Modeling of Cu gettering in p- and n-type silicon and in poly-silicon

Based on experimental findings we set up calculations of numerical modeling of gettering efficiencies for Cu in various silicon wafers. Gettering efficiencies for Cu were measured by applying a reproducible spin-on contamination in the 10¹² atoms/cm² range, followed by a thermal treatment to redistribute the metallic impurity. Subsequently, the wafers were analyzed by a novel wet chemical layer-by-layer etching technique in combination with inductively coupled plasma mass spectrometry. We investigated p/p+ and n/n+ epitaxial wafers with different doping levels and different substrate-doping species. We have also investigated gettering efficiencies of phosphorus-diffused p- and n-type wafers. Heavilyboron doped silicon exhibited a gettering efficiency of ∼100%, while gettering by n+ silicon occurred for doping levels >3×10¹⁹ atoms/cm³ only. In another set of experiments we investigated the dependence of the gettering efficiency of p-type wafers with poly-silicon back sides for different cooling rates and Cu spiking levels. A strong dependence on both parameters was found. Cu gettering in p/p+ epitaxial wafers was modeled by calculating the increased solubility of Cu in p+ silicon compared to non-doped silicon taking into account the Fermi-level effect, which stabilizes donors in p+ silicon, and the pairing reaction between Cu and B. Calculated gettering efficiencies were in very good agreement with experimental results. Gettering in n+ silicon was similarly modeled in terms of pairing reactions and the Fermi-level effect. But, for n-type silicon, many experimental uncertainties existed; thus, we applied our expressions to solubility data of Hall and Racette to obtain the unknown parameters. The empirical calculations were in good agreement even with results on n/n+ wafers. For phosphorus-diffused wafers we had to consider an excess vacancy concentration of 1.2–5.5 times the equilibrium concentration to explain the experimental findings by the model. Gettering by poly-silicon back sides was simulated by solving the time-dependent diffusion equation with boundary conditions that take into account different surface reaction rates of silicon point defects. Using this advanced model, the experimentally measured gettering efficiencies were reproduced within the uncertainty of the measurement. Received: 3 September 2001 / Accepted: 4 September 2001 / Published online: 20 December 2001     

The fate of Li and Be in stars and in the laboratory

We connect the observed under-abundances of Li and Be in dwarfs, with recent results on nuclear cross sections at low energies: for collisions of protons with atomic or molecular targets, the measured cross sections seem too high with respect to extrapolations for bare nuclei. Phenomenologically, these anomalous nuclear interactions can be described in terms of an effective screening potentialU _lab in the range of few hundred eV: in the presence of the electron cloud, nuclei become more transparent to each other as if the effective collision energy is aumented byU _lab. This implies that fusion cross sections are enlarged and at the same time elastic cross sections are lowered. If something similar occurs in stellar plasma, the nuclear burning temperatures are lowered, whereas diffusion processes are enhanced. We find that the observed Li and Be abundances in the Hyades and in the Sun can be reproduced for effective screening potentials of the plasma in the range of 600–700 eV, close to that found by experiments in the laboratory.     

Anomaly in the NMR shifts of P and As in CeP and CeAs

The NMR frequency shifts for ³¹P and ⁷⁵As in the compounds CeP and CeAs have been measured between the Néel point and 200°K. Between 10 and 60°K the ratio of resonance shift to bulk magnetic susceptibility, expected to be independent of temperature, was found to increase with increasing temperature by approximately a factor of two. Possible causes are temperature dependent or non-linear hyperfine couplings.     

Steady state and time-resolved studies of pyrene in solution and in single microcrystals

Single microcrystals of pyrene have been studied by steady state and time resolved fluorescence microscopy. The fluorescence spectra of microcrystals exhibit vibrational structure unlike the broad spectrum observed in pyrene excimer. A risetime is observed in the decay curves of the concentrated solutions, indicating the excimer formation. In contrast, the fluorescence decay profiles of the single microcrystals are nonexponential in nature and the decay times vary with their size and the wavelength of emission. This behaviour has been explained mainly by considering the pyrene dimer stabilized in the ground state.     

