Poly(methyl silsesquioxane)/amphiphilic block copolymer hybrids and their porous derivatives: Poly(styrene‐block‐acrylic acid) and poly(styrene‐block‐3‐trimethoxysilylpropyl methacrylate)

Porous poly(methyl silsesquioxane) (PMSSQ) films were prepared from PMSSQ/amphiphilic block copolymer (ABC) hybrids, and this was followed by spin coating and multistep baking. The ABCs were poly(styrene‐block‐acrylic acid) (PS‐b‐PAA) and poly(styrene‐block‐3‐trimethoxysilylpropyl methacrylate) (PS‐b‐PMSMA), which were synthesized by living polymerization. The chemical bonding between the ABCs and PMSSQ resulted in significant differences in the morphologies and properties of the hybrids and their porous derivatives. Both intramolecular and intermolecular hydrogen bonding existed in the PMSSQ/PS‐b‐PAA hybrid and led to macrophase separation. Through the modification of the chemical structure from the poly(acrylic acid) segment to PMSMA, covalent bonding between PMSSQ and PMSMA occurred and prevented the macrophase separation and initial pyrolysis of the ABC. Modulated differential scanning calorimetry results also suggested a significant difference in the miscibility of the two hybrid systems. The chemical bonding resulted in higher retardation of the symmetry‐to‐nonsymmetry Si? O? Si structural transformation for PMSSQ/PS‐b‐PMSMA than for PMSSQ/PS‐b‐PAA according to Fourier transform infrared studies. The pore size of the nanoporous thin film from the PMSSQ/PS‐b‐PMSMA hybrid was estimated by transmission electron microscopy to be less than 15 nm. The refractive index and dielectric constant of the prepared porous films decreased from 1.354 to 1.226 and from 2.603 to 1.843 as the PS‐b‐PMSMA loading increased from 0 to 50 wt %, respectively. This study suggests that chemical bonding in hybrid materials plays a significant role in the preparation of low‐dielectric‐constant nanoporous films. © 2004 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 42: 4466–4477, 2004     

Improved focused ion beam target preparation of (S)TEM specimen--a method for obtaining ultrathin lamellae

Specimen quality is vital to (scanning) transmission electron microscopy (TEM) investigations. In particular, thin specimens are required to obtain excellent high-resolution TEM images. Conventional focused ion beam (FIB) preparation methods cannot be employed to reliably create high quality specimens much thinner than 20 nm. We have developed a method for in situ target preparation of ultrathin TEM lamellae by FIB milling. With this method we are able to routinely obtain large area lamellae with coplanar faces, thinner than 10 nm. The resulting specimens are suitable for low kV TEM as well as scanning TEM. We have demonstrated atomic resolution by Cs-corrected high-resolution TEM at 20 kV on a FIB milled Si specimen only 4 nm thick; its amorphous layer measuring less than 1 nm in total.     

Point defect clusters and dislocations in FIB irradiated nanocrystalline aluminum films: an electron tomography and aberration-corrected high-resolution ADF-STEM study

Focused ion beam (FIB) induced damage in nanocrystalline Al thin films has been characterized using advanced transmission electron microscopy techniques. Electron tomography was used to analyze the three-dimensional distribution of point defect clusters induced by FIB milling, as well as their interaction with preexisting dislocations generated by internal stresses in the Al films. The atomic structure of interstitial Frank loops induced by irradiation, as well as the core structure of Frank dislocations, has been resolved with aberration-corrected high-resolution annular dark-field scanning TEM. The combination of both techniques constitutes a powerful tool for the study of the intrinsic structural properties of point defect clusters as well as the interaction of these defects with preexisting or deformation dislocations in irradiated bulk or nanostructured materials.     

Site-specific specimen preparation by focused ion beam milling for transmission electron microscopy of metal matrix composites.

