An efficient numerical approach to electrostatic microelectromechanical system simulation

Computational analysis of electrostatic microelectromechanical systems (MEMS) requires an electrostatic analysis to compute the electrostatic forces acting on micromechanical structures and a mechanical analysis to compute the deformation of micromechanical structures. Typically, the mechanical analysis is performed on an undeformed geometry. However, the electrostatic analysis is performed on the deformed position of microstructures. In this paper, a new efficient approach to self-consistent analysis of electrostatic MEMS in the small deformation case is presented. In this approach, when the microstructures undergo small deformations, the surface charge densities on the deformed geometry can be computed without updating the geometry of the microstructures. This algorithm is based on the linear mode shapes of a microstructure as basis functions. A boundary integral equation for the electrostatic problem is expanded into a Taylor series around the undeformed configuration, and a new coupled-field equation is presented. This approach is validated by comparing its results with the results available in the literature and ANSYS solutions, and shows attractive features comparable to ANSYS.     

Microscopic TV holography for MEMS deflection and 3-D surface profile characterization

Recent industrial demands for greater product quality in the fields of microelements and micro-electro-mechanical systems (MEMS) generate new challenges for metrology. The fast-growing MEMS industry requires a robust non-destructive quantitative measurement system for the characterization of their performance, reliability and integrity. A microscopic TV holographic system using a long working distance microscope with an extended zoom range has been developed for microelements and MEMS deformation and 3-D surface profile analysis. The system is capable of evaluating both rough and smooth surfaces. Noisy wrapped phase map is a usual problem in speckle interferometry. We have compared several phase-shifting algorithms for evaluation of speckle phase for their usefulness in generating less-noisy phase maps. The experimental results on a MEMS pressure sensor for out-of-plane deflection and 3-D surface profile analysis are presented.     

An iterative method for nonlinear dynamical system of an electrostatically actuated micro-cantilever

This study proposes an iterative method, in which all iterations are linear, for solving the nonlinear dynamical system of an electrostatically actuated micro-cantilever in MEMS. The presented method is further improved, so that the CPU time needed is significantly reduced. This method provides solutions in excellent agreement with numerical ones.     

Wasserstein distances in the analysis of time series and dynamical systems

A new approach based on Wasserstein distances, which are numerical costs of an optimal transportation problem, allows us to analyze nonlinear phenomena in a robust manner. The long-term behavior is reconstructed from time series, resulting in a probability distribution over phase space. Each pair of probability distributions is then assigned a numerical distance that quantifies the differences in their dynamical properties. From the totality of all these distances a low-dimensional representation in a Euclidean space is derived, in which the time series can be classified and statistically analyzed. This representation shows the functional relationships between the dynamical systems under study. It allows us to assess synchronization properties and also offers a new way of numerical bifurcation analysis.The statistical techniques for this distance-based analysis of dynamical systems are presented, filling a gap in the literature, and their application is discussed in a few examples of datasets arising in physiology and neuroscience, and in the well-known Hénon system.     

Statistical mechanics of Arakawa’s discretizations

The results of statistical analysis of simulation data obtained from long time integrations of geophysical fluid models greatly depend on the conservation properties of the numerical discretization used. This is illustrated for quasi-geostrophic flow with topographic forcing, for which a well established statistical mechanics exists. Statistical mechanical theories are constructed for the discrete dynamical systems arising from three discretizations due to Arakawa [Arakawa, Computational design for long-term numerical integration of the equations of fluid motion: two-dimensional incompressible flow. Part I. J. Comput. Phys. 1 (1966) 119–143] which conserve energy, enstrophy or both. Numerical experiments with conservative and projected time integrators show that the statistical theories accurately explain the differences observed in statistics derived from the discretizations.     

Statistical mechanics of Arakawa’s discretizations

The results of statistical analysis of simulation data obtained from long time integrations of geophysical fluid models greatly depend on the conservation properties of the numerical discretization used. This is illustrated for quasi-geostrophic flow with topographic forcing, for which a well established statistical mechanics exists. Statistical mechanical theories are constructed for the discrete dynamical systems arising from three discretizations due to Arakawa [Arakawa, Computational design for long-term numerical integration of the equations of fluid motion: two-dimensional incompressible flow. Part I. J. Comput. Phys. 1 (1966) 119–143] which conserve energy, enstrophy or both. Numerical experiments with conservative and projected time integrators show that the statistical theories accurately explain the differences observed in statistics derived from the discretizations.     

