含噪声包裹相位图的加权最小二乘相位展开算法研究

二维相位展开广泛应用在精密光学测量、自适应光学、合成孔径雷达、图像处理等领域中。为处理含噪声包裹相位图,以预条件共轭斜量法求解权重最小二乘相位展开方程。引入非加权二维离散余弦变换求解泊松方程得到的最小二乘相位解作为共轭斜量法的初始解,从而加快了收敛速度,同时提出一种新质量图确定算法求解过程中的权重项。计算机模拟和试验表明算法计算速度快,能有效地消除传统路径积分法在处理信噪比低包裹相位图时的"拉线"现象,是一种有效的相位展开方法。     

Digital speckle interferometry for assessment of surface roughness

In this work, the principle of interferometry is used to assess the surface roughness of the machined surfaces. Interferometry produces an interference fringe pattern when two or more light waves interact with each other. It is one of the important tool for precision optical metrology and testing. Well-known advantages of the phase shifting interferometry include high measurement accuracy, rapid measurement, good result even with low contrast fringes and that the polarity of the wave front can be determined. In fringe projection techniques, a known optical fringe pattern is projected onto the surface of interest. The fringe pattern on the surface is perturbed in accordance with the profile of the test surface, thereby enabling direct derivation of surface profile.In this work, an attempt has been made to assess the surface roughness using a speckle fringe analysis method of five frame phase shift algorithm for machined surface (ground surface). As these fringes are too noisy, advanced filtering technique has been used so as to reduce noise and to get improved wrapped phase map from the phase shifted fringes. A phase unwrapping software has been developed using discrete cosine transform (DCT) to generate the three-dimensional (3-D) profiles. Finally, it is compared with R_a values measured using a mechanical stylus instrument, showing good agreement.     

Conversion from phase map to coordinate: Comparison among spatial carrier, Fourier transform, and phase shifting methods

For full-field phase measurement methods, many algorithms have been developed to extract a phase map from fringe image(s). Both phase wrapping and unwrapping algorithms have been extensively investigated by many researchers, but few papers can be found on how to calculate the coordinates of surface points from a phase map. This paper focuses on algorithms that show how a phase map can be used to calculate coordinates. Details are given for single image methods such as Fourier transform, spatial carrier methods, and multiple image methods like traditional phase-shifting methods. Algorithms that can be used to convert a phase map to coordinates and some issues related to these conversion algorithms are discussed. An artifact is measured using these phase measurement methods. The results show that using the correct algorithm to convert a phase map to coordinates is a key to obtaining accurate measurement results.     

基于图切割的相位展开

剪切散斑干涉术中,普遍采取相移法提取相位,只可得到被包裹的相位信息,进一步量化计算之前,必须展开相位,但是大量的散斑噪音使相位展开变得非常困难.本文提出基于图切割理论的相位展开算法,将相位展开等价于整数的最优估计问题,通过最小化能量函数展开相位,无需对散斑包裹相位图进行滤波,就可以从包含大量散斑噪音的包裹相位图中准确地提取出真实相位,极大程度地保留了相位包裹图中的细节信息.对于同一幅模拟的散斑包裹相位图,传统的质量导向枝切法和最小二乘法的均方根误差分别为11.7076和4.9775,新算法的均方根误差则为0.9459,数值模拟与实验结果均验证了新算法优良的抗噪性能.     

基于图切割的相位展开

剪切散斑干涉术中,普遍采取相移法提取相位,只可得到被包裹的相位信息,进一步量化计算之前,必须展开相位,但是大量的散斑噪音使相位展开变得非常困难.本文提出基于图切割理论的相位展开算法,将相位展开等价于整数的最优估计问题,通过最小化能量函数展开相位,无需对散斑包裹相位图进行滤波,就可以从包含大量散斑噪音的包裹相位图中准确地提取出真实相位,极大程度地保留了相位包裹图中的细节信息.对于同一幅模拟的散斑包裹相位图,传统的质量导向枝切法和最小二乘法的均方根误差分别为11.707 6和4.977 5,新算法的均方根误差则为0.945 9,数值模拟与实验结果均验证了新算法优良的抗噪性能.     

