DLC nano-dot surfaces for tribological applications in MEMS devices

With the invention of miniaturized devices like micro-electro-mechanical systems (MEMS), tribological studies at micro/nano-scale have gained importance. These studies are directed towards understanding the interactions between surfaces at micro/nano-scales, under relative motion. In MEMS devices, the critical forces, namely adhesion and friction restrict the smooth operation of the elements that are in relative motion. These miniaturized devices are traditionally made from silicon (Si), whose tribological properties are not good. In this paper, we present a short investigation of nano- and micro-tribological properties of diamond-like carbon (DLC) nano-dot surfaces. The investigation was undertaken to evaluate the potential of these surfaces for their possible application to the miniaturized devices. The tribological evaluation of the DLC nano-dot surfaces was done in comparison with bare Si (1 0 0) surfaces and DLC coated silicon surfaces. A commercial atomic force microscope (AFM) was used to measure adhesion and friction properties of the test materials at the nano-scale, whereas a custom-built micro-tribotester was used to measure their micro-friction property. Results showed that the DLC nano-dot surfaces exhibited superior tribological properties with the lowest values of adhesion force, and friction force both at the nano- and micro-scales, when compared to the bare Si (1 0 0) surfaces and DLC coated silicon surfaces. In addition, the DLC nano-dot surfaces showed no observable wear at the micro-scale, unlike the other two test materials. The superior tribological performance of the DLC nano-dot surfaces is attributed to their hydrophobic nature and the reduced area of contact projected by them.     

Influence of surface energy and relative humidity on AFM nanomechanical contact stiffness

The effects of surface functionality and relative humidity (RH) on nanomechanical contact stiffness were investigated using atomic force acoustic microscopy (AFAM), a contact scanned-probe microscopy (SPM) technique. Self-assembled monolayers (SAMs) with controlled surface energy were studied systematically in a controlled-humidity chamber. AFAM amplitude images of a micropatterned, graded-surface-energy SAM sample revealed that image contrast depended on both ambient humidity and surface energy. Quantitative AFAM point measurements indicated that the contact stiffness remained roughly constant for the hydrophobic SAM but increased monotonically for the hydrophilic SAM. To correct for this unphysical behavior, a viscoelastic damping term representing capillary forces between the tip and the SAM was added to the data analysis model. The contact stiffness calculated with this revised model remained constant with RH, while the damping term increased strongly with RH for the hydrophilic SAM. The observed behavior is consistent with previous studies of surface energy and RH behavior using AFM pull-off forces. Our results show that surface and environmental conditions can influence accurate measurements of nanomechanical properties with SPM methods such as AFAM.     

Nanotribological properties of silicon surfaces nanopatterned by laser interference lithography

The problems caused by the adhesive force and friction force become more critical when the size of M/NEMS devices shrinks to micro/nano-scale. The nanotexture-patterned surface is an effective approach to reduce friction force on micro/nano-scale. Laser interference lithography is an attractive method to fabricate micro/nanotextures, which is maskless and allows large area periodical structures to be patterned by a couple of seconds’ exposure in a simple equipment system. We fabricate various nanogrooves with different pitch and space width on silicon wafers by laser interference lithography and chemical etching. We investigate the nanotribological properties of the patterned surfaces by AFM/FFM. We show that friction on the nano/micro-scale is related to the coverage rate of the nanogrooves, which decreases with increase in the space width and decrease in the pitch.     

Effect of substrate elasticity on evaporation kinetics and evaporative deposition of aqueous polystyrene nanoparticles droplets

Evaporation of aqueous polystyrene(PS) nanoparticles droplets on silicon and polydimethylsiloxane(PDMS) surfaces was studied. Experimental results showed that softer PDMS surfaces yielded a longer constant contact radius(CCR) stage, which could be ascribed to surface deformation of PDMS induced by the vertical component of liquid-vapor interfacial tension. Ringlike depositions of nanoparticles with different crack patterns were found on both silicon and PDMS surfaces. In-situ observation of crack formation showed that nanoparticle movement on the silicon surface was impeded, resulting in radial cracks with periodic distribution. In contrast, nanoparticles were shown to move easily on the PDMS surface. This observation indicated the difference in crack patterns on surfaces could be attributed to the friction force between nanoparticles and the substrate. A large friction force between nanoparticles and the substrate prevented cracks from moving, resulting in a radial crack pattern with periodic distribution, while a small friction force produced multiple large cracks.     

