共查询到20条相似文献,搜索用时 187 毫秒
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基于梯度的线性反演方法计算效率高,基于随机扰动的模拟退火方法寻找最优解能力强针对薄膜椭偏测量的多极值问题,综合两者的优点,提出一种求解薄膜椭偏测量问题的混合反演算法.模型每次扰动采用线性寻优方法搜寻局部最优解,叠代过程中采用均匀设计的模拟退火方法随机搜寻模型,使该算法有跳出局部最优解的能力,可以在较少的叠代次数内搜寻到全局最优解,从而提高求解薄膜椭偏测量非线性反演方法的计算效率.对反演过程控制参数进行讨论,该算法具有自适应的特点.计算表明,该算法可有效求解薄膜椭偏测量的多极值问题. 相似文献
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针对多角度椭偏测量透明基片上薄膜厚度和光学参数时基片背面非相干反射光的影响问题,报道了利用椭偏透射谱测量等离子增强化学气相沉积法(PECVD)制备的a-Si:H薄膜厚度和光学参数的方法,分析了基片温度Ts和辉光放电前气体温度Tg的影响.研究表明,用椭偏透射法测量的a-Si:H薄膜厚度值与扫描电镜(SEM)测得的值相当,推导得到的光学参数与其他研究者得到的结果一致.该方法可用于生长在透明基片上的其他非晶或多晶薄膜.
关键词:
椭偏测量
透射法
光学参数
氢化非晶硅薄膜 相似文献
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介绍了一种同时利用椭偏仪和分光光度计精确测量薄膜光学常数的方法, 并详细比较了该方法与使用单一椭偏仪拟合结果的可靠性.采用可变入射角光谱型椭偏仪(VASE)表征了250—1700 nm波段辉光放电法沉积的类金刚石薄膜,研究发现当仅用椭偏参数拟合时,由于厚度与折射率、消光系数的强烈相关性,无法得到吸收薄膜光学常数的准确解.如果加入分光光度计测得的透射率同时拟合,得到的结果具有很好的惟一性.该方法无需设定色散模型即可快速拟合出理想的结果,特别适合于确定透明衬底上较薄吸收膜的光学常数.
关键词:
光学常数
光谱型椭偏仪
吸收薄膜
透射率 相似文献
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采用光谱型椭偏仪(SE)和分光光度计分别测量了超薄类金刚石(DLC)薄膜和非晶硅(a-Si)薄膜的椭偏参数(y和D)和透射率T。由于薄膜的厚度与折射率、消光系数之间存在强烈的相关性,仅采用椭偏参数拟合,难以准确得到薄膜的光学常数。如果加入透射率同时进行拟合(以下简称SE+T法),可简单、快速得到薄膜的厚度和光学常数。但随机噪声、样品表面的轻微污染或衬底上任何小的吸收都可能影响SE+T法拟合的光学常数的准确性。因此将SE+T法和光学常数参数化法联用,实现DLC、a-Si薄膜光学常数的参数化,以消除测量数据中的噪声对光学常数的影响。结果显示,联用时的拟合结果具有更好的唯一性,而且拟合得到的光学常数变得平滑、连续且符合Kramers-Kronig(K-K)关系。这种方法特别适合于精确表征厚度仅为几十纳米的非晶吸收薄膜的光学常数。 相似文献
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Cyclic competition game models, particularly the “rock–paper–scissors” model, play important roles in exploring the problem of multi-species coexistence in spatially ecological systems. We propose an extended “rock–paper–scissors” game to model cyclic interactions among five species, and find that two of the five can coexistent when biodiversity disappears, which is different from the “rock–paper–scissors” game. As the number of fingers is five, we named the new model the “fingers” game, where the thumb, forefinger, middle finger, ring finger, and little finger cyclically dominate their subsequent species and are dominated by their former species. We investigate the “fingers” model in two ways: direct simulations and nonlinear partial differential equations. An important finding is that the number of species in a cyclic competition game has an influence on the emergence of biodiversity. To be specific, the “rock–paper–scissors” model is in favor of maintaining biodiversity in comparison with the “fingers” model when the variables (population size, reproduction rate, selection rate, and migration rate) are the same. It is also shown that the mobility and reproduction rate can promote or jeopardize biodiversity. 相似文献
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Downstep in pitch contour of Chinese Putonghua is examined using subtly designed sentences by controlling tone combinations. The results show both automatic and nonautomatic downstep phenomena exist in Chinese. In non-automatic downstep, low tones compress downwards the pitch range of the following syllables. and the main influence of downstep is on topline. Low tone not only lower the topline behind it, but also raise the high tones before it, the effects are compatible with each other. In automatic downstep, the topline of pitch contour in intonational phrase is presented as a linear downtrend, but it differs among speakers due to the effect of personal stress practice. In comparison with downstep phenomenon in other tone or non-tone languages, the downstep ratio in Chinese is not constant, and the domain of downstep is not limited within the adjacent tones. 相似文献
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The differences of the pitch and duration of Chinese syllables between Putonghua (PTH) and Taiwan Mandarin (TM) were studied. The speech materials to be used are not only isolated syllables, but also sentences. The results reveal that: For the isolated syllables, T1 and T2 in TM are influenced by Minnan dialect, therefore their pitch are lower than those in PTH. T3 is fall-rise in PTH, while it is fall in TM. Moreover, the syllable duration sequence for different tone is T3〉T2〉T1〉T4 in PTH, while it is T1〉T2〉T3〉T4 in TM. For the syllables in sentences, T2 is mid-rise in PTH, while it is mid-level in TM. And the T3 is longer than T4 but shorter than T1 or T2 in PTH, while it is the shortest in TM. Furthermore the effects of prosodic phrase boundary on duration for different tones are almost the same in PTH, but the lengthening part of T1 or T2 is longer than that of T3 or T4 in TM. 相似文献
