基于氢原子碰撞辐射模型的发射光谱法诊断电子密度

基于碰撞辐射模型,利用氢原子的巴尔末线比对HUST射频负氢离子源等离子体电子密度进行诊断。首先针对HUST离子源等离子体的放电条件,建立了综合考虑氢原子直接激发和氢分子解离激发机制的碰撞辐射模型。基于建立的模型,利用氢原子的巴尔末线比来诊断电子密度。进一步分析了不同的氢原子分子密度比对电子密度诊断的影响,结果表明当电子温度较高,氢分子的解离度较低的等离子体放电状态下,必须同时考虑氢原子直接激发和氢分子解离激发对激发态氢原子的贡献。     

采用发射光谱和朗缪尔探针诊断低温低压氢等离子体

 使用发射光谱诊断法和Langmuir探针诊断法,测量了螺旋波激发等离子体化学气相沉积装置中产生的氢等离子体的发射光谱和电流-电压曲线。运用日冕模型和Druyvestey方法,对不同放电参数条件下激发态氢原子密度﹑等离子体密度及电子能量分布的变化规律进行了研究。结果表明：激发态氢原子密度随射频功率增大而增大,随工作气压的增大先增大,后缓慢下降。等离子体密度随射频功率增大线性增大,随工作气压的增加也是先增大,出现峰值后缓慢下降。电子平均能量随射频功率的变化是先增大,后达到平衡;随着工作气压的增大逐渐减小。两种诊断方法得到的结果基本相符。在低温低压等离子诊断中,两种诊断方法结合使用,可以得到更准确和更多的等离子体信息。     

大气压氩气针-板介质阻挡放电的光电诊断

利用针-板介质阻挡放电装置,在4 mm长的气隙中产生了大气压氩气射流等离子体。利用电学方法实现了对放电电流和电荷量的同时测量,并且对放电脉冲数和放电功率进行了研究;利用发射光谱法对放电等离子体进行了空间分辨测量,并根据ArⅠ696.54 nm的Stark展宽计算了等离子体的电子密度。结果发现:随着外加电压的增加,每个周期内的放电脉冲数增加,放电功率也增加。随着针头距离的增加,电子密度由2.94×1015cm-3逐渐减小到2.28×1015cm-3。实验结果表明:电场强度对放电脉冲数和电子密度的空间分布起重要作用。     

液相隔膜辉光放电等离子体自由基发射光谱研究

为了更好了解液相隔膜辉光放电等离子体引发的化学反应机理,运用发射光谱法研究了稀硫酸溶液隔膜辉光放电等离子体产生的自由基,估算了电子温度与电子密度。结果表明：当电压超过700 V时,观察到了羟基自由基和氢原子的发射光谱;当电压超过750 V时,除了羟基自由基和氢原子外,还观察到了氧原子的发射光谱;这些自由基的发射强度随电压升高而升高;稀硫酸溶液隔膜辉光放电等离子体的平均电子温度与平均电子密度分别为1.3×104 K与7.8×1017 cm-3。     

金属氢的高压合成机理

 从氢原子间及氢分子间的相互作用入手，提出了固体氢中氢分子在高压作用下解离为氢原子，并以氢原子相互结合成金属氢的微观转化过程的机理。用这样的转化机理，可以解释毛河光等关于固体氢的拉曼光谱频率随高压变化规律的实验结果。     

螺旋波激发氢等离子体光谱诊断

 利用螺旋波等离子体化学气相沉积(HWP-CVD)技术,以氢气为反应气体产生等离子体。通过采集氢的可见到紫外发射光谱,对等离子体进行了原位诊断,由氢Balmer系分析得到了不同实验参数对激发态氢原子相对密度的影响,通过对Fulcher带的分析,得到实验参数对氢振动温度的影响。结果表明：低压氢等离子体状态可借用日冕模型来诊断;激发态氢原子密度随入射功率增加而增加,随压强增加而减少,氢分子振动温度随压强增加先增大后减小;电子温度和电子密度是低压氢等离子体状态变化的关键因素。     

