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1.
Multilayered diamond‐like carbon (DLC) nanocomposite coating has been deposited on silicon and stainless steel substrates by combination of cathodic arc evaporation and magnetron sputtering. In order to make DLC coating adhered to metal substrate, a chromium interlayer has been deposited with constant bias voltage of −150 V applied to the substrate. Dense multilayered coating consists of metallic or nonmetallic and tetrahedral carbon (ta‐C) layers with total thickness of 1.44 μm. The coating has been studied for composition, morphology, surface nature, nanohardness, corrosion resistance, and tribological properties. The composition of the coating has been estimated by energy‐dispersive spectroscopy. Field‐emission scanning electron microscopy and atomic force microscopy have been used to study the surface morphology and topography. ID/IG ratio of ta‐C:N layer obtained from Raman spectroscopy is 1.2, indicating the disorder in the layer. X‐ray photoelectron spectroscopy studies of individual ta‐C:N, CrN, and Cr‐doped DLC layers confirm the presence of sp2C, sp3C, CrN, Cr2N, and carbidic carbon, and sp2C, sp3C, and Cr carbide. Nanohardness studies show the maximum penetration depth of 70 to 85 nm. Average nanohardness of the multilayered DLC coating is found to be 35 ± 2.8 GPa, and Young's modulus is 270 GPa. The coating demonstrates superior corrosion resistance with better passivation behavior in 3.5% NaCl solution, and corrosion potential is observed to move towards nobler (more positive) values. A low coefficient of friction (0.11) at different loads is observed from reciprocating wear studies. Wear volume is lower at all loads on the multilayered DLC nanocomposite coating compared to the substrate.  相似文献   

2.
In an effort to obtain an improved liquid crystal (LC) alignment layer for liquid crystal display device applications, amorphous diamond‐like carbon thin films were deposited on ITO‐coated glass substrates by an rf magnetron sputtering technique at room temperature and then treated with plasma in various atmospheres. The polarized images and pretilt angles of the LC cells showed that LC alignment was enhanced by post‐plasma treatments of the films. In Raman and X‐ray photoelectron spectroscopy spectra of the films, an increase in the fraction of sp2‐bonding was observed after post‐plasma treatments of the films. In particular, H2 plasma‐treated film had the largest fraction of sp2‐bonding at the film surface and showed much improved alignment capabilities. These results suggest that π‐bondings of the sp2‐structure at the surface rather than the bulk play an important role in LC alignment.  相似文献   

3.
The titanium/silicon mono‐ and co‐doped amorphous carbon films were deposited by mid‐frequency magnetron sputtering Ti target, Si target, and Ti80S20 alloy target, respectively. The effects of doped elements on the composition, surface morphology, microstructure, and mechanical and tribological properties of the films were investigated. The results reveal that the ratio of sp3 and sp2 carbon bonds of the films is regulated between 0.28 and 0.62 by a combination of Ti and Si dopant. The addition of small amounts of silicon leads to an increase in sp3 bonds and disorder degree of the sp2 carbon. The co‐doped film exhibits significantly superior friction performance than the mono‐doped films. The ultra‐low friction (μ < 0.01) was achieved under a load of 2 N in ambient air with 40% RH. By comparing to the mono‐and co‐doped films, it is thought that the sp3/sp2 ratio of the films may play a key role for the superlow friction. Copyright © 2013 John Wiley & Sons, Ltd.  相似文献   

4.
The electrode properties of boron-doped diamond thin films grown on Ti substrates by a hot-filament chemical vapor deposition technique are evaluated. The Ti substrate surface modifying conditions are devised, involving the surface roughening, annealing, and etching, which effectively improve the diamond electrode properties. The preetching of the Ti substrate produces the titanium hydride layer that can affect the boron-doped diamond film growth significantly. The substrate roughened surface obviously improved the diamond film adhesion and reduced the inner stress. The electrodes reveal minimal background current and better stability. A wider potential window, up to 3 V, is observed for the boron-doped diamond on the etched/annealed samples. The electrochemical activity of the electrodes in the Fe(CN) 6 3-/4- redox system somewhat increases with increasing surface roughness. The apparent increase in the reversibility of the reaction may be explained by the decrease in the true current density. Suitability of the Ti-based boron-doped diamond electrodes for electroanalytical applications is exemplified by sensing the trace metal ions, such as Hg2+ and Pb2+.__________From Elektrokhimiya, Vol. 41, No. 4, 2005, pp. 387–396.Original English Text Copyright © 2005 by Pleskov, Evstefeeva, Krotova, Lim, Chu, Ralchenko, Vlasov, Kononenko, Varnin, Teremetskaya, Shi.This article was submitted by the authors in English.  相似文献   

