Femtosecond laser ablation of silicon in air and vacuum

Femtosecond(fs) pulse laser ablation of silicon targets in air and in vacuum is investigated using a timeresolved shadowgraphic method. The observed dynamic process of the fs laser ablation of silicon in air is significantly different from that in vacuum. Similar to the ablation of metallic targets,while the shock wave front and a series of nearly concentric and semicircular stripes,as well as the contact front,are clearly identifiable in the process of ablation under 1×10 5 Pa,these phenomena are no longer observed when the ablation takes place in vacuum. Although the ambient air around the target strongly affects the evolution of the ablation plume,the three rounds of material ejection clearly observed in the shadowgraphs of fs laser ablation in standard air can also be distinguished in the process of ablation in vacuum. It is proven that the three rounds of material ejection are caused by different ablation mechanisms.     

Femtosecond laser-induced nanostructure-covered large-scale waves on metals

Through femtosecond (fs) laser pulse irradiation (pulse duration: 65 fs, central wavelength: 800 nm, and repetition rate: 250 Hz), we investigate the morphological evolution of fs laser-induced periodic surface structure on Au and Pt, called a nanostructure-covered large-scale wave (NC-LSW) with a period of tens of microns, densely covered by iterating stripe patterns of nanostructures and microstructures. We show that the surface morphology of NC-LSW crucially depends on the fluence of the laser, the number of irradiating pulses, and the incident beam angle. Our experimental observations allow us to establish a three-step model for the NC-LSW formation: the formation of laser-induced surface unevenness, inhomogeneous energy deposition due to the interference between the incident light and the scattered field, and nonuniform energy deposition due to shielding by the peaks of LSW.     

Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon

Femtosecond laser (Ti:sapphire, 100 fs pulse duration) ablation of silicon in air was compared with nanosecond laser (Nd:YAG, 3 ns pulse duration) ablation at ultraviolet wavelength (266 nm). Laser ablation efficiency was studied by measuring crater depth as a function of pulse number. For the same number of laser pulses, the fs-ablated crater was about two times deeper than the ns-crater. The temperature and electron number density of the laser-induced plasma were determined from spectroscopic measurements. The electron number density and temperature of fs-induced plasmas decreased faster than ns-induced plasmas due to different energy deposition mechanisms. Images of the laser-induced plasma were obtained with femtosecond time-resolved laser shadowgraph imaging. Plasma expansion in both the perpendicular and the lateral directions were compared. PACS 52.38.Mf; 52.30.-q     

Nanosecond pulsed laser ablation of silicon in liquids

Laser fluence and laser shot number are important parameters for pulse laser based micromachining of silicon in liquids. This paper presents laser-induced ablation of silicon in liquids of the dimethyl sulfoxide (DMSO) and the water at different applied laser fluence levels and laser shot numbers. The experimental results are conducted using 15 ns pulsed laser irradiation at 532 nm. The silicon surface morphology of the irradiated spots has an appearance as one can see in porous formation. The surface morphology exhibits a large number of cavities which indicates as bubble nucleation sites. The observed surface morphology shows that the explosive melt expulsion could be a dominant process for the laser ablation of silicon in liquids using nanosecond pulsed laser irradiation at 532 nm. Silicon surface’s ablated diameter growth was measured at different applied laser fluences and shot numbers in both liquid interfaces. A theoretical analysis suggested investigating silicon surface etching in liquid by intense multiple nanosecond laser pulses. It has been assumed that the nanosecond pulsed laser-induced silicon surface modification is due to the process of explosive melt expulsion under the action of the confined plasma-induced pressure or shock wave trapped between the silicon target and the overlying liquid. This analysis allows us to determine the effective lateral interaction zone of ablated solid target related to nanosecond pulsed laser illumination. The theoretical analysis is found in excellent agreement with the experimental measurements of silicon ablated diameter growth in the DMSO and the water interfaces. Multiple-shot laser ablation threshold of silicon is determined. Pulsed energy accumulation model is used to obtain the single-shot ablation threshold of silicon. The smaller ablation threshold value is found in the DMSO, and the incubation effect is also found to be absent.     

