Implementation of GHz SAW filters using quasi-harmonic interdigital transducers

本文利用准谐频设计方法,在常规光刻工艺水平上,成功地实现了GHz级声表面波(SAW)器件。准谐频叉指换能器(QHIDT)的优点为其指条宽与指间隙可以比一般的单指换能器宽,克服了单指换能器内指间的多次反射,并且又较好地解决了普通谐频叉指换能器基频抑制不好的缺点。本文给出了制作在ST石英基片上,工作频率1128MHz的声表面波滤波器的实验结果。     

GaN的声表面波特性研究

采用金属有机物化学气相外延方法在(0001)面蓝宝石上生长了高质量、高阻的未掺杂(0001)面GaN薄膜。为精确测量GaN薄膜材料的声表面波特性，在GaN薄膜表面上沉积了金属叉指换能器，叉指换能器采用等叉指结构，叉指的数目为40对，叉指间距为15μm。采用脉冲法测量了声表面波在自由表面和金属表面上的速度，并通过计算得到了机电耦合系数(κ^2)。所测量的声表面波速度（ν)为5667m／s，机电耦合系数(κ^2)为1．9％。     

应用LiNbO_3声表面波驱动的全光纤声光频移器

介绍一种工作在10.7MHz的全光纤声光频移器.它由在LiNbO_3基片上制作的叉指电极换能器产生的声表面波驱动.当驱动电功率1.5W时,频移光转换效率达35％.     

声表面波空心叉指换能器

本文提出一种新的声表面波叉指换器结构——空心叉指换能器。对空心叉指换能器和普通叉指换能器(例如,双叉指换能器和单叉指换器)的性能进行了比较。给出了设计空心叉指换能器的数据。分析和实验结果证明,这种换能器与普通叉指换能器相比,其优点是:在相同的制造工艺和满足规定的指间反射的情况下,容易实现高的成品率和较高的工作频率。     

声表面波驱动的非接触式转动马达

在研究摩擦力驱动的接触式转动马达的基础上,本文研制了一种由声表面波驱动的非接触式转动马达.这种马达的定子选用128°YX-LiNbO3晶体,在晶体表面光刻两对叉指换能器,由叉指换能器在定子表面激发两列平行而反向传播的声表面波.定子表面铺一层流体,转子就浮在流体表面.当定子表面有两列平行而反向的声表面波传播时,流体层中就会产生平行而反向的声流,这种黏性流体的声流运动就会驱动转子运动.实验上测定了马达的角速度随驱动电压,流体层厚度以及流体运动黏性系数变化的结果.同时,我们也发现,在相同工作频率下,非接触式转动马达的阈值电压远小于接触式.     

声表面波单指无内反射叉指换能器

在陈-Haus理论的基础上,本文首先从实验上研究了YZ-LiNbO_3上的短路金反射栅及ST-X石英上的沟槽填铝短路反射栅的反射特性,证明了这两种结构存在异常反射现象。同时,在实验中发现YZ-LiNbO_3上的短路金反射栅存在用改变栅条厚度无法消除的残余反射现象。我们将陈-Haus理论开拓到各向异性晶体的实际情况,从理论上解释了这一现象。 进而从耦合模理论出发讨论了叉指换能器的反射理论。在此基础上,本文着重从理论和实验上提出了利用异常反射现象实现单指无内反射换能器结构,具体分析和实现了两种无内反射叉指换能器结构:YZ-LiNbO_3上的金单指结构和ST-X石英上的沟槽填铝单指结构。在YZ-LiNbO_3上做出相对带宽14％,带内畸变小于±1dB的带通滤波器。与通常铝单指结构滤波器相比,带内畸变减小近10dB。在ST-X石英上做出了相对带宽0.9％,带内响应与理论设计要求完全相同的带通滤波器,而用通常铝单指结构,则滤波器的带内畸变将达到8dB。     

一种“闪烁型”IDT阵列声束偏转器

本文提出了一种类比于光学中“闪烁光栅”的声表面波叉指换能器的陈列结构。讨论了由该阵列激励的一级声束(主偏转声束)的相对强度与阵列诸参数的关系。讨论了该声束的相对强度随声频而变化的规律(频率响应)。理论分析与实验结果表明:对本文所述的具体阵列结构说来,主偏转声束的相对强度,在声频变化一个倍频程范围内,达65％以上,而其起伏小于3dB。本文所得到的一些基本规律,适用于阶梯形叉指换能器阵列所构成的声束偏转结构。     

