磁透镜与偏转器的复合系统的电子光学性质和象差理论

本文研究了旋转对称磁透镜和磁偏转器的复合系统,给出了场和轨迹的普遍表达式。利用向量形式来描写电子轨迹,讨论了高斯光学性质。运用变分原理(费马原理)计算了三级象差,得出了复合系统普遍的象差公式。它们以矩阵的形式表出,形式简洁,便于进行数值计算。本文的结果具有较大的普遍性,概括了文献上关于偏转象差的已有结果,并对复合系统作了较完整的论述和严格的计算,因而可以广泛地研究各种电子束管和电子光学仪器的偏转象差。     

静电透镜与磁偏转器的复合系统的电子光学性质和象差理论

本文将文献[1]的方法和结果加以推广,研究了旋转对称静电透镜和磁偏转器的复合系统。给出了场和轨迹的普遍表达式,讨论了高斯光学性质,得出了这种系统普遍的三级象差和象差系数的公式。这两篇文章有助于较全面地研究各种电子束管和电子光学仪器的偏转象差。 关键词：     

存在初级象差下电子和离子光学系统中刘维定理的应用

在电子和离子光学理论(特别是象差理论)中,广泛地应用了矩阵的运算方法。本文讨论了旋转对称电子光学系统与重叠场(环形电场与非均匀磁场的叠加)离子光学系统中存在初级象差下的变换矩阵,证明了这些变换矩阵的行列式数值恒为1.这个普遍结论是刘维定理的具体应用。这对于电子和离子光学象差理论及计算机辅助设计具有一定意义。 关键词：     

高斯光束的象差平衡

本文从有象差时的衍射积分出发,导出高斯光束中心点亮度与波象差方差的关系,依据斯特列尔判据,采用解线性方程组的方法讨论了高斯光束球差及轴外象差的最佳校正形式,并以表格方式给出了最佳校正形式.     

宽束和细束电磁复合聚焦球面阴极透镜的象差理论

本文研究了对宽束和细束阴极透镜普遍适用的电磁复合聚焦球面阴极透镜的象差理论。在考虑物场和象场弯曲以及阴极面上磁场和横向电场不为零的情况下,导出了任意理想象面上的一级近轴横向象差和包括色象差在内的全部三级横向象差矩阵公式。所得的结果较为完整、普遍。本文详细讨论了宽束和细束阴极透镜的关系,并用轨迹法和变分法严格证明了:当考虑阴极面逸出电子具有一定的初能量和初角度分布,并采用准规范化电位表示的近轴轨迹方程来讨论系统的理想成象时,宽束和细束两类阴极透镜从象差理论以至导出的三级横向象差、象差系数表示式都可以统一起来。本文采用矢量描写轨迹,运用矩阵表示象差,形式简洁,象差系数积分收敛,适合于计算机计算。 关键词：     

激光光学系统的初级象差

本文从泽尼克一高斯国多项式出发,讨论了三种初级象差(球差、营差、象散)在平衡及未平衡状态下的标准偏差同衍射孔半径与高斯光束半径之比α的关系.最后讨论了在均匀光波的最佳校正状态下,高斯光束初级象差同α的关系,得到高斯光束的初级象差可按照均匀光波象差理论进行校正的结论.     

阴极透镜象差的变分理论

本文运用变分原理研究了电磁复合聚焦阴极透镜的象差理论,导出了在任意象平面中象差系数的普遍公式。它们可以用Glaser导出的象差系数的线性组合来表示。这就表明了宽束与细束电子光学系统的象差都可以用统一的变分方法处理,并建立了两者之间的联系,本文采用矢量形式描写阴极透镜的近轴轨迹,并采用矩阵形式描写象差。本文所得的象差系数较之文献上已有结果形式更为简洁且适用于计算机计算。本文考虑了阴极面上磁场和横向电场不为零的情况,因而所得结果较为普遍。 关键词：     