Pertubation analysis of the dynamical behavior of two-junction interferometers

The dynamical properties of symmetric quantum interferometers with equal junctions of negligible capacitance have been studied by means of perturbation analysis in the limit of small values of the parameter β. In this limit, two characteristic time constants arise. These quantities may be linked to two different dynamical processes in the system: the first is related to the time evolution of the average superconducting phase difference across the two junctions; the second defines the time scale for flux motion. The response of the system to constant and time-dependent externally applied magnetic fields is considered and a general perturbed solution for the average superconducting phase difference and the fluxon number variable is derived to first order in β.     

Monte Carlo and numerical studies of coloured noise and stochastic resonance problems

We suggest two algorithms for evaluating dynamical systems described as first order differential equations under the influence of external noise represented by an Ornstein-Uhlenbeck process: a direct Monte Carlo simulation of the equation of motion and a numerical integration of the associated composite marcov equation. The two algorithms complement one another with respect to small and large noise correlation times and produce results which agree within any desired accuracy. We apply our algorithms to the problem of stochastic resonance and present the numerical results of first passage time densities, transition rates und phase histograms as functions of the system parameters frequency of the periodic force, noise correlation time and noise strength.     

Hamilton's equations for constrained dynamical systems

We derive expressions for the conjugate momenta and the Hamiltonian for classical dynamical systems subject to holonomic constraints. We give an algorithm for correcting deviations of the constraints arising in numerical solution of the equations of motion. We obtain an explicit expression for the momentum integral for constrained systems.     

Eckhaus instability in systems with large delay

The dynamical behavior of various physical and biological systems under the influence of delayed feedback or coupling can be modeled by including terms with delayed arguments in the equations of motion. In particular, the case of long delay may lead to complicated and high-dimensional dynamics. We investigate the effects of delay in systems that display an oscillatory instability (Hopf bifurcation) in the absence of delay. We show by analytical and numerical methods that the dynamical scenario includes the coexistence of multiple stable periodic solutions and can be described in terms of the Eckhaus instability, which is well known in the context of spatially extended systems.     

Stochastic sensitivity analysis of periodic attractors in non-autonomous nonlinear dynamical systems based on stroboscopic map

To apply stochastic sensitivity function method, which can estimate the probabilistic distribution of stochastic attractors, to non-autonomous dynamical systems, a 1/N$1/N$-period stroboscopic map for a periodic motion is constructed in order to discretize the continuous cycle into a discrete one. In this way, the sensitivity analysis of a cycle for discrete map can be utilized and a numerical algorithm for the stochastic sensitivity analysis of periodic solutions of non-autonomous nonlinear dynamical systems under stochastic disturbances is devised. An external excited Duffing oscillator and a parametric excited laser system are studied as examples to show the validity of the proposed method.     

Introduction to focus issue: mixed mode oscillations: experiment, computation, and analysis

Mixed mode oscillations (MMOs) occur when a dynamical system switches between fast and slow motion and small and large amplitude. MMOs appear in a variety of systems in nature, and may be simple or complex. This focus issue presents a series of articles on theoretical, numerical, and experimental aspects of MMOs. The applications cover physical, chemical, and biological systems.     

Universal features of hydrodynamic Lyapunov modes in extended systems with continuous symmetries

Numerical and analytical evidence is presented to show that hydrodynamic Lyapunov modes (HLMs) do exist in lattices of coupled Hamiltonian and dissipative maps. More importantly, we find that HLMs in these two classes of systems are different with respect to their spatial structure and their dynamical behavior. To be concrete, the corresponding dispersion relations of Lyapunov exponent versus wave number are characterized by lambda approximately k and lambda approximately k2, respectively. The HLMs in Hamiltonian systems are propagating, whereas those of dissipative systems show only diffusive motion. Extensive numerical simulations of various systems confirm that the existence of HLMs is a very general feature of extended dynamical systems with continuous symmetries and that the above-mentioned differences between the two classes of systems are universal in large extent.     

Effect of signal modulating noise in bistable stochastic dynamical systems

The effect of signal modulating noise in bistable stochastic dynamical systems is studied. The concept of instantaneous steady state is proposed for bistable dynamical systems. By making a dynamical analysis of bistable stochastic systems, we find that global and local effect of signal modulating noise as well as stochastic resonance can occur in bistable dynamical systems on which both a weak sinusoidal signal and noise are forced. The effect is demonstrated by numerical simulation.     

