Single- and multi-pulse formation of surface structures under static femtosecond irradiation

Femtosecond surface structure modifications are investigated under irradiation with laser pulses of 150 fs at 800 nm, on copper and silicon. We report sub-wavelength periodic structures formation (ripples) with a periodicity of 500 nm for both materials. These ripples are perpendicular to the laser polarization and can be obtained with only one pulse. The formation of these ripples corresponds to a fluence threshold of 1 J/cm² for copper and 0.15 J/cm² for silicon. We find several morphologies when more pulses are applied: larger ripples parallel to the polarization are formed with a periodicity of 1 μm and degenerate into a worm-like morphology with a higher number of pulses. In addition, walls of deep holes also show sub-wavelength and large ripples.     

Structure formation on the surface of alloys irradiated by femtosecond laser pulses

Laser-induced periodic surface structures with different spatial characteristics have been observed after multiple linearly polarized femtosecond laser pulse (120 fs, 800 nm, 1 Hz to 1 kHz pulse repetition frequency) irradiation on alloys. With the increasing number of pulses, nanoripples, classical ripples and modulation ripples with a period close to half of classical ripples have all been induced. The generation of second-harmonic has been supposed to be the main mechanism in the formation of modulation ripples.     

Ultrafast time-resolved imaging of femtosecond laser-induced periodic surface structures on GaAs

We report the formation dynamics of periodic ripples on Ga As induced by femtosecond laser pulses（800 nm, 50 fs） via a collinear time-resolved imaging technique with a temporal resolution of 1 ps and a spatial resolution of 440 nm. The onset of periodic ripples emerges in the initial tens of picoseconds in the timescale of material ejection. The periodic ripples appear after irradiation of at least two pump pulses at surface defects produced by the first pulse and the ripple positions kept stable until the formation processes complete. The formation mechanisms of laser-induced periodic ripples are also discussed.     

Formation of subwavelength periodic structures on tungsten induced by ultrashort laser pulses

The evolution of surface morphology of tungsten irradiated by single-beam femtosecond laser pulses is investigated. Ripplelike periodic structures have been observed. The period of these ripples does not show a simple relation to the wavelength and angle of incidence. The orientation of ripples is aligned perpendicularly to the direction of polarization for linearly polarized light. Surprisingly, we find that the alignment of the ripple structure turned left or right by 45 degrees with respect to the incident plane when using right and left circularly polarized light, respectively. The period of the ripple can be controlled by the pulse energy, the number of pulses, and the incident angle. We find a clear threshold for the formation as a function of pulse energy and number of pulses. The mechanism for the ripple formation is discussed, as well as potential applications in large-area structuring of metals.     

Self-organized structure formation on the bottom of femtosecond laser ablation craters in glass

Using femtosecond laser pulses (150 fs duration at λ=400 nm) for ablation experiments on glass samples with and without enclosed silver nanoparticles, characteristic sub-micrometer surface topologies are observed on the flat bottom of the ablation craters produced. The structures show increasing order towards periodic ripple-like features with an increasing number of successive pulses applied. Depending on sample and experimental conditions, the spatial periodicity varies between 340 nm and 1900 nm, despite a constant laser wavelength and incidence angle. An analysis based on electron and atomic force microscopy of the structures indicates that the formation of the ripples in this work is due to instabilities and self-organization of the surface relaxation after ablation. PACS 81.16.Rf; 42.70.-a     

Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses at 1300 and 2100 nm wavelengths

We present periodic ripples and arrays of protrusions formed on the surface of silicon after irradiation by low-fluence linearly polarized femtosecond laser pulses. Laser-induced periodic surface structures (LIPSS) are observed for irradiation at center wavelengths of 800, ∼ 1300, and ∼ 2100 nm, with the structure periods somewhat less than the incident wavelengths in air. Additionally, we observe structures with spatial periods substantially less than the incident laser wavelengths. These sub-wavelength periodic structures form only when the photon energy is less than the silicon bandgap energy. We discuss a number of factors which may contribute to the generation of this surface morphology.     