6H-SiC单晶的激光刻蚀及光谱分析

激光微加工是半导体精密加工的一个有效方法。对于碳化硅(SiC)单晶,使用紫外波段激光可以获得对入射能量最大的吸收效率。使用355 nm全固态激光器对6H-SiC单晶进行刻蚀。同时将样品置于不同的介质下以探究最优加工条件。使用拉曼光谱表征激光刻蚀后的SiC表面。刻蚀后表面主要由无定形硅及纳米晶石墨组成,对于空气下刻蚀的SiC晶片,无定形硅主要分布于刻蚀坑的周围,刻蚀坑内较少。而在液体下刻蚀的样品,无定形硅的空间分布相反。通过分析残留在表面的物质,在另一角度研究了激光刻蚀的反应机理。对于液体辅助的激光加工,以往的研究主要关注液层的厚度及粘度,对液体还原性的研究很少。为确定液体还原性的影响,使用共聚焦激光扫描显微镜及能量色散谱检测了不同液体辅助加工样品的表面形貌及氧含量。结果表明,液体还原性在激光刻蚀过程中有着较大的影响,使用有着还原性的液体作为介质可以有效减少表面氧化并获得更规则的表面形貌。     

fs Laser surface nano-structuring of high refractory ceramics to enhance solar radiation absorbance

The surface and structural modification of titanium (Ti) has been explored after the interaction of ultrashort laser pulses with the surface target. The targets were exposed by femtosecond Ti: Sapphire laser pulses in liquid (ethanol) and dry (air) environment. In order to explore the effect of pulse energy, the targets were exposed to 1,000 succeeding pulses for various pulse energies ranging from 200 to 500 μJ for pulse duration of 25 fs. SEM analyses were performed for central as well as the peripheral ablated areas of the target. It was found that in the case of ethanol (both for central and peripheral ablated areas) there is a grain growth along with nanoscale pores and dots when the target was irradiated for 200 μJ. For intermediate energies (300–400 μJ), grains of 1–2 μm with distinct boundaries are formed in the central ablated area. Whereas in the peripheral ablated area, laser-induced periodic surface structures (LIPSS) and globules are grown. For the highest pulse energy (500 μJ), distinct grains are observed for both regions. However, in the peripheral area the grains are of bigger size with cracks along the boundaries. In case of ablation in air, in the center of ablated areas, island-like structures with multiple ablative layer or LIPSS and nanoscale spheres are observed both for lower and intermediate pulse energies. For the highest pulse energy only nanoscale LIPSS could be observed. For ablation in air at the peripheral areas, well-defined, laser-induced periodic surface structures are observed for all pulse energies. Raman spectroscopy reveals that the liquid (ethanol) environment forms the carbonyl compounds with the metal and induces C–C stretching vibration, whereas in case of air, hydroxo complexes are formed. It has been found that surface treatment of Ti with ultrashort (25 fs) laser radiation in ethanol environment allows the growth of particular surface structures in the form of grains and simultaneously induces changes in its chemical composition.     

Glassy carbon layer formed in diamond-like carbon films with femtosecond laser pulses

We report the first observation, to our knowledge, of a glassy carbon (GC) layer modified from diamond-like carbon (DLC) films with femtosecond (fs) laser pulses. The GC layer, which is confirmed by Raman spectroscopy, is produced most efficiently at low laser fluence near the ablation threshold of the DLC films. This surface modification depends little on the laser polarization and wavelength used. The fs laser-induced GC layer should be a new thin-film material useful for a variety of engineering applications due to its characteristics similar to those of DLC and the additional properties inherent in GC. PACS 61.80.Ba; 79.20.Ds; 42.62.Cf     

