules that scatter into low-J states also tend to exit in a broad peak (10–20° FWHM) near the specular, and this peak is broadened with increasing incident angle. The molecules that scatter into high-J states have a much broader distribution, indicating that they are trapped rotationally during the initial collision and suffer multiple collisions before leaving the surface.     

Thermal destruction of two-dimensional graphite islands on refractory metals (Ir, Re, Ni, and Pt)

Thermal destruction of two-dimensional graphite films on Ni(111), Re(10-10), Ir(111), and Pt(111) substrates is studied. It is shown that the detachment of an edge carbon atom from an island is a limiting process stage for all the cases. The activation energy of this process varies from 2.5 eV for nickel to 4.5 eV for iridium. The variation of the activation energy is associated with the ability of the metal surface to form strong chemisorptive bonds with valence-active edges of graphite islands, which loosen C-C bonds in graphite.     

C_(60)离子束撞击固体表面坍塌沉积物的拉曼光谱研究

Ｃ６０离子束撞击固体表面坍塌沉积物的拉曼光谱研究唐紫超任斌黄荣彬田中群郑兰荪（固体表面物理化学国家重点实验室厦门大学化学系厦门３６１００５）ＣｏｌａｐｓｅｄＤｅｐｏｓｉｔｉｏｎｏｆＡｃｃｅｌａｔｅｄＣ６０ＢｅａｍｏｎＳｏｌｉｄＳｕｒｆａｃｅｓ——Ｃ...     

Scattering of Li+ from LEED characterized W(110) and Si (111) surfaces at energies between 2 and 20 eV

Energy and angular distributions of Li⁺ ions scattered from W(110) and Si(111) surfaces have been measured for a wide range of scattering angles and for beam energies between 2 and 20 eV. The collision process can be explained in terms of binary collisions with single surface atoms, if the influence of the attractive part of the interaction potential is taken into account. A square well approximation for the potential makes it possible to predict the form of the energy spectrum as well as the behaviour of the angular distribution of the scattered particles for both systems. The influence of adsorbed atoms and molecules on the scattering behaviour has been investigated. Exposure of the W surface to H₂, O₂ and CO shows that surface coverages exceeding 10% of a monolayer very drastically influence the scattering. The results from the clean surfaces indicate that sufficiently precise measurements of the energy spectra of the scattered particles can yield very detailed information about the form of the interaction potential. The form of the energy spectra also contains information as to the extent of vibrational excitation of the surface atoms.     

Scattering of CO and N(2) molecules by a graphite surface

Measurements of angular distributions for the scattering of well-defined incident beams of CO and N(2) molecules from a graphite surface are presented. The measurements were carried out over a range of graphite surface temperatures from 150 to 400?K and a range of incident translational energies from 275 to over 600?meV. The behavior of the widths, positions and relative intensities of the angular distributions for both CO and N(2) were found to be quite similar. The experimental measurements are discussed in comparison with calculations using a classical mechanical model that describes single collisions with a surface. Based on the behavior of the angular distributions as functions of temperature and incident translational energy, and the agreement between measured data and calculations of the single-collision model, it is concluded that the scattering process is predominantly a single collision with a collective surface for which the effective mass is significantly larger than that of a single carbon atom. This conclusion is consistent with that of earlier experiments for molecular beams of O(2) molecules and Xe atoms scattering from graphite. Further calculations are carried out with the theoretical molecular scattering model in order to predict translational and rotational energy transfers to and from the molecule during scattering events under similar initial conditions.     

The dynamical origin of non-normal energy scaling and the effect of surface temperature on the trapping of low molecular weight alkanes on Pt(111)

Molecular classical dynamical simulations of alkanes trapping on platinum surfaces were performed to examine the origin of non-normal energy scaling for molecular adsorption. Conversion of normal to parallel translational energy at normal incidence and conversion of parallel translational energy into normal translational energy at glancing angles are the primary mechanisms which produce non-normal energy scaling of alkanes trapping on cold Pt(111). In addition, a tendency to convert rotational energy gained in the first gas-surface collision into normal translational energy for collisions at glancing incidence further increases the degree of non-normal energy scaling. Increasing surface temperature is shown to have little effect on energy transfer processes in the first bounce but increasing influence on subsequent bounces. Despite difficulties in defining trapping at high surface temperatures, simulations indicate that the initial trapping probability of ethane on Pt(111) does not fall by more than a factor of two over the surface temperature range of 100–700 K.     

Pt(111)表面低能溅射现象的分子动力学模拟

利用嵌入原子方法的原子间相互作用势，通过分子动力学模拟，详细研究了贵金属原子在Pt (111)表面的低能溅射现象.模拟结果显示：对于垂直入射情况，入射原子的质量对Pt (11 1)表面的溅射阈值影响不大.当入射原子的能量小于溅射阈值时，入射原子基本以沉积为主 ；当入射原子的能量大于溅射阈值时，溅射产额随入射原子能量的增加而线性增大；当入射 原子能量达到200 eV时，各种入射原子的溅射产额都达到或接近1，此时入射原子主要起溅 射作用.溅射原子发射的角分布概率和溅射花样与高能溅射相类似.研究表明：与基于二体碰 撞近似的线性级联溅射理论不同，当入射原子能量大于溅射阈值时，低能入射原子的溅射产 额正比于入射原子的约化能量和入射原子与基体原子的质量比.通过对低能入射原子的钉扎 能力分析，提出了支配低能溅射的入射原子反射物理机理. 关键词： 分子动力学模拟、低能溅射     

Dynamical Analysis of Sputtering at Threshold Energy Range： Modelling of Ar＋Ni（100） Collision System

The sputtering process of Ar＋Ni（100） collision systems is investigated by means of constant energy molecular dynamics simulations. The Ni（100） slab is mimicked by an embedded-atom potential, and the interaction between the projectile and the surface is modelled by using the reparametrized ZBL potential. Ni atom emission from the lattice is analysed over the range of 20-50 eV collision energy. Sputtering yield, angular and energy distributions of the scattered Ar and of the sputtered Ni atoms are calculated, and compared to the available theoretical and experimental data.