The evolution of a microstructure on Si by a femtosecond laser

Femtosecond laser micromaching silicon is investigated by a Ti:sapphire laser (800 nm, 1 kHz) with a pulse duration of 130 fs. It is investigated that the result is affected by fluences at a different number of pulse. In the experiment, we have observed the periodic surface structure such as microholes, and found that the direction of the array holes was parallel to the laser polarization direction. This result has potential application in the fabrication of two-dimensional photonic crystals. We have determined the optimal conditions for producing these surface structures. At the same time, when we change the fluence and the pulse number, the ripples and the columns emerge. If the pulse number remains unchanged, we also investigated the evolution of a crater at a different pulse fluence. The microholes will become regular cracks on the outer irradiation area, and the ripples will gradually disappear. But, the column structures will appear. At a higher fluence, ripples only appear when the number of pulses (N) is less than 200 and a column structure exists at the center region when N is above 600.     

The growth of nanoscale periodic and dot-like structures on the surface of stainless steel with femtosecond laser pulses in the dry and wet ambient environment

The present work deals with growth of nanoscale periodic and dot-like structures on the surface of stainless steel (SS) by the irradiation of femtosecond laser pulses. For this purpose Ti: Sapphire femtosecond laser pulses (wavelength of 800 nm, pulse length of 25 fs and pulse repetition rate of 1 kHz) were employed in a dry (air) and liquid confined (deionized water and ethanol) environments. The targets were exposed to 1000 succeeding pulses for various fluences ranging from 50 to 150 mJ?cm^?2. Nanoscale structures including ripples, and dots were observed by SEM analysis. The growth and dependence of structure-formation on the ambient environment and laser fluence in both central as well as peripheral ablated areas is systematically investigated. The development of nanostructures and nanoripples is correlated with structural analysis carried out by micro Raman spectroscopy.     

Periodic ripple structures on silicon substrates induced by femtosecond laser at various scan modes

An 880-nm Ti:sapphire laser is used to induce ripple structures on silicon substrates. Single-oriented ripples, twice-overlapped/interlaced single-oriented ripples and single/double-oriented ripples with lattice structures have been obtained at five scan modes. The ripples may be formed by an intensity modulation which arises from the interference of the incident laser and the surface plasmon polaritons excited by the scattered wave of laser. The lattice structures are believed to be formed by intersecting truncation of two mutually perpendicular ripples. All the ripples are oriented in the direction perpendicular to the laser polarization vector and with a period smaller than the laser wavelength.     

Simulation of rippled structure adjustments based on localized transient electron dynamics control by femtosecond laser pulse trains

This study investigates the effects of pulse energy distributions on subwavelength ripple structures (the ablation shapes and subwavelength ripples) using the plasma model with the consideration of laser particle–wave duality. In the case studies, the laser pulse (800 nm, 50 fs) trains consist of double pulses within a train with the energy ratios of 1:2, 1:1, and 2:1. Localized transient electron densities, material optical properties, and surface plasmon generation are strongly affected by the energy distributions. Hence, the adjustment of the ablation shape and subwavelength ripples can be achieved based on localized transient electron dynamics control during femtosecond laser pulse train processing of dielectrics. The simulation results show that better, more uniform structures, in terms of ablation shapes and subwavelength ripples, can be easily formed at a lower fluence or subpulse energy ratio of 1:1 with a fixed fluence. It is also found that pulse trains at a 1:1 energy ratio are preferred for drilling high-aspect-ratio microholes or microchannels.     

On the physics of self-organized nanostructure formation upon femtosecond laser ablation

We present new results on femtosecond LIPSS on silicon, fostering the dynamic model of self-organized structure formation. The first set of experiments demonstrates LIPSS formation by irradiation with a femtosecond white light continuum. The ripples are, as usual, perpendicular to the light polarization with a fluence-dependent wavelength between 500 and 700 nm. At higher dose (fluence × number of shots), the LIPSS turn to much coarser structures. The second set of experiments displays the dose dependence of pattern evolution at about threshold fluence. In contrast to the general case of multi-pulse LIPSS, where a strong dependence of the structures on the laser polarization is observed, single-shot exposition of silicon at about the ablation threshold results in a concentric pattern of very regular sub-wavelength ripples following the oval shape of the irradiated spot, without any reference to the laser polarization. When increasing the number of pulses, the usual, typical ripples develop and then coalesce into broader perpendicular structures, interlaced with remnants of the first, finer ripples.     

