Effect of Ar/H2 and Kr/H2 mixtures as discharge gas on the ion intensity in dc glow discharge mass spectrometry

 In dc glow discharge mass spectrometry, the addition of small amounts of H₂ to pure Ar as discharge gas has greatly increased the ion intensities of elements compared with the conventional method using pure Ar. This phenomenon was also observed for the addition of H₂ to pure Kr. The reason for the increase of the ion intensities of elements was studied by using a Kr gas mixture containing 0.2% (v/v) H₂. The ion intensities of the elements P, Se and As (whose first ionization potentials are higher than the energy levels of the excited state of Kr) did not increase even if the Kr/H₂ gas mixture was used. The results show that the addition of H₂ significantly contributed to increasing the number of metastable argon or krypton atoms (Penning ionization). Received: 4 November 1995/Revised: 5 January 1996/Accepted: 10 January 1996     

H2/Ar direct current glow discharge mass spectrometry at constant voltage and pressure

The addition of hydrogen to a direct current (dc) - argon glow discharge (GD) coupled to a time of flight mass spectrometer has been studied using a fixed voltage between the electrodes and a fixed discharge pressure. Hydrogen contents investigated were 0.5%, 1% and 10% v/v in the argon discharge and the samples under study consisted of a copper-base, a nickel-base and an iron-base homogeneous materials. Also, the in-depth profile analysis of a tin plate was investigated. Results have shown that hydrogen addition gives rise to significant changes in the slope of the linear relationship between the electrical current and the discharge voltage. Clearly, the electrical resistance of the discharge at the typical operation voltages in the interval 600–1000 V increases with hydrogen added to pure argon.A decrease of the sputtering rates was observed the higher the hydrogen concentrations. Besides, the “reduced sputtering rates”, i.e. the sputtering rates divided by the corresponding electrical current, were also lower for the H₂/Ar discharges than for pure argon. However, the analytical ion signals observed using discharge voltages higher than 900 V turned out to be higher in a 0.5% H₂/Ar discharge than in pure argon for the copper and nickel materials. Besides, for the three samples investigated the ion yields were from 1.5 up to 3 times higher in 0.5% H₂/Ar discharges as compared to the pure argon.Finally, the effect of 0.5% H₂ addition to the Ar discharge on the in-depth profile of a tin plate has also been investigated. As compared to the use of a pure Ar GD, higher sensitivity for major and minor components of the coating were observed without loss of the relative depth resolution achieved.     

A contribution to the study of matrix effects in the analysis of solid samples by D. C. glow discharge mass spectrometry

Relative Sensitivity Factors (RSF) for the analysis of 22 elements by glow discharge mass spectrometry have been determined from the multiple determination of 19 reference materials representing steels, Ni-based heat resisting alloys, copper, aluminium, molybdenum and indium by using an Ar/0.2 vol. % H₂ mixture as a filler gas. The measurements were made by using the VG 9000 glow discharge mass spectrometer. For all the materials analyzed, the relative variations of these factors were reduced by more than a factor of 2 when the Ar/H₂ mixture was substituted to the pure argon. In addition, the proposed technique greatly decreases the matrix effects, thus allowing the determination of the elemental composition of metallic samples without needing to use standard reference materials.     

The vibrational relaxation of H2. I. Experimental measurements of the rate of relaxation by H2, He,Ne, Ar,and Kr

The vibrational relaxation of gaseous H₂ in mixtures with He, Ne, Ar, and Kr was studied by the laser Schlieren technique in incidents shock waves at 1350–3000 K. From the results of 155 experiments the following standard relaxation times for self-relaxation of H₂ and relaxation of H₂ by He, Ne, Ar and Kr were obtained:

pτ is in atm s, and the qouted uncertainties are standard deviations. The results for H₂/H₂ and H₂/Ar are in very good agreement with previous results of Kiefer and Lutz, and the extrapolated for H₂/H₂, H₂/He and H₂/Ar agree very well with low temperature data Ducuing.The linear mixture rule for a additivity of relaxation rates was found to hold, to within experimental accuracy, for the mixtures studied in the present work.     

