微透镜制作中光刻胶与衬底匹配行为的研究

利用光刻/离子束刻蚀制作大面阵硅微透镜阵列,采用SEM和表面探针测试等手段分析所制样品的形貌特点,定性讨论制备工艺的不同对所制器件的影响.所用工艺为大面阵微尖阵列和微合阵列的离子束刻蚀制作奠定了基础.     

凹折射微透镜阵列的离子束刻蚀制作

利用光刻热熔成形工艺及离子束刻蚀制作 12 8× 12 8元凹微透镜阵列。所制硅及石英凹微透镜的典型基本图形分别为凹球冠形、凹柱形和矩顶凹面形。分析了在光致抗蚀剂柱凹微透镜图形制作过程中的膜系匹配特性 ,与制作该种微透镜有关的光掩模版的主要结构参数 ,以及光致抗蚀剂掩模工艺参数的控制依据等。探讨了在凹微透镜器件制作基础上利用成膜工艺开展平面折射微透镜器件制作的问题。采用扫描电子显微镜 (SEM)和表面轮廓仪测试了所制石英凹微透镜阵列的表面微结构形貌。给出了所制石英凹微透镜阵列远场光学特性的测试结果。     

大口径石英基底衍射透镜的高精度制备方法

针对传统接触式曝光过程中掩模版因自身重力产生形变从而引入不可忽视的线宽误差和位置误差的问题,提出了一种大口径石英基底衍射透镜的高精度制备方法.采用背面具有真空道的高平面度、高强度金属校正工装吸附在掩模版上,利用掩模版上下表面的压强差使其与工装高度贴合,确保掩模版的高平面度.待石英基底所有区域均与掩模版结构面紧密贴合后取下工装.完成接触式曝光和显影后,采用反应离子刻蚀技术对大口径石英基底进行刻蚀,最终得到高精度微纳米结构.经有限元分析,使用该校正工装后,掩模版的形变量由28.85μm减小为0.88μm.实验结果表明,采用该方法制备的口径430mm两台阶石英基底菲涅尔衍射透镜波像差优于1/25λ,平均衍射效率为38.24%,达到理论值的94.35%,具有良好的聚焦和光学成像效果.     

基于表面等离子体共振的水质分析系统稳定性研究

根据表面等离子体共振的原理，建立了可用于长期、实时、不间断检测的水质分析系统.为了提高系统的稳定性，对表面等离子体共振传感芯片进行了改进，利用LB法在传感芯片的金属膜表面镀制了聚苯乙烯（PS）层.利用改进前后的表面等离子体共振传感芯片分别对两种样品进行了稳定性实验研究.分析经过长时间检测前后所测得的实验数据，发现改进后的水质分析系统所测得的溶液表面等离子体共振共振角的变化为改进前系统的1/10，最小反射率改变为改进前的1/30.实验证明，经过改进的水质分析系统能更适用于长期不间断的检测分析.     

聚甲基丙烯酸甲酯(PMMA)微流控芯片DNA分析系统的研制

生物分析是微流控芯片分析最具进一步发展及商品化前景的分支领域之一.报道了基于聚甲基丙烯酸甲酯(PMMA)微流控芯片DNA分析系统的研制.采用简易热压法自制的PMMA芯片,以小型光纤式激光诱导荧光为检测器,以四触点可切换1 800 V高压电源为电驱动系统,以2%羟乙基纤维素(HEC)为筛分介质,通过用于DNA分析的TO-PRO-3荧光染料和激光诱导荧光检测器670 nm截止滤光片的选择,构建了微流控芯片DNA分析系统.芯片凝胶电泳分离ψX174-HaeⅢRF DNA片段,以603 bp片段计算理论塔板数n为1.14×10~6·m~-1,271/281 bp的分离度R为1.2.建立的PMMA微流控芯片DNA分析系统具有制作和运行成本低,芯片可重复使用,分析重现性好等特点.该研究可用于制作微型化便携式DNA分析仪,应用于临床诊断、疾病筛查等领域.     