螺旋波激发氢等离子体光谱诊断

利用一套螺旋波激发等离子体化学气相沉积（HWP—CVD）发生装置及发射光谱采集装置，原位诊断了不同入射功率、气压、氢气流量下氢等离子体光谱，研究了激发态氢原子的变化情况、氢分子振动温度的变化和激发态氢分子的相对分布。结果表明：     

Langmuir探针诊断低压氢等离子体电子密度与温度

为研究实验参数对螺旋波诱导的低压氢等离子体状态的影响,用Langmuir探针对等离子体伏安特性曲线进行了原位诊断,采用双曲正切函数的指数变换模型拟合曲线,根据Druyvesteyn方法得到状态参数电子密度、有效电子温度和电子能量几率函数,分析了它们随实验参数的变化规律。结果表明:射频输入功率、气压和约束磁场对等离子体状态有较大影响。随着射频射入功率增大,放电模式发生转变,电子密度跳跃增长;随着气压增大,电子密度先增大后减小,1.5 Pa为最佳电离气压,随约束磁场的增强呈线性增长;有效电子温度随功率和气压的增大而下降,随约束磁场的增强线性降低,电子能量几率函数曲线峰位和高能部分都向低能移动,与有效电子温度变化规律吻合。     

高气压微波氢等离子体发射光谱诊断

在2.45GHz,800W级的高气压微波等离子体放电系统中,通过测量不同微波功率和放电气压下氢等离子体的Balmer线系的发射光谱,从测量的谱线总展宽中卷积去掉具有高斯线形的Doppler展宽和仪器展宽得到谱线的Stark展宽,并通过Stark展宽测量氢等离子体的电子数密度和电场强度。结果表明:等离子体的电子数密度和电场强度随着放电气压的升高都是先增大后减小,随着微波功率的增加呈现逐渐增大的趋势。微波功率为800W时,气压在25kPa时电子数密度和电场强度都达到最大值,等离子体的电子数密度和内部的电场强度分别为3.55×1012cm-3及4.01kV/cm。     

含锰钢表面氢原子/氢分子吸附行为的第一性原理研究

采用基于密度泛函理论的第一性原理方法研究了氢原子和氢分子在纯铁表面和锰原子掺杂表面的吸附与解离行为.研究结果表明,氢原子可在纯铁(001)表面稳定吸附,吸附能按照顶位,桥位和心位依次增强;而溶质原子锰降低了氢原子距离表面的位置并强化了氢原子的吸附行为.氢分子在纯铁表面的吸附解离行为取决于氢分子距离模型表面的初始距离和初始空间构型.氢分子平行于纯铁(001)表面时,距离心位1.2?发生解离,而桥位、顶位均不会发生解离;氢分子垂直放置时,距离桥位0.6?、顶位1.0?发生解离,心位不会发生解离.氢分子平行于锰掺杂纯铁(001)表面时,距离桥位0.6?、顶位0.7?、心位1.2?发生解离;氢分子垂直放置时,距离桥位、心位0.8?发生解离,而顶位放置氢分子不发生解离.归纳可知,锰溶质原子掺杂会增加铁基体表面氢原子和氢分子的吸附作用并促进氢分子发生分解.     

Nitrogen dissociation and its excitation/vibrational temperature with hydrogen admixture in 50 Hz DC discharge

Trace rare gas optical emission spectroscopy (TRG-OES) is carried out to determine the excitation temperature, vibrational temperature, dissociation fraction and nitrogen (N) atom density in 50?Hz active screen cage nitrogen plasma, as a function of discharge parameters (current density and fill pressure) and hydrogen concentrations. The excitation temperature is determined from Ar–I emission lines and is found to increase with hydrogen mixing. In a similar fashion, the vibrational temperature of second positive system is determined and found to have increasing trend with hydrogen addition. The dissociation fraction increases with hydrogen concentration up to 40% H₂ in the nitrogen plasma, so as the nitrogen atom density.     