Spatially resolved spectroscopic measurements of a dielectric barrier discharge plasma jet applicable for soft ionization

An atmospheric pressure microplasma ionization source based on a dielectric barrier discharge with a helium plasma cone outside the electrode region has been developed for liquid chromatography/mass spectrometry and as ionization source for ion mobility spectrometry. It turned out that dielectric barrier discharge ionization could be regarded as a soft ionization technique characterized by only minor fragmentation similar to atmospheric pressure chemical ionization (APCI). Mainly protonated molecules were detected. In order to characterize the soft ionization mechanism spatially resolved optical emission spectrometry (OES) measurements were performed on plasma jets burning either in He or in Ar. Besides to spatial intensity distributions of noble gas spectral lines, in both cases a special attention was paid to lines of N₂⁺ and N₂. The obtained mapping of the plasma jet shows very different number density distributions of relevant excited species. In the case of helium plasma jet, strong N₂⁺ lines were observed. In contrast to that, the intensities of N₂ lines in Ar were below the present detection limit. The positions of N₂⁺ and N₂ distribution maxima in helium indicate the regions where the highest efficiency of the water ionization and the protonation process is expected.     

Ion/Molecule reactions in SiH4/H2S and GeH4/H2S mixtures

The gas phase ion chemistry of silane/hydrogen sulfide and germane/hydrogen sulfide mixtures was studied by ion trap mass spectrometry (ITMS), in both positive and negative ionization mode. In positive ionization, formation of X/S (X = Si, Ge) mixed ions mainly takes place via reactions of silane or germane ions with H₂S, through condensation followed by dehydrogenation. This is particularly evident in the system with silane. On the other side, reactions of H_nS₂⁺ ions with XH₄ (X = Si, Ge) invariably lead to formation of a single X? S bond. In negative ionization, a more limited number of mixed ion species is detected, but their overall abundance reaches appreciable values, especially in the SiH₄/H₂S system. Present results clearly indicate that ion processes play an important role in formation and growth of clusters eventually leading to deposition of amorphous solids in chemical vapor deposition (CVD) processes. Copyright © 2009 John Wiley & Sons, Ltd.     

Thermodynamics of H/D Isotope Effects in Urea Hydration and Structural Features of Urea Aqueous Solutions at Various Temperatures: III.1 Solubility of Argon and Krypton at 101325 Pa in the Systems H2O-CO(NH2)2 and D2O-CO(ND2)2

The thermodynamic characteristics of hydration of Ar and Kr were calculated from experimental data on the solubility of Ar and Kr in solutions of urea in H₂O and of deuterourea in D₂O at 101325 Pa and 278.15-318.15 K. Solutions of Ar and Kr significantly differ in the value of thermodynamic effects accompanying dissolution.     

A structural investigation of [C6H6]2+ and [C6H6]+˙ ions involved in charge exchange reactions

Mass-analysed ion kinetic energy spectra for collisional activation (CA) of [C₆H₆]⁺˙ formed via electron capture by [C₆H₆]²⁺ ions in collision with neutral benzene molecules have been compared for the C₆H₆ isomers benzene, 1,5-hexadiyne and 2,4-hexadiyne. Comparisons of fragment abundance and total CA fragment yields were also made for [C₆H₆]⁺˙ ions generated by electron ionization (EI). CA conditions of ion velocity and collision gas pressure were identical in these comparisons. In general the fragment abundance patterns for the ions formed by charge exchange were very similar to those for singly charged benzene ions generated by EI. However, significant variations in CA fragment yield (the ratio of the total CA fragment ion abundance to the abundance of the incident unfragmented ions) were observed. It is not clear from the results whether these variations reflect structurally different ions or ions of different internal energies. The CA spectra of [C₆H₆]⁺˙ ions derived from charge exchange reactions between the benzene dication and the target gases He, Ne, Ar, Kr and Xe have also been recorded and, once again, very similar fragment abundance patterns were observed along with large variations in total CA fragment yields. Charge exchange efficiency measurements are reported for reactions between the benzene dication and the targets He, Ne, Ar, Kr, Xe and C₆H₆ (benzene) and also for the doubly charged ions derived from the linear C₆H₆ isomers. In the latter case Xe and benzene targets were used. The energetics and efficiency measurements for the former reactions suggest that for targets such as He and Ne the processes probably involve excited states of the doubly charged ions. The efficiencies measured for the latter reactions were distinctly different for the three C₆H₆ isomers and may indicate a strong dependence of charge exchange cross-section on doubly charged ion structure.     