电磁复合聚焦—偏转球面阴极透镜的相对论象差理论

本文应用变分原理研究了电磁复合聚焦-偏转球面阴极透镜的相对论象差理论。在考虑阴极面逸出电子具有一定的初能量和初角度分布,物场和象场弯曲以及阴极面上磁场和横向电场不为零的情况下,导出了任意理想象面上的一级近轴横向象差和包括色球差在内的全部三级几何横向象差,以及各种特殊类型象差系数的明显表达式。本文导出的象差公式不仅普遍适用于宽束和细束阴极透镜,而且普遍适用于相对论或非相对论,阴极和屏为球面或平面时的各种情况。本文以复数描写轨迹,用矩阵表示象差,形式简洁,适合于计算机计算。 关键词：     

全息摄影的光学系统及其象差讨论

本文在论述高斯参数与透镜参数的关系;透镜的波象差以及全息象差的基础上,提出了三种基本常用的全息摄影系统,讨论了这三种系统所适用的场合,及所用光学元件的象差要求。     

磁圆形透镜和磁六极透镜的复合系统的象差

近来磁六极透镜作为球差校正器引起了人们的注意。本文研究了磁圆形透镜和磁六极透镜的场分布叠加形成的复合系统的象差。我们在复数域中定义了内积,采用了复数的表象和微分算符,全面讨论了这种复合系统的高斯光学性质及二、三、四级象差,得出了各级象差所有的象差系数的公式。 关键词：     

Paraxial imaging electron optics and its spatial-temporal aberrations for a bi-electrode concentric spherical system with electrostatic focusing

The paraxial solutions play an important role in studying electron optical imaging system and its spatial-temporal aberrations, as was discussed in previous paper [1], but investigation of a bi-electrode concentric spherical system with electrostatic focusing directly from paraxial electron ray equation and paraxial electron motion equation has not been done before. In this paper, we shall use the paraxial equations to study the spatial-temporal trajectories and their aberrations for a bi-electrode concentric spherical system with electrostatic focusing.In the present paper, start from the paraxial ray equation and paraxial motion equation, the paraxial spatial-temporal trajectory of moving electron emitted from the photocathode has been solved for a bi-electrode concentric spherical system with electrostatic focusing. The paraxial static and dynamic electron optics, as well as the paraxial spatial-temporal aberrations in this system are then discussed, the general regularity of imaging in paraxial optical system has been explored. The paraxial spatial aberrations, as well as the paraxial temporal aberrations with different orders, have been defined and deduced, that are classified by the order of (?_z/?_ac)^1/2 and (?_T/?_ac)^1/2. Thus we get same conclusions about paraxial spatial and temporal aberrations as we have given in the previous paper and it completely shows that the paraxial spatial-temporal aberrations can be investigated directly from the paraxial ray equation and paraxial motion equation.     

电子束曝光机偏转系统及可动物镜分析

电子束大扫描场偏转系统设计中 ,像差的确定是一个必须解决的实际问题。以SDS 3电子束曝光机的磁复合偏转系统为基础 ,以双通道扫描原理进行扫描 ,分析了像差与电子束主轨迹的关系。给出了可动物镜的条件 ,并利用这一条件分析电子束最佳轨迹的结构和方法。并使用计算机辅助设计研究电子束曝光机聚焦偏转系统的结构。由该电子束曝光机试验结果表明 ,复合系统结构简单紧凑 ,像差小而可以不用动态校正。采用矢量描写电子轨迹 ,以积分式表示像差。以 0 .0 0 5rad半张角 ,5× 10 -5的高压纹波 ,5 0mm的像距 ,10mm× 10mm扫描场的边脚处 ,使动态校正前的总像差为 0 .0 3μm。     

Static and dynamic imaging electron optics and spatial-temporal aberrations in a bi-electrode spherical concentric system with electrostatic focusing

In imaging electron optics, for a concentric spherical system composed of two spherical electrodes with electrostatic focusing, the electrostatic potential distribution and the spatial-temporal trajectory of electron motion can be expressed by analytical forms. It is naturally to take such system as an ideal model to investigate the imaging properties, as well as the spatial-temporal aberrations, to analyze its particularity and to find the clue of universalities and regularities. Research on this problem has important significance, which can afford theoretical foundation not only in studying static electron optics for the night vision devices, but also in studying dynamic electron optics for high-speed image converter tubes.In the present paper, based on the practical electron ray equation and electron motion equation for a bi-electrode concentric spherical system with electrostatic focusing, the spatial-temporal trajectories of moving electrons emitted from the photocathode have been solved, the exact and approximate formulae for image position and flight time of electrons, have been deduced. Start from solutions of spatial-temporal trajectories, the electron optical spatial-temporal properties of this system are then discussed. According to the definitions of spatial-temporal aberrations, the paraxial and geometrical lateral aberrations, as well as the paraxial and geometrical temporal aberrations, have been deduced, that are classified by the order of and .     

