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1.
Effects of the Hf content in Co-Hf-Ta thin films on the microstructure and magnetic properties were investigated in this study. It was found that appropriate Hf addition can effectively refine the Co grain size. Co grain sizes sharply decreased from 50 nm down to 2.3 nm with increasing the Hf content from 1.02 at.% to 2.81 at.%, leading to the reduced magneto-crystalline anisotropy. The Co-Hf-Ta thin films with small Co grains reveal low anisotropy field, low coercivity, and high resistivity. By optimizing the Hf content, the film with Hf concentration of 2.81 at.% exhibits excellent soft magnetic properties: high saturation magnetization (4πMS ∼ 13.6 kG), and low coercivity (HC ∼ 0.6 Oe). The effective permeability of the film reaches 800 and remains constant up to 1 GHz.  相似文献   

2.
Nanogranular CoFeZrO thin films were successfully prepared by radio frequency reactive magnetron sputtering in O2/Ar atmosphere. The magnetic properties and microstructure were investigated. It is found that the Co17.08Fe49.76Zr16.24O16.91 films show the best soft magnetic properties: magnetic coercivity of 0.3 Oe; anisotropy field of 44.9 Oe; saturation magnetization of 16.8 kG; electrical resistivity of 462.8 μΩ cm. The effective permeability of the films reaches 800 and flattens up to 2 GHz.  相似文献   

3.
High permeability magnetic films can enhance the inductance of thin-film inductors in DC-DC converters. In order to obtain high permeability, the uniaxial anisotropy and coercivity should be as low as possible. This study employed dc reactive magnetron sputtering to fabricate nanocrystalline FeHfN thin films. The influence of the nitrogen flow on the composition, microstructure, and permeability characteristics, as well as magnetic properties was investigated. Increasing the nitrogen content can alter FeHfN films from amorphous-like to crystalline phases. The magnetic properties and permeability depend on variations in the microstructure. With the optimum N2/Ar flow ratio of 4.8% (N2 flow: 1.2 sccm), low anisotropy (HK = 18 Oe), low coercivity (HC = 1.1 Oe) and high permeability (μ′ > 600 at 50 MHz) were obtained for fabrication of a nanocrystalline FeHfN film with a thickness of around 700 nm. Such as-fabricated FeHfN films with a permeability of over 600 should be a promising candidate for high-permeability ferromagnetic material applications.  相似文献   

4.
FeNiN thin films with good soft magnetic properties were synthesized on Si (1 0 0) substrates at 473 K by RF magnetron sputtering. The dependence of phase structure and magnetic properties on nitrogen partial pressure, nickel concentrations, film thickness and substrate temperature were systematically investigated. The phase evolution from α-(Fe,Ni)N to ξ-(Fe,Ni)2N with increase of nitrogen partial pressure was seen. The addition of Ni caused FeNiN films to turn from BCC structure to FCC structure. Clear reproducible striped domains appeared at the film surfaces when XNi=19.6%, which is explained by the high enough perpendicular anisotropy and the small stress in the film. All films show smooth surfaces and good soft magnetic properties compared to corresponding FeN compounds. The magnetic properties depended dramatically on the phase structure. Optimum soft magnetic properties with HC of <1 Oe are obtained between 5.0%?XNi?10.0%.  相似文献   

5.
FeNi thin films were fabricated by radio frequency magnetron sputtering on Si(1 1 1). Dynamic properties at remanence of the films were systematically investigated in a wide frequency range from 100 MHz to 5 GHz. The results show that both thickness of FeNi films and oblique angle have important effects on the magnetic properties of the films, the magnetic resonant frequency of the films can also be adjusted by the two factors. The in-plane uniaxial magnetic anisotropy field can be adjusted from 82 Oe to 220 Oe by increasing the oblique angle. As a consequence, the magnetic resonant frequency of the films increased from 2.7 GHz to 4.2 GHz.  相似文献   

6.
Bilayered Fe65Co35 (=FeCo)/Co films were prepared by facing targets sputtering with 4πMs∼24 kg. The soft magnetic properties of FeCo films were induced by a Co underlayer. Hc decreased rapidly when the Co underlayer was 2 nm or more. The films showed well-defined in-plane uniaxial anisotropy with the typical values of Hce=10 Oe and Hch=3 Oe, respectively. High frequency characteristics of the films show the films can work at 0.8 GHz with real permeability as high as 250.  相似文献   