Formation of Negative Hydrogen Ions in a Ne–H2 Hollow Cathode Discharge

The formation of negative hydrogen ions in a conventional hollow cathode discharge has been investigated. A mixture of Ne and H₂ proved to be more advantageous compared to pure hydrogen. The study has been performed by solving the electron Boltzmann equation, coupled with a system of balance equations for neon and hydrogen neutral and charged particles. The vibrational distribution function of hydrogen has been calculated. Our calculations show unusually high population of vibrationally excited hydrogen molecules in a Ne–H₂ mixture, which explains the high density of negative hydrogen ions under optimal conditions (total gas pressure of few Torr, hydrogen number mole fraction of 1–10% and discharge current of 10–100 mA). Line intensities originating from highly excited neon states vs. hydrogen pressure have been calculated and a comparison with existing experimental results has been made.     

Enhancement of intensities in glow discharge mass spectrometry by using mixtures of argon and helium as plasma gases

Glow discharge mass spectrometry (GD-MS) is an excellent technique for fast multi-element analysis of pure metals. In addition to metallic impurities, non-metals also can be determined. However, the sensitivity for these elements can be limited due to their high first ionization potentials. Elements with a first ionization potential close to or higher than that of argon, which is commonly used as discharge gas in GD-MS analysis, are ionized with small efficiency only. To improve the sensitivity of GD-MS for such elements, the influence of different glow-discharge parameters on the peak intensity of carbon, chlorine, fluorine, nitrogen, phosphorus, oxygen, and sulfur in pure copper samples was investigated with an Element GD (Thermo Fisher Scientific) GD-MS. Discharge current, discharge gas flow, and discharge gas composition, the last of which turned out to have the greatest effect on the measured intensities, were varied. Argon–helium mixtures were used because of the very high potential of He to ionize other elements, especially in terms of the high energy level of its metastable states. The effect of different Ar–He compositions on the peak intensity of various impurities in pure copper was studied. With Ar–He mixtures, excellent signal enhancements were achieved in comparison with use of pure Ar as discharge gas. In this way, traceable linear calibration curves for phosphorus and sulfur down to the μg kg⁻¹ range could be established with high sensitivity and very good linearity using pressed powder samples for calibration. This was not possible when pure argon alone was used as discharge gas. This contribution is based on a presentation given at the Colloquium for Analytical Atomic Spectroscopy (CANAS ’07) held March 18–21, 2007 in Constance, Germany.     

Gas-phase ion-molecule bimolecular and clustering reactions in dilute solutions of acetonitrile in xenon,krypton, argon,neon and helium

Gas-phase bimolecular and clustering reactions of acetonitrile in Xe, Kr, Ar, Ne and He were studied at high chemical ionization pressures in the new coaxial ion source at Auburn. With electron energies near the ionization threshold, the mass spectra are exceedingly simple and are comprised of [CH₄CH]⁺ and clusters of [CH₄CN]⁺ with various ligands such as H₂O and CH₃CN. At higher electron energies many other peaks appear. The intensities of the new peaks depend upon the ionization potential of the charge transfer gas, the ionizing electron energy and the ion source conditions, and are due to reactions of fragment ions. Residence time distributions at electron energies above the ionization threshold (∼ 30 eV) demonstrate that two molecular structures are present in the ion beam at m/z 42, one presumably is protonated acetonitrile ([CH₃CNH]⁺) while the evidence indicates that the second species does not contain acidic hydrogens. With ionizing electron energies near threshold (∼ 10. 5 eV) only one structure is observed. Studies with electron energies near the ionization threshold under high-pressure chemical ionization conditions result in greatly simplified mass spectra and are possible only because of the coaxial geometry of the ion source.     