Normal spectral emissivity of platinum in the red and in the green in vacuum and helium

The spectral emissivity of platinum for λ=0.645 μm and λ=0.546 μm has been measured by using a De Vos blackbody in ultrahigh vacuum and in helium. Changes in enissivity brought about by heat treatment and changing ambiences, are illustrated and discussed and the results are compared with previously published data. The emissivities determined turned out to be appreciably lower than the measurements of previous investigators. The determined values for 1100<T(K)<1800 are for 0.645 μ between 0.237 and 0.249 in vacuum, and between 0.185 and 0.290 in helium; and for 0.546 μm between 0.250 and 0.312 for vacuum and between 0.219 and 0.321 in helium.     

Fluorescence spectra of anthracene and pyrene in water and in aqueous surfactant solution

The fluorescence and excitation spectra of anthracene and pyrene have been measured in water and in aqueous solution of sodium dodecyl sulfate (SDS), and compared with the spectra in ethanol, for microcrystals and in a solution by the dilution method. The molecular spectra observed in water exhibit large broadenings and red-shifts due to the specific solvent effects of water. In aqueous SDS solution the spectra of anthracene are considerably broadened and red-shifted, suggesting the existence of the molecules near the micellar surface, while in the emission spectrum of pyrene remarkable intensity reductions of the vibronic bands have been observed, indicating a weak polarity of the environment in the SDS micelles.     

Natural frequencies of cylindrical shells and panels in vacuum and in a fluid

A unified formula for estimating the natural frequencies of circular cylindrical shells and panels in vacuum as well as in a fluid is presented. Boundary conditions considered include both simply supported and clamped. In the latter case, tables of constants are included to facilitate application of the formula. Extension of the method to estimate the frequencies of a system of cylindrical shells coupled by fluid gaps is also discussed. The methodology is particularly suitable for digital computer implementation.     

屋顶花园种植的金银花、竹荪中铅和镉含量及其评价

采用火焰原子吸收光谱法测定屋顶花园种植金银花、竹荪中Pb、Cd的含量。该法简单、快速、灵敏度高,准确性好。回收率在93.6%—96.7%之间,相对标准偏差小于5%。实验结果表明:金银花中Pb、Cd的平均含量范围分别为16.46—16.60、0.19—0.23mg/kg,竹荪中Pb、Cd的平均含量范围分别为11.07—14.62、5.54—5.48mg/kg。     

Optical properties of calcite and gypsum in crystalline and powdered form in the infrared and far-infrared

The complex indices of refraction for crystalline gypsum and calcite were determined from reflectance measurements for both single crystals and pressed powder pellets. These optical constants were determined from a classical dispersive analysis (DA) of the reflectance data to facilitate comparisons between the crystal and powdered data. This study was done to show the usefulness and the limitations of using pressed pellets for determining the complex refractive index of materials unavailable in single crystals.     

Annihilation of slow antiprotons in flight and in traps

The antiproton-nucleus annihilation in two possible experimental situations (low energy in-flight annihilation and annihilation in a trap) is investigated taking into account the Coulomb interaction. For these two cases, the formulas giving the relation between the antiproton-nucleus scattering lengtha _cs and observables (annihilation cross section and antiprotons time-of-life in a trap) are obtained. These relations are proposed to determinea _cs.     

Interaction of impurity and intrinsic defects in forsterite and its role in the formation of spectral and luminescence properties

This paper reports on the results of investigations of the coefficients of chromium distribution between a crystal and a melt of forsterite, the absorption and luminescence spectra, and the electron paramagnetic resonance spectra of chromium centers in Mg₂SiO₄: Cr, Mg₂SiO₄: Cr: Sc, and Mg₂SiO₄: Cr: Li crystals. It has been established that the concentration dependences of these properties vary upon changing over from the range of trace concentrations of chromium, scandium, or lithium impurities in the melt to the range of higher concentrations of these impurities. The observed phenomenon is explained by the interaction of impurities with intrinsic defects of the crystal, which is called as the microimpurity trapping effect. According to the performed estimations, the concentration of predominant intrinsic defects (magnesium Frenkel defects) in the forsterite crystals grown from the melt is equal to (7.5 ± 0.3) × 10⁻⁶ atomic fractions. The energy of the formation of magnesium Frenkel defects can be estimated as 4.2 ± 0.2 eV.     