Global dynamics of the advanced light source revealed through experimental frequency map analysis

Frequency map analysis was first used for the dynamical study of numerical simulations of physical systems (solar system, galaxies, particle accelerators). Here it is applied directly to the experimental results obtained at the Advanced Light Source. For the first time, the network of coupling resonances is clearly visible in an experiment, in a similar way as in the numerical simulation. Excellent agreement between numerical and experimental results leads us to propose this technique as a tool for improving numerical models and actual behavior of particle accelerators. Moreover, it provides a model-independent diagnostic for the evaluation of the dynamical properties of the beam.     

Microelectromechanical bandpass filters based on cyclic coupling architectures

Bandpass filters based on resonant microelectromechanical systems (MEMS) have the unique advantage of being able to leverage the benefits of classical mechanical filters, including their high quality factors of resonance, while simultaneously addressing the challenges associated with manufacturing cost and size, and enabling integrated fabrication with other on-chip components. While prior research has demonstrated the benefits of microelectromechanical filters composed of both isolated and coupled microresonators, the optimality of existing filter architectures, and their associated performance metrics, is yet to be fully determined. To this end, the current effort seeks to investigate the relative utility of micromechanical filter designs which exploit a nontraditional filter architecture founded upon cyclic, elastic coupling. Specifically, the work seeks to characterize the pertinent performance metrics and robustness characteristics associated with these systems, and to benchmark the acquired results against conventional, open-chain filter designs. The work ultimately demonstrates that MEMS filters based upon cyclic coupling architectures may be beneficially leveraged in certain filter implementations to improve overall system performance.     

ESPI solution for non-contacting MEMS-on-wafer testing

Rapid progress in the field of micro-electro-mechanical systems (MEMS) makes the development of appropriate measuring and testing means timely. Characterizing the mechanical properties of MEMS structures at a very early stage of manufacturing is a challenging task for quality assurance in this field. The paper describes a new solution that is based upon the vibration analysis of the microparts. The nanometer amplitudes are detected by advanced electronic speckle pattern interferometry (ESPI). A specific signal processing technique has been applied to make the solution robust. Comprehensive numerical simulations provide the theoretical base for the HNDT concept. A laboratory system for 4″ wafer has been built, and extensive tests show that such key properties as e.g. the thickness of springs or membranes can be determined exactly. Automated frequency scanning and corresponding digital image processing open the way to reliable and fast industrial systems for MEMS testing on wafer level.     

Stability transformation: a tool to solve nonlinear problems

We present an analysis of the properties as well as the diverse applications and extensions of the method of stabilisation transformation. This method was originally invented to detect unstable periodic orbits in chaotic dynamical systems. Its working principle is to change the stability characteristics of the periodic orbits by applying an appropriate global transformation of the dynamical system. The theoretical foundations and the associated algorithms for the numerical implementation of the method are discussed. This includes a geometrical classification of the periodic orbits according to their behaviour when the stabilisation transformations are applied. Several refinements concerning the implementation of the method in order to increase the numerical efficiency allow the detection of complete sets of unstable periodic orbits in a large class of dynamical systems. The selective detection of unstable periodic orbits according to certain stability properties and the extension of the method to time series are discussed. Unstable periodic orbits in continuous-time dynamical systems are detected via introduction of appropriate Poincaré surfaces of section. Applications are given for a number of examples including the classical Hamiltonian systems of the hydrogen and helium atom, respectively, in electromagnetic fields. The universal potential of the method is demonstrated by extensions to several other nonlinear problems that can be traced back to the detection of fixed points. Examples include the integration of nonlinear partial differential equations and the numerical determination of Markov-partitions of one-parametric maps.     

基于光折变双光束耦合的刚性全息明孤子的温度依赖特性研究

研究了基于双光束耦合的光折变耗散系统中全息明孤子的温度演化特性.数值计算结果表明，晶体温度与刚性全息孤子的稳定性密切相关.在一定温度下，全息孤子能在晶体中传播足够远的距离；当晶体温度漂移不大时，入射孤子能演化成稳定的全息孤子继续传播；而当晶体温度变化足够大时，孤子波强度随传播距离增加或减小，入射孤子不能以稳定的全息孤子态传播.讨论了将刚性全息孤子的温度特性应用于光学衰减、中继器件的可能性. 关键词： 空间光孤子 光折变非线性光学 耗散系统 全息聚焦