This work describes the application and usefulness of the focused ion beam (FIB) technique for the preparation of transmission electron microscopy (TEM) samples from metal matrix composite materials. Results on an Aldiamond composite, manufactured by the squeeze casting infiltration process, were chosen for demonstration. It is almost impossible to prepare TEM specimens of this material by any other conventional method owing to the presence of highly inhomogeneous phases and reinforcement diamond particles. The present article gives a detailed account of the salient features of the FIB technique and its operation. One of the big advantages is the possibility to prepare site-specific TEM specimens with high spatial resolution. The artifacts occurring during the specimen preparation, for example, Ga-ion implantation, curtain effects, amorphous layers, bending of the lamella, or different milling behaviors of the materials have been discussed. Furthermore, TEM examination of the specimens prepared revealed an ultrafine amorphous layer of graphite formed at the interface between the Al and diamond particles that may affect the interfacial properties of the composite materials. This may not have been feasible without the successful application of the FIB technique for production of good quality site-specific TEM specimens.     

Anisotropic thermal expansion behavior of thin films of polymethylsilsesquioxane, a spin-on-glass dielectric for high-performance integrated circuits

Thin films of poly(methylsilsesquioxane) (PMSSQ) are candidates for use as interdielectric layers in advanced semiconductor devices with multilayer structures. We prepared thin films of PMSSQ with thicknesses in the range 25.0-1151.0 nm by spin-casting its soluble precursor onto Si and GaAs substrates with native oxide layers and then drying and curing the films under a nitrogen atmosphere at temperatures in the range 250-400 degrees C. The out-of-plane thermal expansion coefficient alpha(perpendicular) of each film was measured over the temperature range 25-200 degrees C using spectroscopic ellipsometry and synchrotron X-ray reflectivity, while the in-plane thermal expansion coefficient alpha(parallel) of each film was determined over the temperature range 25-400 degrees C by residual stress analysis. PMSSQ films cured at higher temperatures exhibited reduced thermal expansion, which is attributed to the denser molecular packing and higher degree of cross-linking that arises at higher temperatures. Surprisingly however, all the PMSSQ films were found to exhibit very strong anisotropic thermal expansion; alpha(perpendicular) and alpha(parallel) of the films were in the ranges 140-329 ppm/ degrees C and 12-29 ppm/ degrees C respectively, depending on the curing temperature. This is the first time that cured PMSSQ thin films have been shown to exhibit anisotropic thermal expansion behavior. This anisotropic thermal expansion of the PMSSQ thin films might be due to the anisotropy of cross-link density in the films, which arises because of a combination of factors: the preferential orientation of methyl groups toward the upper film surface and the preferential network formation in the film plane that occurs during curing of the confined film. In addition, the film electron densities were determined using synchrotron X-ray reflectivity measurements and the film biaxial moduli were obtained using residual stress analysis.     

Synchrotron X-ray scattering study of the mechanism of nanopore generation in nanoporous organosilicate thin films imprinted with a reactive six-armed porogen

In situ grazing incidence small-angle X-ray scattering analysis was successfully performed during the thermal processing of film blends of polymethylsilsesquioxane (PMSSQ) precursor and triethoxysilyl-terminated six-arm poly(epsilon-caprolactone) (mPCL6) porogen. In addition, thermogravimetric analysis of the films was carried out in a nitrogen atmosphere. These measurements provide important information about the structures of the blend films and of the resulting porous films. In particular, they are used in this paper to establish the mechanism of the formation of imprinted pores within the blend films. During the heating run, the sacrificial thermal degradation of the porogen component commenced at 320 degrees C, generating pores in the resulting cured PMSSQ films. Only very limited porogen aggregation occurred during the blend film formation process (spin-coating and subsequent drying), and these porogen aggregates were of relatively small size and narrow size distribution. The observed restriction of the formation of such porogen aggregates was found to result from the favorable hybridization reaction of the porogen's reactive end groups with the reactive functional groups of the PMSSQ precursor, which competes with aggregation via reaction between the porogen molecules. The average radius (or half-size) of the porogen aggregates was in the range 2.45-3.98 nm, depending on the porogen loading (10-40 wt %). The porogen aggregates retained their size and size distribution until thermal degradation, which resulted in the imprinting of nanopores in the cured PMSSQ films with size and size distribution corresponding to those of the porogen aggregates. The porosities of the resulting nanoporous films were in the range 12.4-41.7%, depending on the initial porogen loading.     