7.
NiZn ferrite films with well-defined spinel crystal structure were in situ fabricated by radio frequency magnetron sputtering at room temperature. The microstructures and static magnetic properties of the films’ dependence on the partial pressure ratio of argon to oxygen gas were investigated. Scanning electron microscope images indicated that all the films consisted of particles nanocrystalline in nature and the sizes increase as the ratio increases in the range of 10-25 nm. A large saturation magnetization (237.2 emu/cm3) and a minimum of coercivity (68 Oe) were obtained when the ferrite film was deposited in the ratio of 4:1. The complex permeability values (μ = μ−iμ″) of the film were measured at frequency up to 5 GHz. It was shown that the film exhibited a large real part of permeability μ′ of 18 and a very high resonance frequency fr of 1.2 GHz. The results suggested that the NiZn ferrite film as-deposited in the ratio of 4:1 may be promised as magnetic medium in the application of integrated circuits operating at microwave frequencies.  相似文献   

8.
Microstructure, static magnetic properties and microwave permeability of sputtered FeCo films were examined. Fe60Co40 films (100 nm in thickness) deposited on glass substrates exhibited in-plane isotropy and a large coercivity of 161.1 Oe. When same thickness films were deposited on 2.5 nm Co underlayer, well-defined in-plane anisotropy was formed with an anisotropy field of 65 Oe. The sample had a static initial permeability of about 285, maximum imaginary permeability of 1255 and ferromagnetic resonance frequency of 2.71 GHz. Cross-sectional TEM image revealed that the Co underlayer had induced a columnar grain structure with grain diameter of 10 nm in the FeCo films. In comparison, FeCo films without Co underlayer showed larger grains of 70 nm in diameter with fewer distinct vertical grain boundaries. In addition, the Co underlayer changed the preferred orientation of the FeCo from (1 0 0) to (1 1 0). The improvement in soft magnetic properties and microwave behavior originates from the modification of the film microstructure, which can be well understood by the random anisotropy theory.  相似文献   

9.
Polycrystalline Co2Mn1−xSi (CMS) thin films with Mn-deficiency can grow on different types of substrates such as MgO (1 0 0) single crystal, α-sapphire (0 0 0 1) and Si coated with SiO2 either by using V or Ta/Cu as the seed layer. The magnetic property, especially the coercivity of the CMS thin films strongly depends on the crystalline structure and microstructure of the CMS thin film, hence it is affected by the substrate and also the seed layer. Very soft CMS thin film with coercivity of about 20 Oe has been obtained when MgO (1 0 0) is used as the substrate. Magnetic tunnel junctions (with MR ratio of about 9%–18%) by utilizing the CMS as one of ferromagnetic electrodes have been successfully fabricated. The degradation of the magnetoresistive effect of the MTJ after magnetic annealing is attributed to the diffusion of the Mn-atoms into the tunnel barrier during the annealing process.  相似文献   

10.
In this paper, a novel amorphous Co-Pt-P thin film fabricated by DC sputtering was proposed for soft underlayer in perpendicular recording. The structural and magnetic properties of the films were investigated by X-ray diffraction (XRD) and vibrating sample magnetometer (VSM), respectively. The results show that maximum permeability of Co-12 at%Pt-P films sputtered at room temperature (RT) is quite low when the phosphorus content is less than 5.2 at%, but Co-12 at%Pt-7 at%P thin film, is of amorphous state and has a high permeability of ∼500. The excellent soft magnetic properties of maximum permeability (500), coercivity (18 Oe) and saturation magnetization (760 emu/cm3) indicate that the amorphous Co-12 at%Pt-7 at%P film is expected to be a promising soft magnetic underlayer of perpendicular magnetic recording. The Co-12 at%Pt-7 at%P thin film is gradually crystallized with increasing substrate temperatures. The crystallization temperature of the Co-12 at%Pt-7 at%P thin film is ∼200 °C.  相似文献   