A generalized temporal phase unwrapping algorithm for three-dimensional profilometry

A generalized temporal phase unwrapping algorithm is proposed for absolute phase measurement of object surfaces with complex topography. We first make comments on error analysis of various temporal phase unwrapping (TPU) algorithms and point out problems existing in these techniques. We present a generalized TPU algorithm (GTPU), which eliminates some limitations imposed on the fringe sequence for the classical TPU algorithms. So the desired number of fringes can be determined according to practical situation, leading to a flexible method for phase reconstruction. In addition, compared with the classical TPU algorithms, GTPU has better noise immunity and less computational complexity. Theoretical analysis and experiment results are presented to show the validity of the proposed algorithm.     

光学干涉图像处理中基于质量权值的离散余弦变换解包裹相位

为减少噪声对相位恢复过程的影响,快速得到正确的解包裹相位,提出了一种改进的相位解包裹方法——加权离散余弦变换解包裹算法。该方法把离散余弦变换和标识相位数据好坏的质量权值结合起来,兼有速度快和可靠度高的优势。为验证此算法,对模拟和实验得到的包裹相位图添加随机噪声和散粒噪声,同时采用加权与非加权离散余弦变换算法进行处理,所得到的解包裹结果与未加噪声的解包裹相位值进行比较,结果表明,通过加权离散余弦变换算法恢复的相位图比非加权离散余弦变换算法所恢复的相位图更接近于理想值,而且两种算法的运行速度基本相同,这证明提出的算法不仅保证了效率高的优点,而且所恢复的解包裹相位具有较好的噪声免疫能力和可靠度。     

A simple method to unwrap the geometrically discontinuous phase map and its application in the measurement of IC package

Research on the techniques to unwrap the geometrically discontinuous phase map is an active area during the past decade, various algorithm are developed. Basically, these algorithms need a prior knowledge about the spatial extension of the discontinuity area in the sample for correct phase unwrapping, manual mask is often involved and negate the sense of automatic processing to fringe patterns. More ever, current phase unwrapping algorithms are either computationally complex or highly time consuming. In this paper, a refined method is proposed to deal with the geometrical discontinuity problem in an improved automation sense: suppression of background noise and recognition of discontinuity area in the phase map can be finished in the same time, and discontinuous phase map can be unwrapped in a simple way to avoid the effect of discontinuity area. An example of electronic package with complex shape and structure is used to verify the efficiency of this method.     

条纹图象的数字化自动分析处理技术之二:相位分析法

相位分析法是目前光学条纹图象数字化自动分析处理中的最重要方法之一。本文较全面地介绍了相位分析技术,并对相位分析的关键技术--相位的滤波和解包络方法做了重点说明。文中给出了相位解包络的实例并讨论了图象数字化自动分析处理技术的实际应用状况。     

广义条纹图序列编码的相位重建

为解决拓扑复杂物体三维数字化过程中的绝对相位测量及相位重建问题,提出了一种广义变频条纹图序列的相位展开算法。简要综述了现有的各种时间维相位展开算法并指出这些算法存在的问题,在此基础上,详细分析比较提出方法与正指数条纹序列算法的噪声免疫力和时间复杂度,证明该方法有更高的噪声免疫力和更低的时间复杂度。特别是,当相邻编码条纹图的条纹数之比不等于2时,正指数条纹序列算法出现严重噪声,而提出的方法依然能够正常工作。此外,该算法还能够根据实际情况决定需要投影的条纹频率,从而能够使用相对较少的条纹编码图像进行有效的相位展开,进而提高系统的实时性。理论分析和实验结果都证明了提出算法的有效性。     

