全光纤傅里叶变换光谱仪的关键技术研究

研究一种基于光纤Mach-Zehnder干涉仪结构的全光纤傅里叶变换光谱仪(fiber fourier transform spectrometer, FFTS)。设计了光程调制范围可达2 cm的压电陶瓷光纤相位调制器,代替传统傅里叶变换光谱仪中的动镜产生光程扫描。实验中采用1 310 nm DFB激光器作为参考光源,对测试光干涉图进行等光程间隔采样,以消除压电陶瓷非线性光程调制产生的误差。通过对测试光干涉图做傅里叶逆变换得到测试光光谱图。利用该FFTS系统测量了ASE宽带光源的光谱,并将测量结果和光栅光谱仪测量结果进行了对比,结果表明两者所测ASE光谱线型一致。最后,利用光纤光栅作为样品,对FFTS系统的光谱分辨率进行了检测,光谱分辨率达到了0.78 cm-1。     

外差式偏振干涉成像光谱技术研究

提出了一种新型的基于Savart偏光镜的外差式偏振干涉成像光谱技术,该技术在偏振干涉成像光谱仪中引入一对平行偏振光栅对,使其得到的干涉图频率与波数相关,具有了波数外差的特点,降低了干涉图频率,从而可利用较少的采样点数实现很高的光谱分辨率.对外差式偏振干涉成像光谱技术的基本原理进行了研究,详细分析了系统光程差、干涉图表达式、光谱分辨率以及光谱复原方法等.最后给出了外差式偏振干涉成像光谱仪的设计实例并进行了计算机仿真模拟,所复原的光谱与输入光谱曲线相符合,验证了方案的正确性.外差式偏振干涉成像光谱仪具有结构紧凑、光通量高、稳定性强、光谱分辨率高的特点,尤其适合超小型高稳定性、高探测灵敏度的高光谱探测应用.     

空间采样傅里叶变换光谱仪光谱反演研究

根据相似性准则,对采集到的干涉图像进行干涉图元的拆分,通过寻址定位,得到与离散光程差序列相匹配的采样干涉图序列。采用过零采样方式,对大单边干涉图序列与小双边干涉图序列利用不同的窗函数进行切趾。为了校正相位误差,结合所研究采样干涉图的特点,对频域光谱乘积校正和空域干涉图卷积校正进行了研究和改进,获得了比较理想的光谱线形,其中空域干涉图卷积校正后的光谱偏差仅为0.012088,具有最好的校正效果。     

Time-domain surface profile imaging via a hyperspectral Fourier transform spectrometer

We describe a method for time-domain surface profile measurements via white-light reflection spectroscopy using a hyperspectral Fourier transform spectrometer (HS-FTS). This technique measures the frequency of the spectral modulation of reflected light from a multilayer optical surface and reports the spatially resolved optical thickness. Owing to the Fourier relationship, the Fourier transform spectrometer manifests this spectral modulation as temporal satellites in interferogram space. We show that measurement of the positions of these satellites can be used to reconstruct the optical thickness profile over a surface using the HS-FTS.     

Subwavelength grating Fourier‐transform interferometer array in silicon‐on‐insulator

A planar waveguide Fourier‐transform spectrometer with densely arrayed Mach‐Zehnder interferometers is demonstrated. Subwavelength gratings are used to produce an optical path difference without waveguide bends. The fabricated device comprises of an array of 32 Mach‐Zehnder interferometers, which produce a spatial interferogram without any moving parts, yielding a spectral resolution of 50 pm and a free‐spectral range of 0.78 nm. As a result of similar propagation losses in subwavelength grating waveguides and conventional strip waveguides, loss imbalance is minimized and high interferometic extinction ratio of −25 to −30 dB is obtained. Furthermore, phase and amplitude errors arising from normal fabrication variation are compensated by the spectral retrieval process using calibration measurements.     

Fourier transform ultraviolet-visible spectrometer based on a beam-folding technique

A beam-folding technique in optical interferometry, where the number of beam folds used can be very large, is reported. This technique can be used as a low-cost position-tracking method in a Fourier transform spectrometer (FTS) to cover the broad spectral range from UV to IR. The main advantage gained is the simple position-tracking algorithm used in sampling the interferogram. We have developed a UV-visible FTS, whose wavelength coverage is limited only by the optical elements (350 nm(-1) microm with off-the-shelf components). Preliminary results show that it can achieve a resolution of approximately 4 cm(-1) even with a ball-bearing translation stage.     

