激光驻波场中Cr原子运动轨迹与汇聚沉积的分析

利用半经典模型，从铬原子在激光驻波场中的运动方程出发，通过数值解方法模拟了铬原子在驻波场中的运动轨迹，并分析了原子的纵向速度分布和准直程度及球差对沉积条纹结构的影响，同时也讨论了基片摆放位置对沉积条纹结构的影响，并通过实验得到了纳米光栅条纹结构. 关键词： 激光驻波场 原子沉积 运动轨迹 沉积分布     

中性钠原子在激光驻波场中的运动特性研究

基于半经典理论,分析了中性钠原子在激光驻波场中的受力特征,以此为基础分别对不同纵向运动速度和横向运动速度条件下中性钠原子的运动轨迹进行了仿真运算,得到了不同速度条件下中性钠原子的运动轨迹特征,基于累计算法进一步对不同速度条件下中性钠原子的沉积特性进行了仿真,当钠原子的纵向运动速度符合最可及速度(740 m/s)时,纳米沉积条纹的半高宽为2.78 nm,条纹对比度为38.5 ∶1,当纵向运动速度偏离最可及速度(350 m/s)时,纳米沉积条纹的半高宽为29.1 nm,其对比度下降为15 ∶1.而当中性钠原子 关键词： 原子光刻 激光驻波场 条纹半高宽 条纹对比度     

The influence of divergence angle on the deposition of neutral chromium atoms using a laser standing wave

The characteristics of neutral chromium atoms in the standing wave field are discussed.Based on a semi-classical model,the motion equation of neutral atoms in the laser standing wave field is analyzed,and the trajectories of the atoms are obtained by simulations with the different divergence angles of the atomic beam.The simulation results show that the full width at half maximum(FWHM) of the stripe is 2.75 nm and the contrast is 38.5:1 when the divergence angle equals 0 mrad,the FWHM is 24.1 nm and the contrast is 6.8:1 when the divergence angle equals 0.2 mrad and the FWHMs are 58.6 and 137.8 nm,and the contrasts are 3.3:1 and 1.6:1 when the divergence angles equal 0.5 and 1.0 mrad,respectively.     

Observation of collimation and decollimation of an atomic beam in a misaligned standing wave

This paper reports an experimental study on the collimation and decollimation of an atomic beam in a misaligned standing wave, in which the effective detuning caused by the Doppler effect is affected by the longitudinal velocity of the atomic beam. The experiment shows that in a strong field with red detuning between laser field and atomic transition frequency, laser heating in a normal standing wave becomes laser cooling in a misaligned standing wave for an approriate misalignment angle. For blue detuning, laser cooling in a standing wave can also become laser heating in a misaligned standing wave for an appropriate condition. These results ca be used in controling atomic motion.     

电子在激光驻波场中运动产生的太赫兹及X射线辐射研究

采用单电子模型和经典辐射理论分别对低能和高能电子在线偏振激光驻波场中的运动和辐射过程进行了研究. 结果表明: 垂直于激光电场方向入射的低速电子在激光驻波场中随着光强的增大, 逐渐从一维近周期运动演变为二维折叠运动, 并产生强的微米量级波长的太赫兹辐射; 高能电子垂直或者平行于激光电场方向入射到激光驻波场中, 都会产生波长在几个纳米的高频辐射; 低能电子与激光驻波场作用中, 激光强度影响着电子的运动形式、辐射频率以及辐射强度; 高能电子入射时, 激光强度影响了电子高频辐射的强度, 电子初始能量影响着辐射的频率; 电子能量越高, 产生的辐射频率越大. 研究表明可以由激光加速电子的方式得到不同能量的电子束, 并利用电子束在激光驻波场的辐射使之成为太赫兹和X射线波段的小型辐射源. 研究结果可以为实验研究和利用激光驻波场中的电子辐射提供依据.     

Simulation of Chromium Atom Deposition Pattern in a Gaussain Laser Standing Wave with Different Laser Power

One-dimensional deposition of a neutral chromium atomic beam focused by a near-resonant Gaussian standing- laser field is discussed by using a fourth-order Runge-Kutta type algorithm. The deposition pattern of neutral chromium atoms in a laser standing wave with different laser power is discussed and the simulation result shows that the full width at half maximum （FWHM） of a nanometer stripe is 115nm and the contrast is 2.5：1 with laser power 3.93mW; the FWHM is 0.8nm and the contrast is 27：1 with laser power 16mW, the optimal laser power; but with laser power increasing to 50mW, the nanometer structure forms multi-crests and the quality worsens quickly with increasing laser power.     

沟道效应作用下中性原子在激光驻波场中的沉积特性研究

基于半经典理论,建立了中性原子与激光驻波场相互作用的模型,分析了中性原子在激光驻波场沟道效应作用下运动轨迹及沉积特性,探讨了球差、色差和原子束发散角对沉积条纹的影响. 得到了上述三种影响因素下纳米光栅的半高宽分别为0.532,12.16,96.70 nm. 仿真结果表明,随着原子束发散角度的增加,沉积条纹的对比度将会下降,当原子束发散角分别为0.1 mard时,其对比度为85.2：1,发散角为0.3 mrad时,条纹对比度为5.33：1,而当发散角增加至0.5 mrad以上时,沉积条纹将会出现分裂现象,导致条纹的恶化. 关键词： 激光驻波场 纳米光栅 沟道效应     

量子模型分析激光驻波原子透镜的像差

采用量子模型对近共振激光驻波原子透镜会聚Cr原子束、形成纳米量级光栅结构的物理过程进行数值模拟。为提高原子透镜的成像质量,对各种像差,如衍射像差、球差、色差、及原子束发散角、原子磁支能级、原子同位素等因素引起的像差进行了理论分析。模拟结果表明,相比粒子光学模型,量子模型能更加精确地描述原子会聚结果,且能解释原子在驻波光场中的衍射现象。在各种像差中,原子束发散角是最主要的因素,其影响大于衍射像差、球差、色差。原子的磁支能级、同位素等因素对像差影响很小,可以忽略不计。激光冷却准直原子束的方法可以减小束发散角引起的像差,压缩原子速度Vz分布范围的方法可以减小色差。     

Analysis of Cr atom focusing deposition properties in the double half Gaussian standing wave field

The use of the dipole force on atoms is a new technology that is used to build nanostructures. In this way, a high quality standard nano-grating can be obtained. Based on the semi-classical model, the motion equation is investigated and the trajectories of atoms in double half Gaussian standing wave field are simulated. Compared with the Gaussian standing wave field, the double half Gaussian standing wave can well focus the Cr atoms. In order to obtain this kind of beam, a prism is designed and the experimental result shows that the beam is well generated.     

原子光刻中驻波场与基片距离的判定方法研究

原子光刻实验中, 激光驻波场能起到原子透镜的效果, 实现原子汇聚. 激光驻波场与沉积基片间的距离对形成纳米条纹结构的质量具有重要影响. 利用高斯光束传播规律, 提出了一种能够定量判断激光驻波场与沉积基片相对位置的实验方法. 该方法通过调节装载有凸透镜和反射镜的精密位移台改变驻波场距基片的距离, 利用光电探测器接收反射光强的变化, 将位移改变量转变为接收器的电压信号. 利用驻波场激光束光斑直径值, 实现准确定位驻波场与基片的距离. 对上述实验过程进行数值模拟, 数值计算的结果和实验结果高度符合. 该方法实现了准确定位驻波场距基片的距离, 为后续深入研究驻波场和基片间距离对沉积纳米条纹结构质量的影响提供实验基础.