仿视觉过程的相位展开方法

在所有基于条纹分析的光学测量中,相位展开问题是难以避免的问题。所有传统的相位展开方法的共同点都是在相主值图中通过邻域内相主值差和寻找无噪声的相位展开路径来完成的。如果不利用整幅图像像素间的联系,则误差会沿展开路径传播。根据人眼识别栅线图周期的过程提出了一种与以往完全不同的相位展开方法。经过初步提取周期分界线、修补分界线和根据分界线确定周期三个步骤即可完成相位展开过程。该算法的原理简单明了,实现起来相对简单,只需单幅条纹图像即可得到周期,因而可用于动态测量。实验结果验证了该算法的可行性。     

Iterative two-step temporal phase-unwrapping applied to high sensitivity three-dimensional profilometry

Although temporal phase unwrapping method can be applied to solve some problems to measure an object with steep shapes, isolated parts or fringe undersampling in three-dimensional (3D) shape measurement, it needs to acquire and process a sequence of fringe pattern images which would take much time. Servin et al. proposed a 2-step temporal phase unwrapping algorithm, which only needs the 2 extreme phase-maps to achieve exactly the same results as standard temporal unwrapping method. But this method is only validated by computer simulation, shortage of experimental demonstration, its sensitivity coefficient G is limited, and it cannot be used when the G value is larger. We proposed an iterative two-step temporal phase-unwrapping algorithm which is an extension of Servin׳s method. First, add a fringe pattern with an intermediate sensitivity, project the fringe patterns of different sensitivity onto the tested object’s surface, and collect deformed fringe patterns with a CCD camera. Then we obtain the unwrapped phase with larger sensitivity coefficient G by cascading the sensitivity coefficients. And we derive the initial phase conditions of the 2-step temporal phase unwrapping algorithm. Finally, the experimental evaluation is conducted to prove the validity of the proposed method. The results are analyzed and compared with Servin׳s method. The experimental results show that the proposed method can achieve higher sensitivity and more accurate measurement, and it can overcome the main disadvantages encountered by Servin׳s method.     

A new wavelet transform for reliability-guided phase unwrapping of optical fringe patterns

A new daughter wavelet definition for reliability-guided phase unwrapping of the optical fringe pattern is introduced. The new daughter wavelet definition is given by normalized mother wavelet with a new factor including a Gaussian function. The modulus of the wavelet transform coefficients, obtained by using daughter wavelet under this new daughter wavelet definition, includes not only modulation information but also local frequency information of the deformed fringe pattern. Therefore, it can be treated as a good parameter which represents the reliability of the reconstructed phase data. Mathematical demonstration of this parameter is given. Both the computer simulation and experiment reveal the validity of the proposed method.     

基于希尔伯特变换的干涉条纹相位解调新算法

提出了一种新的应用希尔伯特变换解调干涉条纹相位的算法,可以从单幅干涉条纹图中解调出全场相位分布.在实际应用中,常借助傅里叶变换实现希尔伯特变换算法,但是会忽略负频率成分,造成相位信息的丢失.对于相位分布非单调变化的干涉条纹,提出了一种判断函数,用来计算相位信息零频率点的分布.利用相位的零频率点分布构造了一个二元模板,使用该模板对本文提出的两次希尔伯特变换法产生的包裹相位图进行修正.对修正后的包裹相位图进行解包裹处理,可以得到连续的全场相位分布.对该方法用计算机模拟进行了验证.     

基于DCT算法的种子点相位解包算法

移相干涉术由于其高精度被广泛应用在光学元件的面形测量上,而由移相算法得到的相位数据被包裹在[-π,π]之间。基于区域生长理论的相位解包算法(种子点法)可以高精度地实现连贯区域的相位解包,基于离散余弦变换的最小二乘解包(DCT)算法可以实现矩形区域的相位解包,而实际测量中,经常会碰到被测件的有效区域为非矩形的分离区域。因此,在分析前两种算法优缺点的基础上,提出了基于DCT算法的种子点相位解包算法。首先运用DCT算法对整个包裹相位进行解包,然后运用种子点法分别解包各分离区域,再通过DCT算法求得的种子点干涉级次实现各分离区域解包相位的统一。实验结果表明,该方法克服了种子点法和DCT算法的缺点,可以准确、快速地实现分离区域干涉图包裹相位的解包,且比这两种算法具有更好的稳定性和更高的精度。     