Determinations of Intermediate Neutral Species in Hydrocarbon Discharge Plasma

This work reports laser ionization combined with Time-Of-Flight (TOF) mass spectrometry investigation on intermediate species in the hydrocarbon plasma of atmospheric-pressure fast-flow pulsed dc-discharge. All neutral intermediate species including transient radicals from benzene/Ar discharge have been characterized by a molecular beam sampling combined with TOF mass spectrometry. This shows that with a hydrocarbon gas mixture of 0.3% C₆H₆ in Ar discharge the intermediate species consist of simple radicals (such as C₂, C₅H₅, C₇H₇) and polycyclic organic molecules (C₁₀H₈, C₁₃H₁₀, C₁₄H₁₀). Theoretical studies on total energies and ionization potentials of the intermediate species have been carried out using the hybrid density functional theory. Effect of the ionization potential on mass spectral intensity has been discussed. Based on the observed data, the possible major neutral reaction channels of the plasma chemistry have been discussed. The developed experimental method has implications in volatile organic compounds removing and impurities diagnosis in Tokamak edge-plasma.     

Modeling of H2 and H2/CH4 Moderate-Pressure Microwave Plasma Used for Diamond Deposition

One-dimensional transport models of moderate-pressure H ₂ and H ₂ /CH ₄ plasmas obtained in a diamond deposition microwave reactor are presented. These models describe the plasma as a thermochemically nonequilibrium flow with three different energy modes. The solution of the one-dimensional plasma transport equations enabled the estimation of plasma species concentrations and temperatures on the axis of the reactor. As far as pure H ₂ plasmas are concerned, results showed that the model predictions of gas and vibration temperatures are in good agreement with experimental measurements. The model also yields a relatively good qualitative prediction of the variations of H-atom mole fraction with the power density absorbed by the plasma. The results obtained for H ₂ /CH ₄ discharges showed that the model prediction on the variations of H-atom mole fraction with methane percentage in the discharge is in good qualitative agreement with experimental results. They also showed that methane is rapidly converted to acetylene before reaching the discharge zone. The concentrations of neutral hydrocarbon species in the reactor are mainly governed by thermal chemistry. The addition of methane strongly affects the ionization kinetics of the plasma. Three major ions are generally obtained in H ₂ /CH ₄ plasmas: C ₂ H ₂ ⁺ , C ₂ H ₃ ⁺ , and C ₂ H ₅ ⁺ . The relative predominance of these ions depends on the considered plasma region and on the discharge conditions. The ionic species concentrations are also mainly governed by chemistry, except very near the substrate surface. Finally the use of this transport model along with the surface chemistry model of Goodwin ⁽¹⁾ enabled us to estimate the diamond growth rate for several discharge conditions.     

Simple and quick rotational temperature determination in N2-containing discharge plasma

A quick spectroscopic method of rotational temperature determination based on the low-resolution emission spectrum of the N₂ (v=2v=()) vibronic band profile of the second positive system iras developed. The new method of molecular gas temperature determination was used in an rf glow discharge excited in N₂ and N₂ + Ar + B₂ H₆ gas mixture at u pressure range 500–13011 Pa. This method of molecular gas temperature measurement is applicable to nonisothermic plasmas used in plasma-chemical reactors.     

Effects of a controlled N2 and O2 addition to Ar on the analytical parameters of the GD-OES

The influence of the controlled addition of N₂ and of O₂ to Ar on the analytical parameters of a dc glow discharge has been investigated for bulk samples of the pure metals Al, Ti, Fe, Ni, Cu, and Ag. The constant voltage discharge mode at 1000 V was applied with a mean power of about 1 W/mm². The N₂ and O₂ concentrations in the discharge gas Ar were varied in the range 0–3 mass-%, corresponding to a partial pressure of about 4 · 10^–3 hPa. The general effect of the gaseous addition is the decrease of the sputtering rate with an increasing concentration of N₂ or O₂. Atomic processes, which might be responsible for the observed effects, are discussed.     

Calculation of the hyperfine spectrum for H2Ne,H2Ar,H2Kr dimers.

