Discharge characteristics of the DUHOCAMIS with a high magnetic bottle-shaped field

For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions （DUHOCAMIS） was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.     

Field Calculations for Permanent Magnets used for Glow Discharges

If a permanent magnet has both a homogeneous polarization inside the material and a linear demagnetization characteristic in external fields, its magnetic field can be expressed using a surface pole model. For magnets satisfying these conditions and, in addition, having a rectangular shape, the fields at any given point in space can be calculated analytically. An algorithm for this calculation is presented in a form that can easily be implemented into a computer program. In our experiments we used Nd₂Fe₁₄B magnets to support low pressure glow discharges by magnetic fields. The magnets can be seen as composed of elementary magnets with rectangular shape, for which the magnetic field distribution is calculable. We present results of field calculations for various configurations of permanent magnets that we used in hollow cathode and Penning discharges.     

Discharge characteristics of the DUHOCAMIS with a high magnetic bottle-shaped field

For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions (DUHOCAMIS) was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.     

Influence of the Self-Heated Cathode Geometry on the Parameters of a Low-Pressure Discharge in Crossed <Emphasis Type="Italic">E×H</Emphasis> Fields

The parameters of a self-maintained low-pressure discharge in crossed E×H fields are compared for the Penning discharge with a self-heated disk cathode and the combined discharge with an axial self-heated rod electrode. Based on the continuity equation for the electron flux and the energy balance on the hot cathode, the parameters of the discharge in crossed E×H fields with the self-heated cathode are calculated for a wide range of variations of geometrical sizes of the discharge cell and work functions of cathode material. It is demonstrated that the examined systems differ significantly by radial distributions of fast electron concentration (uniform for the Penning cell and highly nonuniform for the combined discharge cell) and currents and that the volt-ampere characteristics of the examined cells are described by decreasing voltage-current dependences.__________Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 1, pp. 73–80, January, 2005.     

Reflex discharges at low pressure

An investigation is made of reflex discharges with cold and hot cathodes at low pressures at which the free path of the electrons exceeds the dimensions of the discharge region. It was found that in the reflex discharge with hot cathode radial deformation of the potential is produced even at weak magnetic fields. The relationship between the anomalous motion of electrons emitted by the cathode and the experimentally determined anomalies of the static and dynamic characteristics of the suppressed reflex discharge was determined. The changes in the linear dimensions of the discharge region were also investigated for all the given forms of discharge.     

Doppler spectroscopy of hydrogen and deuterium Balmer alpha line in an abnormal glow discharge

The results of hydrogen and deuterium Balmer alpha line shapes and line intensities study in an abnormal glow discharge are reported and analyzed. The Doppler shifts along line wings are used to determine energies of excited hydrogen and deuterium atoms. For 12 different cathodes, intensity and shape of line wings are examined and dependence upon cathode material is determined. Tentative explanation of line wings intensity dependence is related to the sputtering of cathode material and back-scattering coefficients of incident hydrogen or deuterium ions and atoms from cathode surface. The influence of the light reflected on a cathode surface to the line shape measurements along discharge axis is considered. In hydrogen, deuterium, and Ar+3%H/sub 2/ discharges, basic mechanisms of fast hydrogen generation and excitation are studied. The shape and intensities of the H/sub /spl alpha// line profiles in pure hydrogen and in argon-hydrogen mixture may be correlated with hydrogen atom-carrier gas collision excitation cross sections. In order to assess the importance of reflected fast hydrogen atoms back scattered from the cathode surface, for the Balmer line shape formation, a simulation program is used. The results are in a qualitative agreement with Balmer line shapes observations.     

Parameters of the discharge plasmas of surface-plasma sources of negative hydrogen ions

The main parameters of the plasma of high-current hydrogen-cesium glow discharges of surface-plasma (planotron and Penning) sources of negative hydrogen ions are determined using contact-free spectroscopic methods and compared for identical discharge current densities. The elemental and charge composition of the plasma is established. The temperature of the hydrogen atoms and the energy of the visible-range radiation of the plasma discharge are measured and estimates of the electron density in the plasma are made. The dynamics of the change in the parameters of the discharge plasma of a Penning source — the densities of hydrogen atoms, cesium atoms and ions, and molybdenum atoms — is tracked during a discharge pulse with spatial resolution along two coordinates. It is observed that cesium atoms and ions and molybdenum atoms are pent up near the cathode surface. Zh. Tekh. Fiz. 68, 32–38 (October 1998)     

圆形复合式磁控溅射阴极设计及其放电特性模拟研究

基于二维有限元算法使用COMSOL软件对圆形复合式磁控溅射阴极的磁场进行了计算,结合Matlab优化工具箱分别采用遗传算法和模拟退火算法对圆形复合式磁控溅射阴极的结构进行优化,得到靶材利用率达到最大的最优结构.对得到的最优化磁控阴极,基于自洽粒子模拟方法,使用VSim软件对不同工况下的放电特性进行了模拟.研究发现随着磁场非平衡度的增加,阴极表面电势降落最大的位置和等离子体聚集的位置,沿着阴极表面外沿不断向阴极中心移动,阴极表面磁场的强度不断减小.随着磁场非平衡度的增加,等离子体密度先增加后减小,鞘层厚度先减小后增加,等离子体的密度和鞘层厚度不仅与磁场非平衡度有关,而且与磁场强度有关.最后根据粒子模拟的结果,对复合式磁控阴极的靶材刻蚀深度进行了研究.研究发现,在优化前后靶材的刻蚀范围从60 mm扩展至整个靶面,极大地提高了靶材利用率.     