The Hydrogen Dissociator

A performance analysis is presented for the hydrogen dissociator used in hydrogen masers to provide a beam of atomic hydrogen. An analysis of the discharge characteristics yields relations for electron temperature as a function of vessel size and gas pressure and for plasma density as a function of power input. Also a relation between ion impact energy at the wall and electron temperature is derived. For a typical dissociator (2" diameter, 0.1 Torr hydrogen pressure, and 4 watt input power) these relationships yield an electron temperature of 39,000°K, a plasma density of 1011 cm-3 and an ion impact energy of 20 volts. The dissociation rate is calculated using published cross-sections. Assuming a recombination rate of 4 × 10-3, the analysis yields an atomic hydrogen density of about 1014 cm-3, a degree of dissociation of 2%, and an atomic beam flux of 1.3 × 1018 cm-2 × sec-1 for the example quoted. This beam flux is in good agreement with estimated values for hydrogen masers. A coefficient for performance ? is derived for the hydrogen dissociator, defined as the ratio of atomic beam flux to discharge power consumption. It is shown that ? is a function of the electron temperature and has a maximum at 87,000°K. It is concluded from this analysis that the discharge in presently used hydrogen dissociators is well optimized given the pressure constraints of the system.     

Optical emission spectroscopy of 50 Hz pulsed dc nitrogen–hydrogen plasma in the presence of active screen cage

The N₂-H₂ plasma gas mixture, generated in a 50?Hz pulsed dc discharge system with active screen cage, is characterized by optical emission spectroscopy (OES), as a function of gas pressure, the fractions of hydrogen and current density. The N₂ dissociation degree and N atomic density was measured with actinometery where argon gas is used as actinometer. It was shown that the increase in hydrogen fraction enhances the dissociation of N₂, until the maximum of 40%. The excitation temperature is determined from Ar-I emission line intensities by using the simple Boltzmann plot method. The dissociation fraction and excitation temperature is found to increase with hydrogen mixing in nitrogen plasma.     

低气压长间隙介质阻挡放电的光谱诊断

设计了一种电极间隔为10 cm的介质阻挡放电装置,以氩气为工作气体,在低气压下产生等离子体。采用发射光谱法,研究了放电空腔内等离子体电子温度和电子密度随空间位置的变化规律。等离子体电子温度的变化通过使用Corona模型计算获得,等离子体电子密度的变化通过分析Ar原子750.4 nm谱线强度变化得到。实验发现空腔内不同位置的等离子体电子温度和电子密度是不同的。当测量位置从阴极向阳极移动时,电子温度先略上升而后迅速下降,再缓慢上升;电子密度先缓慢而后迅速地增大。     

圆筒内氢等离子体非定常化学反应羽流场DSMC分析

利用直接模拟Monte Carlo方法研究圆筒侧壁注入氢等离子体羽流场在8×10^-6s内的非定常流动特性.根据Bird的化学反应模型考虑离解-复合反应模型和电荷转移反应模型.在流场中注入H₂、H、金属原子X、H₂⁺和H⁺五种组分,研究离解-复合反应对流场中粒子分布和密度的影响,结果表明离解-复合反应使H₂数密度降低,H数密度增加,说明在流场中H₂的离解反应速率大于H的复合反应速率.加入电荷转移反应后H₂⁺数密度降低,H⁺数密度增加,对其他组分数密度没有显著影响.     

Diagnosis of negative hydrogen ions and rovibrational distribution of H<Subscript>2</Subscript> molecule in non-thermal plasmas

Rovibrational excited hydrogen molecule plays an important role for the production of H^- ions. The correlation between H^- ion density and rovibrational distribution of H₂ molecules has been investigated in dielectric barrier discharge hydrogen plasmas via optical emission spectrometry and molecular beam mass spectrometry. The relative vibrational distribution of molecular hydrogen in the electronic ground state has been determined by the best fitting to the Fulcher-α band emission lines. It is shown that the ratio of the Q_(0-0)(1) to Q_(1-1)(1) line is very suitable and simple for the diagnosis of vibrational temperature in the range of 1500 to 7500 K. At certain discharge conditions (ac 40 kHz, 14 kV), the vibrational temperature decreases from 3600 to 2400 K as the pressure increases from 100 to 200 Pa and the negative ions density near the ground electrode also decreases as the pressure increases. Both the hydrogen ions density and the vibrational temperature increase with the increasing of discharge voltage. It is found that the evolution of negative atomic hydrogen ions density greatly depends on the vibrational temperature.     