Relativistic aberrations in quantum phase space

A phase space treatment of special relativity of quantum systems is developed. In this approach a quantum particle remains localized if subject to inertial transformations, the localization occurring in a finite phase space area. Unlike in the non-relativistic case, relativistic transformations generally distort the phase space distribution function, being equivalent to aberrations in optics. The relativistic aberrations of massive particles are in general different from those of optical images.     

Theory of paraxial lateral aberrations of electrostatic imaging electrostatic electron optics based on asymptotic solutions and its verification

In imaging electron optics, study of geometrical lateral aberrations of third order and paraxial lateral aberrations of second order has traditionally been paid more attention to, but the existence of paraxial chromatic aberrations of third order and paraxial chromatic aberrations of magnification of third order was almost ignored, and the general form of paraxial lateral aberration has not been studied theoretically.In the present paper, the paraxial lateral aberrations expressed in general form have been derived emphatically on the basis of asymptotic solutions of paraxial equation. The relationship between the coefficients of asymptotic solutions has been investigated, which proves that the coefficients of asymptotic solutions are related each other. Through a bi-electrode electrostatic spherical concentric system model, two special solutions expressed by asymptotic solutions and accurate solutions in a bi-electrode electrostatic spherical concentric system have been deduced, and the paraxial lateral aberrations have been verified and tested, in which the aberration coefficients are solved by asymptotic solutions of paraxial equation. Result completely proves that the approach based on asymptotic solutions to solve the paraxial lateral aberrations are practicable and accurate enough. The paraxial chromatic aberration of magnification of third order and the paraxial chromatic aberration of third order have been firstly derived, and the Recknagel-Artimovich formula of paraxial chromatic aberration of second order which possess an greatest part in the whole paraxial lateral aberrations has been deduced and confirmed. A simple and clear form for expressing paraxial lateral aberrations of imaging electron optics is suggested for practical use. Results of the present paper will have theoretical value for aberration theory of imaging electron optics and practical significance for the design of image tubes.     

Different algebraic method for computing the high-order aberrations of practical combined focusing-deflection systems

Differential algebraic (DA) method is an effective technique in computer numerical analysis. It implements conveniently differentiation up to arbitrary high order, based on the nonstandard analysis. Some complicated nonlinear dynamics problem including high-order aberrations of electron optical systems can be solved effectively by mapping properties of DA quantities. However, the existing study applying DA method to the practical system is limited to simple electron lenses. In this paper, the application of DA method is extended to practical combined focusing-deflection systems, and the aberrations up to fifth order are calculated. The electric and magnetic fields of the electron lenses and deflectors, which are computed by finite element method (FEM) or finite difference method (FDM), are in the form of discrete arrays. Local analytical expressions for electric and magnetic field quantities are constructed from these arrays for arbitrary place where electron is traced in DA computation. Thus the developed DA method is applicable for engineering design and computing problem. Based on the study of the expressions and the structure of the aberration coefficients for the fifth-order aberrations of the combined focusing-deflection system and the local analytic expression of the practical electromagnetic field, correlative computer software was developed, whose interface is convenient to calculate the high-order aberrations of the practical systems. The new DA method and software are tested with a uniform magnetic field deflection having an analytic solution. And the results show that the accuracy is sufficiently high, only limited by machine precision. Finally, as an example, a practical combined magnetic focusing and magnetic deflection system is analyzed and discussed.     

约束系统的变换性质

受约束的系统,它的运动可用非独立的态函数来描述。在约束系统的时空坐标和态函数作无穷小变换下,考虑到作用量和约束方程的变化,导致了普遍的变换结果,沿着系统运动的轨线,得到约束系统变换性质的一般方程,从而给出约束系统在变换下产生守恒律的条件,对连续系统的某些具体变换写出了其变换性质方程,在特殊情况下,变换性质方程可化为经典Noether定理的结果,用于经典力学作了较详细的讨论,并把Poincaré-Cartan不变量推广到了受约束系统。 关键词：