Mass transport in nanofluidic devices

Nanofluidics is a recent appearing research field, introduced in 1995 as an analogue of the field of microfluidics, and has been becoming popular in the past few years. The proximity of the channel dimension, the Debye length, and the size of biomolecules such as DNA and proteins gives the unique features of nanofluidic devices. Of various unique properties of the nanofluidics, mass transport in nanochannel plays determining roles in fundamental reaches and practical applications of nanofluidic device. Thus, much work including numerical and experimental researches has been performed to investigate the mass transport behaviors in nanofluidic devices. This review summarizes the fabrication technologies for nanofluidic devices, the mass transport behaviors in nanochannel, and their applications in bioanalysis. The main focus will be laid on the effects of nanochannel size and surface charge on mass transport including electrokinetic transport of charged analytes, diffusion of electric neutral molecules, ionic current rectification, concentration polarization, nonlinear electrokinetic flow at the micro-nanofluidic interfaces.     

Flexible fabrication and applications of polymer nanochannels and nanoslits

Fluidic devices that employ nanoscale structures (<100 nm in one or two dimensions, slits or channels, respectively) are generating great interest due to the unique properties afforded by this size domain compared to their micro-scale counterparts. Examples of interesting nanoscale phenomena include the ability to preconcentrate ionic species at extremely high levels due to ion selective migration, unique molecular separation modalities, confined environments to allow biopolymer stretching and elongation and solid-phase bioreactions that are not constrained by mass transport artifacts. Indeed, many examples in the literature have demonstrated these unique opportunities, although predominately using glass, fused silica or silicon as the substrate material. Polymer microfluidics has established itself as an alternative to glass, fused silica, or silicon-based fluidic devices. The primary advantages arising from the use of polymers are the diverse fabrication protocols that can be used to produce the desired structures, the extensive array of physiochemical properties associated with different polymeric materials, and the simple and robust modification strategies that can be employed to alter the substrate's surface chemistry. However, while the strengths of polymer microfluidics is currently being realized, the evolution of polymer-based nanofluidics has only recently been reported. In this critical review, the opportunities afforded by polymer-based nanofluidics will be discussed using both elastomeric and thermoplastic materials. In particular, various fabrication modalities will be discussed along with the nanometre size domains that they can achieve for both elastomer and thermoplastic materials. Different polymer substrates that can be used for nanofluidics will be presented along with comparisons to inorganic nanodevices and the consequences of material differences on the fabrication and operation of nanofluidic devices (257 references).     

Low-temperature direct bonding of glass nanofluidic chips using a two-step plasma surface activation process

Owing to the well-established nanochannel fabrication technology in 2D nanoscales with high resolution, reproducibility, and flexibility, glass is the leading, ideal, and unsubstitutable material for the fabrication of nanofluidic chips. However, high temperature (~1,000 °C) and a vacuum condition are usually required in the conventional fusion bonding process, unfortunately impeding the nanofluidic applications and even the development of the whole field of nanofluidics. We present a direct bonding of fused silica glass nanofluidic chips at low temperature, around 200 °C in ambient air, through a two-step plasma surface activation process which consists of an O₂ reactive ion etching plasma treatment followed by a nitrogen microwave radical activation. The low-temperature bonded glass nanofluidic chips not only had high bonding strength but also could work continuously without leakage during liquid introduction driven by air pressure even at 450 kPa, a very high pressure which can meet the requirements of most nanofluidic operations. Owing to the mild conditions required in the bonding process, the method has the potential to allow the integration of a range of functional elements into nanofluidic chips during manufacture, which is nearly impossible in the conventional high-temperature fusion bonding process. Therefore, we believe that the developed low-temperature bonding would be very useful and contribute to the field of nanofluidics.     

Fabrication of silica nanotube arrays from vertical silicon nanowire templates

A simple thermal oxidation-etching process was developed to translate vertical silicon nanowire arrays into silica nanotube arrays. The obtained nanotubes perfectly retain the orientation of original silicon nanowire arrays. The inner tube diameter ranges from 10 to 200 nm. High-temperature oxidation produces relative thick, rigid, and pinhole-free walls that are made of condensed silica. This method could be useful for fabrication of single nanotube sensors and nanofluidic systems.     