Micromechanism of sulfurizing activated carbon and its ability to adsorb mercury

The effect of ambient environment (dry or wet) and overlapping laser pulses on the laser ablation performance of brass has been investigated. For this purpose, a Q-switched, frequency doubled Nd:YAG laser with a wavelength of 532 nm, pulse energy of 150 mJ, pulse width of 6 ns and repetition rate of 10 Hz is employed. In order to explore the effect of ambient environments, brass targets have been exposed in deionized water, methanol and air. The targets are exposed for 1000, 2000, 3000 and 4000 succeeding pulses in each atmosphere. The surface morphology and chemical composition of ablated targets have been characterized by using Scanning Electron Microscope (SEM), Atomic Force Microscope (AFM) and Attenuated Total Reflection (ATR) techniques. In case of liquid environment, various features like nano- and micro-scale laser-induced periodic surface structures with periodicity 500 nm–1 μm, cavities of size few micrometers with multiple ablative layers and phenomenon of thermal stress cracking are observed. These features are originated by various chemical and thermal phenomena induced by laser heating at the liquid–solid interfaces. The convective bubble motion, explosive boiling, pressure gradients, cluster and colloid formation due to confinement effects of liquids are possible cause for such kind of features. The metal oxides and alcohol formed on irradiated surface are also playing the significant role for the formation of these kinds of structure. In case of air one huge crater is formed along with the redeposition of sputtered material and is ascribed to laser-induced evaporation and oxide formation.     

Laser ablation of silicon in water with nanosecond and femtosecond pulses

We describe laser ablation of Si under water by 5 ns, 355 nm and 100 fs, 800 nm pulses. Compared to that in air, an approximately twofold improvement in the ablation rate is found in water for femtosecond and nanosecond pulses. For higher laser irradiances, the plasma that forms at the water-air interface hampers further improvement of the ablation rate. We investigated the enhanced ablation process in water and found that the cavity-confinement geometry that increases the laser energy coupling to the target and allows more energy to be transferred to the cavity sidewalls plays an important role in the escalated material removal process. In addition, we show that the water layer that effectively reduces the oxidation and redeposition of the ablated debris is also responsible for improvements in the ablation process.     

Femtosecond laser micromachining of an Au/Cr film nanostack

Selective laser patterning of thin films in a multilayer structure is an emerging technology for the fabrication of MEMS devices. A 775-nm Ti:sapphire laser (130 fs, 1 kHz) was used to irradiate thin-film stacks with variations in the process parameters, such as the pulse energy, feed rate, and numerical aperture of the objective lens. The two layers of the Au/Cr film have the same thickness, which is about 1000 nm. They were coated on a glass substrate. By SEM, an AFM and an optical surface profiler, we investigate the morphology of a pattern including the line width, groove depth, and laser-induced periodic surface structures (LIPSSs). The ablation depth was observed to depend on the pulse energy. In addition, from the energy spectrum, we find which layer was removed completely. The experimental results show that precise micromachining with a desired stability and reproducibility can be achieved by controlling the ablation energy and the feed rate. With a different energy and feed rate, we have processed the gating and the circle, which with the smooth cutting edge and groove was consistent with the beam spatial distribution.     

Laser Fabrication of Nanostructures on a Pure Aluminum Surface in Air

We report on the fabrication of surface nanoparticles and micro/nanograting structures on bulk pure aluminum in air using a 150 fs, 775 nm femtosecond laser. We investigate the size of the generated surface nanoparticles under irradiation with different femtosecond laser pulses. Smaller nanoparticles can be induced by a larger number of laser pulses and a lower laser fluence. In addition, we observe the formation of micro/nanogratings when the laser focus is scanned across a pure aluminum surface in air. We obtain micro- and nano-grating composite structures on a pure aluminum surface by adjusting the laser fluence and scan velocity. Femtosecond laser surface ablation of bulk pure aluminum in air is potentially a promising technique for efficient fabrication of surface nanostructures.     