5.
Superhydrophobic films mainly based on poly(allylamine hydrochloride) (PAH) and poly(acrylic acid) (PAA) polyelectrolyte multilayer have been deposited onto cleaned glass substrate by a layer-by-layer dip coating method. 3 bilayers of the PAH and PAA was directly coated onto the substrate as an underlying layer for subsequent coating. Desired surface roughness on the polyelectrolyte bilayers was created by etching the bilayers in hydrochloric acid solution so as to create the open pore having suitable size at the surface. Then, nanoparticles such as SiO2 and TiO2 of various sizes were deposited onto the etched polyelectrolyte bilayers. Finally, the surfaces were further modified with semifluorinated silane followed by cross-linking at 180 °C for 2 h to obtain desirable surface morphological features. The effect of etching time and addition of nanoparticles on surface morphology was investigated using an atomic force microscope (AFM). Wetting ability of the prepared film was determined by measuring water droplet contact angle using a goniometer. Adhesion between the superhydrophobic films and the substrate was evaluated by using a standard tape test method (D3359). The adhesion was improved by reducing the organic content in the films.  相似文献   

6.
Diamond‐like carbon (DLC) coatings are getting new trends for cutting tool applications. In this research work, the DLC coatings were deposited on 15 × 15 × 5‐mm tungsten carbide cobalt substrates with variation of bias voltage from 0 to 500 V. The DLC films of 400 nm were deposited using filter cathode vacuum arc system, and 100‐nm chromium interlayer was deposited by sputtering. The optimized conditions for plasma pretreatment at different argon flow rates and deposition rates with bias variation were found. The effect of bias voltage on microstructure, tribology, adhesion, and mechanical properties were evaluated. The characterization techniques employed were field emission electron microscopy, Raman spectroscopy, wear test, SEM, scratch test, and nano‐indentation. The effect of substrate pretreatment on film adhesion was also evaluated. It was observed that etching rate increased with the increase in Ar flow rate while DLC deposition and sputtering rates decreased with increase in the bias voltage. The characterization suggests the DLC coatings deposited at 0 V bias as optimum condition because of showing the best results among all other conditions. Copyright © 2014 John Wiley & Sons, Ltd.  相似文献   

7.
Titanium/diamond‐like carbon (Ti/DLC) bilayer films with different relative thickness were fabricated by direct‐current and pulsed cathode arc plasma method. Microstructure, morphological characteristics, and mechanical properties of the films were investigated in dependence of the thickness of Ti and DLC layers by Raman spectroscopy, atomic force microscopy, Knoop sclerometer, and surface profilometer. Raman spectra of Ti/DLC bilayers show the microstructure evolution (the size and ordering degree of sp2‐hybridized carbon clusters) with varying the thicknesses of Ti interlayer and DLC layer. Nano‐scaled Ti interlayer of 12–20 nm thickness presents the largest size effect. The catalytic effect of the sublayer is most pronounced in the carbon layer of less than 106 nm. In these thickness ranges, the bilayer films possessed the highest micro‐hardness and reactivity between atoms at interface. Internal stress in the bilayer monotonically decreases, with the thickness of Ti interlayer increasing to 30 nm and then becomes stable with the thickness. These results are associated with the occurrence of atomic diffusion process at Ti/C interface, and they are of cardinal significance to optimize the structure and mechanical properties of carbon‐based multilayer films. Copyright © 2016 John Wiley & Sons, Ltd.  相似文献   