Tribological behavior of micro/nano-patterned surfaces in contact with AFM colloidal probe

In effort to investigate the influence of the micro/nano-patterning or surface texturing on the nanotribological properties of patterned surfaces, the patterned polydimethylsiloxane (PDMS) surfaces with pillars were fabricated by replica molding technique. The surface morphologies of patterned PDMS surfaces with varying pillar sizes and spacing between pillars were characterized by atomic force microscope (AFM) and scanning electron microscope (SEM). The AFM/FFM was used to acquire the friction force images of micro/nano-patterned surfaces using a colloidal probe. A difference in friction force produced a contrast on the friction force images when the colloidal probe slid over different regions of the patterned polymer surfaces. The average friction force of patterned surface was related to the spacing between the pillars and their size. It decreased with the decreasing of spacing between the pillars and the increasing of pillar size. A reduction in friction force was attributed to the reduced area of contact between patterned surface and colloidal probe. Additionally, the average friction force increased with increasing applied load and sliding velocity.     

Friction and normal forces of model friction modifier additives in simulations of boundary lubrication

ABSTRACT

Interaction forces between solid surfaces are often mitigated by adsorbed molecules that control normal and friction forces at nanoscale separations. Molecular dynamics simulations were conducted of opposing semi-ordered monolayers of united-atom chains on sliding surfaces to relate friction and normal forces to imposed sliding velocity and inter-surface separation. Practical examples include adsorbed friction-modifier molecules in automatic transmission fluids. Friction scenarios in the simulations had zero, one, or two fluid layers trapped between adsorbed monolayers. Sliding friction forces increased with sliding velocity at each stable separation. Lower normal forces were obtained than in most previous nanotribology molecular simulations and were relatively independent of sliding speed. Distinguishing average frictional force from its fluctuations showed the importance of system size. Uniform velocities were obtained in the sliding direction across each adsorbed film, with a gradient across the gap containing trapped fluid. The calculated friction stress was consistent with measurements reported using a surface forces apparatus, indicating that drag between an adsorbed layer and trapped fluid can account sufficiently for sliding friction in friction modifier systems. An example is shown in which changes in molecular organisation parallel to the surface led to a large change in normal force but no change in friction force.     

Investigation into layers formed by selective transfer CMP mechanisms with atomic force microscope

To understand mechanisms of chemical mechanical planarization (CMP), an atomic force microscope (AFM) was used to characterize polished layer surfaces formed by selective transfer after a set of polishing experiments. It is know that in the process of friction of two materials and in the presence of own lubricants, wear phenomenon itself manifests as a transfer of material from an element of a friction couple on the other, this phenomenon being characteristic to the selective transfer process. A selective transfer can be safely achieved in a friction couple, if there is a favorable energy, and in the presence of relative movement, if in the friction area is a material made by copper and the lubricant is adequate (glycerin or special lubricant). The forming selective layer on the contact surfaces makes that the friction force to be very low because of the structure formed by selective transfer. To optimize the CMP process, one needs to obtain information on the interaction between the slurry abrasive particles (with the size range of about 30–70 nm) and the polished surface. To study such interactions, we used AFM. Surface analysis of selective layer using the AFM revealed detailed surface characteristics obtained by CMP. Studying the selective layer CMP, of which the predominated one is copper (in proportion of over 85%), we found that the AFM scanning removes the surface oxide layer in different rates depending on the depth of removal and the pH of the solution. Oxide removal happens considerably faster than the copper CMP removal from the selective layer. This is in agreement with generally accepted models of copper CMP. It was found that removal mechanisms depend on the slurry chemistry, potential per cent of oxidizer, and the applied load. This presentation discusses these findings. Both load force and the friction forces acting between the AFM tip and surface during the polishing process were measured. One big advantage of using the AFM tip (of radius about 50 nm) as abrasive silica particle is that we can measure forces acting between the particle-tip and the surface being polished. Here, we report measurement of the friction force while scratching and polishing. The correlation between those forces and removal rate is discussed.     