Enhancement of resolution and quality of nano-hole structure on GaN substrates using the second-harmonic beam of near-infrared femtosecond laser

By using a second harmonic of near infrared femtosecond (fs) laser (λ=387 nm, 150 fs) with high NA objective lens, fabrication resolution has been greatly improved in nano-fabrication of wide band-gap semiconductor gallium nitride (GaN). We have carried out a wet-chemical-assisted fs laser ablation method, in which the laser beam is focused onto a single-crystal GaN substrate immersed in a concentrated hydrochloric (HCl) acid solution. A two-step processing involving irradiation with a fs laser beam in air followed by wet chemical treatment is also performed for comparison. In the wet-chemical-assisted ablation, theoretical diameters of ablation craters are calculated as a function of pulse energy by assuming that the reaction is based on two-photon absorption. In lower energy, the calculated curve is close to the experimental value, while the actual measured diameters in the region of higher energy are larger than calculated values. In the condition of the highest fabrication resolution, we obtained ablation craters smaller than 200 nm at full width at half maximum. We have also demonstrated the fabrication of two-dimensional (2D) periodic nanostructures on surface of a GaN substrate using the second harmonic single fs-laser pulse. Uniform ablation craters with the size as small as 410 nm in diameter are arranged with a periodicity of 1 μm. Such structures are applicable to 2D photonic crystals which improve the light extraction efficiency for blue LEDs in the near future.     

Deposition of bimetallic Au/Ag clusters by the method of laser deposition of nanoparticles from colloidal systems

A method of formation of bimetallic clusters on the surface of optically transparent media is proposed. Nanoparticles of noble metals were obtained by laser ablation into a liquid. Clusters were formed by means of colloidal deposition of nanoparticles. Cluster morphology after deposition was studied by means of atomic force and scanning electron microscopy. We demonstrate transformation of the transmission spectrum of obtained structures before and after laser-induced aggregation.     

Laser-induced changes in titanium by femtosecond,picosecond and millisecond laser ablation

In order to realize the qualitative control of the laser-induced changes trend and the quantitative control of the laser-induced changes range in titanium upon laser irradiation with different pulse duration, comparative ablation experiments by femtosecond, picosecond and millisecond pulsed lasers were carried out on titanium in this study. Then the final surface morphology, aspect ratio, chemical composition and microstructural state of the ablated titanium were analyzed by laser scanning confocal microscopy, X-ray photoelectron spectroscopy and transmission electron microscopy, respectively. The dependency of the morphology, size, composition and microstructure of ablated titanium on laser pulse duration variation were emphatically discussed. It is found that, as the laser pulse duration increases from femtosecond to millisecond scale, surface morphology quality of ablated titanium gets worse, aspect ratio of microgroove decreases, proportion of titanium oxides in final ablation products becomes larger and the microstructural state of ablated titanium has a higher amorphization degree, which can be attributed to the decreased laser intensity per pulse and enhanced heat conduction effect in titanium with the pulse duration increasing.     

Femtosecond laser application for high capacity optical data storage

A femtosecond (fs) laser application for multi-layer optical recording is investigated. Information patterns at different layer depths were written inside a transparent glass substrate due to micro-void formation by fs laser ablation, which causes re-distribution in glass materials and a refractive index modification. The information bits recorded in a single layer can be retrieved clearly without interference from the neighboring layers. A fs laser irradiation of a transparent polymer matrix (doped with fluorescent materials for use as low-cost recording media) is also studied. A fs laser induced photo-chemical reaction changes the chemical properties of the fluorescent materials and records information bits inside the matrix. With an ultra-fast laser as a new light source, 3D optical recording can be available for high capacity data storage up to 1 TB per disc. PACS 82.50.-m; 42.65. Re; 72.70.Jk.     