8.
Fullerene‐like hydrogenated carbon films were deposited on Si substrate by plasma‐enhanced chemical vapor deposition. The microstructures of films were characterized by high‐resolution transmission electron microscopy and Raman spectrum. The tribological performance of films was tested by reciprocating ball‐on‐disc tester under 1‐ethyl‐3‐methylimidazolium tetrafluoroborate ionic liquid. The surface morphology and chemical composition of wear tracks and wear rates were investigated by optical microscope, X‐ray photoelectron spectroscopy, and 3D surface profiler. The results indicated that the film with a typical fullerene‐like structure embedded into the amorphous sp2 and sp3 carbon networks could be prepared successfully, and the film shows a higher hardness (26.7 GPa) and elastic recovery (89.9%) compared with the amorphous carbon film. Furthermore, the film shows a lower friction coefficient at low contact load and friction frequency, and excellent wear‐resistance performance at high load and frequency under ionic liquid lubrication. Meanwhile, the wear life of fullerene‐like hydrogenated carbon films could be improved significantly using ionic liquid as a lubrication material. Copyright © 2015 John Wiley & Sons, Ltd.  相似文献   

9.
This paper reports the deposition of diamond-like carbon (DLC) films on Si <100>, using a low energy (1.45 kJ) dense plasma focus assisted sputtering of graphite insert at the tip of the tapered anode. The substrates are placed in front of the anode at different axial and angular positions and are exposed to multiple focus shots. The information regarding the DLC structure is acquired by using Raman spectroscopy. The spectra are characterized by two broad bands known as “G-band” and “D-band”. The results point towards the formation of DLC films with both sp3 (diamond like) and sp2 (graphite like) domains. In X-ray diffraction (XRD) pattern, no additional peak is observed except a peak at 2θ = 69° which corresponds to the silicon (Si) substrate. The intensity of Si peak is reduced after treatment indicating the deposition of amorphous carbon. Scanning electron microscopy (SEM) results demonstrate that the smoothness of the film increases with increasing the substrate angular positions with respect to the anode axis. Energy dispersive X-ray (EDX) analysis reveals that the films deposited at lower axial and angular positions are thicker which is complemented by the cross-sectional views of the films.  相似文献   

10.
In this paper, the influence of the addition of W and H to pure DLC coatings on the structural, mechanical and tribological properties will be presented. The coatings were deposited by r.f. magnetron sputtering from a C target embedded with different numbers of W pellets. Working in non-reactive or reactive atmosphere allowed to deposit H-free or H-containing coatings, respectively, on steel and Si substrates. A Cr adhesion interlayer was interposed between the films and the substrate. Films with W content from 0 to 12 at.% and H incorporated up to a maximum value close to 40 at.% were deposited. All coatings had an amorphous structure, although vestiges of crystallinity could be detected in W-containing films. The addition of W led to a significant hardening of the DLC coating (from ~10 to 18 GPa); inversely, with H incorporation the hardness drop down to values even lower than that of pure DLC films. It was possible to establish a good correlation between the hardness and the residual stresses. In spite of decreasing friction and wear coefficients when alloying DLC with W, almost no difference was found among the W–DLC films whatever the W content was. A similar trend was achieved with the H addition. However, in this case a decrease in the friction coefficient was registered whereas the wear rate increased. The best performance concerning the friction was obtained for an H-containing coating (0.05) whereas, for the wear resistance, H-free W–DLC films were better performing (0.3 × 10?16 m3 N?1 m?1).  相似文献   

11.
Plasma enhanced chemical vapor deposition (PECVD) technique using pulsed-DC power supply was used to fabricate diamond like carbon (DLC) films at deposition rates as high as 110 nm/min. The DLC films deposited by pulsed-DC and DC based power supplies under different gas flow ratios were studied for their suitability as dielectric layer coatings in plasma display panels (PDPs). The effect of deposition parameters on the properties of the DLC films were studied using Fourier transform infra-red spectroscopy (FTIR) and spectroscopic ellipsometry (SE). FTIR reveals that higher hydrogen dilution in gas mixture leads to higher sp3 content. SE studies in wide spectral range were analyzed using Tauc-Lorentz model dielectric function. A rise in the extracted refractive index was seen on increasing the H2 content in the feed gas, thus resulting in optically denser films. Secondary electron emission coefficient (γ) was measured in the films deposited by the DC and pulsed-DC based PECVD. Firing voltage in the DLC samples was found to have very low variation in the operating pressure range used in commercial PDPs, suggesting possibility of enhanced long term reliability of DLC coatings in future PDP applications.  相似文献   

