碳化硅薄膜的力学性能测试分析

对利用射频磁控溅射及真空退火方法在(100)硅晶片衬底上制备的纳米晶碳化硅(SiC)薄膜,用纳米压痕仪进行了力学性能测试分析.纳米压痕技术测试给出两块SiC薄膜样品I和II的弹性模量/硬度分别约为106GPa/9.5GPa和175GPa/15.6GPa.纳米划痕技术测试两块SiC薄膜的摩擦系数分别约为0.02~0.15和0.05~0.18,显示出良好的润滑性能;对薄膜的临界附着力等进行测量以评价膜基结合强度,分析了划痕过程中薄膜近表面弹塑性变形和断裂信息.在原子力显微镜下对SiC薄膜样品的初始表面及残余压痕和划痕形貌进行了观察分析,与测试结果相符.综合比较,样品II的整体性能优于样品I.本文中薄膜的弹性模量和硬度值较低可归因于制膜技术的不同和表层碳含量偏高.     

铝合金焊接接头力学性能实验研究

铝合金焊接结构是航天领域的常用结构。实验过程中焊接接头出现了低强度破坏,主要是由焊接接头变形不协调引起的。为了更好地研究焊接接头的破坏机理,采用纳米压痕实验和微拉伸实验对焊接接头的微区材料力学性能进行实验研究,得到焊接接头不同区域的弹性模量、屈服极限、强度极限、延伸率的分布规律。分析了自焊缝中心向母材区域过渡时各力学性能的变化趋势,本文结果可为焊接接头破坏机理的研究提供数据基础。     

微米/纳米尺度的材料力学性能测试

针对如何定量测定纳米、微米尺度及低维材料的力学性能,叙述了采用当今先进观测手段,结合设备特点和力学分析技术来评价材料的硬度、弹性模量、屈服应力、抗蠕变及抗疲劳性等力学性能的测试方法．     

亚微米氮化钛膜的纳米压痕和划痕测定

采用等离子电弧沉积的方法, 分别在GT35和40CrNiMo钢上沉积厚约为0.5$mu$m 的氮化钛(TiN)膜. 为了筛选基材,采用纳米压痕和划痕技术, 评价膜基界面结合和固体润滑效果. 纳米压痕结果,GT35, 40CrNiMo和TiN的纳米硬度/弹性模量的典型值分别约为 11.5GPa/330GPa, 6.0GPa/210GPa, 30GPa/450GPa. 纳米划痕结果,GT35有较理想的膜基结合能力;GT35, 40CrNiMo, TiN及其有机膜的摩擦系数分别约为0.25, 0.45, 0.15, 0.10. 同40CrNiMo相比,GT35是较为理想的基体材料. 纳米压痕和划痕技术能提供丰富的近表面的弹塑性变形、断裂和摩擦等的信息,是评价亚微米薄膜力学性能的有效手段.     

纳米硬度技术的发展和应用

近二十年来,主要用于检测材料表面微米和亚微米尺度力学性质的纳米硬度技术发展迅速.首先,概述硬度的定义、分类及其适用范围.然后,系统地总结纳米硬度技术的发展,重点介绍纳米压痕硬度的测量原理及其影响因素,连续刚度测量原理,高分辨率的载荷位移测量原理,几种常用压头的几何形状,试样表面的准备和确定,相关的测试方法,仪器校准和显微观察等问题.通过压痕实验可获得硬度、弹性模量、断裂韧性、存储模量和损耗模量、蠕变应力指数等.最后,简要介绍纳米划痕硬度测量技术的发展和应用.      

基于MEMS技术的微型惯性导航系统的发展现状

根据美国 DARPA(the Defense Advanced Research Projects Agency)资助项目的概况,介绍了微电子机械系统(MEMS)惯性传感器领域的新进展,对 DARPA 的特别项目 MEMS-INS(Inertial Navigation System)的进展状况进行了说明。详细描述了惯性技术、导航技术领域内前沿研究机构研究 MEMS INS 的路线,总结了微型导航技术系统算法的研究现状。最后,对 MEMSINS 的发展进行展望,指出 MEMS INS 的发展方向。过去的发展趋势表明:微型惯性技术将向芯片级的超小型 MEMS IMU(Inertial Measurement Unit)和 MEMS INS 以及组合导航的发展方向。     