空间调制微型傅里叶变换红外光谱仪研究

针对目前环境、医疗、空间、气象、军事及安全等领域对傅里叶变换红外光谱仪微小型化、轻量化及固态化的迫切需求,提出并研究了一种以MOEMS多级微反射镜为核心器件的空间调制微型傅里叶变换红外光谱仪。在理论研究方面,建立了空间调制微型傅里叶变换红外光谱仪的物理模型,探究了该系统的光场分割与空间采样的光学原理;分析了多级微反射镜的衍射效应,提出了一种通过补边抑制衍射噪声抑制方法;进行了多级微反射镜采样误差的分析,并提出了基于最小二乘拟合的修正算法;通过对光源空间相干性、准直系统像差以及入射光场均匀性的分析,确定了光学系统的总体设计指标;通过对多级微反射镜基片加工精度、分束器材料色散特性和膜层透射效率等的计算分析,确定了干涉系统的设计方法与技术参数。在核心技术方面,提出了两个多级微反射镜的3种制作方法,分析了制作误差的来源及对系统性能的影响。通过工艺设计及实验条件探索,分别采用电铸法、真空镀膜法以及斜面倾角叠片法制作了两个多级微反射镜。在系统设计方面,进行了红外准直与缩束系统的光学设计,对整体光机系统进行了建模仿真,分析了杂散光噪声的来源。在图谱处理方面,利用过零采样方式,通过图像分割算法,获取了干涉图采样序列;通过对干涉图序列的插值、补零、延拓与卷积方法,完成了光谱相位误差的校正;通过离散傅里叶变换解调,实现了由干涉图像到信号光谱的数据反演。最后研究了系统光机整体的集成组装技术,并对原理样机进行了实验测试。本文研制的空间调制微型傅里叶变换红外光谱仪的特点在于:取消了动镜驱动机构与采样控制机构,具有微小型与轻量化的特点;干涉图的采样由多级微反射镜完成,其空间采样的方式增加了系统的稳定性与可靠性,实时采样的特点增加了系统的快速性与有效性;多级微反射镜阵列采用MOEMS工艺技术制作,增加了系统的采样精度。该光谱仪系统的结构及制作方法具有自主知识产权,并具有广阔的应用前景。     

Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques

Spectral phase in a white-light interferogram contains information about the absolute optical path difference (OPD) in the interferometer. Evaluation of spectral phase is therefore important in applications such as profilometry with white light. In spectrally resolved white-light interferometry (SRWLI) the white-light interferogram is spectrally decomposed by a spectrometer in order to determine this phase. Several single-frame techniques in SRWLI have been proposed for the evaluation of the phase including Fourier transform, Hilbert transform, spatial phase shifting, windowed Fourier transform and wavelet transform. In this paper we present a comparative study of these techniques in this application in relation to the temporal phase-shifting technique which is a multi- frame method. Further, we also propose a modified method to remove the influence of source spectrum modulation in Hilbert transform procedure.     

空间外差光谱仪干涉图数据处理

空间外差光谱技术是一种新型的超分辨光谱技术。介绍了空间外差光谱仪的基本原理,并针对其特点提出了干涉图数据处理的方法。首先通过一阶差分对干涉图进行去基线处理,然后使用三角函数作为切趾函数对干涉图进行切趾,并对傅里叶变换光谱进行相位校正,最后采用已知双线光源对空间外差光谱仪原理试验装置进行波长定标。文章以Na双线与Hg谱线进行波长定标,得到了波长定标曲线。通过以上的方法对空间外差光谱仪干涉图数据进行处理,能有效地提高干涉图反演光谱的精度。     

Birefringent prism based Fourier transform spectrometer

This paper presents the design of a rugged and compact Fourier transform spectrometer (FTS) utilizing a birefringent prism, a pair of polarizers and a linear CCD array. This design improves on existing FTS by eliminating moving parts and spreading the optical path difference (OPD) spatially (rather than temporal scanning), making the system smaller, more reliable, and dramatically reducing measurement times. Both the theoretical models for the design and experimental results of the prototype are presented. The optical performance is tested using LEDs of known wavelengths, with the fringe counting technique employed during interferogram acquisition to ensure accurate sampling of the interferogram at constant OPD intervals. Reconstructing the spectra showed that the detected wavelengths deviated from the actual wavelengths by less than 1 nm.     