The weakly bound dimers H₂Ne, Ar, Kr are treated such that the H₂, rotation (quantum number j) remains unperturbed except for orientational effects. The orientation of the ortho H₂(j = 1) is mainly influenced by the anisotropic forces between the dimer constituents. We develop a method which allows to extract from a measured hyperfine dimer transition the value of a simple molecular parameter containing mainly the strength of the anisotropic interaction sandwiched between the dimer-stretch vibrational eigenfunctions. An analytic expression is derived permitting an easy comparison between measurements and results from simple model potentials. In addition, where necessary due to the existence of quasi-bound states, the influence of continuum states can be properly taken into account, by our method.     

Relative sensitivity factors in direct current glow discharge mass spectrometry using Kr and Xe gas — Estimation of the role of Penning ionization

Relative sensitivity factors (RSF) (Fe=1) were determined for steel, aluminium and copper standard samples by direct current glow discharge mass spectrometry using Kr and Xe as discharge gas. In general, the RSF values in Kr and Xe were higher than in Ar; however for S and P in Kr gas and P, As and Se in Xe gas they were considerably lower. This decrease is related to the relative importance of the Penning ionization process in overall ionization of the sputtered species. The results showed the percentage of Penning ionization to account for 75.6–82.0% for Se, As and P and 64.2% for S.     

Dry etching of InGaP and AlInP in CH4/H2/Ar

Electron cyclotron resonance (ECR) plasma etching with additional rf-biasing produces etch rates 2,500 A/min for InGaP and AlInP in CH₄/H₂/Ar. These rates are an order of magnitude or much higher than for reactive ion etching conditions (RIE) carried out in the same reactor. N₂ addition to CH₄/H₂/Ar can enhance the InGaP etch rates at low flow rates, while at higher concentrations it provides an etch-stop reaction. The InGaP and AlInP etched under ECR conditions have somewhat rougher morphologies and different stoichiometries up to 200 Å from the sur face relative to the RIE samples.     

Comparative studies on excitation of nickel ionic lines between argon and krypton glow discharge plasmas

The emission characteristics of nickel ionic lines in a glow discharge plasma are investigated when argon or krypton was employed as the plasma gas. Large difference in the relative intensities of nickel ionic lines which are assigned to the 3d⁸4p–3d⁸4s transition is observed between the krypton plasma and the argon plasma. Different intense Ni II lines appear in the krypton spectrum and in the argon spectrum, such as the Ni II 231.601 nm for Kr and the Ni II 230.009 nm for Ar. The excitation energy of these Ni II emission lines can give a key in considering their excitation mechanisms. The explanation for these experimental results is that charge-transfer collisions between nickel atom and the plasma gas ion play a major role in exciting the 3d⁸4p excited levels of nickel ion. The conditions for energy resonance in the charge-transfer collision determine particular energy levels having much larger population; for example, the 3d⁸4p ⁴D_7/2 level (6.39 eV) for Kr and the 3d⁸4p ⁴P_5/2 level (8.25 eV) for Ar.     

Mechanism of PtIV Sonochemical Reduction in Formic Acid Media and Pure Water

Sonochemical synthesis of platinum nanoparticles (Pt NPs) in formic acid solutions and pure water was investigated using a 20 kHz ultrasonic irradiation. The obtained results gave new insights on the underneath Pt^IV reduction mechanism in formic acid media under argon and in pure water under Ar/CO atmosphere. It was shown that in pure water sonochemical reduction of platinum ions occurs by hydrogen issued from homolytic water molecule split. Pt^IV ion reduction appears to be a very slow process under argon atmosphere in pure water due to formation of oxidizing species like OH radicals and H₂O₂ leading to reoxidation of intermediate Pt^II ions. Sonochemical reduction is accelerated manifold in the presence of formic acid or Ar/CO gas mixture. Solution and gas‐phase analyses reveal that both CO and HCOOH act as OH^. radical scavenger and reducing agent under ultrasonic irradiation. Their ability to reduce platinum ions at room temperature is enhanced due to the local heating in the liquid shell surround the cavitation bubble. An innovative synthesis route for monodispersed Pt NPs in pure water without any templates or capping agents in the presence of Ar/CO gas mixture is then proposed. Obtained Pt NPs within the range of 2–3 nm exhibited a strong stability towards sedimentation in water. Since Ar/CO atmosphere is the only restriction of the process, this procedure can be applied in various media and is also compatible with a large array of experimental conditions.