啁啾光纤光栅透镜法制作技术的理论与实验研究

对利用零级抑制均匀相位掩模版结合同透镜制作啁啾光纤光栅的技术进行了详细的理论和实验研究。结果表明这种方法适合于制作啁啾参数较小的光纤光栅，当所制作的光栅啁啾参数较大时，将导致严重的光谱不对称性和包层模耦合。     

矩底拱面状微透镜阵列的氩离子束刻蚀

在ＺｒＯ２、ＩｎＰ、Ｓｉ及ＳｉＯ２即融凝石英衬底上用氩离子束刻蚀制作面阵矩底拱面状微透镜阵列，给出了氩离子束在不同的入射角度下刻蚀器件的速率与离子束能量之间的关系。实验表明，用国产ＢＰ２１２紫外正型光刻胶制作的光致抗蚀剂掩膜图形在经过优化的工艺条件下可以通过氩离子束刻蚀将预定图形转移到衬底材料中。     

超声电铸提高金属微流控芯片模具的均匀性

利用微电铸技术制作的微流控芯片模具往往存在沉积厚度不均匀的缺陷,这种缺陷会影响模具的尺寸精度及使用性能,并增加模具的制作成本。为了制得厚度均匀的微流控芯片模具,研究了超声电铸对模具均匀性的影响。首先,采用有限元软件COMSOL Multiphysics建立微流控芯片模具的微电铸模型,分析电铸2 h后的模具的厚度分布。并根据该仿真结果,设计掩模版。然后,在自主搭建的超声电铸装置中进行一系列电铸实验,来研究超声搅拌对模具均匀性的影响。实验结果表明:电铸过程中添加超声搅拌可以改善微流控芯片模具的均匀性。超声功率为200 W时,超声频率改善模具均匀性的程度为200 kHz＞80 kHz＞120 kHz。超声频率为200 kHz时,超声功率改善模具均匀性的程度为500 W＞200 W＞100 W。当超声的频率和功率分别为200 kHz和500 W时,与无超声电铸相比,模具的均匀性提高约30%。     

矩底拱面状微透镜阵列的氩离子束刻蚀 

 在ZrO₂、InP、Si及SiO₂即融凝石英衬底上用氩离子束刻蚀制作面阵矩底拱面状微透镜阵列，给出了氩离子束在不同的入射角度下刻蚀器件的速率与离子束能量之间的关系。实验表明，用国产BP212 紫外正型光刻胶制作的光致抗蚀剂掩膜图形在经过优化的工艺条件下可以通过氩离子束刻蚀将预定图形转移到衬底材料中。     

半壳结构金纳米膜的局域表面等离子体共振效应

采用纳米模版印刷术和化学自组装技术制备了半壳结构的金粒子膜.利用场发射扫描电子显微镜和光谱仪等测试手段对样品的结构和光学性质进行了分析.研究发现，该结构的金膜所具有独特的局域表面等离子体共振效应取决于样品的粒子大小、间距等微观结构，且其峰值吸收波长对其周围环境介质的介电常数变化十分敏感.实验结果表明，粒子排列均匀的亚单层膜结构是控制光学性质稳定的关键. 关键词： 局域表面等离子体共振 半壳结构 纳米模版印刷术     

石英玻璃球撞击刚性壁的破碎过程

利用高速枪对石英玻璃球撞击刚性靶板进行了实验研究,分析了不同速度下球体的破碎过程和失效模式。当冲击速度低于临界破坏速度时,石英玻璃球以略低于原速从靶板回弹;当超过临界破坏速度时,球体呈现“压缩破碎区-表面剥落区-剪切破坏区”的破坏结构;进一步提高碰撞速度,剪切破坏区的扩展导致球体碎裂为若干“月牙状”的碎块;更高撞击速度下,石英玻璃球发生坍塌式破碎,在远离撞击端处产生层裂现象。利用离散元软件对球体的撞击破坏过程进行了模拟研究,球体在高速碰撞下的破碎可以分为弹性压缩、整体破碎和二次撞击3个阶段。球体碎裂前Hertz接触理论可以较好描述其撞击力,而破碎后的撞击力由于碎裂卸载远小于理论值,且偏差随冲击速度逐渐增加。     

高纯石英玻璃研抛特性的研究

介绍了高纯石英玻璃的研抛特性。从石英玻璃的内部结构、硬度、微裂纹、表面结构等几方面分析了石英玻璃的物理特性,并与K9光学玻璃进行了对比。通过研究两者被抛光表面的显微图像,分析其产生的原因,结果表明,高纯石英玻璃研抛去除速度慢、表面质量高。     

Study of quartz glass by differential fourier transform IR reflection spectroscopy: Bulk and surface properties

The optical characteristics of quartz glass are studied in the bulk and on the surface by the method of differential Fourier transform IR reflection spectroscopy. Tabular values of the optical constants that characterize the bulk properties of quartz glass in the range 3.5–2000 μm are obtained. Particular features of the dielectric function are estimated, which make it possible to describe the properties of the surface of polished quartz glass in the IR range.     

Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates

A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can be decreased greatly.The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.     