DNA manipulation with elastomeric nanostructures fabricated by soft-moulding of a FIB-patterned stamp

A Focused Ion Beam (FIB)-patterned silicon mould is used to fabricate elastomeric nanostructures, whose cross-section can be dynamically and reversibly tuned by applying a controlled mechanical stress. Direct-write, based on FIB milling, allows the fabrication of nanostructures with a variety of different geometries, aspect ratio, spacing and distribution offering a higher flexibility compared to other nanopatterning approaches. Moreover, a simple double replication process based on poly(dimethylsiloxane) permits a strong reduction of the fabrication costs that makes this approach well-suited for the production of low cost nanofluidic devices. DNA stretching and single molecule manipulation capabilities of these platforms have been successfully demonstrated.     

Injection molded nanofluidic chips: fabrication method and functional tests using single-molecule DNA experiments

We demonstrate that fabrication of well-defined nanofluidic systems can be greatly simplified by injection molding of thermoplastic polymers. Chips featuring nanochannel arrays, microchannels and integrated interconnects are produced in a single processing step by injection molding. The resulting open channel structures are subsequently sealed by facile plasma-enhanced thermal bonding of a polymer film. This fast, inexpensive and industry-compatible method thus provides a single-use all-polymer platform for nanofluidic lab-on-a-chip applications. Its applicability for nanofluidics is demonstrated by DNA stretching experiments performed on individual double-stranded DNA molecules confined in the injection molded nanochannels. The obtained results are consistent with measurements performed in costly state-of-the-art silica nanochannels, for both straight and tapered channel geometries.     

纳流控芯片的微加工技术及其应用*

纳流控学和纳流控芯片应用于化学和生化分析的研究近年来取得了长足的发展。纳流控的基础和应用研究以纳流控芯片的研制为基础,而纳流控新品的制备需依靠微纳加工技术。本文着重介绍目前已经建立的纳流控芯片加工技术,包括掩膜加工法、牺牲层技术、模具加工法、化学-机械抛光法、机械拉伸技术以及其他的加工技术。此外,还简单介绍了纳流控芯片在试样预处理以及生化分析中的应用。     

Interface-directed sol-gel: direct fabrication of the covalently attached ultraflat inorganic oxide pattern on functionalized plastics

For plastic electronics and optics, the fabrication of smooth, transparent and stable crack-free inorganic oxide films (and patterning) on flexible polymeric substrates with strong bonding strength and controllable thickness from nanometers to micrometers is a key but still remains a challenge. Among versatile inorganic oxides, silica oxide film as SiO _x is especially important because this semiconductor material could provide crucial properties in devices or serve as a base layer for further multilayer construction. In this paper, we describe a new interface-directed sol-gel method to fabricate flexible high quality silicon oxide film onto commodity plastics. The resulting crack-free silica film has strong covalent bonding with polymer substrates, homogeneous morphology with ultralow roughness, highly optical transparency, tunable thickness from nm to μm, and easy patterning ability. Such fabrication strategy relies on a novel photocatalytic oxidation reaction by photosensitive ammonium persulfate (APS), which is able to fabricate highly reactive hydroxyl monolayer surface on inert polymeric substrates. This kind of hydroxylated surface could serve as nucleation and growth sites to initiate surface sol-gel process. As a result, well-defined SiO _x film deposition (gelation) occurs, and patterned hydroxylation regions could be easily utilized to induce the formation of patterned oxide film arrays. Our strategy also excludes the requirements of clean room and vacuum devices so as to fulfill low-cost and fast fabrication demands. Two application examples from such high quality SiO _x layer onto plastics are given but should not be limited within these. One is that oxygen permeation rate of SiO _x deposited polymer film decreases 25 times than pristine polymer substrate, which is good for the potential packaging materials. The other one is that silanization monolayer, for example, 3-aminopropyltriethoxysilane (APTES), could be successfully constructed onto silica layer through classical silanization reaction, which is applicable for many potential purposes, for instance, proteins could be accordingly immobilized onto plastic support with effective signal-to-background ratio. Moreover, we further demonstrate that this interface-directed sol-gel strategy is a general method which could be successfully extended to other high quality oxide film fabrication, e.g., TiO₂.     

一种制备单分散SiO2空心微球的新方法

在乙醇/氨水介质中, 分别以分散聚合和无皂乳液聚合方法制得的不同粒径聚苯乙烯(PS)微球为模板, 以正硅酸乙酯(TEOS)为前驱体, 通过控制介质中氨水的初始体积, 一步法制得了不同粒径的单分散SiO2空心微球. 整个过程无需添加其它溶剂溶解或高温煅烧的方法来除去模板微球. 对SiO2空心微球进行测试表征, 提出了SiO2空心微球的可能形成机制.     