12.
Formation of porous morphology in nanocrystalline mechanically alloyed and electrochemically etched Ti–6Al–4V biomedical alloy was investigated. The alloy was electrochemically etched in a mixture of H3PO4 and HF. The electrochemical etching results in broad range from micro(nano)-macropores formation in the surface layer, with diameter in the range of 3 nm–60 µm. On the etched surface hydroxyapatite was electrochemically deposited by using 0.042 M Ca(NO3)2 + 0.025 (NH4)2HPO4 + 0.1M HCl electrolyte. In this way bioactive surface was prepared. The pores in the surface acts as anchors for the hydroxyapatite, which grows inside them. Due to the porous morphology, the etched as well as HA deposited surface is promising for hard tissue implant applications. The nanocrystalline alloy has a nanohardness and Young modulus in the range of 993–1275 HV and 137–162 GPa, respectively.  相似文献   

13.
Difference X‐ray photoelectron spectroscopy (D‐XPS) revealed the surface oxidation process of a diamond‐like carbon (DLC) film. Evaluation of surface functional groups on DLC solely by the C 1s spectrum is difficult because the spectrum is broad and has a secondary asymmetric lineshape. D‐XPS clarified the subtle but critical changes at the DLC surface caused by wet oxidation. The hydroxyl (C―OH) group was dominant at the oxidized surface. Further oxidized carbonyl (C?O) and carboxyl (including carboxylate) (COO) groups were also obtained; however, the oxidation of C?O to COO was suppressed to some extent because the reaction required C―C bond cleavage. Wet oxidation cleaved the aliphatic hydrogenated and non‐hydrogenated sp2 carbon bonds (C―H sp2 and C―C sp2) to create a pair of C―OH and hydrogenated sp3 carbon (C―H sp3) bonds. The reaction yield for C―H sp2 was superior at the surface, suggesting that the DLC film was hydrogen rich at the surface. Oxidation of aromatic sp2 rings or polycyclic aromatic hydrocarbons such as nanographite to phenols did not occur because of their resonance stabilization with electron delocalization. Non‐hydrogenated sp3 carbon (C―C sp3) bonds were not affected by oxidation, suggesting that these bonds are chemically inert. Copyright © 2014 John Wiley & Sons, Ltd.  相似文献   

14.
The cooling behavior of GaN-on-diamond substrate can be enhanced by reducing the thermal boundary resistance (TBR), which is mainly determined by the nature of interlayer. Although SiN film is considered as the primary candidate of dielectric layer, it is still needed to be optimized. In order to facilitate the understanding of the influence of dielectric layer on the TBR of GaN-on-Diamond substrate, aluminum nitride (AlN), and silicon nitride (SiN) film were compared systematically, both of which are 100 nm. The time-domain thermoreflectance (TDTR) measurements, adhesion evaluation, and microstructural analysis methods were adopted to analyse these two interlayers. The results show the TBR of SiN interlayer is as low as 38.5 ± 2.4 m2K GW−1, comparing with the value of 56.4 ± 5.5 m2K GW−1 for AlN interlayer. The difference of TBR between these two interlayers is elucidated by the diamond nucleation density, and the adhesion between the diamond film and GaN substrate, both of which are affected by the surface charge and chemical groups of the dielectric layer.  相似文献   

15.
The influence of a post‐annealing treatment on the chemical structure of a diamondlike carbon (DLC) film was clarified by Raman spectroscopy. The DLC films were synthesized by ionized deposition. The structures were elucidated via Raman analysis in conjunction with the sp2 cluster model. The as‐prepared DLC film consisted of a dielectric matrix including sp3 carbon, where sp2 clusters were floating. When the post‐annealing treatment commenced, especially between 450 and 600°C, carbon─hydrogen bonds were cleaved, and the hydrogen atoms were desorbed from the film, creating defects or dangling bonds. The defects were reactive in growing sp2 clusters that were strained with numerous defects because of the restricted degrees of freedom in the solid. As the post‐annealing temperature further increased, the clusters became dominant and the strain was gradually dissolved.  相似文献   