A fast,accurate phase unwrapping method for wavelet-transform profilometry

A novel phase unwrapping method used in wavelet-transform profilometry is presented to improve the accuracy and speed of the unwrapping process. The wrapped phase of the fringe image is extracted by using wavelet transform. How to establish quality map using scale factor at wavelet ridge is discussed firstly. The proposed method can reflect the reliability of the pixels in fringe image effectively. As the consuming time of traditional flood-fill phase unwrapping algorithm is too long, an improved quality-guided method is used in phase unwrapping process. We divide the wrapped phase map into two levels following the established quality map, and process these two levels using different algorithms. Compared with the traditional flood-fill algorithm, we can get the accurate result while the consuming time of the phase unwrapping process is much less by using the proposed method. Simulation and experiment results verify that the 3D information of the measured object can be obtained rapidly and accurately by using the proposed method. Also the dynamic object can be measured too.     

A digital spatial carrier for wavelet phase extraction

In this paper, we present a new method to digitally add a high-frequency spatial carrier in order to use the wavelet phase extraction algorithm, which leads directly to the phase without the unwrapping process. The method needs a fringe pattern and its π/2 shifted version. The application is performed with two shifted fringe patterns obtained from the phase shifting images of the thermomechanical study of an MOS power transistor. A comparison with the phase shifting results is made.     

A novel 3D measuring method for discontinuous object by non-integral twin-frequency grating

A new 3D shape measurement method based on non-integral twin-frequency grating projection is proposed. In this paper, the projected composite grating is composed of two sinusoidal gratings, and the quotient of whose frequencies is not an integer. By using appropriate phase-shifting algorithms, two wrapped phases can be obtained from sixteen frames of the distorted grating patterns. In aid of appropriate phase unwrapping method, the unwrapped phase of high frequency fringe is obtained only from the relation of the two wrapped phases by a pixel-to-pixel phase unwrapping technique. Therefore the unwrapped phase of high frequency fringe pattern is independent of the low frequency fringe pattern, different from traditional integral twin-frequency grating projection methods in which the phase unwrapping error of low frequency fringe pattern may be propagated onto the unwrapped phase of high frequency fringe pattern. The new theory proves that the proposed method is applicable to measure discontinuous object, and has considerable measurement accuracy.     

Recovering the absolute phase maps of two fringe patterns with selected frequencies

Phase unwrapping is an important and challenging issue in fringe pattern profilometry. In this Letter we propose an approach to recover absolute phase maps of two fringe patterns with selected frequencies. Compared to existing temporal multiple frequency algorithms, the two frequencies in our proposed algorithm can be high enough and thus enable efficient and accurate recovery of absolute phase maps. Experiment results are presented to confirm the effectiveness of the proposed technique.     

Demodulation of a single interferogram based on continuous wavelet transform and phase derivative

A novel method based on continuous wavelet transform (CWT) and guidance of phase derivative is developed to measure the phase of a single fringe pattern which contains closed fringes. Wrapped phase values are retrieved by ridge extraction algorithms based on CWT which has the capability of better noise reduction and thus increases the resolution of measurement significantly. To further reduce the noise, the scales detected by maximum ridge algorithm are filtered iteratively before retrieval of wrapped phase. The proposed method also identifies any ambiguous point in a non-monotonous fringe pattern by directly tracking an inflexion point from an unwrapped phase map without the use of a carrier. The algorithm developed is validated by computer simulation and experimental results. Based on micro interferometry the experimental results for both static and dynamic deformations of a micro structure demonstrate that the proposed method is an effective tool for the analysis of closed fringe patterns and subsequent deformation measurement. However, the proposed technique is limited to measurement of surface which is relatively smooth compared to the mean wavelength of the light source. In addition, prior knowledge of the sign of surface slope is required in cases where a spatial carrier is not available or adaptable.