Complete plastic nanofluidic devices for DNA analysis via direct imprinting with polymer stamps

Development of all polymer-based nanofluidic devices using replication technologies, which is a prerequisite for providing devices for a larger user base, is hampered by undesired substrate deformation associated with the replication of multi-scale structures. Therefore, most nanofluidic devices have been fabricated in glass-like substrates or in a polymer resist layer coated on a substrate. This letter presents a rapid, high fidelity direct imprinting process to build polymer nanofluidic devices in a single step. Undesired substrate deformation during imprinting was significantly reduced through the use of a polymer stamp made from a UV-curable resin. The integrity of the enclosed all polymer-based nanofluidic system was verified by a fluorescein filling experiment and translocation/stretching of λ-DNA molecules through the nanochannels. It was also found that the funnel-like design of the nanochannel inlet significantly improved the entrance of DNA molecules into nanochannels compared to an abrupt nanochannel/microfluidic network interface.     

柔软的球状和长方体状氧化硅中空结构的制备研究

采用自组装形成的芘纳米结构作为模板,成功地制备了柔软的球状和长方体状氧化硅中空结构.当不同量的芘在十六烷基三甲基溴化铵(CTAB)溶液中自组装时,产生的自组装结构展现出明显的从球状到长方体状的形貌变化.这些结构被用作氧化硅前驱体溶胶-凝胶反应的模板,获得了球状和长方体状氧化硅/芘复合结构.通过乙醇除去模板后,生成了柔软的球状(直径约为400nm)和长方体状(长为0.5—2.5μm)的氧化硅中空结构.这些结果展现了采用有机纳米结构作为模板来合成无机中空结构的优势:合成简便、结构多样以及结构形貌的灵活可控.     

Optical trapping in micro- and nanoconfinement systems: Role of thermo-fluid dynamics and applications

In this mini-review, recent advances on the role of a focused laser in micro- and nanofluidic systems is widely introduced with special interest in thermo-fluid dynamical aspects and their importance in optical manipulation. As a brief introduction to microfluidic systems, we describe the advantages and challenges of the use of micro- and nanoscale confinement in optical trapping, as well as standard fabrication techniques for micro- and nanofluidic systems. From thermo-fluid dynamical viewpoints, various phenomena that accompany a laser irradiation to fluidic devices, are explained in detail. These phenomena can affect the optical trapping of target materials significantly, and are classified into two categories: one that induces the fluid flow around the target and another that directly acts on it as an external force. These classes are reviewed by shedding light on some recent cutting-edge researches for optical manipulation. Some applications using thermo-fluid dynamics in microfluidic systems for the measurement of optical forces and for the separation, measurement, and detection of target materials are also introduced.     

Recent advances in single-molecule detection on micro- and nano-fluidic devices

Single-molecule detection (SMD) allows static and dynamic heterogeneities from seemingly equal molecules to be revealed in the studies of molecular structures and intra- and inter-molecular interactions. Micro- and nanometer-sized structures, including channels, chambers, droplets, etc., in microfluidic and nanofluidic devices allow diffusion-controlled reactions to be accelerated and provide high signal-to-noise ratio for optical signals. These two active research frontiers have been combined to provide unprecedented capabilities for chemical and biological studies. This review summarizes the advances of SMD performed on microfluidic and nanofluidic devices published in the past five years. The latest developments on optical SMD methods, microfluidic SMD platforms, and on-chip SMD applications are discussed herein and future development directions are also envisioned.     

Shape-coded silica nanotubes for biosensing

Shape-coded silica nanotubes (SNTs) were fabricated on the basis of template synthesis as a new dispersible microarray system. The template synthesis of shape-coded SNTs begins with the fabrication of a porous alumina film that has well-defined cylindrical pores with two or more different diameter segments by multistep anodization of an aluminum substrate. Then, SNTs were fabricated with a surface sol-gel method that can control the wall thickness of SNTs on the single-nanometer level. Attractively, the difference in optical reflectance between the segmented parts of individual silica nanotube makes it very convenient to identify each nanotube and enables these shape-coded SNTs to work as coding materials for biosensing.     

A novel method for the fabrication of monodisperse hollow silica spheres

In this paper, we report a novel method for the fabrication of small monodisperse hollow silica spheres. In this approach, when silica shells were coated on polystyrene particles by the sol-gel method, the polystyrene cores were dissolved subsequently, even synchronously, in the same medium to form monodisperse hollow spheres. Neither additional dissolution nor a calcination process was needed to remove the polystyrene cores. Transmission electron microscopy, scanning electron microscopy, and porosity measurements were used to characterize the monodisperse hollow silica spheres.     