LB膜在SAW ILRAC及RAC相位修正中的应用

声表面波反射栅脉冲压缩器件(RAC)及直列式反射栅脉冲压缩器件(ILRAC),在脉冲压缩雷达及其他一些系统中用作匹配滤波,是一种重要的模拟信号处理器件。声表面波在器件基片上的各处速度的轻微差别将会影响器件的性能。器件中的金属膜结构(叉指换能器;金属栅条,点阵等)会改变表面波速度,因而镀膜,光刻等工艺的误差将对器件的参数产生影响,最终表现为对于到达输出换能器的声表面波的相位导致误差,降低脉冲压缩输出的主副瓣比。     

表面掠射体波(SSBW)

叉指换能器不仅是高效率的表面波换能器,而且往往也是有效的体波换能器。对表面波器件来说,这些体波将带来杂散影响,需加以抑制。与此相反,“表面掠射体波”(以下简称SSBW)器件,不是利用叉指激发的表面波,而正是利用它激发的体波来完成信号处理功能的。 这种体波由叉指换能器激发,形成紧沿表面传播的波束,其传播矢量几乎完全平行压电晶体表面,并满足表面边界条件。它的传播速度V_s与衰减基本上同于无限大介质中相同方向的体波。其同步频率满足下列关系     

声表面波在压电晶体表面上的聚焦特性

研究了压电晶体表面上圆弧形叉指换能器产生的声表面波的聚焦现象。用作者提出的压电晶体表面激发的严格矢量场理论来计算会聚的表面波声场,取代了比较流行的源于光学的标量角谱理论。理论分析表明介质的各向异性对声束的会聚特性有很大的影响,如焦长和焦点附近声场的对称性。在实验中可以用光学暗场法来观察声表面波场的会聚。尽管各向异性介质或各向异性压电晶体上表面波声场的会聚都非常复杂,实验的结果和理论分析比较一致。     

Development of a SAW duplexer with one-chip isolation circuits

We propose new structures of one-chip type SAW duplexers where Tx and Rx SAW ladder filters as well as isolation networks are fabricated together on a single 36 degrees LiTaO(3) piezoelectric substrate. The new SAW duplexer can overcome the difficulty in fabrication of conventional SAW duplexers while providing the performance matching that of conventional duplexers. Validity of the structure is verified through numerical simulation and experiments.     

基于AlN声表面波滤波传感器器件的有限元仿真

声表面波器件是一种利用压电材料的压电效应与逆压电效应工作电子器件, 文章首先详细描述了声表面波器件的设计与仿真过程,运用有限元分析的方法分别计算了利用声表面波的 SAW 器件与利用体波的 BAW 器件的性能与各项参数,对相关的器件进行了计算分析,分别用上述方法研究了基于 AlN 薄膜的声表面波器件和悬臂梁结构的体波器件,推导得出了器件的电学导纳与频率之间的关系, 通过分析器件的导纳-频率曲线,推导出器件内部声波的模式以及合适的工作频率,最终得出在 IDT 周期为 8 微米的情况下,SAW 器件的理想工作频率是 0.7-1.95GHz,BAW 器件的理想工作频率在 0.6-3.2GHz 的结果。     

Reversing multistrip coupler

A theory of a reversing multistrip coupler (RMSC) is presented based on a previously developed spectral theory of IDTs. It shows that the frequency dependence of the track-changing reflection of a SAW taking place in a RMSC, and the dependence of the reflection of the SAW from a periodic grating reflector are described by the same functions. The reflection of the SAW to the other channel is complete in a narrow frequency band of relative width (2/3) Δv/v if the RMSC is sufficiently long. Several expected applications of RMSCs are discussed, among them SAW dispersive filters, resonators, and low-loss filters.     

