空间载频干涉法全场测量长度技术

在研究二维快速傅里叶变换法进行干涉测试基本原理的基础上,提出一种基于二维快速傅里叶变换的长度测量法.以量块长度的测量为对象,被测量块置于泰曼-格林干涉仪测试光路中,参考光波分别与待测长度的量块表面和辅助平面反射的测试光波形成干涉条纹,条纹由图像采集系统采集.利用编制的算法处理软件,通过处理干涉条纹图中量块边缘识别、区域延拓、滤波、波面统一,获得了量块全场表面的空间长度分布,实现了对量块长度的自动化测量.结果表明:该测量法不仅具有较高的测量准确度,而且具有全场测试和非接触测量等优点.     

空间载频干涉法全场测量长度技术

 在研究二维快速傅里叶变换法进行干涉测试基本原理的基础上,提出一种基于二维快速傅里叶变换的长度测量法.以量块长度的测量为对象,被测量块置于泰曼-格林干涉仪测试光路中,参考光波分别与待测长度的量块表面和辅助平面反射的测试光波形成干涉条纹,条纹由图像采集系统采集.利用编制的算法处理软件,通过处理干涉条纹图中量块边缘识别、区域延拓、滤波、波面统一,获得了量块全场表面的空间长度分布,实现了对量块长度的自动化测量.结果表明：该测量法不仅具有较高的测量准确度,而且具有全场测试和非接触测量等优点.     

用激光干涉法测量长度的智能化处理技术研究

介绍利用激光干涉与数字图像处理技术以及应用FFT分析干涉涤纹方法，分析并解决测量端面长度标准中条纹图的处理技术。应用这种方法不但提高了测试过程的自动化程度，而且大大地提高了测量精度。文中给出了最典型的端面长度标准量块的干涉条纹小数部分的实测结果。     

基于偏振移相的环路径向剪切干涉

只需要一幅干涉图就能得到被检波面信息的径向剪切干涉,适于动态波前的测量。将便于干涉图像处理的同步移相技术引入径向剪切干涉中,基于环路径向剪切干涉,利用一个正交的二维光栅分光,采用偏振移相法,能同时得到相移间隔π/2的四幅移相干涉图。运用传统的四步移相算法,结合波面迭代算法复原波面。通过理论公式的推导、计算机的模拟分析,以及初步的实验测试,验证了偏振移相应用于径向剪切干涉的可行性,模拟结果显示均方根精度优于λ/100。具有抗振特点的光栅分光偏振移相的同步移相方案,不仅能够克服剪切干涉的单幅干涉图处理复杂的缺点,更有利于提高剪切干涉的抗干扰能力。     

基于二维傅里叶变换的单帧干涉图相位提取方法

针对大口径光学元件干涉测试过程中,测试装置和干涉腔长较大,气流扰动和环境振动对移相测试过程产生影响等问题,采用一种基于二维傅里叶变换的单帧干涉图处理方法,只需要对一幅空间载频干涉条纹图进行处理即可获得待测相位,具有抗振测试的优点。对该方法的基本原理和算法过程进行分析,并对近红外大口径移相平面干涉仪中600 mm口径的光学平晶进行了面形测试。实验结果表明:采用该方法所得波面峰谷值(PV)为0.112,波面均方根值(RMS)为0.014,与移相算法所得波面数据相比,波面峰谷值偏差不到(1/500);波面均方根值(RMS) 偏差几乎为零。     

长度测量中干涉条纹的自动识别技术研究

利用激光干涉与数字图像处理技术以及应用FFT分析干涉条纹方法,分析并解决了测量端面长度标准中条纹图的处理技术,应用这种方法不但提高了测试过程的自动化程度,而且大大地提高了测量结果的精度,并给出了最典型的端面长度标准量块的干涉条纹小数部分的实测结果.     

移相干涉测量术及其应用

为了对移相式数字干涉仪在光学元件测量中的应用有全面了解，介绍了移相干涉术的基本原理。结合激光数字波面干涉仪，阐述移相干涉术的四步重叠平均算法、压电晶体移相器(PZT)的结构、3 PZT的组合方法、移相器的标定误差和非线性误差的校正方法、波面相位解包的自适应种子算法、波面相位的评价指标等内容。结合移相数字波面干涉仪，叙述了移相干涉测量技术在普通光学元件、红外光学元件、大口径光学元件、非球面光学元件等测量中的应用并指出了应用过程中的注意事项。最后明确指出光干涉技术正沿着高相位分辨率、高空间分辨率、宽波段和瞬态高速测量的方向发展，并将会在瞬态波前测量、微机械的微结构动态分析等方面有着越来越广泛的应用。     

基于二维光栅分光的同步移相干涉测量技术

为了干涉测量的抗振目的,提出了一种新的同步移相干涉测量方案并搭建了实验装置。整个测量系统在迈克耳孙偏振移相干涉仪的基础上,利用一个正交的二维光栅产生对称分光,选取对于理想光栅衍射效率一致的(±1,±1)级衍射光作为测量分光路,使之分别通过偏振方向依次相差45°的一个偏振片组,从而分别形成0°、90°、180°和270°相移的四幅移相干涉图,按照传统的四步移相算法,对被测波面进行了复原。分析了光强畸变和移相误差对系统的测量误差的影响。利用该系统测量一球面系统,结果与在ZYGO干涉仪上相比较,球面系统的均方根误差相差0.012λ,峰谷值相差0.051λ。     