多层二维材料纳米压痕实验研究

多层二维材料在诸多应用领域拥有广阔的前景,其力学性能是保证材料和器件性能与服役寿命的关键性因素。然而,在以往的力学表征中,其层间耦合作用对于力学性能测量的影响往往被忽略,对随着厚度增加而带来的弯曲刚度效应也缺乏相应关注。本文基于原子力显微镜的纳米压痕技术研究了多层石墨烯、六方氮化硼和二硫化钼的力学行为,实现了其力学性能的准确测量。实验结果表明,随着二维材料片层厚度的增加,受弯曲刚度影响,其力学行为从薄膜特征向线性板特征转变。对于表现出板行为的材料,我们采用\"柔度法\"计算其杨氏模量,所得数值与薄膜行为的求解较为一致。同时,我们发现多层二维材料体系中,由于层间相互耦合作用较弱,在变形过程中容易引起层间相对滑移,因而造成所测力学性能的弱化。本文的工作不仅发展了一种测量厚层二维纳米材料力学性能的方法,还揭示了层间耦合作用对于多层二维材料变形行为的影响,为探究二维异质结的结构-性能关系乃至微纳器件的制备加工提供了新的思路。     

扭转力学性能电测技术的研究

本文介绍了一般扭转试验机经改造后,自动描绘出精确的扭矩-扭角(T—)曲线的电测技术.装置结构简单,操作方便,测试精度高.     

含能单晶微纳米力学性能试验研究及数值表征

利用微纳米压痕实验测定β-HMX 单晶(010) 晶面和α-RDX 单晶(210) 晶面的力学性能参数和微观破坏特征,并利用数值拟合确定了含能单晶的部分本构参数. 通过微纳米压痕实验连续刚度法(CSM) 得到HMX 单晶和RDX 单晶的弹性模量和硬度,RDX 单晶的硬度和模量都大于HMX 单晶,其硬度值均表现出一定的尺寸效应. 利用原子力显微镜(AFM) 分析了HMX 单晶和RDX 单晶的微观破坏机理,裂纹随着载荷的增大生成并扩展,裂纹面产生方向为晶体的最易解理破坏方向. 利用ABAQUS 有限元软件进行了纳米压痕数值模拟,结合微纳米压痕实验加卸载曲线,选取了合适的含能单晶塑性损伤本构模型的损伤本构参数.     

聚甲基丙烯酸甲酯材料(PMMA)纳米压/划痕变形热恢复的实验研究

聚甲基丙烯酸甲酯(PMMA)是常见的光伏电池封装材料.本文采用锥形和球形两种压头,利用纳米压痕仪开展了PMMA的纳米压痕和划痕实验.基于表面形貌扫描得到的PMMA材料在不同温度热处理后压痕与划痕变形随时间恢复的演化规律,分析了时间、温度和压头形状等对PMMA材料压/划痕变形恢复过程的影响机理.结果表明,压/划痕变形恢复...     

基于纳米压入法Sn-Ag-Cu无铅焊料高温力学性能的研究

无铅化和微型化已经成为电子封装的发展趋势,温度对无铅焊点的可靠性产生了不可忽视的影响。本文对Sn96.5Ag3Cu0.5无铅焊料进行回流处理,采用纳米压入法研究其在实际工况下的高温力学性能。结果表明,温度对焊料试样的力学性能影响显著。随着温度的升高,弹性模量和硬度逐渐降低,焊料发生软化;较高温度下的蠕变应力指数较小,焊料的蠕变抗力降低,其相应的蠕变激活能为76kJ/mol。由此可知,随温度的升高,焊料的蠕变机制由位错攀移逐渐转变为晶界滑移。     

Structure-property relationships in polymer composites with micrometer and submicrometer graphite platelets

The objectives of this work were (a) to investigate the influence of micrometer and submicrometer scale graphite platelets of different aspect ratios and volume fractions on the effective and local quasi-static and dynamic properties of composites with micrometer and submicrometer scale reinforcement, and (b) to compare and evaluate mechanical property measurements of inhomogeneous materials via local (microscale) and bulk (macroscale) experimental methods. Small platelet volume fractions (0.5%) provided proportionally larger increase of the elastic and storage moduli compared to large volume fractions (3.0%). Randomly distributed 15 μm platelets provided marginally higher composite stiffness compared to 1 μm platelets while small volume fractions (0.5%) of 15 μm platelets had a pronounced effect on the effective Poisson's ratio. It was found that local property measurements of inhomogeneous materials conducted by nanoindentation are not representative of the bulk behavior even when the characteristic length of the inhomogeneity is an order of magnitude smaller than the indentation contact area. In this case, statistical averaging of data from a large number of indentations does not result in agreement with bulk measurements. On the other hand, for small aspect ratio platelets with dimensions two orders of magnitude smaller than the nanoindentation contact area, the nanoindenter-obtained properties agreed well with the effective material behavior. It was found that platelets residing at the specimen surface contribute the most to nanoindentation data, which implies that this technique is only valid for well-distributed nanoparticulate and microparticulate systems, and that nanoindentation cannot be used for depth profiling of microstructured composites.     