Processing quartz glass by using the second harmonic of picosecond pulse Nd:YVO<Subscript>4</Subscript> laser

The processing of synthetic quartz glass by use of the second harmonic of a picosecond Nd:YVO₄ laser was examined. The threshold irradiation pulse energy density to process the glass using a picosecond pulse is about 3.8 J/(cm² pulse). The groove depth does not increase effectively by scanning with a single line even if the number of scans is increased. It becomes easy to process a thick material when the aperture is widened. A through hole (entrance side diameter 106 μm) was formed through a 0.3-mm-thick synthetic quartz glass plate without cracking by the use of circular scanning. The trepanning of a ring (outer diameter 3 mm, inner diameter 1 mm) from 0.3-mm synthetic quartz glass was achieved. PACS 52.38.Mf; 42.62.Cf; 81.05.Kf     

Specific features of proton NMR relaxation of hydrocarbons and water in the pore space of silicates

The relaxation of the proton magnetization of water and hydrocarbons in a model medium of glass beads and quartz sand is studied by the NMR method. The spectrum of relaxation times of fluids is one-component in the model environment and three-component in quartz sand. The surface relaxivities measured in the model medium are used to determine the pore size distribution in quartz sand. Estimates of the specific surface area of sand based on the relaxation data are consistent with the values measured by the sorption method. The EPR method is used to determine the chemical nature of the active paramagnetic centers responsible for the surface relaxation of the proton magnetization. Differences in the relaxation behavior of aqueous and hydrocarbon fluids are interpreted within the framework of a simple model of surface relaxation.     

Hologram recording in glass and direct reconstruction using visible-wavelength laser beam

We propose a method of hologram recording in a glass plate by corona charging. The holographic recording materials used in this study are conventional soda-lime glass and azobenzene polymer film. A Fourier transform hologram on an azobenzene polymer film coated on the glass plate is recorded in the glass plate by corona charging. After removing the polymer film, the hologram recorded in the plate can be reconstructed using a visible-wavelength laser beam. The first-order diffraction efficiency of the hologram at a wavelength of 532 nm is 0.03%; the efficiency depends on the depth of the surface relief structure on the azobenzene polymer film and the corona-charging time. The hologram recorded in the glass plate has high environmental resistance.     

石英玻璃低能质子辐照损伤动力学研究

地面模拟研究了JGS3光学石英玻璃在真空、热沉和能量低于200keV的低能质子辐照下表面光学性能变化的基本规律．并建立了辐照损伤色心演化的动力学唯象模型。试验结果表明．大通量低能质子辐照对石英玻璃表层具有明显的表面损伤效应。随着辐照吸收剂量的增加,光密度变化先以线性规律迅速增加．加进一步增加时逐渐呈现饱和趋势;采用较高能量辐照作用后光密度变化出现饱和趋势的拐点提前,且饱和数值降低。根据对试验结果的分析,建立了低能质子辐照下石英玻璃色心演化的动力学模型．并给出了光密度变化的表达式。采用模型结果进行数学模拟,模拟曲线与试验结果曲线相似。因此所建立的动力学模型可以用来定量描述低能质子辐照下石英玻璃光学性能随辐照吸收剂量的变化规律。     

自支撑二值化Beynon-Gabor波带片的制备及其单级聚焦特性

Gabor波带片是一种理想的单级聚焦光学元件,但制备困难.本文采用聚焦离子束直写技术成功制备出30环、20扇区的二值化Beynon-Gabor波带片,其有效面积半径为700μm,第一环半径90μm.利用各向异性腐蚀液对硅基底进行开孔,实现了Beynon-Gabor波带片二值化、自支撑、镂空的结构特征.在波长为355 nm的激光下测试其光学性能,结果表明所制备的Beynon-Gabor波带片主光轴上只存在1级衍射叠加后的焦点,不存在高级衍射焦点,具有优异的单级聚焦性能.     

Protein photoimmobilizations on the surface of quartz glass simply mediated by benzophenone

In this paper, photoinduced protein immobilizations on quartz glass slides utilizing benzophenone as photoinitiator without any photoactive group derivatizations involved were developed. Three different methods mediated by benzophenone were investigated, including protein photo-attachment onto untreated glass surface, protein attachment onto glass surface by reacting with pre-photografted maleic anhydride, and protein photo-attachment onto alkylamino silane functionalized glass surface, respectively. Protein immobilizations were characterized by fluorescence microscopy and atomic force microscopy. The preservation of biological activity after protein photo-attachments was confirmed by immunoassays. Area-defined protein immobilization was also primarily investigated. Comparative studies demonstrated that in respect of immobilization density, coverage homogeneities and photo-localization, protein photocoupling to amino-terminated quartz glass surfaces remarkably outperformed other photoinduced methods, as well as one kind of 3-(triethoxysilyl) propyl isocyanate chemical protein immobilization. The feasibility of this protein photo-immobilization on silicon-based materials is promising for widespread application because of its simplicity and effectiveness.