Plan-view preparation of TEM specimens from thin films using adhesive tape

A simple plan-view sample preparation technique for transmission electron microscopy (TEM) specimens is proposed for thin films by tearing-off the film with adhesive tape. The demand for very thin samples is highest for nanostructured materials where the structure of 2-5 nm sized features (grains) needs to be resolved; therefore, overlapping of nanometer-sized features should be avoided. The method provides thin areas at the fracture edges of plan-view specimens with thickness in the range of the grain size in the film allowing for artifact free high-resolution TEM imaging. Nanostructured materials typically fracture between the grains providing areas with the thickness of the grain size. Besides the swiftness of the method, the samples are free of surface amorphization artifacts, which can occur in ion beam milling up to 1 nm depth even at low energy ion bombardment. The thin film tear-off technique is demonstrated on a CuMn alloy thin film with grain size of 2 nm.     

The correlation between ion beam/material interactions and practical FIB specimen preparation.

The focused ion beam (FIB) tool has been successfully used as both a stand alone analytical instrument and a means to prepare specimens for subsequent analysis by SEM, TEM, SIMS, XPS, and AUGER. In this work, special emphasis is given to TEM specimen preparation by the FIB lift-out technique. The fundamental ion/solid interactions that govern the FIB milling process are examined and discussed with respect to the preparation of electron transparent membranes. TRIM, a Monte Carlo simulation code, is used to physically model variables that influence FIB sputtering behavior. The results of such computer generated models are compared with empirical observations in a number of materials processed with an FEI 611 FIB workstation. The roles of incident ion attack angle, beam current, trench geometry, raster pattern, and target-material-dependent removal rates are considered. These interrelationships are used to explain observed phenomena and predict expected milling behaviors, thus increasing the potential for the FIB to be used more efficiently with reproducible results.     

New approach to fabricate nanoporous gold film

A simple preparation of ultrathin nanoporous gold film was described. Copper and gold were used to fabricate Cu-Au alloy film sthrough vacuum deposition. The formation of nanoporous gold films from the alloy films involved thermal process and chemical etch by hydrochloric acid or by nitric acid. The free-standing nanoporous gold films have been analyzed by scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray photoelectron spectrometer (XPS) and surface-enhanced Raman scattering (SERS). It was noted that the nanoporous gold film etched by hydrochloric acid is uniform with a cover of fog-like moieties.     

Off-axis electron holography of unbiased and reverse-biased focused ion beam milled Si p-n junctions.

Off-axis electron holography is used to measure electrostatic potential profiles across a silicon p-n junction, which has been prepared for examination in the transmission electron microscope (TEM) in two different specimen geometries using focused ion beam (FIB) milling. Results are obtained both from a conventional unbiased FIB-milled sample and using a novel sample geometry that allows a reverse bias to be applied to an FIB-milled sample in situ in the TEM. Computer simulations are fitted to the results to assess the effect of TEM specimen preparation on the charge density and the electrostatic potential in the thin sample.     

Evaluation of fine structure of tubular zeolite NaA membrane by FTIR-ATR and FIB-TEM.

A zeolite NaA (LTA) membrane supported by an alumina porous support tube for pervaporation (PV) dehydration of ethanol was characterized by transmission electron microscopy (TEM) using a focused ion beam (FIB) thin-layer specimen preparation technique and by Fourier transform infrared attenuated total reflectance method (FTIR-ATR) using a diamond prism as the waveguide. FIB-TEM clearly presented cross-section images up to about 15 microm depth from the membrane surface. FTIR-ATR monitored the Si-O asymmetric stretching vibration spectrum. The Si-O spectrum was compared with the TEM image and their relationships were discussed. By combining the two methods, we could study the thickness of surface LTA crystals, the grain boundary, the LTA/alumina interface structure and the crystallinity and density of materials inside of the alumina porous support. Consequently, fine structure changes of the LTA membrane corresponding to the hydrothermal synthesis condition could be sensitively detected.     