基于多普勒非对称空间外差光谱技术的多普勒测速仿真

阐述了多普勒非对称空间外差光谱仪用于被动式多普勒测速的基本原理,通过综合考虑干涉条纹对比度和仪器测速灵敏度等关键因素,建立了效率函数,分别针对高斯线型和洛伦兹线型发射谱线,从理论上推导了最优单臂偏置量的选择依据,并以高斯线型目标谱线为例进行了仿真验证.同时,提出了一种基于部分干涉条纹反演多普勒速度的数据处理方法,简化了多谱线目标源的数据处理过程.结合自适应频率跟踪算法对单谱线目标源和多谱线目标源进行了仿真比较,仿真结果表明,在不考虑噪声的情况下,该方法针对多谱线目标源的多普勒测速最大绝对误差在0.004 m/s以内,与针对单谱线目标源的处理精度相当,可以满足实际应用的精度要求.     

空心阴极元素灯光谱的空间分布测量方法

提出利用成像光谱仪研究空心阴极元素灯光谱空间分布的检测方法。自制了基于Offner成像系统的推扫式凸面光栅成像光谱仪,覆盖波长范围400~1 000 nm,视场角22°,光谱分辨率2~3 nm;利用该光谱仪第一次得到得到Hg元素灯光谱的空间分布,给出了不同波长下的空间图像和不同空间位置的光谱分布信息,具有较高的空间分辨率和光谱分辨率;并同时获取了不同工作电流条件下的元素灯高光谱数据,对比分析了处于不同工作状态下光谱空间分布的差异。这为空心阴极元素灯光谱的空间分布等性能研究提供了一个很好的工具,相关方法也可以用来研究其他类型的光源。     

Single-pixel polarimetric imaging spectrometer by compressive sensing

We present an optical system that performs polarimetric spectral imaging with a detector with no spatial resolution. This fact is possible by applying the theory of compressive sampling to the data acquired by a sensor composed of an analyzer followed by a commercial fiber spectrometer. The key element in the measurement process is a digital micromirror device, which sequentially generates a set of intensity light patterns to sample the object image. For different configurations of the analyzer, we obtain polarimetric images that provide information about the spatial distribution of light polarization at several spectral channels. Experimental results for colorful objects are presented in a spectral range that covers the visible spectrum and a part of the NIR range. The performance of the proposed technique is discussed in detail, and further improvements are suggested.     

基于空间外差的拉曼信号处理方法研究

空间外差拉曼光谱技术是近年兴起的一种超光谱探测技术,它既具有拉曼光谱测量的非接触、快速、简单、可重复、无需样品准备等特点,更具有空间外差的超光谱分辨率、高通量、无运动部件优点,能在被测物质特征波长中心范围探测,实现微弱拉曼光信号的直接测量。由于被测信号微弱、光学元件加工精度、器件封装及仪器安装误差等原因,会导致空间外差拉曼光谱仪(SHRS)接收到的干涉图存在光强分布不均匀、干涉条纹倾斜或扭曲等现象,从而使普通光谱恢复方法得到光谱信号准确度下降或无法识别。根据SHRS探测到的干涉图所存在的误差特点,将二维傅里叶变换应用于SHRS干涉图的光谱复原,提出基于二维频域谱重采样的最强直线方向光谱提取方法,以实现SHRS光谱的获取。提取过程为：将采集的目标干涉图进行二维傅里叶变换,获得二维频谱图,通过使用相同实验系统采集的单波长或多波长光源的二维频谱信号特征峰的位置信息,拟合获取光信息强度最大方向直线方程。然后根据该直线与目标二维频谱图各列交点坐标位置,确定重采样贡献像元及权重。对拟合直线方程经过的所有列像元进行重采样,得到最终的光谱信号。将该方法应用于自行搭建实验系统采集的三叶草干涉图数据,同时与其他方法光谱复原结果进行对比。结果表明：与一维行平均光谱法比较,该方法获取的光谱在探测波段中心区域信号强度更加明显,同时消除了探测器热噪声的影响;与二维频谱中心行直接提取法比较,该方法是该方法的改进版本,两者结果比较接近。但是由于考虑到干涉条纹y分量的影响,沿二维频谱信号最强方向重采样得到的最终光谱,其主峰半峰宽更窄、边频噪声强度更小,且随着y分量的增加,光谱复原效果及优势将越发明显。该方法是空间外差拉曼光谱技术数据处理的一种有益补充与尝试。     