移相式干涉仪在锥体棱镜角度测试中的应用

为了实时、高精度地测试光学零件，对移相式数字波面干涉仪在锥体棱镜角度测试中的应用进行了研究。通过锥体棱镜二面角偏差计算方法得到了二面角偏差和干涉波面之间的关系，分析了干涉波面的形状与锥体棱镜综合误差的关系，编写了锥体棱镜角度和综合误差测试程序，并且在移相式数字波面干涉仪和ZYGO干涉仪上分别对锥体棱镜进行测试，给出了2者的比较测试结果。结果表明，移相式数字波面干涉仪测量锥体棱镜二面角偏差的误差在0.3″范围内，RMS值的测量误差在λ/50内；提出的方法可实现检测过程的自动化。     

FFT动态相位重建算法的滤波窗影响分析

为了优化相位重建算法,针对波面干涉图的傅里叶频谱,分析了不同滤波窗口的分布特征和频谱响应,通过计算机仿真和实验测试,确定了FFT动态相位重建算法的最佳滤波窗口类型。其中处理仿真干涉图重建的波面与原始波面的波面峰谷值残差为0.008 5λ,波面均方根值残差为0.000 1λ;处理实验干涉图获得的波面与移相干涉测量法获得的波面峰谷值残差为0.009 3λ,波面均方根值残差为0.000 5λ。结果表明:选取Hamming窗进行滤波处理并重建的相位经拟合后得到的波面较参考波面的面形残差最小,相位重建精度优于0.01λ,可进一步应用于大口径光学元件的测量中。     

A new method of non-contact gauge block calibration using a fringe-counting technique: I. Theoretical basis

A new non-contact interference method for gauge block or length bar calibration is presented. A central interference fringe of polychromatic light is used for the determination of the end surface position of the measured artefact. Distances referring to these positions are measured using a fringe-counting technique, with a wavelength-stabilized laser interferometer. Absolute and comparative measurement methods are proposed. A new technique for central interference fringe detection and identification is discussed.     

A new method of noncontact gauge block calibration using the fringe counting technique: II. Experimental verification

An experimental verification of a new noncontact interference method for gauge block or length bar calibration is presented. In this technique, the length of the tested artifact is measured by means of the counting fringe method. A new technique for central interference fringe detection is used for evaluation of the end surface positions of the measured artifact. The experimental set-up and length measurement procedure are described. Preliminary experimental results and uncertainty analysis of the proposed method are presented.     

Fiber Fabry-Perot Cavity Using Sagnac Loop with Phase-Shift Grating

Fiber Fabry-Perot cavity using Sagnac loop with phase-shift grating is investigated. Various interference patterns corresponding to the different fiber Fabry-Perot cavities are obtained, and their potential applications in multiwavelength fiber laser source are discussed.     

Grating-assisted generation of 2D surface plasmon interference patterns for nanoscale photolithography

Generation of 2D surface plasmon interference patterns using a 3D metal-dielectric diffraction structure is studied. The potential application field is surface plasmon interference nanolithography aimed at fabrication of 3D periodic structures. The considered structure consists of a 3D dielectric diffraction grating with a metal film applied in the substrate region. The diffraction grating is designed to transform the incident wave into a set of surface plasmons that generate 2D interference pattern underneath the metal film. The configuration of the interference patterns is analyzed theoretically. It is shown by simulations within the rigorous electromagnetic theory that high-contrast interference patterns with the period 2.5-3.5 times smaller than the incident wave length can be produced. The configuration of the calculated patterns coincides with theoretically estimated ones. At the interference maxima electric field intensity exceeds incident wave intensity by an order of magnitude. The ways to control the form and period of the interference pattern by changing polarization and length of the incident wave are presented.     

一种提高干涉相位识别精度的方法

针对开环相移驱动下的单色光干涉测量,提出一种满足四步法的高精度相位识别的方法。首先选取干涉场中存在适当相位差的两像素点,建立相移驱动单周期内两像素点灰度序列值之间的干涉方程组。运用椭圆拟合获取相应干涉方程组参数,然后通过反算序列相位确定逐点驱动步长或序列相位信息。结合序列相位信息,运用Lagrange抛物插值算法,设计计算满足四步法的4幅干涉图,并计算各像素点的初相位。最后,运用多波长算法计算表面形貌并进行误差分析。实验表明:计算得到的方波多刻线样板的Ra值为0.439 0 m,测量误差为0.23%,此方法降低了对测量条件的硬件与环境要求,满足表面形貌高精度测量的要求。     

Fluxons interactions in a Josephson junction with a phase-shift

We consider a long Josephson junction with a discontinuity point characterized by a gauge phase-shift. The system is described by a modified sine-Gordon equation. We study, in particular, the interactions between a fluxon and a fractional fluxon. A perturbation theory is developed in the small phase-shift limit to understand the characteristics of the interaction. Finally, numerical computations of the threshold bias current and the threshold velocity for a fluxon running over a fractional fluxon are presented.     

Fractional Fringe Order Method Using Fourier Analysis for Absolute Measurement of Block Gauge Thickness

A fringe analysis method, which combines the Fourier transform with the fractional fringe order method for measuring the absolute thickness of a block gauge, is presented. An approximate integer part of the fringe order is estimated by mechanical measurements, and the fractional part is determined by Fourier analysis of the interferometric fringe patterns. The fringe patterns are obtained with a Michelson interferometer by illumination of several selected wavelengths, respectively. The use of the fractional fringe order method can determine accurately more than 2ϖ phase jumps. The measured thickness of a block gauge is 5999115.0 ± 0.7 nm, which is comparable with the standard thickness of 6 mm. The influence of wavelength and approximate integer part of fringe order on the measurement accuracy is discussed.