Thermally stable antireflective coatings based on nanoporous organosilicate thin films

Thermally stable nanoporous organosilicate thin films were realized by the microphase separation of pore-generating polymers mixed with an organosilicate matrix to be antireflective coatings (ARCs), for which a thin film with a refractive index (n) of 1.23 for zero reflection is required. The refractive index of such nanoporous organosilicate films can be tuned from 1.39 down to 1.23 by incorporating nanopores within the films. With a nanoporous single layer with n approximately 1.23, the light transmittance of the glass above 99.8% was achieved in the visible range (lambda approximately 550 nm). To overcome the limitation on the narrow wavelength for high transmittance imposed by a single antireflective nanoporous thin film, bilayer thin films with different refractive indices were prepared by placing a high refractive index layer with a refractive index of 1.45 below the nanoporous thin film. UV-vis transmittance of a glass coated with the bilayer films was compared with nanoporous single-layer films and it is demonstrated that the novel broadband antireflection coatings in a wide range of visible wavelength can be easily obtained by the organosilicate bilayer thin films described in this study. Also, ARCs developed in this study demonstrate excellent AR durability owing to the hydrophobic nature of the organosilicate matrix.     

Novel fabrication process using nanoporous anodic aluminum oxidation and MEMS technologies for gas detection

A class of nanoporous TiO₂ gas sensors processed by novel anodic aluminum oxidation (AAO) of Al thin films and microelectromechnical systems (MEMS) techniques are presented. To enhance the sensitivity and reduce the sensing dimensions of a gas sensor, a nanoporous surface of the gas-sensitive material on the sensor is required. These sensors can be implemented on silicon or silicon dioxide substrate featuring a thin membrane of micro-hotplate structure featuring micro-heaters, thermometers and electrodes, and thus operate as chemoresistive devices. Combining the AAO method with dry-etch process, a homogeneous and nanoporous SiO₂ surface of the sensor can be effectively configured by modulating various hole diameters and depth, hence replacing conventional photolithography and electrochemical etch. The process integration including AAO, reactive ion etch (RIE) and microfabrication is mainly developed and a feasibility study of PVD TiO₂ thin film deposition upon the porous device is also provided. TiO₂ thin films deposited on the nanoporous surface are investigated and compared with non-porous TiO₂ films. It is encouraging that our fabrication process is able to provide relatively high surface area to enhance sensitivity of the sensor without additional doping steps. Our promising experimental results have revealed these miniature and cost-effective devices are not only compatible, but applicable to smart bio-chemical sensors of next generation.     

HDPE,LLDPE或LDPE高取向薄膜微结构的电子显微学研究

木工作用透射电子显微术及电子衍射技术研究3种PE(HDPE,LLDPE或LDPE)均聚物高取向薄膜的微结构。定量测定了它们的结晶尺寸。通过倾斜样品电子显微学研究确定了不同种PE纤维结构的对称性。     

Nanoporous piezo- and ferroelectric thin films

Nanoporous barium titanate and lead titanate thin films (～100 nm calculated from ellipsometric data) are prepared starting from sol-gel solutions modified with a commercially available block-copolymer and evaporation-induced self-assembly methodology. The tuning of the thermal treatment followed by in situ ellipsometry allows the decomposition of the organic components and of the structuring agent leading to the formation of porous tetragonal crystalline perovskite structures as observed by XRD, HRTEM, SEM, and ellipsoporosimetry. Both nanoporous barium titanate and lead titanate thin films present local piezoelectric and ferroelectric behavior measured by piezoresponse force microscopy (PFM), being promising platforms for the preparation of the generation of new multifunctional systems.     

Preparation of Doped Ceria Electrolyte Films for SOFCs by Spray Coating Method

Spray coating method is a cost-effective technique suitable for the preparation of uniform and large-area thin films. This article presents findings on the preparation of dense electrolyte thin films by spray coating method. Dense, crack-free Gd-doped CeO₂ (GDC) thin films with a thickness of approximately 2 µm were successfully prepared on porous NiO-GDC substrates. The influence of the dispersion of GDC nanopowders in susupension on the microstructure of the thin films was investigated. Results show that agglomeration of GDC nanopowders in suspension resulted in a porous microstructure and a densely packed microstructure was obtained for the film prepared from a well-dispersed suspension.     