11.
In this work, the thickness effect of Fe52Co48 soft magnetic films with in-plane anisotropy on static and microwave magnetic properties was investigated. The hysteresis loop results indicated that the static in-plane uniaxial anisotropy field increased from almost 0-60 Oe with increasing film thickness from 100 to 540 nm and well-defined in-plane uniaxial magnetic anisotropy can be obtained as the thickness reached 540 nm or larger. Based on Landau-Lifshitz-Gilbert (LLG) equation, the microwave complex permeability spectra were analyzed and well fitted. The LLG curve-fitting results indicated that the initial permeability increased from 106 to 142 and the resonant frequency was shifted from 4.95 to 4.29 GHz as the film thickness was varied from 540 to 1500 nm. Moreover, it was found that there was a discrepancy between the static and the dynamically determined anisotropy field, which can be explained by introducing an additional effective isotropic ripple field. The decreased ripple field was suggested to result in a significant decrease of damping coefficient from 0.109 to 0.038.  相似文献   

12.
A series of (Fe65Co35±2)x-(SiO1.7±0.2)1−x nano-granular films with various metal volume fractions (x) were fabricated by rf sputtering. In a wide range, excellent soft magnetic properties have been achieved. In the x range from 0.7 to 0.48, the films exhibit small coercivity Hc not exceeding 4 Oe and high electrical resistivity ρ up to 1.15 × 104 μΩ cm. And a minimum Hc value of 1.65 Oe was obtained for the sample of x = 0.57 with ρ = 2.86 × 103 μΩ cm. At a frequency lower than 2.0 GHz, the real part μ′ of complex permeability of this sample is more than 170 and the FMR frequency is as high as 2.6 GHz, implying a high cut-off frequency for high frequency applications. With decreasing Fe65Co35±2 volume fraction, the resistivity of films increases remarkably and the grain size decreases obviously. At the same time, the coercivity Hc decreases with grain size decreasing, which is consistent with the conclusion resulted from random anisotropy model quoted by Herzer. Study on Henkel plots shows that intergranular ferromagnetic exchange coupling exists among grains and is important for realizing soft magnetic properties.  相似文献   

13.
Strontium ferrite particles were firstly prepared by sol-gel method and self-propagating synthesis, and then the polyaniline/strontium ferrite/multiwalled carbon nanotubes composites were synthesized through in situ polymerization approach. Structure, morphology and properties of the composite were characterized by various instruments. XRD analysis shows that the output of PANI increases with the increase of the content of MWCNTs, due to the large surface area of MWCNTs. Because of the coating of PANI, the outer diameter of MWCNTs increases from 10 nm to 20-40 nm. The electrical conductivity of the composites increases with the amount increase of MWCNTs and reaches 7.2196 S/cm in the presence of 2 g MWCNTs. The coercive force of the composites prepared with 2 g MWCNTs is 7457.17 Oe, which is much bigger than that of SrFe12O19 particles 6145.6 Oe, however, both the saturation magnetization and the remanent magnetization of the composite become much smaller than those of SrFe12O19 particles. The electromagnetic properties of the composite are excellent in the frequency range of 2-18 GHz, which mainly depend on the dielectric loss in the range of 2-9 GHz, and mainly on the magnetic loss in the range of 9-18 GHz.  相似文献   

14.
Nanostructured single phase strontium hexaferrite, SrFe12O19, thin films have been synthesized on the (100) silicon substrate using a spin coating sol–gel process. The thin films with various Fe/Sr molar ratios of 8–12 were calcined at different temperatures from 500 to 900 °C. The composition, microstructure and magnetic properties of the SrFe12O19 thin films were characterized using Fourier transform infrared spectroscopy, differential thermal analysis, thermogravimetry, X-ray diffraction, electron microscopy and vibrating sample magnetometer. The results showed that the optimum molar ratio for Fe/Sr was 10 at which the lowest calcination temperature to obtain the single phase strontium hexaferrite thin film was 800 °C. The magnetic measurements revealed that the sample with Fe/Sr molar ratio of 10, exhibited higher saturation magnetization (267.5 emu/cm3) and coercivity (4290 Oe) in comparison with those synthesized under other Fe/Sr molar ratios.  相似文献   