声表面波陷波器与梯形结构相结合的滤波器

用单端对SAW谐振器取代LC低通滤波器中的电容可构成宽通带陷波器。它具有频率选择性好，通带插损低，对陷波频点抑制较高的优点。将这种陷波器与梯形滤波器结合，能实现一种在通带具有低插损，而在特定频段达到高抑制的滤波器，从而可用于双工器中。本文首先分析了这种组合结构的构成原理及实现方法；然后进行理论模拟，并进行了实验验证。     

移动通讯用声表面波器件发展近况

本文首先回顾了民用声表面波器件的最新发展概况．随着移动通讯的发展，声表面波器件的最大应用市场将是通讯，而低插损声表面波滤波器成为新的研究高潮．本文因此随后简要介绍了几种主要的低插损结构的研究情况及其在移动通讯中的应用．最后，展望了声表面波器件的发展趋势．     

Nano-image profiles transferred by near field phase-shifting lithography precisely simulated by finite element method and fabricated

The operating frequency of the SAW filters is limited by the gap width but not the line width. The narrow gap width is required for the high operating frequency SAW filters. Therefore, in this study, high precision nano-image profiles transferred by near field phase-shifting mask (NFPSM) lithography at various exposure-energy-intensities (EEIs) are simulated by the finite element method (FEM). The transferred energy-intensity distribution (TEID) in the photoresist during the NFPSM process (at the wavelength of 248 nm) can be accurately simulated by the FEM. The TEID at the interface between the mask and the photoresist is also simulated. The fabricated pattern widths clearly match the simulation results. The study of the simulated image profiles shows that they are dependent on the EEI. The greater the EEI is, the narrower the width and the shorter the height of the image profile. The nano-linewidth of 60 nm is simulated and fabricated. The fabricated nano-imaging profile precisely fits the simulation results. Therefore, any expected nano-image profile can easily be fabricated by way of the simulation.     

Behavior of Al/Cu/Ti electrodes in surface acoustic wave filter at high power

Driven by the need for high data-rates and continuous reduction in device size, surface acoustic wave filters are required to work under increasingly high power. In this work, a series of 2.7 GHz surface acoustic wave filters with Al/Cu/Ti three-layered electrode were fabricated and loaded with high power. Those three-layered electrodes showed weaker texture but higher stability than Al-Cu alloy electrode at high power. Morphologies, microstructures and elements distribution in cross section of fingers were analyzed carefully before and after high power loading. Results show that the circular-arc-shaped outline of fingers were appeared in most samples after high power loading, and the number of gains in the finger cross section changed from some into several with much larger volume. The features of distribution of Cu atoms also coincided with these microstructures. By finite element method and phase diagram analysis, the higher stability of Al/Cu/Ti three-layered electrodes are attributed to precipitation of θ-CuAl₂ in the bottom edge of electrode finger and Cu-doped α-Al in the center top.     

Evaluation of new single crystal piezoelectric materials for surface acoustic-wave applications

Surface acoustic waves (SAW), or Rayleigh waves, bound to the surfaces of piezoelectric materials are becoming rapidly significant in electronic device applications, particularly as VHF-UHF frequency filters and versatile time-domain processors. The majority of available devices utilize either signle crystalline quartz or lithium niobate as the piezoelectric medium. This paper describes briefly the growth and critical evaluation of SAW impedance and propagation properties for certain new single crystal piezoelectric materials. Crystals discussed are Czochralski-grown bismuth germanium oxide, films of zinc oxide and aluminum nitride both epitaxially grown on single crystal sapphire, and flux-grown beryllium oxide. It is concluded that bismuth germanium oxide may prove an important cost-effective alternative to both quartz and lithium niobate, and that either zinc oxide or aluminum nitride is destined to prove invaluable in the realization of monolithic circuits such as programmable tapped delay lines, in which SAW will be interfaced with metal-oxide semiconductor (large scale integrated) technology, and active SAW elements employing functional integration.     

Scanning Michelson interferometer for imaging surface acoustic wave fields

A scanning homodyne Michelson interferometer is constructed for two-dimensional imaging of high-frequency surface acoustic wave (SAW) fields in SAW devices. The interferometer possesses a sensitivity of ~10(-5)nm/ radicalHz , and it is capable of directly measuring SAW's with frequencies ranging from 0.5 MHz up to 1 GHz. The fast scheme used for locating the optimum operation point of the interferometer facilitates high measuring speeds, up to 50,000 points/h. The measured field image has a lateral resolution of better than 1 mu;m . The fully optical noninvasive scanning system can be applied to SAW device development and research, providing information on acoustic wave distribution that cannot be obtained by merely electrical measurements.     

Boxlike filter response based on complementary photonic bandgaps in two-dimensional microresonator arrays

We propose that a boxlike filter response can be obtained by utilizing complementary photonic bandgap properties of the column and row configurations in two-dimensional microresonator arrays. The filters are fabricated using deep-UV lithography in silicon-on-insulator technology. The observed sidelobes reduction is approximately 10 dB, and the usable bandwidth can be as high as 500-750 GHz.