Structure and dielectric properties of HfO<Subscript>2</Subscript> films prepared by a sol–gel route

Mono- and multilayer HfO₂ sol–gel thin films have been deposited on silicon wafers by dip-coating technique using a solution based on hafnium ethoxide as precursor. The densification/crystallization process was achieved by classical annealing between 400 and 600 °C for 0.5 h (after drying at 100 °C). Systematic TEM studies were performed to observe the evolution of the thin film structure depending on the annealing temperature. The overall density of the films was determined from RBS spectrometry correlated with cross section (XTEM) thickness measurements. After annealing at 450 °C the films are amorphous with a nanoporous structure showing also some incipient crystallization. After annealing at 550 °C the films are totally crystallized. The HfO₂ grains grow in colonies having the same crystalline orientation with respect to the film plane, including faceted nanopores. During annealing a nanometric SiO₂ layer is formed at the interface with the silicon substrate; the thickness of this layer increases with the annealing temperature. Capacitive measurements allowed determining the value of the dielectric constant as 25 for four layer films, i.e. very close to the value for the bulk material.     

Neutron reflectivity study of lipid membranes assembled on ordered nanocomposite and nanoporous silica thin films

Single bilayer membranes of 1-palmitoyl-2-oleoyl-sn-glycero-3-phosphocholine (POPC) were formed on ordered nanocomposite and nanoporous silica thin films by fusion of small unilamellar vesicles. The structure of these membranes was investigated using neutron reflectivity. The underlying thin films were formed by evaporation induced self-assembly to obtain periodic arrangements of silica and surfactant molecules in the nanocomposite thin films, followed by photocalcination to oxidatively remove the organics and render the films nanoporous. We show that this platform affords homogeneous and continuous bilayer membranes that have promising applications as model membranes and sensors.     

Effect of short-chain branching on the morphology of LLDPE-oriented thin films

High-density polyethylene and randomly branched linear low-density polyethylene of varying branch length and content were used to produce oriented thin films. Sample morphology was investigated using transmission electron microscopy (TEM), differential scanning calorimetry (DSC), and dynamic mechanical thermal analysis (DMA). Gelation studies suggested that the film preparation technique may have involved gel-drawing. DSC characterization of samples with approximately equal average branch content revealed very different melting behavior, suggesting differences in crystal size distributions. This was attributed to variations in the distribution of branches within samples. For similar branching distributions, the average melting temperature (and, similarly, crystal size) generally decreased as branch content increased. This was corroborated by TEM, with which crystal thickness was found to decrease as branch content increased. TEM further revealed that the lateral alignment of mosaic blocks and the resultant lamellar character of the thin films was obscured as branch content increased, a result of reduced crystal size, crystallinity, and possibly increased interphase content. DMA of compression-molded material revealed the presence of a beta peak in branched samples only. Moreover, the alpha transition temperature shifted to lower temperatures as branch content increased.     

Nanoporous carbon nanotubes synthesized through confined hydrogen-bonding self-assembly

We report a simple and direct synthetic method for the preparation of nanoporous carbon nanotubes with larger pores (>10 nm) on the tube wall. The method combines the use of anodic aluminum oxide (AAO) as a template for the tube diameter and block copolymer/carbohydrates self-assembly within thin films confined inside AAO pore channels to form nanopores. It involves coating the AAO inner pore channel surface with block copolymer (polystyrene-co-poly(vinylpyridine)) and carbohydrates in dimethylformamide (DMF) solution. Drying of DMF induced microphase separation of PS-PVP and formation of ordered PS and PVP/carbohydrate domains. Within the coating, the carbohydrates stay specifically only in the pyridine domains surrounding PS domains due to the hydrogen bonding between carbohydrates and pyridine blocks. After carbonization at high temperature (>460 degrees C) in argon, PS was removed, forming the nanopores and carbohydrates, and PVP was carbonized, forming the framework of nanoporous carbon tubes within AAO channels. Removal of AAO led to the formation of individual monodisperse nanoporous carbon nanotubes with a tube wall of approximately 16 nm. The ease with which these nanoporous carbon nanotubes can be fabricated, and the ability to tune tube nanostructures and surface chemistry through the choice of block copolymers used and carbonization temperature, should facilitate investigations of their scope for practical applications.