An experimental/computational approach to identify moduli and residual stress in MEMS radio-frequency switches

In this paper, we identify the Young's modulus and residual stress state of a free-standing thin aluminum membrane, used in MEMS radio-frequency (rf) switches. We have developed a new methodology that combines a membrane deflection experiment (MDE) and three-dimensional numerical simulations. Wafer-level MDE tests were conducted with a commercially available nanoindenter. The accuracy and usefulness of the MDE is confirmed by the repeatability and uniformity of measured load-deflection curves on a number of switches with both wedge and Berkovich tips. It was found that the load-deflection behavior is a function of membrane elastic properties, initial residual stress state and corresponding membrane shape. Furthermore, it was assessed that initial membrane shape has a strong effect on load-deflection curves; hence, its accurate characterization is critical. Through an iterative process and comparison between MDE data and numerical simulations, the Young's modulus and residual stress state, consistent with measured membrane shape, were identified. One important finding from this investigation is that variations in membrane elastic properties and residual stress state affect the load-deflection curve in different regimes. Changes in residual stress state significantly affect the load-deflection slope at small values of deflection. By contrast, variations in Young's modulus result in changes in load-deflection slope at large deflections. These features are helpful to decouple both effects in the identification process.     

铝箔力学性能的实验研究

铝箔已被广泛应用于电子工业,现又被用作锂电池正极集流体,因而对于铝箔的力学性能要求也在不断提高。通过表征和研究铝箔的力学性能(弹性模量、屈服强度、断裂强度等),能够为铝箔相关技术的可靠性研究提供必要的数据支持和理论指导,从而使铝箔得到合理和可靠的使用。本文运用微拉伸、纳米压痕和动态力学分析(DMA)实验,分别研究了不同厚度的H18态和O态铝箔的力学性能。结果表明两者的弹性模量均约为30GPa,仅为块材的一半;H18态铝箔材料的断裂强度要明显强于块材,而O态铝箔材料的断裂强度则明显小于块材;此外,H18态铝箔材料的屈服强度明显大于块材,O态铝箔材料的屈服强度与块材相仿。并且,随着厚度的增加,H18态铝箔材料的延伸率显著增大,但是仍远小于块材。通过扫描电子显微镜(SEM)对铝箔材料断裂形貌进行微观分析,发现铝箔的拉伸断裂方式为脆性断裂。     

基于纳米压痕法无铅焊锡连接各层材料力学性能的研究

利用SMT全自动回流焊机和高温恒温试验箱,制备出经2次回流焊时效20天的Sn-0.7Cu/Cu焊点试件.采用纳米压痕法,对其焊点金属间化合物力学性能进行测试.根据OliverPharr算法,利用接触刚度连续测量技术得到该化合物(IMC)的弹性模量及硬度,并与同种工况下的焊料及铜进行对比,发现其硬度明显大于二者.并得到了Sn-0.7Cu焊料、金属间化合物和Cu的室温蠕变速率敏感指数,对三者的蠕变性能做了对比分析,发现Sn-0.7Cu的室温蠕变速率敏感指数明显大于IMC和Cu.     

大变形扭转塑性硬化的实验和仿真研究

通过拉伸和扭转实验以及理论分析发现:在扭转实验中,当等效名义伸长率达到 286％时发生扭断,在此之前无明显局部化现象出现;相比较而言,单轴拉伸实验中的试件在颈缩失稳断裂时标距的最大伸长率仅为 29％.因此,用实心圆柱的扭转实验作为研究低碳钢这类弹塑性材料在大变形特征下的更为有效的基本实验,而以单轴拉伸实验作为补充是十分必要的.并通过数值模拟对在扭转过程中弹性核演变的历史进行了分析.     

Mechanical measurements of adhesion in microcantilevers: Transitions in geometry and cyclic energy changes

Adhesion between initially separated components is a critical issue in microelectromechanical systems (MEMS), as it plays an important role in determining device reliability and the forces (and energy) required for successful operation. In this paper we outline a new approach for characterizing adhesion using microfabricated MEMS cantilevers, wherein transitions between adhered geometries and the corresponding energy changes are quantified using an instrumented nanoindenter. The use of an instrumented mechanical probe offers an important advantage over other techniques, in that the measured load-displacement response can be used to directly quantify energy changes during changes in adhered geometry and cyclic loading. In addition, the adhered portion of the system can be determined from the mechanical response of the beam, without having to view the system optically as required via interferometric techniques. Experimental results are presented which detail the transitions from free-standing cantilevers to arc-shaped and to s-shaped configurations. Measurements of the energy changes that occur under cyclic loading are also presented. The experiments reveal interesting adhesion behaviors suggested by vastly different experiments reported elsewhere, namely unstable transitions from one adhered geometry to another. The results are interpreted in the contexts of beam theory and fracture mechanics models, which can be used to infer interfacial adhesion energy.