纳米接触过程中黏着规律的变化

本文应用大规模分子动力学方法, 模拟了两种具有不同粗糙形貌的、刚性球形探头与弹性平面基体之间的纳米尺度接触, 计算了探头与基体之间的拉离力和黏着功, 研究了接触过程中界面黏着力随载荷的变化规律, 分析了接触界面原子的法向应力分布. 研究发现, 原子级光滑接触的黏着力随着载荷的增大而线性增大, 而原子级粗糙接触的黏着力-载荷曲线分为以不同斜率增长的两个阶段. 相比于原子级光滑探头, 原子级粗糙探头与基体之间具有较小的拉离力和黏着功, 却在接触过程中形成了较大的黏着力. 因此, 拉离力和黏着功不能表征出纳米接触过程中原子吸引作用对界面法向力的贡献大小.     

Capillary force on a nanoscale tip in dip-pen nanolithography

Monte Carlo simulation has been used to characterize the capillary force due to the condensation of a liquid meniscus between a tip with a nanoscale asperity and a flat surface. To consider both hydrophobic and hydrophilic molecules coating the tip as a model of dip-pen nanolithography, tips with various wettabilities are studied. The capillary force due to the meniscus is calculated for various saturations (humidities). We have implemented a thermodynamic integration technique that can project the force into energetic and entropic contributions. In most cases, the force is mainly energetic in origin. At the snap-off separation where the meniscus disappears, the tip feels a significant entropic force at high saturation. Our calculation shows nonmonotonic behavior of the pull-off force as a function of saturation, which is in qualitative accord with experiments.     

Bio-inspired dual surface modification to improve tribological properties at small-scale

In miniaturized devices like micro/nano-electro-mechanical systems (MEMS/NEMS), the critical forces, namely adhesion and friction restrict the smooth operation of the elements that are in relative motion. MEMS/NEMS are traditionally made of silicon, whose tribological properties are not good. In this paper, we present an investigation on the approach of dual surface modification of silicon surfaces and their tribological properties at micro-scale. The dual surface modification is a combination of topographical and chemical modifications. As the topographical modification, micro-patterns with varying shapes of pillars and channels were fabricated on Si(1 0 0) wafer surfaces using photolithography method. Chemical modification included the coating of micro-patterns with diamond-like carbon (DLC) and Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces with combined modification were evaluated for their micro-friction behavior in comparison with those of bare Si(1 0 0) flat surfaces and the topographically/chemically modified silicon surfaces. Results showed that the surfaces with dual modification exhibited superior tribological properties. These results indicate that a combination of topographical and chemical modification is very effective in enhancing tribological properties at small-scale. The combined surface treatments such as the ones investigated in the current work could be useful for tribological applications in small-scale devices such as MEMS/NEMS. The motivation for undertaking the dual modification approach comes from an earlier observation made on the significant influence of the surface characteristics of lotus leaf on its micro-friction behavior.     

Scratch direction and threshold force in nanoscale scratching using atomic force microscopes

The nanoscaled tip in an AFM (atomic force microscope) has become an effective scratching tool for material removing in nanofabrication. In this article, the characteristics of using a diamond-coated pyramidal tip to scratch Ni-Fe thin film surfaces was experimentally investigated with the focus on the evaluation of the influence of the scratch or scan direction on the final shape of the scratched geometry as well as the applied scratch force. Results indicated that both the scratched profile and the scratch force were greatly affected by the scratch direction. It has been found that, to minimize the formation of protuberances along the groove sides and to have a better control of the scratched geometry, the tip face should be perpendicular to the scratching direction, which is also known as orthogonal cutting condition. To demonstrate the present findings, three groove patterns have been scratched with the tip face perpendicular to the scratching direction and very little amount of protuberances was observed. The threshold scratch force was also predicted based on the Hertz contact theory. Without considering the surface friction and adhesive forces between the tip and substrate, the threshold force predicted was twice smaller than the measurement value. Finally, recommendations for technical improvement and research focuses are provided.     