Creation of periodic subwavelength ripples on tungsten surface by ultra-short laser pulses

Formation of periodic subwavelength ripples on a metallic tungsten surface is investigated through a line-scribing method under the irradiation of 800?nm, 50 fs to 8 ps ultra-short laser pulses. The distinctive features of the induced ripple structures are described in detail with different laser parameters. Experimental measurements reveal that with gradual decrease of the laser fluence, the pulse duration or the scanning speed, the ripple period is inclined to reduce but the ripple depth tends to become pronounced. Theoretical analyses suggest that the transient dielectric function change of the tungsten surface mainly originates from the nonequilibrium distribution of electrons due to the d-band transitions. A sandwich-like physical model of air?Cplasma?Ctarget is proposed and the excitation of a surface plasmon polaritonic (SPP) wave is supposed to occur on the interface between the metallic target and the electron plasma layer. Formation of ripples can be eventually attributed to the laser?CSPP interference. Theoretical interpretations are consistent with the experimental observations.     

Optical modification of semiconductor surfaces through the nanoripples formation using ultrashort laser pulses: Experimental aspects

We review the studies of nanoripples formation on various semiconductor species using ultrashort pulses and different experimental conditions. We present recent studies in this field and discuss the fabrication of 2D periodic nanostructures formed on the surface of semiconductor crystals applying a method of two-beam interference of femtosecond laser. Further, we discuss the short-period ripples formation and present the studies of the semiconductors with different bandgaps potentially suitable for generation of sub wavelength nanoripples. We also show the method of formation of the nanoholes and nanodots on the surface of different semiconductors. Ripples formation using different laser parameters and ambient media is analyzed with the objective of identifying conditions of forming short-period nanoripples. Finally, we discuss the formation of extended homogeneous laser-induced periodic surface structures using few-cycle laser pulses.     

Pyramid-like spikes in a single crystal superalloy produced by picosecond laser irradiation

Pyramid-like spikes in a single crystal superalloy were investigated upon irradiation with picosecond (ps) laser pulses (200 ps, 800 nm, 1 kHz) under different laser fluences and pulse numbers. Both sides and grooves of pyramid-like spikes were covered with ripples, which had a period of ～760 nm. The pyramid-like spike separation increased obviously with increasing laser fluence. Microstructural investigations indicate that the pyramid-like spikes were initiated with subsequent pulses from a smooth surface with corrugations and ripples. The coexistence of capillary waves for spikes and capillary waves for ripples in the melted material can be used to explain the formation of the pyramid-like spikes.     

Progressive formation of fine and coarse ripples on SiC surface by repeated irradiation of femtosecond laser pulses

In this work, we report the progressive formation of first nanoparticles, next fine ripples, and eventually coarse ripples during the irradiation of single-crystal 6H-SiC surfaces with increasing number of femtosecond laser pulses (λ = 515 nm, τ = 250 fs, repetition rate = 100 kHz). At laser fluences greater than the single-pulse ablation threshold, nanoparticles were produced on the surface by the first few pulses over which fine ripple patterns overlapped at increased pulse numbers. As the pulse number was further increased over ten, the surface was gradually transformed into a coarse ripple–covered one. At laser fluence below the threshold, however, only fine ripples were formed nonuniformly.     

Femtosecond laser induced periodic large-scale surface structures on metals

The periodic ripple structures on wolfram and titanium surfaces are induced experimentally by linear polarized femtosecond laser pulses at small incident angles. The structural features show a material difference in the s- and p-polarized laser irradiation. The interspace between the ripples increases significantly for p-polarized laser irradiation when it exceeds a threshold angle, and the ripples' periodicities are larger than the wavelength of the incident p-polarized femtosecond laser; however, no significant change in the period of the ripples is observed with increasing incident angle for s-polarized laser irradiation. To explain these phenomena we propose a resonant absorption mechanism, by which the experimental observations can be interpreted.     