Electromigration and permeation of hydrogen and deuterium in silver

A steady state flow technique was used to measure the effective charge number (Z*) and permeability (N) of hydrogen and deuterium in silver. Over the range of temperature (485–720°C) and pressure (220–750 torr) the effective charge number is a constant. The interstitial impurity migrates in the direction of the electron wind with Z_H* = ?6·8 and Z_D* = ? 18. The values of Z* are of the same order as self-electromigration but the size of the isotope effect is surprising. The quantum theories used to explain the isotope effect for hydrogen electromigration in Fe and Ni appear to fail here. In order to determine the effective charge number is was necessary to measure the permeability. For both H₂ and D₂, the permeability in silver follows the equation N = N_O exp(? Q/RT) where N_0D = 2·39 ± 0·40, Q_D = 14400 ± 300, N_OH = 2·86 ± 0·70 and Q_H = 14200 ± 500. Here Q is in units of cal/mol and N is in units of cc(ntp)/(sec - atm² - cm) The isotope effect ratio N_H/N_D = 1·25 was smaller than the classically expected value of (2)^1/2, but could be explained by the theory of Ebisuzaki, Kass and O'Keeffe.     

Coherence and Divergence of Megatrends in Science and Engineering

Scientific discoveries and technological innovations are at the core of human endeavor, and it is estimated that their role will only increase in time. Such advancements evolve in coherence, with areas of confluence and temporary divergences, which bring synergism and that stimulate further developments following in average an exponential growth. Six increasingly interconnected megatrends are perceived as dominating the scene for the next decades: (a) information and computing, (b) nanoscale science and engineering (S&E), (c) biology and bio-environmental approaches, (d) medical sciences and enhancing human physical capabilities, (e) cognitive sciences and enhancing intellectual abilities, and (f) collective behavior and system approach.This paper presents a perspective on the process of identification, planning and program implementation of S&E megatrends, with illustration for the US research initiative on nanoscale science, engineering, and technology. The interplay between coherence and divergence, leading to unifying science and converging technologies, does not develop only among simultaneous scientific trends but also along time and across geopolitical boundaries. There is no single way of development of S&E, and here is the role of taking visionary measures. Societal implication scientists need to be involved from the conceptual phase of a program responding to a S&E megatrend.     

Scheibe-aggregates of Pseudoisocyanine in solution and in molecular monolayers

A new working molecule 1,1,1,3,3,3-hexafluoro-2-(trifluoromethyl)-propane-2-t (CF₃)₃CT, is reported for the isotope separation of tritium by TEA CO₂-laser-induced multiphoton dissociation (MPD). Selective and efficient dissociation of (CF₃)₃CT was observed by irradiation at about 980 cm^–1 where (CF₃)₃CH was nearly transparent. The critical fluence for dissociation of (CF₃)₃CT at 10R(28) 980.9 cm^–1 was estimated to be as low as 4.6 J/cm², which is the lowest of the tritiated halocarbons that we have ever reported. A detailed study was made of the pressure dependence of the dissociation rate constants for (CF₃)₃CT and (CF₃)₃CH to clarify the collisional effects in their MPD. The hydrogen isotope exchange between (CF₃)₃CH and HTO was found to be extremely rapid, which is advantageous in the practical laser separation cycle for tritium removal from water.     

Virtual bound states of Pd in Cu,Ag and Au and of Pt in Ag

The positions and widths of the virtual bound states of 5 and 10% Pd in Cu, Ag and Au and of 5 and 10% Pt in Ag have been measured by XPS. The spin—orbit splitting of the Pt state in Ag is reduced from the theoretical value, but comparable to the spectroscopic atomic value. The host lattice d-band structure is perturbed in the alloys.     

Path Integration and Separation of Variables in Spaces of Constant Curvature in Two and Three Dimensions

In this paper path integration in two- and three-dimensional spaces of constant curvature is discussed: i.e. the flat spaces R² and R³, the two- and three-dimensional sphere and the two- and three-dimensional pseudosphere. We are going to discuss all coordinates systems where the Laplace operator admits separation of variables. In all of them the path integral formulation will be stated, however in most of them an explicit solution in terms of the spectral expansion can be given only on a formal level. What can be stated in all cases, are the propagator and the corresponding Green function, respectively, depending on the invariant distance which is a coordinate independent quantity. This property gives rise to numerous identities connecting the corresponding path integral representations and propagators in various coordinate systems with each other.