Effect of chain length on the adhesion behaviour of n-alkanethiol self-assembled monolayers on Au(111): An atomic force microscopy study

The effect of chain length on the adhesion behaviour of n-alkanethiols CH₃(CH₂)_nSH, wheren = 5, 6, 7, 9, 10, 11, 14 and 15 has been followed by carrying out pull-off force measurement using atomic force microscopy (AFM). The self-assembled monolayers on Au(111) surface has been characterized by reflection absorption infra-red spectroscopy (RAIRS) and contact mode AFM. It is observed that the work of adhesion is independent of thiol chain length though the standard deviation is high for short chain length thiol-based monolayers. This may be attributed to the relatively more deformable nature of the short chain thiol films due to their heterogeneity in the monolayer structure than the long chain ones. This, in turn, increases the contact area/volume between the AFM tip and the monolayer, and hence the force of adhesion. However, in the presence of water, the force of adhesion is lower than that observed in air reflecting the effects of capillary forces/polar components associated with the surface energy.     

纳米级随机粗糙表面微观滑动摩擦力的计算研究

表面形貌很大程度上决定了摩擦副的摩擦性能, 而所有的表面都不可能是绝对光滑的.由于摩擦表面形貌的随机性, 决定了实际的摩擦过程具有随机性的特点, 因此为了获得与随机形貌对应的摩擦特性, 建立合理的随机摩擦模型是必要的. 本文基于Lennard-Jones势能建立了纳米级随机粗糙表面和原子级光滑的刚性平面间的随机摩擦模型; 模型中, 界面势能由法向载荷和界面间平衡距离决定.通过数值计算的方法, 推导了微观滑动摩擦力的计算公式和摩擦力与法向载荷之间的关系. 研究结果表明摩擦力随着法向载荷的增加而增加, 但不是线性增长. 结果也说明界面间的表面势能可能是微观摩擦力的本质起源. 关键词： 随机粗糙表面 Lennard-Jones势能 微滑动摩擦力 微摩擦     

On the dependence of the static friction force between a rigid,randomly rough fractal surface and a viscoelastic body on the normal force

The present investigation is based on the assumption that the static coefficient of friction can be characterized roughly by the rms value of the surface gradient in the contact region. We numerically investigate the contact between a rigid, randomly rough surface and an elastic half-space and determine the dependence of the rms slope in the contact region on the normal force. For fractal surfaces with a Hurst exponent of H ≈ 1, the rms slope can be approximated very well by a logarithmic function of the normal force. Parameters of the approximation have been determined as functions of the Hurst exponent. The rms value of the slope always increases with the normal force, which indicates that the coefficient of friction should be an increasing function of the normal force.     

微间隙受限液体行为与昆虫爪垫在光滑壁面的粘着机理

自然界中许多昆虫通过分泌一层油性液体薄膜实现其爪垫表皮和光滑壁面之间粘附和解粘附,从而实现在光滑壁布的快速爬行.为了提示昆虫爪垫与光滑壁面间微量液体薄膜对生物粘着的意义,基于自行研制的粘着接触实验仪,采用微量的[emim[Tf2N]离子液体和聚α烯烃油,观测其受限在纳米级光滑钢球表面与玻璃表面之间的接触行为以及法向粘着力.实验发现,临界体积(10^-12—10^-9L)范围内的受限液滴达到临界厚度（小于2μm）后会出现自动铺展和瞬时收缩行为，并同时提供幅值稳定且数值 关键词： 受限液体 粘着力 昆虫爪垫 类固化     