Double-beam fourier spectroscopy with interferometric background compensation

A double-beam multiplex spectrometer is described which is specially suited for measuring small variations in absorptivity or reflectivity, or narrow spectral lines, against a strong and varying background. By a modification of the conventional Fourier spectrometer, the interferogram beam and the radiation normally going back to the source — the anti-interferogram beam — are combined in the sensitive area of a single detector. If a sample and a reference standard are placed in the interferogram and the anti-interferogram paths respectively, the Fourier transform of the interferogram of the combined intensity directly yields the difference between the spectra of the sample and the reference standard with the optical cancellation of the common features. The advantages and possible applications of this technique are discussed.     

电激励DF化学激光器光腔流场荧光光谱测量与分析

 观察并记录了增大D₂流量时DF激光光腔流场可见光荧光的变化现象,对光轴处的可见光荧光进行了光谱测量,使用波长为632.8 nm和543.5 nm的He-Ne激光器对光谱仪进行标定。对激光器光腔内介质成分进行了理论分析,并理论计算了DF高次泛频谱线及D原子谱线,通过比对荧光的实验测量光谱与光腔内介质成分谱线,发现荧光是由F,He,D,N,DF及其它激发态介质共同形成的,对光轴处荧光的颜色构成作出了解释。     

空间调制型傅里叶变换光谱仪光场的均匀性研究

基于多级微反射镜的空间调制型傅里叶变换光谱仪在光场的横向空间同时采集所有光程差的干涉图信息,所以光场能量的空间分布特性影响着系统的性能。文章将空间分布函数引入到光谱仪系统中,通过仿真实验得到,分布函数调制后的干涉图对比度下降,同时复原光谱中出现边频谱线。理论分析表明,干涉图调制度下降来源于调制度函数对光程差采样空间的周期性变化;而边频谱线则是光源的单色谱线对调制度函数的空间频谱进行频率搬移的结果。最后,提出了平场校正的差影算法与反向恢复算法。仿真结果表明,反向恢复算法可以更好的复原出干涉图和光谱。     

Computational Spectral Imaging Based on Compressive Sensing

Spectral imaging is an important tool for a wide variety of applications. We present a technique for spectral imaging using computational imaging pattern based on compressive sensing(CS). The spectral and spatial information is simultaneously obtained using a fiber spectrometer and the spatial light modulation without mechanical scanning. The method allows high-speed, stable, and sub sampling acquisition of spectral data from specimens.The relationship between sampling rate and image quality is discussed and two CS algorithms are compared.     

交叉非对称型Czerny-Turner光谱仪光学系统设计

根据Czerny-Turner结构光谱仪工作原理,以便携式微型光学系统为设计目标,设计了一种光谱范围为200900nm的交叉非对称型Czerny-Turner光谱仪光学系统.通过分辨率、光谱范围等设计要求确定光谱仪大致结构后,引入初级像差对初始结构进行进一步优化.首次提出将球差约束条件与光阑面选取相结合,设计流程确定准直镜通光口径、光栅初始尺寸及聚焦镜中心波长对应口径,继而结合彗差约束条件,确定球面镜离轴角,并基于几何光学确定聚焦镜初始通光口径的方法.利用ZEMAX软件对初始参量进行模拟优化,并采用自主研制的样机进行光谱测量,分析结果表明,该光学系统能够在狭缝宽度为25μm,光栅常数为1.667μm/line条件下,实现中心波长分辨率优于1nm,边缘波长分辨率优于1.5nm.     

Measurement technique for depth profiling in time-domain low-coherence interferometer

A measurement technique for depth profiling in a time-domain low-coherence interferometer has been proposed. The spatial variation of the optical path caused by a diffraction grating in the Littrow configuration produces a white-light interferogram. A one-dimensional charge-coupled device (1D-CCD) detector is used to measure the undersampled white-light interferogram. The position of the reflective boundary is calculated from the rate of phase change with spatial frequency, which is based on the sub-Nyquist sampling of the white-light interferogram in the frequency domain.