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JIA Duojie 《中国物理C(英文版)》2008,32(7)
It is shown that SU(2) QCD admits an dual Abelian-Higgs phase, with a Higgs vacuum of a type-Ⅱ superconductor. This is done by using a connection decomposition for the gluon field and the random-direction approximation. Using a bag picture with soft wall, we presented a calculational procedure for the glueball energy based on the recent proof for wall-vortices [Nucl. Phys. B 741(2006)1]. 相似文献
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Based on the research in Ref. [5][Materials Science and Engineering, 1989; A122: 57 63], an improved model of heat source is set up, the different modes of Lamb wave in an isotropic sample generated by a chopped electron beam at frequency f are obtained with integral transform and normal function expansion method, and the output signal of PZT coupled at the back surface of the sample is found out. The generation mechanism of SEAM (Scanning Electron Acoustic Microscopy) signal is discussed. It shows that the SEAM is a near field imaging technique with high spatial resolution and its best lateral spatial resolution is about 2√2α (α is the radius of the focused electron beam). Some of experimental results of SEAM images are presented in the paper and it shows that the spatial resolution of SEAM is better than 0.5 μm and smaller than the thermal diffusion length of the sample. Therefore the character of near field imaging in SEAM is also proved experimentally. 相似文献
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Transmission spectra of coupled cavity structures (CCSs) in two-dimensional (2D) photonic crystals (PCs) are investigated using a coupled mode theory, and an optical filter based on CCS is proposed. The performance of the filter is investigated using finite-difference time-domain (FDTD) method, and the results show that within a very short coupling distance of about 3λ, where λ is the wavelength of signal in vacuum, the incident signals with different frequencies are separated into different channels with a contrast ratio of 20 dB. The advantages of this kind of filter are small size and easily tunable operation frequencies. 相似文献
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The key to the restoration of rotational motion blurred image is how to restore the image under a low cost and to correct the irreversibility of the degradation function matrix.Based on the special qualities of degradation function matrix and precise deduction in space-domain, we present a new approach using gradient-loading for restoration of rotational blurred image.By easily adding a gradient operator, the irreversibility of the original matrix is corrected and can be applied for inverse filtering then.Gradientloading is the optimized approach which combines the advantages of both the approaches using constrained least square filtering and traditional diagonal-loading.Compared with the approach using least square filtering, its peak signal-to-noise ratio (PSNR) is improved from 3.18 to 6.46dB, while the computing time is reduced to 1/2-1/3.Experimental results demonstrate the effectiveness, noise-resistibility, robustness, and low complexity of this approach, which make it more suitable for real-time environment. 相似文献
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We propose an all-optical logic device made of a bent tapered Y-junction waveguide with a Kerr-type nonlinear interface. It could provide an AND gate, OR gate, and exclusive-OR (XOR) gate. We could obtain different transmission results by adjusting the bending angle. The numerical simulation results show that the device functions as AND, OR, and XOR gates. 相似文献
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Real-time, continuous-wave terahertz (THz) imaging is demonstrated. A 1.89-THz optically-pumped farinfrared laser is used as the illumination source, and a 124 × 124 element room-temperature pyroelectric camera is adopted as the detector. With this setup, THz images through various wrapping materials are shown. The results show that this imaging system has the potential applications in real-time mail and security inspection. 相似文献