Ripple formation during deep hole drilling in copper with ultrashort laser pulses

Cross sections of deep holes produced by ultrashort laser pulses and showing a variety of microstructural formations are presented. After tens of thousands of 800 nm wavelength pulses, the walls of the holes show distinct ripples with a period of ∼300 nm. It is demonstrated that these ripples are the result of light interference effects. Indeed, the ripples are perpendicular to the electric field of the laser beam and their spacing scales with the laser wavelength. Additional fine ripples with spacing of ∼75 nm were also observed. PACS 62.20.Mk; 62.25.+g; 79.20.Ds     

Surface ripple changes during Cr film ablation with a double ultrashort laser pulse

Surface modification is investigated experimentally by varying the time separation of double femtosecond laser radiation and surface ripples by varying the time separation and polarization direction of double pulses train. Nanometer-sized particles are formed during resolidification of the molten region when the second pulse arrives within 10 ps and the molten material is ejected much after 10 ps. The ripple in the outer region remains oblique to the sum of the vector direction of the two pulses when the time delay is zero. With time delay ranging from 0.5 to 10 ps and different polarization directions of the laser radiation, the ripple generally aligned perpendicular to the polarization direction of the electric field with multiple pulses in the vicinity of ablation threshold is effectively eliminated without fragments at the edge. Furthermore, remnant ripples on irradiated area at higher energies with the same polarization direction are removed by irradiation at a lower energy with each different polarization direction of double pulse. Based on morphological observations for different time delays, possible mechanisms of ripple formations and eliminations are suggested.     

时间整形飞秒激光诱导熔融硅表面纳米周期条纹的电子动力学研究

研究了时间整形飞秒激光在熔融硅表面诱导纳米周期条纹结构的电子动力学过程.通过引入非线性电离机制和表面等离子激元的瞬态作用机理,建立了关于时间整形飞秒激光诱导和调控熔融硅表面纳米周期条纹结构的电子动力学模型,并应用该模型研究获得了纳米条纹周期与时间整形脉冲时间间隔的定量关系.理论研究结果表明,通过调节时间整形脉冲的时间间隔可以实现操控表面等离子激元与激光瞬态干涉过程中的波矢配对,最终可实现对诱导的纳米条纹周期的调控.此模型预测得到的纳米条纹周期与实验结果符合得很好.该研究对于深刻理解整形脉冲链诱导材料表面纳米周期结构的电子动力学操纵机制以及对条纹周期的调控都具有重要的理论价值.     

Circular ripple formation on the silicon wafer surface after interaction with linearly polarized femtosecond laser pulses in air and water environments

Ultrashort laser pulse interaction with the surface of silicon wafer in air and water environments is investigated. Ti:sapphire laser with 40 femtosecond laser pulses at 790 nm and 10 Hz repetition rate was used. The ablation threshold of the silicon surface in the air was determined to be about 0.28 J cm^?2. The surface morphology was studied by using scanning electron microscope images. The size of the regular ripples formed in the air environment is a little smaller than the laser wavelength. Due to the nonlinear interaction and self-focusing before the target, the ripples size reduced to nearly a half of the laser wavelength in the water. Moreover, the spikes’ structure formation and their diameter in air and water were studied. Two regimes for spike formation in water are proposed that can explain the anomalous decrease of the spikes’ diameter in higher fluence. During the interaction of single linearly polarized femtosecond laser pulse with the surface, an irregular ripple formation that called circular ripple is observed. This structure which is a result of radiation pressure implies to the surface by the end of the pulse. A new physical model for interpretation of the circular ripples formation based on the ponderomotive force of an ultrashort pulse laser is proposed which can predict the size of the circular ripples. The calculated results are in accordance with our experimental findings.