16.
Amorphous diamond‐like carbon (DLC) has drawn a great deal of attention for its superior wear properties against ultra‐high molecular weight polyethylene (UHMWPE). Its rate of wear, however, is not necessarily maintained within a specific range. The aim of this study was to evaluate the mechanical features and tribological properties of three types of surfaces: (i) uncoated, (ii) carbon‐ion implantation (CII)‐treated, and (iii) DLC‐film‐coated substrate. The surface alterations were carried out on cobalt–chrome (Co? Cr? Mo) alloy by the plasma‐source ion implantation (PSII) method. The wear properties and friction coefficient were estimated by a pin‐on‐plate wear‐tester. We found, as a result, that the implanted carbon penetrated the substrates in which good adhesion was expected. Though the surface modifications by CII and DLC hardened the surfaces, the surface with DLC was also roughened (Ra = 39 nm). In contrast, the surface modified by CII had a very smooth surface (Ra = 15 nm) and low friction coefficient (ranging from 0.15 to 0.20), resulting in a low rate of wear. Our findings suggest that CII on the Co? Cr? Mo alloy/UHMWPE pair offers potential benefits as a hard coating for artificial total‐joint arthroplasty. Copyright © 2008 John Wiley & Sons, Ltd.  相似文献   

17.
Microfabrication of the n-GaAs substrate surface was investigated by a combination of colloidal crystal templating, electroless plating and subsequent metal-assisted etching using noble metals as a catalyst. Ag and Cu nanosized particles were deposited site selectively to form metal-honeycomb patterns on GaAs using self-organized polystyrene spheres as a mask. By Ag-assisted etching, GaAs was effectively etched into a convex-array structure. Different anisotropic etching patterns were observed throughout the substrate after Ag-assisted etching, by changing the crystal-face orientation of n-GaAs from (1 0 0) to (1 1 1).  相似文献   

18.
Polyoxymethylene (POM, polyacetal) is one of the most popular plastics for machine elements, especially in Japan. However, it is difficult to use it under severe operating conditions such as high speed and high contact pressure. Diamond-like carbon (DLC) coatings were well known to be tribological and functional coatings. However, both POM and DLC coatings are difficult to adhere them each other. In the present paper, DLC coatings are deposited by plasma-based ion implantation and deposition (PBIID) method on POM substrate, and validity of DLC coatings on POM was investigated through friction and mechanical tests. When gas pressure was 0.2 and 0.8 Pa, hardness and adhesion properties of DLC coating deposited under gas pressure of 0.5 Pa were lower compared with under 0.2 and 0.8 Pa. For preparing DLC coatings having hard and good adhesion properties, relatively thin substrate was suitable. A correlation between relative humidity in the laboratory and friction coefficient was confirmed while DLC coatings remain on the substrate.  相似文献   

19.
A method of analyzing X-ray absorption spectra of nitrogen-doped amorphous carbon (a-C) samples was developed to determine their sp2 bonding concentrations. The films under consideration are simultaneously deposited onto polytetrafluoroethylene (PTFE) polymer or silicon wafer substrates by hot wire plasma sputtering of graphite. sp2 bonding concentrations of a-C films deposited on PTFE increase from 74% to 93% with growing nitrogen doping. Silicon substrate films yield the same general trend, but show that the near surface electronic structure of a-C films depends on the substrate.  相似文献   

20.
Using ionic source assistant, Ti and N co‐doped amorphous C (α‐C:N:Ti) thin films were prepared by pulse cathode arc technique. Microstructure, composition, elemental distribution, morphology, and mechanical properties of α‐C:N:Ti films were investigated in dependence of nitrogen source, pulse frequency, and target current by Raman spectroscopy, X‐ray diffraction, scanning electron microscopy, X‐ray photoelectron spectroscopy, atomic force microscopy, nanoindentation, and surface profilometer. The results show the presence of titanium carbide and nitride in a‐C:N:Ti films. The α‐C:N+:Ti film (6 Hz, 60 A) shows the smaller size and the higher disordering degree of Csp2 clusters. The α‐C:N+:Ti films present smoother surface and smaller particle size than for α‐C:N2:Ti films. N ions facilitate the formation of N‐sp3C bonds in the α‐C:N+:Ti films, and α‐C:N+:Ti (10 Hz, 80 A) film possesses the more graphite‐like N bonds. Higher hardness and lower residual stress present in the α‐C:N2:Ti (10 Hz, 80 A) film.  相似文献   

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