Effects of discharge current and voltage on the high density of metastable helium atoms

Both hollow-cathode and Penning-type discharges were adopted to excite helium atoms to a metastable state. Experimental data indicate that Penning discharge is more suitable for generating high fractions of metastables in a low-density helium beam for laser-induced fluorescence technique in measuring electric fields at the edge of a plasma. The metastable density increases with increasing helium gas pressure in the range of 1.33×10^{-2}－66.7Pa. The highest metastable density of 3.8×10^{16}m^{-3} is observed at a static gas pressure of 66.7Pa. An approximately linear relationship between the density of metastable helium atoms and the plasma discharge current is observed. Magnetic field plays a very important role in producing a high density of metastable atoms in Penning discharge.     

空心阴极直流放电的二维自洽模型描述和阴极溅射分析

建立了空心阴极放电的二维自洽理论模型,理论研究了气压为50—120Pa,电压为150—300V的范围内Ar空心阴极放电特性、粒子密度和电离速率空间分布,特别考察了影响阴极溅射分布有关因素:阴极面上的电场、离子流和离子密度的沿阴极截面的空间分布.研究结果不仅证实了在所讨论的范围内,空心阴极效应明显存在而且发现归一化电离速率的空间分布形状强烈依赖于气压.通过研究电场、离子流和离子密度的空间分布解释了空心阴极溅射型离子激光器中不均匀阴极溅射的现象来源于阴极面附近的电场、离子流和离子密度的不均匀分布 关键词： 空心阴极放电 自洽模型 气体激光 阴极溅射     

On the structure and properties of a material deposited from arc discharge plasma near the cathode and onto vacuum-chamber walls

The structure and composition of a material (composite) deposited onto vacuum-chamber walls from arc discharge plasma during the crystallization of cathode spot products in electric and magnetic fields is studied by the methods of electron microscopy and energy dispersive analysis. The regular character of the inclination of the columnar structure of films growing from a separated droplet fraction of the plasma near the cathode assembly during arc sputtering is established. It is shown that the magnetic field of the focusing coil has a more noticeable effect on the particle trajectory near the cathode under the used operating modes of the cathode assembly as compared to the interelectrode potential.     

筒形溅射阴极的磁场优化及其高功率放电特性研究

基于高功率脉冲磁控溅射(HiPIMS)技术开发的筒形溅射阴极,配合电磁系统可有效地提升等离子体的输运效率.然而电磁系统的引入反作用于筒内放电特性,从而使靶面放电面积和放电强度无法同时维持.鉴于此,本文通过调整磁场布局,研究了靶面切向(横向)磁场和法向(纵向)磁场对靶面放电的作用规律,优化后靶面切向磁场分布更加均匀,磁场强度高于40 mT的靶面区域占比由51%增至67%,同时法向峰值强度外移,强度由73 mT增至96 mT.采用Ar/Cr体系放电发现:相同工艺条件下,优化后的溅射阴极辉光变亮,靶电流增大,放电面积变宽,放电特性得到显著提升.利用等离子体整体模型仿真和发射光谱仪检测发现优化后离子电流和光谱强度得到明显提升,Cr粒子密度提高一倍,增至2.6×10^20 m^–3,且离化率上升至92.1%,同时输出离子通量提高近一倍,实现了靶面放电与离子输出的双促进.     

Effect of E × B electron drift and plasma discharge in dc magnetron sputtering plasma

Study of electron drift velocity caused by Etimes B motion is done with the help of a Mach probe in a dc cylindrical magnetron sputtering system at different plasma discharge parameters like discharge voltage, gas pressure and applied magnetic field strength. The interplay of the electron drift with the different discharge parameters has been investigated. Strong radial variation of the electron drift velocity is observed and is found to be maximum near the cathode and it decreases slowly with the increase of radial distance from the cathode. The sheath electric field, E measured experimentally from potential profile curve using an emissive probe is contributed to the observed radial variation of the electron drift velocity. The measured values of the drift velocities are also compared with the values from the conventional theory using the experimental values of electric and magnetic fields. This study of the drift velocity variation is helpful in providing a useful insight for determining the discharge conditions and parameters for sputter deposition of thin film.     