15.
The soft magnetic properties of the substrate/[non-buffer or buffer Ta]/[permalloy (Ni80Fe20) or conetic (Ni77Fe14Cu5Mo4)]/Ta prepared by ion beam sputter deposition are investigated. The value of the surface resistance of the conetic film is twice as high as that of the permalloy film. The value of the coercivity and magnetic susceptibility of the conetic film decreased by 25% and doubled relative to that of the permalloy film. The coercivity, with a value of 0.12 Oe, and the magnetic susceptibility, with a value of 1.2×104 for the conetic film, are suitable for soft magnetic biosensor applications.  相似文献   

16.
An in-plane magnetic anisotropy of FePt film is obtained in the MgO 5 nm/FePt t nm/MgO 5 nm films (where t=5, 10 and 20 nm). Both the in-plane coercivity (Hc∥) and the perpendicular magnetic anisotropy of FePt films are increased when introducing an Ag-capped layer instead of MgO-capped layer. An in-plane coercivity is 3154 Oe for the MgO 5 nm/FePt 10 nm/MgO 5 nm film, and it can be increased to 4846 Oe as a 5 nm Ag-capped layer instead of MgO-capped layer. The transmission electron microscopy (TEM)-energy disperse spectrum (EDS) analysis shows that the Ag mainly distributed at the grain boundary of FePt, that leads the increase of the grain boundary energy, which will enhance coercivity and perpendicular magnetic anisotropy of FePt film.  相似文献   

17.
We present a systematic study on magnetic properties of co-sputtered Tb-Co2FeAl (TCFA) films. The TCFA films with suitable Tb content have perpendicular magnetic anisotropy (PMA). The PMA deteriorates with both decreasing film thickness and high temperature annealing. Under a certain thickness, the perpendicular coercivity of the TCFA films with PMA can be reduced down to 60 Oe, which is comparable with normal soft ferromagnets. After annealing at 100 °C, a large remanence squareness of 0.95 is observed in the TCFA film with 33% Tb and a thickness of 30 nm.  相似文献   

18.
The magnetic properties of strontium hexaferrite (SrFe12O19) films fabricated by pulsed laser deposition on the Si(100) substrate with Pt(111) underlayer have been studied as a function of film thickness (50–700 nm). X-ray diffraction patterns confirm that the films have c-axis perpendicular orientation. The coercivities in perpendicular direction are higher than those for in-plane direction which indicates the films have perpendicular magnetic anisotropy. The coercivity was found to decrease with increasing of thickness, due to the increasing of the grain size and relaxation in lattice strain. The 200 nm thick film exhibits hexagonal shape grains of 150 nm and optimum magnetic properties of Ms=298 emu/cm3 and Hc=2540 Oe.  相似文献   

19.
The deposition monolayers of L10 FePt nanoparticles via an electrospraying method and the magnetic properties of the deposited film were studied. FePt nanoparticles in a size of around 2.5 nm in diameter, prepared by a liquid process, were used as a precursor. The size of the deposited particles can be controlled up to 35 nm by controlling the sprayed droplet size that is formed by adjusting the precursor concentration and the precursor flow rate. The droplets were heated in a tubular furnace at a temperature of up to 900 °C to remove all organic compounds and to transform the FePt particles from disordered face centered cubic to an ordered FCT phase. Finally, the particles were deposited in the form of a monolayer film on a silicon substrate by electrostatic force and characterized by scanning electron microscopy. The monolayer of particles was obtained by the high charge on particles obtained during the electrospraying process. The magnetic properties of the monolayer were investigated by magneto-optic Kerr effect measurements. Coercivity up to 650 Oe for a film consisting of 35 nm L10 FePt nanoparticles was observed after heat treatment at a temperature of 800 °C.  相似文献   

20.
This paper investigates structural, microstructural and magnetic properties of amorphous/nanocrystalline Ni58Fe12Zr10Hf10B10 powders prepared by high energy milling. Ball milling of Ni, Fe, Zr, Hf and B leads to alloying of the element powders at 120 h. The results show that at 190 h the amorphous content is at the highest level and the grain size is about 2 nm. The magnetic measurements reveal that the coercivity and the saturation magnetization reach about 20 Oe and 30 emu/g at 190 h and become approximately 5 Oe and 40 emu/g after a suitable heat treatment, respectively.  相似文献   

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