Anhydrous Sol-Gel Synthesis of Titania-Doped Siloxane Polymer for Integrated Optics

Sol-gel synthesis of organic-inorganic hybrid materials for planar waveguides and devices has received growing interest due to its low-cost processing and good suitability for doping. Titania is an important optical dopant, but homogeneous incorporation of titania in silica is difficult to be achieved by the conventional sol-gel process (aqueous system) because of the significant difference between the hydrolysis rates of the precursors. In this paper, we report an anhydrous sol-gel process for synthesising titania-doped siloxane polymers. The process consists of a hydrolysis of 3-methacryloxypropyltrimethoxysilane (MPS) with boric acid under anhydrous conditions, and a condensation with dimethyldimethoxysilane (DMDMS), diphenyldimethoxysilane (DPhDMS) and titanium ethoxide (TET). Optical characterisations for the produced titania-doped polymer were performed, and results showed that TET doping is useful for reducing the OH concentration of the synthesised polymer and is also effective for improving the optical quality of spin coatings. DMDMS and DPhDMS are favourable in reducing the birefringence and in increasing the thermostability of the material, and the methacryl groups of MPS are UV-polymerizable, which is useful for low cost fabrication of waveguides by photolithographic process. The results of ellipsometry scanning measurements show that titania is homogeneously incorporated in the hybrid matrix, suggesting that the anhydrous sol-gel process is useful for preparation of UV-sensitive titania-doped siloxane polymers for optical applications.     

Electric-field-controlled flow in nanoscale-thin wetting films

A novel nanofluidic system based on electroosmotic flow in nanoscale-thin aqueous wetting films is reported. The water films formed spontaneously on mica substrates in a saturation humidity environment. The film thickness was determined to be a few tens of nanometers by optical interference and fluorescence intensity measurements and was consistent with a theoretical evaluation of the thickness of a film based on the competing forces of electrostatic repulsion and capillary pressure. Lateral flow was induced by applying a dc electric field tangential to the film and characterized by tracking the position of a fluorescent probe. The mobilities of the thin fluid layer and the flow marker were lower than the predictions of the electrokinetic theory, which may be a result of adsorption of the fluorescent molecules to the mica. Confinement of the film to two-dimensional "channels" was achieved by microcontact printing of patterned hydrophobic monolayers onto the substrate. This system has the advantage of simple and inexpensive fabrication in comparison to nanofluidic devices made by traditional lithography techniques.     

Microchip-based cellular biochemical systems for practical applications and fundamental research: from microfluidics to nanofluidics

By combining cell technology and microchip technology, innovative cellular biochemical tools can be created from the microscale to the nanoscale for both practical applications and fundamental research. On the microscale level, novel practical applications taking advantage of the unique capabilities of microfluidics have been accelerated in clinical diagnosis, food safety, environmental monitoring, and drug discovery. On the other hand, one important trend of this field is further downscaling of feature size to the 10¹–10³ nm scale, which we call extended-nano space. Extended-nano space technology is leading to the creation of innovative nanofluidic cellular and biochemical tools for analysis of single cells at the single-molecule level. As a pioneering group in this field, we focus not only on the development of practical applications of cellular microchip devices but also on fundamental research to initiate new possibilities in the field. In this paper, we review our recent progress on tissue reconstruction, routine cell-based assays on microchip systems, and preliminary fundamental method for single-cell analysis at the single-molecule level with integration of the burgeoning technologies of extended-nano space.     

Nanoscale molecular traps and dams for ultrafast protein enrichment in high-conductivity buffers

We report a new approach, molecular dam, to enhance mass transport for protein enrichment in nanofluidic channels by nanoscale electrodeless dielectrophoresis under physiological buffer conditions. Dielectric nanoconstrictions down to 30 nm embedded in nanofluidic devices serve as field-focusing lenses capable of magnifying the applied field to 10(5)-fold when combined with a micro- to nanofluidic step interface. With this strong field and the associated field gradient at the nanoconstrictions, proteins are enriched by the molecular damming effect faster than the trapping effect, to >10(5)-fold in 20 s, orders of magnitude faster than most reported methods. Our study opens further possibilities of using nanoscale molecular dams in miniaturized sensing platforms for rapid and sensitive protein analysis and biomarker discovery, with potential applications in precipitation studies and protein crystallization and possible extensions to small-molecules enrichment or screening.