Optical transmission and reflection of aluminum film irradiated by nanosecond laser beam and experimental studying of phase-explosion

In this paper we present evidence for a phase explosion during the laser-induced ablation process by studying the optical reflectivity of the ablated plume. The ablation was produced by irradiating thin film aluminum coated on a quartz substrate with a single pulse laser beam in ambient air. The laser pulse was provided by the second harmonic of a Q-switched Nd:YAG laser with ∼10 ns pulse duration. The transmission of a low power He–Ne laser beam through the hot ablated material plume and its reflection (from the front surface, and rear surface of aluminum film) were also monitored during the duration of the ablation event. The results show that the front surface reflectivity is enhanced at an early time of ablation which is described as strong evidence for the creation of a phase explosion in this process.     

Periodic nanostructures on Si(100) surfaces generated by high-repetition rate sub-15 fs pulsed near-infrared laser light

Nanoscale rifts and ripples at a periodicity of 130 nm were generated on Si(100) surfaces immersed in water using tightly focused 800 nm 12 fs pulsed 85 MHz laser light at subnanojoule pulse energies. At radiant exposure close to the ablation threshold rifts were typically 20-50 nm in width and 70 nm in depth running perpendicular to the laser polarization. On increase of the irradiance, the rifts broadened and formed periodic ripples, whereas at highest exposure, a random nanoporous surface topology emerged. Rift and ripple formation is explained by laser-induced standing surface plasma waves, which result in periodic variation of dissipation and ablation.     

纳秒紫外重复脉冲激光烧蚀单晶硅的热力学过程研究

采用波长为355 nm的纳秒紫外重复脉冲激光对单晶硅片进行了盲孔加工实验, 观测了随脉冲增加激光烧蚀硅片的外观形貌和盲孔孔深、孔径的变化规律, 并对紫外激光辐照硅片的热力学过程进行了分析. 研究结果表明:紫外激光加工硅盲孔是基于热、力效应共同作用的结果, 热效应会使得硅材料熔化、气化甚至发生电离产生激光等离子体,为材料的去除提供条件;激光等离子体冲击波以及高温气态物向外膨胀会对熔化材料产生压力致使其向外喷射,为重复脉冲的进一步烧蚀提供了条件;力效应主要沿着激光传输的方向,垂直于硅表面,使得去除部位主要集中在孔的深度方向,达到较高的孔径比,实验观察孔径比可达8:1;此外,激光等离子体的产生也阻止了激光对靶面的作用,加之随孔深的增加激光发生散焦,使得烧蚀深度有一定的限制,实验观察烧蚀脉冲个数在前100个时加工效率较高.     

Comparison of Laser Chemical Processing and LaserMicroJet for structuring and cutting silicon substrates

This paper deals with the development of a new cutting method for thin silicon solar wafers with liquid-jet-guided lasers (LaserMicroJet®, LMJ, and Laser Chemical Processing, LCP). Several laser systems with different wavelengths were tested to find the optimum laser system and processing parameters in terms of efficient material removal and deep laser cutting. Water and potassium hydroxide were used as carrier liquids to enhance laser ablation. The ablation efficiency was defined as a target parameter and experimentally determined by performing single laser grooves. It is demonstrated that the ablation process of LMJ is mainly affected by silicon melting and then removing by the liquid-jet momentum for single laser grooves. Best result for deep laser grooves is achieved if evaporation dominates the ablation process. Better surface quality referred to laser-induced crystalline damage is presented for a cut wafer with LMJ in comparison to a standard multiwire slurry saw. This shows a great potential of wafering with liquid-jet-guided lasers although no optimal liquid media was used.     

Parametric study on femtosecond laser pulse ablation of Au films

Ablation process of 1 kHz rate femtosecond lasers (pulse duration 148 fs, wavelength 775 nm) with Au films on silica substrates has been systemically studied. The single-pulse threshold can be obtained directly. For the multiple pulses the ablation threshold varies with the number of pulses applied to the surface due to the incubation effect. From the plot of accumulated laser fluence N × ?_th(N) and the number of laser pulses N, incubation coefficient of Au film can be obtained (s = 0.765). As the pulse energy is increased, the single pulse ablation rate is increasing following two ablation logarithmic regimes, which can be explained by previous research.