Ion energies at the cathode of the DC planar magnetron sputtering discharge

The energy distribution of the ions striking the cathode of the dc planar magnetron system was measured over a range of the typical sputtering conditions (magnetic field of 0.07–0.13 T, argon pressure of 0.01–10 Pa, discharge voltage of 250–600 V). The results obtained allow us to conclude that the major part of the incident ion flux originates in the cathode fall region. The theoretical model developed in terms of mobility theory makes it possible to evaluate the cathode fall voltage and its dependence on the sputtering conditions. It was found that the normalized integral form of the incident ions, energy spectrum is practically independent of the sputtering discharge parameters.     

Objektzerstäubung im Elektronen-Emissionsmikroskop in Abhängigkeit von Art und Energie der Ionen

In an emission electron microscope with ion induced electron emission the dependence of emission current and cathode sputtering under ion bombardment on discharge voltage, type of discharge gas and specimen material is measured. If high image intensity and little cathode sputtering is desired, a discharge gas of small molecular mass and high ion energies should be used. Under such conditions it is possible to observe a specimen in an emission microscope over a longer period without appreciable specimen changes due to cathode sputtering during observation.     

Specific features of magnetic properties of three-component magnetic superlattices based on Fe/Co/Mo

Synthesis of three-component magnetic superlattices based on the Fe/Co/Mo system by cathode sputtering in an electron-oscillating discharge and their complex investigations have been performed for the first time. The fields have been investigated by X-ray diffraction, vibrational magnetometry, and Mössbauer spectroscopy with the use of completely computerized systems. Oscillations of the main magnetic parameters with a change in the Mo thickness and giant spontaneous magnetization have been found. The properties of three-component superlattices are compared with those of the analogous system based on Fe/Mo.     

槽型空心阴极放电中槽底阴极面的电子发射对放电的影响

运用粒子和流体组合模型理论研究了槽型空心阴极放电中槽底阴极面上二次电子发射对放电等离子体特性、电离特性及阴极溅射的影响.研究表明,从槽底阴极面发射的电子在进入负辉区后,可以形成振荡电子,因而具有增强电离的作用.根据各阴极面上的离子的空间分布可以推知槽底附近的阴极面上的溅射较强,这可以解释槽型空心阴极放电实验中观察到的因溅射导致槽底截面形状圆形化的现象     

缩比间隙中辉光放电相似性的初步研究

为了研究缩比实验在气体放电中的有效性, 对缩比间隙中的低气压氩气放电进行了数值模拟. 根据气体放电相似性的猜想, 如果间隙气压p和间隙距离d的乘积为常量, 即p₁d₁=p₂d₂, 并且约化电场E/p 在两个间隙中的空间分布相同, 那么这两个放电间隙的放电特性存在相似性. 数值模拟中设置三个缩比间隙: 气隙A的长度为30 mm, 气压为1 Torr (1 Torr=133.322 Pa); 气隙B的长度为15 mm, 气压为2 Torr; 气隙C的长度为10 mm, 气压为3 Torr. 仿真结果表明, 三个间隙均为辉光放电, 并存在明显的阴极位降区. 间隙A, B, C 的阴极位降区的厚度d_C分别为2.71, 1.35和0.87 mm, 相对应的pd值几乎相同, 即pd_C≈2.70 Torr·mm. 这与氩气辉光放电Paschen曲线最低点(pd≈2.86 Torr·mm)相近. 缩比间隙的放电参数的特性(如工作电压、电场、电流密度、电子密度和离子密度的沿“空间”px的分布)的数值计算结果与放电相似性猜想所预计的结果一致. 所以, 可以认为放电相似性猜想适用于低气压氩气缩比间隙的辉光放电. 关键词： 放电相似性 辉光放电 缩比间隙     

Glow discharge with an annular hollow cathode

A discharge system with peripheral discharge chambers (Penning cells) and common hollow cathode with only one cell supplied with power is studied. It is shown that a jumpwise transition from a dark discharge to a glow discharge is accompanied by the penetration of plasma into the hollow cathode.     

Enhanced energy deposition efficiency of glow discharge electronbeams for metal surface treatment

The energy deposition efficiency and focal spot dynamics of electron beams produced by pulsed cold-cathode high-voltage glow discharges for metal surface treatment are investigated for two different cathode geometries. A concave cathode geometry in which the focusing is dominated by the convergence of the electric field lines in the cathode fall region is compared with flat cathode in which the focusing is exclusively caused by the self-generated magnetic field. Results of the treatment of AISI 4140 carbon steel samples show that the concave cathode geometry significantly increases the efficiency, reduces the threshold power necessary for melting, and is less sensitive to variations in the discharge parameters and sample position. The results of numerical modeling indicate that the observed increase in efficiency is caused by the longer persistence of the focal spot on the sample. The model can be used to predict the discharge parameters required for a desired treatment