原子力显微镜探针耦合变形下的微观扫描力研究

原子力显微镜(AFM)的微探针系统是典型的微机械构件，它在接触扫描过程处于耦合变形状态.采用数值模拟方法探究恒力模式下探针耦合变形对微观扫描力信号、微观形貌信号的影响.研究表明，AFM的恒力模式扫描中，法向扫描力并不是恒定大小，与轴向扫描力存在耦合作用，在粗糙峰峰值增加阶段，二力均增加；在粗糙峰峰值减小阶段，二力均减小；该耦合作用随形貌坡度、针尖长度等增加而加强.微观形貌的测试信号和横向扫描侧向力信号受探针耦合变形影响较小，但侧向力与形貌斜率密切相关，且其极值点与形貌极值点存在位置偏差，这些结果均与原子力 关键词： 原子力显微镜 探针悬臂梁 耦合变形 扫描力     

Investigating biomolecular recognition at the cell surface using atomic force microscopy

Probing the interaction forces that drive biomolecular recognition on cell surfaces is essential for understanding diverse biological processes. Force spectroscopy has been a widely used dynamic analytical technique, allowing measurement of such interactions at the molecular and cellular level. The capabilities of working under near physiological environments, combined with excellent force and lateral resolution make atomic force microscopy (AFM)-based force spectroscopy a powerful approach to measure biomolecular interaction forces not only on non-biological substrates, but also on soft, dynamic cell surfaces. Over the last few years, AFM-based force spectroscopy has provided biophysical insight into how biomolecules on cell surfaces interact with each other and induce relevant biological processes. In this review, we focus on describing the technique of force spectroscopy using the AFM, specifically in the context of probing cell surfaces. We summarize recent progress in understanding the recognition and interactions between macromolecules that may be found at cell surfaces from a force spectroscopy perspective. We further discuss the challenges and future prospects of the application of this versatile technique.     

Nanotribology of Mo–Se–C films

Transition metal dichalcogenides with a layered structure are well known for their self-lubricating properties, particularly in a vacuum or dry atmosphere. The macrotribological properties of these films have been studied extensively. However, the tribological behaviour of these films in the nanonewton load range has hardly been reported. Study of tribological properties with load in the nanonewton range is required for applications related to microelectromechanical systems or nanoelectromechanical systems. In view of the above, the hardness, surface force, friction force, etc. of Mo–Se–C films were investigated at an applied load in the nanonewton range using a nanoindenter and atomic force microscopy. The effect of carbon content, applied load and scanning speed on the friction coefficient was determined. Data pertaining to topography, lateral force and pull-off force of various surfaces are illustrated. The observed nanotribological behaviour of these films is analysed in the light of their nanohardness. The results indicate that the friction force of all the films is very low and in general dependent on surface force. However, a film having the highest carbon content exhibits the maximum friction force. With increasing carbon content of the films tested, the hardness increases and wear decreases. The above results pertain to investigations under ambient conditions.     

Description of force surfaces in atomic force microscopy with allowance for the mobility of the lattice atoms

The surfaces of constant force and the profiles of the horizontal component of the force during scanning of the tip of an atomic force microscope above the surface of a close-packed lattice in the contact mode are calculated taking account of the mobility of the lattice atoms. It is shown that when the mobility is taken into account, the previously observed discontinuities on the surface of constant force arise at smaller scanning forces on the tip above the surface than in the immobile-atom approximation. The force surfaces arising when scanning above vacancies are obtained. The possibility of using atomic force microscopy data for diagnostics of point defects on a solid surface is discussed.     

Regularity analysis of wrinkles under the action of capillary force in an annular thin film

The wrinkling law of annular sheet which is induced by capillary force with inner liquid film is analyzed in this paper. The results show that the inner liquid film can wrinkle the annular sheet when the surface tension of the liquid film reaches a critical value, and the critical value can be dramatically altered by changing the geometry and properties of the annular sheet. The results obtained in this article may hold potential applications in generating three-dimensional structures through capillary effects.