使用斯塔克展宽计算大气压射频介质阻挡放电氮气等离子体的电子密度

大气压射频等离子体是近几年发展起来的一种新型非平衡等离子体。以氮气掺杂少量氩气为放电气体,实现了大气压射频介质阻挡放电。利用发射光谱对放电进行在线诊断研究,并分析谱线线型,从中分离出谱线的Stark线型,从而计算出放电通道的电子密度。研究了单个放电通道中电子密度的空间分布并测量了通道同一位置的电子密度随放电输入功率的变化。结果显示,在放电通道中部,当放电输入功率由138W增加至248W,电子密度由4.038×1021 m-3升高至4.75×1021 m-3。     

Sensitive detection of cold cesium molecules formed on Feshbach resonances

We observe the dynamic formation of quasibound Cs2 molecules near Feshbach resonances in a cold sample of atomic cesium. Using an external probe beam, more than 15 weakly coupled molecular states are detected with high sensitivity, whose collisional formation cross sections are as small as sigma=2 x 10(-16) cm(2). By modeling the molecule formation and dissociation processes with rate equations, we conclude that at an atomic density of 10(13) cm(-3) and temperature of 5 microK, more than 5(1)x10(5) Cs2 molecules in a single rovibrational state coexist with 10(8) Cs atoms in our trap.     

Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O_2

Densities of Ar metastable states 1s_5 and 1s_3 are measured by using the tunable diode laser absorption spectroscopy(TDLAS) in Ar and Ar/O2 mixture dual-frequency capacitively coupled plasma(DF-CCP). We investigate the effects of high-frequency(HF, 60 MHz) power, low-frequency(LF, 2 MHz) power, and working pressure on the density of Ar metastable states for three different gas components(0%, 5%, and 10% oxygen mixed in argon). The dependence of Ar metastable state density on the oxygen content is also studied at different working pressures. It is found that densities of Ar metastable states in discharges with different gas components exhibit different behaviors as HF power increases. With the increase of HF power, the metastable density increases rapidly at the initial stage, and then tends to be saturated at a higher HF power. With a small fraction(5% or 10%) of oxygen added in argon plasma, a similar change of the Ar metastable density with HF power can be observed, but the metastable density is saturated at a higher HF power than in the pure argon discharge. In the DF-CCP, the metastable density is found to be higher than in a single frequency discharge, and has weak dependence on LF power. As working pressure increases, the metastable state density first increases and then decreases,and the pressure value, at which the density maximum occurs, decreases with oxygen content increasing. Besides, adding a small fraction of oxygen into argon plasma will significantly dwindle the metastable state density as a result of quenching loss by oxygen molecules.     

Simulation of the process of generation of atomic hydrogen in a gas-discharge cell with a self-heated cathode

This work is devoted to a theoretical simulation of the process of generation of atomic hydrogen in a source depending for its operation on a low-pressure self-sustained discharge in crossed E×H fields (reflected magnetron discharge) with an additional self-heated (hot) cathode made as a rod and located in line with the system. The distribution of the atomic hydrogen density over the volume of the discharge cell and the density atomic hydrogen flux onto the disk cathode have been analytically calculated for the discharge operating pressure and current, the pressure of the working gas, and the induction of the external magnetic field varied over wide ranges. The results of the simulation allow comprehensive analysis of the operation of actual atomic hydrogen sources based on this type of discharge. __________ Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 12, pp. 76–82, December, 2005.